 lixiang
|
6447434c5b
Venus代码删除
|
3 months ago |
|
lixiang
|
9fdde379d4
cooling加条件限制
|
9 months ago |
 kuangzl
|
eaf2ce039b
Added PMChamberLabel display for VenusDE and VenusSE.
|
9 months ago |
 zhouhr
|
afa8662437
Changed from VPA to Aligner1 && Removed PreClean, PostClean in SequenceInfo
|
9 months ago |
|
lixiang
|
9faf7dc26a
拉取代码软件报警，去除默认Aligner1
|
10 months ago |
|
zhouhr
|
632f566bc6
fix bug in SEMFSwapRoutine
|
10 months ago |
|
lixiang
|
608cf43d67
1.做工艺前pump down 根据底压确定是否执行
|
10 months ago |
|
lixiang
|
3e00375ce8
1.FDC代码逻辑移到PricessDefine
|
11 months ago |
|
lixiang
|
a98efc8a0b
1.修改kepler2300 FDC 运行报错bug
|
11 months ago |
|
lixiang
|
e00ff4f30d
1.高温Heater position1-position5加上动画
|
11 months ago |
|
zhouhr
|
12fa756895
1. SETM will be Init while While SETM Abort Homing
|
11 months ago |
|
lixiang
|
52e8bd8f7a
1.优化Home断开重连
|
11 months ago |
|
lixiang
|
01dafac8f1
1.Kepler2200 添加Home 设备断开重连功能
|
11 months ago |
|
lixiang
|
4634f3f91a
1。设置log最大500M，超出分文件（解决文件太大，log打不开）
|
1 year ago |
|
lixiang
|
f03139a580
1.应tps需求添加，VenusSE工艺结束，PM主界面信息保存
|
1 year ago |
|
lixiang
|
166a9ab00e
VenusSE UI 打不开bug，配置文件确实Name
|
1 year ago |
|
lixiang
|
7e15cb64a0
1.Recipe 添加 Stable/OverEtch 功能
|
1 year ago |
|
lixiang
|
87f1121180
1.Recipe UI 界面Name优化
|
1 year ago |
|
lixiang
|
6bbe2e529b
1.删除或注释 Venus ChamberType
|
1 year ago |
|
lixiang
|
8b6a73425d
添加Start job 前check kepler2200 高温Heater温度
|
1 year ago |
|
lixiang
|
0f0650b80f
1.PM 界面 run recipe 变为手动模式
|
1 year ago |
|
lixiang
|
f62e761ad2
修复小标题efem online/offline报警bug
|
1 year ago |
|
lixiang
|
c8af7de363
将kepler与Venus UI配置分开，添加Heat Routine
|
1 year ago |
|
lixiang
|
0f905564d0
加入登录界面和权限管理
|
1 year ago |
|
lixiang
|
17793fef54
kepler2300 PM界面添加Include/Exclude功能
|
1 year ago |
|
lixiang
|
9e14bbee6a
1.由于PM种类变多，且分配置，PM 加载device 功能重写
|
1 year ago |
|
lixiang
|
f09d7d1b15
分开所有系列配置文件
|
1 year ago |
|
lixiang
|
e818b037a2
1.修复TM Swap 不能开门/状态比对不过bug
|
1 year ago |
|
lixiang
|
1929a3510b
1.新版ui界面开发
|
1 year ago |
|
lixiang
|
7ff42d4eca
1.添加 Process 切换step Match/BiasMatch设置值 offset功能，c1/c2小于offset不设置
|
1 year ago |
