 zhouhr
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0bea20360b
add LeakCheckRoutine in DE,VCE && add online for TM,VCE && fix bug in PM-PartialPressure && add LP in VCE && add sensor in VCE from TM
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11 months ago |
 lixiang
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34958e5963
swap 压差计算log测试
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11 months ago |
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lixiang
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d938a9e54c
PM/TM swap pick 开门前加压力wait
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11 months ago |
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lixiang
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9e9459c927
efem界面按钮功能优化
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11 months ago |
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lixiang
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5a4c70257b
1.Recipe 添加给eap recipe的内容
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11 months ago |
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lixiang
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c671c999c0
ui界面优化
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11 months ago |
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lixiang
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608cf43d67
1.做工艺前pump down 根据底压确定是否执行
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11 months ago |
 hecl
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0f361d7301
1.Fix SETM robot ArmExtend bugs
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11 months ago |
 sangwq
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1ff7394c30
Fix the ATM cycle blocking bug.
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11 months ago |
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sangwq
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03770198be
Skip auto Vent/pump while ATM mode.
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11 months ago |
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sangwq
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5d9198550f
Enhance the throughput with align sequence.
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11 months ago |
|
zhouhr
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8cf03142ec
Add the PreClean,PostClean in SequenceInfo && Add DESequenceFormat.xml for Sequence && Add Venus DETM IO && fix VCEA pump Open in UI
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11 months ago |
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lixiang
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ed7c537c19
1.添加TM/LLA/LLB 平衡阀
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11 months ago |
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hecl
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f814cf53a8
1.Add simulator read RF ConfigType function
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11 months ago |
|
lixiang
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d33079596b
1.优化新版跑片动画
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11 months ago |
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sangwq
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54ed40c8b1
enhance kepler throughput
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11 months ago |
|
zhouhr
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9b93f58d68
Add Venus DE OperationView && add the compatibility of the TM&VCE between SETM&DETM
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11 months ago |
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sangwq
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82703d4497
enhance throughput with loadlock delay.
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11 months ago |
|
hecl
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aed602cdc9
1.Add Tru rf/match Reconnect function
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11 months ago |
|
hecl
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0a2d5ac547
Venus DE TM simulator add
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11 months ago |
|
sangwq
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57281fce55
Enhance throughput while not pass by aligner.
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11 months ago |
|
hecl
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ca830385e4
Fix bug
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11 months ago |
|
hecl
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996eacc709
VenusDE recipe tolerance enhance
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11 months ago |
|
zhouhr
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13460815b8
add PM ALARM_Notify while PM sensor Alarm && add TMBase for SETM&&DETM && add HongHuDETM For DE && fix some bugs in DETMUI
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11 months ago |
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sangwq
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f53fecc7bb
Enhance sequence aligner configurability
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11 months ago |
|
lixiang
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7513d2e586
TM View 添加wafer
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11 months ago |
|
lixiang
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8d613c7d1f
奈思UI 新版动画
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11 months ago |
|
lixiang
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6dc3e20037
添加Mfc calibration 流气后，等待钟摆阀完全关闭的step
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11 months ago |
|
lixiang
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3e00375ce8
1.FDC代码逻辑移到PricessDefine
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11 months ago |
|
hecl
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09a72490a8
1.enhance Tru match logical
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11 months ago |
