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				@@ -2272,12 +2272,23 @@ namespace Venus_RT.Modules 
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				                         return; 
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				                 } 
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				-                // 有两片processed wafer 时且, 不需要align wafer 时, 不要预期 
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				-                if((atmWaferCount == 0 && (outLLWaferStatus.outSlot.Count() < 2 || _lstWaferTasks.Exists(wt => ModuleHelper.IsLoadPort(wt.currentMod) && !wt.IsAligned))) ||  
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				-                   (atmWaferCount == 1 && inLLWaferStatus.emptySlot.Count == 2 && _efemRobotSingleArmOption == 0 && (outLLWaferStatus.outSlot.Count < 2 || _dictModuleTask[outLL].TimeToReady > 20))) 
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				+                // need pass by aligner 
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				+                if(_lstProcessJobs.Exists(pj => pj.State == EnumProcessJobState.Processing && IsSequenceNeedAlign(pj.Sequence))) 
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				                 { 
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				-                    if (ForwardATMWafers(inLL)) 
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				-                        return; 
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				+                    if (atmWaferCount == 0 || (atmWaferCount == 1 && inLLWaferStatus.emptySlot.Count == 2 && _efemRobotSingleArmOption == 0 && (outLLWaferStatus.outSlot.Count < 2))) 
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				+                    { 
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				+                        if (ForwardATMWafers(inLL)) 
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				+                            return; 
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				+                    }     
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				+                } 
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				+                // don need pass by aligner 
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				+                else 
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				+                { 
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				+                    if (_lstWaferTasks.Count(wt => wt.currentMod == outLL || (wt.currentMod == ModuleName.TMRobot && ModuleHelper.IsLoadPort(wt.destMod))) == 0 && _lstWaferTasks.Count(wt => wt.currentMod == inLL || wt.currentMod == ModuleName.EfemRobot) < (_efemRobotSingleArmOption == 0 ? 2 : 1)) 
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				+                    { 
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				+                        if (ForwardATMWafers(inLL)) 
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				+                            return; 
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				+                    } 
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				                 } 
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				                 if((inLLWaferStatus.emptySlot.Count == 2 || (inLLWaferStatus.emptySlot.Count == 1 && _efemRobotSingleArmOption != 0) && _dictModuleTask[inLL].TimeToReady < 2)) 
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