 zhouhr
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d95b8c7876
cancel Open PVN22 in SE,DE && add VenusVentRoutine && fix the bug in GasBoxLeakCheck && Change Logic in pumpdown&Vent in SE,DE
|
hai 11 meses |
|
zhouhr
|
28a7e74cc0
Let PVN22 open before PumpDown start in SE&DE.
|
hai 11 meses |
|
zhouhr
|
a0f20d03ac
add ChillerCheck and Interval to 1s && SE DE Chamber can operate TurboPump freely && fix the bug in GasLeakCheck && close PVN22 after PMPumpDown
|
hai 11 meses |
|
zhouhr
|
b0e5581d4e
delete some item in SE Config && add WallChiller in DE && add ConfigItem for pump check ForelinePressure in every chambertype
|
hai 1 ano |
|
zhouhr
|
cc436f1ac6
add DE shareChiller && add check items before PM Pump down.
|
hai 1 ano |
 lixiang
|
3ac2e3bc3a
1.删除/注释 PMEntity 里面关于 LoadLock 的代码（Venus样机独有功能）
|
hai 1 ano |
|
lixiang
|
6bbe2e529b
1.删除或注释 Venus ChamberType
|
hai 1 ano |
|
lixiang
|
0f0650b80f
1.PM 界面 run recipe 变为手动模式
|
hai 1 ano |
 hecl
|
ea59788c5a
Venuse DE routine update &fix config can't hide bugs
|
hai 1 ano |
|
hecl
|
9de8ce9b11
Venus SE UI &&Venus DE pump,purge,start turbo routine update
|
hai 1 ano |
|
lixiang
|
6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
|
hai 1 ano |
|
lixiang
|
bdcf0556c9
1.将kepler2200与其它项目配置文件分开
|
hai 1 ano |
|
lixiang
|
4338503e2a
1.添加霍庭格RF Device
|
hai 1 ano |
 sangwq
|
03063bae6a
Enhance the routine framework.
|
hai 1 ano |
|
lixiang
|
cb91599d02
修复recipe Ui信息显示
|
hai 1 ano |
|
lixiang
|
a5813eb09d
1.修改chamber wafer样式
|
hai 1 ano |
|
lixiang
|
530ddcbae7
优化topview界面
|
hai 1 ano |
|
lixiang
|
de406b964e
1.添加EFEM等ui界面
|
hai 1 ano |
|
lixiang
|
a64bed3d6c
1.Run recipe 功能现场修改
|
hai 1 ano |
|
lixiang
|
c060fde154
1.Recipe Edit 添加配置功能
|
hai 1 ano |
|
lixiang
|
280432bb82
1.TM传片动画制作，UI界面优化
|
%!s(int64=2) %!d(string=hai) anos |
|
sangwq
|
096c873956
Sequence SPEC update.
|
%!s(int64=2) %!d(string=hai) anos |
|
lixiang
|
1f1fb71be3
1.2023/02/17现场rt代码修改
|
%!s(int64=2) %!d(string=hai) anos |
|
sangwq
|
0606b882bc
process module 1215
|
%!s(int64=2) %!d(string=hai) anos |
|
sangwq
|
847220c6ce
update for initial recipe design
|
%!s(int64=2) %!d(string=hai) anos |
|
sangwq
|
8565810192
Servo Pressure and Gas Flow done.
|
%!s(int64=2) %!d(string=hai) anos |
|
sangwq
|
af96d139ff
2022年11月24日 提交 RT 部分更改
|
%!s(int64=2) %!d(string=hai) anos |
