 lixiang
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e818b037a2
1.修复TM Swap 不能开门/状态比对不过bug
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1 year ago |
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lixiang
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b2406d6f78
1.添加signalTonwer ui界面
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1 year ago |
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lixiang
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1929a3510b
1.新版ui界面开发
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1 year ago |
 hecl
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bb939f4cb1
Venus DE he flow update
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1 year ago |
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hecl
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9de8ce9b11
Venus SE UI &&Venus DE pump,purge,start turbo routine update
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1 year ago |
 zhouhr
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5266d6e42b
fix the Chamber Pressure not show && Add CheckLoad Station to PA Position && fix CheckLoad cannot finish in Simulator.
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1 year ago |
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zhouhr
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984e634945
1. Add check before Open VCE Outer Door based on ATM sensor and OutDoorOpenPressure
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1 year ago |
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hecl
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1b165a2e61
Venus DE update && Venus SE simulator update
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1 year ago |
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hecl
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8d8b960858
Venus DE chamber UI change && Venus SE simulator update
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1 year ago |
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hecl
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7875fff8f4
1Venus DE UI Update && Venus SE Simulator update
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1 year ago |
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zhouhr
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75fc0c642e
update TMROBot,VCE Simulator
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1 year ago |
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zhouhr
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9d9b666ea4
Venus SE Update
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1 year ago |
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hecl
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df4447c2d2
PMhomeRoutine add VenusDE chambertype
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1 year ago |
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lixiang
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feed6f1c8e
修复手动流气bug
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1 year ago |
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lixiang
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7ff42d4eca
1.添加 Process 切换step Match/BiasMatch设置值 offset功能，c1/c2小于offset不设置
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1 year ago |
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lixiang
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6f2b23125b
再次提交解决Tolerance bug
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1 year ago |
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lixiang
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8cea3a0063
修复流气tolerance bug
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1 year ago |
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lixiang
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e2cd173579
1.添加Kepler2200 流气 Tolerance
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1 year ago |
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lixiang
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6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
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1 year ago |
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lixiang
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8b2a01fcc3
kepler2200配置文件也添加IsEnableEthercat
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1 year ago |
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lixiang
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d744d950e1
配置文件添加Ethercat开关功能
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1 year ago |
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lixiang
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ee26035034
1.添加Ethercat 励兆 Match DeviceData
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1 year ago |
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lixiang
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08ec6feef2
1.优化数据分析界面颜色选择bug
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1 year ago |
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lixiang
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bdcf0556c9
1.将kepler2200与其它项目配置文件分开
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1 year ago |
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lixiang
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 year ago |
|
hecl
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db7e4fc9d5
PMProcessRoutine naming conventions & Lot id record adjustment
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1 year ago |
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hecl
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2aa8eecc79
Enhancement of PMProcessRoutine recipe processing flow
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1 year ago |
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lixiang
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fd2d6f9a5c
解决冲突
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1 year ago |
|
lixiang
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33ba42d9ef
1.添加RT关闭同时关闭钟摆阀和RF的功能
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1 year ago |
|
hecl
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fa67219b9f
1.Add automatically update database column codes
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1 year ago |
