zhouhr 01f4eaa5de fix the bug in SEMFSwapRoutine 1 year ago
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LoadPrepareRoutine.cs 253fcb8be2 add CassetteArrive,CurrentSlot in UI,RT,Simulator 1 year ago
LoadRoutine.cs 253fcb8be2 add CassetteArrive,CurrentSlot in UI,RT,Simulator 1 year ago
LoadWithSMIFRoutine.cs 0bea20360b add LeakCheckRoutine in DE,VCE && add online for TM,VCE && fix bug in PM-PartialPressure && add LP in VCE && add sensor in VCE from TM 1 year ago
UnloadRoutine.cs 6748e4b29b fix the bug in UnloadRoutine as the name of vce InnerDoor is fixed. 1 year ago
UnloadWithSMIFRoutine.cs 0bea20360b add LeakCheckRoutine in DE,VCE && add online for TM,VCE && fix bug in PM-PartialPressure && add LP in VCE && add sensor in VCE from TM 1 year ago
VCEHomeRoutine.cs 253fcb8be2 add CassetteArrive,CurrentSlot in UI,RT,Simulator 1 year ago
VceEntity.cs 01f4eaa5de fix the bug in SEMFSwapRoutine 1 year ago