zhouhr 01f4eaa5de fix the bug in SEMFSwapRoutine преди 11 месеца
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LoadPrepareRoutine.cs 253fcb8be2 add CassetteArrive,CurrentSlot in UI,RT,Simulator преди 11 месеца
LoadRoutine.cs 253fcb8be2 add CassetteArrive,CurrentSlot in UI,RT,Simulator преди 11 месеца
LoadWithSMIFRoutine.cs 0bea20360b add LeakCheckRoutine in DE,VCE && add online for TM,VCE && fix bug in PM-PartialPressure && add LP in VCE && add sensor in VCE from TM преди 11 месеца
UnloadRoutine.cs 6748e4b29b fix the bug in UnloadRoutine as the name of vce InnerDoor is fixed. преди 11 месеца
UnloadWithSMIFRoutine.cs 0bea20360b add LeakCheckRoutine in DE,VCE && add online for TM,VCE && fix bug in PM-PartialPressure && add LP in VCE && add sensor in VCE from TM преди 11 месеца
VCEHomeRoutine.cs 253fcb8be2 add CassetteArrive,CurrentSlot in UI,RT,Simulator преди 11 месеца
VceEntity.cs 01f4eaa5de fix the bug in SEMFSwapRoutine преди 11 месеца