| .. |
|
PM
|
9d28f8ee7d
1.Add Tru match
|
il y a 1 an |
|
TM
|
0a2d5ac547
Venus DE TM simulator add
|
il y a 11 mois |
|
ClusterGemModel.xml
|
60e9a04892
Simulator LP3 Update
|
il y a 1 an |
|
DBModel.sql
|
df4447c2d2
PMhomeRoutine add VenusDE chambertype
|
il y a 1 an |
|
DataGroup.xml
|
a98efc8a0b
1.修改kepler2300 FDC 运行报错bug
|
il y a 11 mois |
|
DeviceModel.xsd
|
d8e5f1dc2c
2022 last update
|
il y a 2 ans |
|
EquipmentVariables.xml
|
7dc2089ceb
1、add PortWaferStart/PortWaferEnd event sequence name parameter;
|
il y a 1 an |
|
EventDefine.xml
|
3f9c41937a
update for event module enhancement
|
il y a 2 ans |
|
IoProviderConfig.xml
|
0a2d5ac547
Venus DE TM simulator add
|
il y a 11 mois |
|
LogDefine.json
|
2de3872723
duplicated wafer function.
|
il y a 1 an |
|
RecipeFormat.xml
|
9760d40cf7
port simulator
|
il y a 2 ans |
|
SESequenceFormat.xml
|
a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
|
il y a 1 an |
|
SVID.xls
|
63d58afa42
1、SecsGem增加了UTF-8编码的支持；
|
il y a 1 an |
|
SequenceFormat.xml
|
4259958c23
Remove the Align angle definition in sequence and implement the Loadlock delay function.
|
il y a 1 an |
|
SignalTower.xml
|
a98efc8a0b
1.修改kepler2300 FDC 运行报错bug
|
il y a 11 mois |
|
System.sccfg
|
b0e5581d4e
delete some item in SE Config && add WallChiller in DE && add ConfigItem for pump check ForelinePressure in every chambertype
|
il y a 11 mois |
|
System_Kepler2200.sccfg
|
b0e5581d4e
delete some item in SE Config && add WallChiller in DE && add ConfigItem for pump check ForelinePressure in every chambertype
|
il y a 11 mois |
|
System_Kepler2300.sccfg
|
b0e5581d4e
delete some item in SE Config && add WallChiller in DE && add ConfigItem for pump check ForelinePressure in every chambertype
|
il y a 11 mois |
|
System_VenusDE.sccfg
|
b0e5581d4e
delete some item in SE Config && add WallChiller in DE && add ConfigItem for pump check ForelinePressure in every chambertype
|
il y a 11 mois |
|
System_VenusSE.sccfg
|
b0e5581d4e
delete some item in SE Config && add WallChiller in DE && add ConfigItem for pump check ForelinePressure in every chambertype
|
il y a 11 mois |
|
VenusPreProcess.py
|
64c7ef574e
log
|
il y a 2 ans |
hecl
0a2d5ac547
Venus DE TM simulator add