 lixiang
|
54c8557dd6
调度优化
|
2 months ago |
|
lixiang
|
f92e6abb17
1.添加Kepler2300 功能代码
|
2 months ago |
|
lixiang
|
6ec37ea42c
1.与Venus分开，删除冗余代码
|
3 months ago |
|
lixiang
|
2cdc13a01b
1.Venus与Kepler 代码分开
|
3 months ago |
|
lixiang
|
38b40b702d
1.修复all in all out 不做cooling bug
|
4 months ago |
|
lixiang
|
1931fc55d3
1.根据长鑫要求Process Hietory界面添加eap提供的wafeid与lottype信息
|
4 months ago |
 zhouhr
|
82d289e21c
1. add the function of WTWClean by WTWInterval
|
4 months ago |
|
lixiang
|
add331513f
1.WaferHistory与ProcessHistory 添加 Carrier ID，Process History 切recipe 保留原查询信息
|
5 months ago |
|
lixiang
|
10c22069fe
1.添加EFEM光栅报警开关
|
5 months ago |
 sangwq
|
bcb1461e22
Routing bug while single PM and double arm running.
|
6 months ago |
|
sangwq
|
3a49881f33
fix the typing error.
|
6 months ago |
|
sangwq
|
81e78398e6
enhance the routing algorithm avoid blocking issue while single arm and single PM run.
|
6 months ago |
|
sangwq
|
e12c5e5a93
fixed the blocking bug while return wafers.
|
6 months ago |
|
sangwq
|
d449c55208
Force Loadlock cooling while return wafer.
|
6 months ago |
|
lixiang
|
ca702b093b
1.alarm List 收集到300+条，并添加到程序里
|
6 months ago |
|
lixiang
|
d6b8d32004
1.修复不能跑atm模式的bug
|
7 months ago |
|
sangwq
|
a850db5a2d
Enhance the cooling algorithm to avoid processed wafer stay loadlock too long.
|
7 months ago |
|
sangwq
|
a5826caf14
Pre/Post Lot Clean functionality.
|
7 months ago |
|
lixiang
|
17c3d36a2b
Sequence 界面 PM REcipe 支持选择 Pre Clean/Post Clean/WTW Clean 和 Process Recipe
|
7 months ago |
|
lixiang
|
bfd7d2def6
手动添加冲突bug 代码
|
8 months ago |
|
sangwq
|
87cdf166a0
restore the dispatcher version which been broken by source merge.
|
8 months ago |
|
sangwq
|
5b961e44db
fix blocking issue while no wafer waiting in LL.
|
8 months ago |
|
lixiang
|
33d0cd73dd
1.修复Pump Counter 显示错误bug
|
8 months ago |
|
sangwq
|
9e65346638
Fixed the blocking bug after one control job abort and restart.
|
8 months ago |
|
sangwq
|
679a0eb967
fix the blocking bug while In loadlock is empty.
|
8 months ago |
|
sangwq
|
98cc9d6be7
Fixed the blocking bug after error PM restored.
|
8 months ago |
|
sangwq
|
1f85177a1a
Manual return PM wafer function while error happen.
|
8 months ago |
|
lixiang
|
b67769ec2c
ui优化
|
8 months ago |
|
sangwq
|
0af5bc1e75
throughput enhancement.
|
8 months ago |
|
lixiang
|
99d939492e
1.加登出界面
|
8 months ago |
