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					| EventDefine.cs | a5245356d0
					source files | 3 years ago | 
		
			
			
			
				
					| Fdc.cs | d33079596b
					1.优化新版跑片动画 | 1 year ago | 
		
			
			
			
				
					| GasBoxLeakCheckRoutine.cs | d95b8c7876
					cancel Open PVN22 in SE,DE && add VenusVentRoutine && fix the bug in GasBoxLeakCheck && Change Logic in pumpdown&Vent in SE,DE | 1 year ago | 
		
			
			
			
				
					| GasFlowRoutine.cs | c332b95d39
					venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function | 1 year ago | 
		
			
			
			
				
					| LLPickRoutine.cs | ecd991d2f4
					1.修复kepler 气缸开关信号只读on或者off bug | 1 year ago | 
		
			
			
			
				
					| LLPlaceRoutine.cs | ecd991d2f4
					1.修复kepler 气缸开关信号只读on或者off bug | 1 year ago | 
		
			
			
			
				
					| LoadLockLeakCheckRoutine.cs | ecd991d2f4
					1.修复kepler 气缸开关信号只读on或者off bug | 1 year ago | 
		
			
			
			
				
					| LoadLockPumpRoutine.cs | ecd991d2f4
					1.修复kepler 气缸开关信号只读on或者off bug | 1 year ago | 
		
			
			
			
				
					| LoadLockPurgeRoutine.cs | ecd991d2f4
					1.修复kepler 气缸开关信号只读on或者off bug | 1 year ago | 
		
			
			
			
				
					| LoadLockVentRoutine.cs | ecd991d2f4
					1.修复kepler 气缸开关信号只读on或者off bug | 1 year ago | 
		
			
			
			
				
					| PMEntity.cs | a4f8a29122
					1.Kepler2200 Gas 改造,六路变八路 | 1 year ago | 
		
			
			
			
				
					| PMGasVerificationRoutine.cs | e2836bfbda
					1.Chamber DE process enhance | 1 year ago | 
		
			
			
			
				
					| PMGaslinePurgeRoutine.cs | 03063bae6a
					Enhance the routine framework. | 2 years ago | 
		
			
			
			
				
					| PMHeatRoutine.cs | c8af7de363
					将kepler与Venus UI配置分开,添加Heat Routine | 1 year ago | 
		
			
			
			
				
					| PMHomeRoutine.cs | a4f8a29122
					1.Kepler2200 Gas 改造,六路变八路 | 1 year ago | 
		
			
			
			
				
					| PMLeakCheckRoutine.cs | 9de8ce9b11
					Venus SE UI &&Venus DE pump,purge,start turbo routine update | 1 year ago | 
		
			
			
			
				
					| PMPartialPressureRoutine.cs | 945ce3c74c
					1.Venus SE DE Add PressureControl | 1 year ago | 
		
			
			
			
				
					| PMProcessRoutine.cs | 2136e3b838
					1.分开kepler与Venus 漏气检测ui,删除多余代码 | 1 year ago | 
		
			
			
			
				
					| PMProcess_FA.cs | 774c804aa9
					fixed pm event occurs carrierid is null | 1 year ago | 
		
			
			
			
				
					| PMPurgeRoutine.cs | 9de8ce9b11
					Venus SE UI &&Venus DE pump,purge,start turbo routine update | 1 year ago | 
		
			
			
			
				
					| PMRoutineBase.cs | 945ce3c74c
					1.Venus SE DE Add PressureControl | 1 year ago | 
		
			
			
			
				
					| PMVATPerformanceRoutine.cs | 945ce3c74c
					1.Venus SE DE Add PressureControl | 1 year ago | 
		
			
			
			
				
					| Process.cs | 3cad102221
					更新 RT | 3 years ago | 
		
			
			
			
				
					| ProcessDefine.cs | a4f8a29122
					1.Kepler2200 Gas 改造,六路变八路 | 1 year ago | 
		
			
			
			
				
					| PumpDownRoutine.cs | a4f8a29122
					1.Kepler2200 Gas 改造,六路变八路 | 1 year ago | 
		
			
			
			
				
					| RFPowerSwitchRoutine.cs | 03063bae6a
					Enhance the routine framework. | 2 years ago | 
		
			
			
			
				
					| StartDryPumpRoutine.cs | 03063bae6a
					Enhance the routine framework. | 2 years ago | 
		
			
			
			
				
					| StartTurboPumpRoutine.cs | 9de8ce9b11
					Venus SE UI &&Venus DE pump,purge,start turbo routine update | 1 year ago | 
		
			
			
			
				
					| VentRoutine.cs | a4f8a29122
					1.Kepler2200 Gas 改造,六路变八路 | 1 year ago | 
		
			
			
			
				
					| VenusRecipeFileContext.cs | 7d93bf0076
					Job Clean function, not finished. | 2 years ago | 
		
			
			
			
				
					| VenusSequenceFileContext.cs | 8cf03142ec
					Add the PreClean,PostClean in SequenceInfo && Add DESequenceFormat.xml for Sequence && Add Venus DETM IO && fix VCEA pump Open in UI | 1 year ago | 
		
			
			
			
				
					| VenusVentRoutine.cs | 0a2d5ac547
					Venus DE TM simulator add | 1 year ago | 
		
			
			
			
				
					| VirgoRecipeFileContext.cs | 896c7407de
					优化log功能 | 3 years ago | 
		
			
			
			
				
					| VirgoSequenceFileContext.cs | 896c7407de
					优化log功能 | 3 years ago |