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@@ -1,427 +0,0 @@
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-using Aitex.Common.Util;
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-using Aitex.Core.RT.Event;
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-using Aitex.Core.RT.Log;
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-using Aitex.Core.RT.SCCore;
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-//using EPInterface.Datas;
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-using System;
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-using System.Collections.Generic;
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-using System.Xml;
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-
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-namespace Venus_RT.Modules
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-{
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- /// <summary>
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- /// Recipe head
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- /// </summary>
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- public class RecipeHead
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- {
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- public string RecipeVariation { get; set; }
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- public string CreationTime { get; set; }
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- public string LastRevisionTime { get; set; }
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- public string CreatedBy { get; set; }
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- public string LastModifiedBy { get; set; }
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- public string PressureMode { get; set; }
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- public string Description { get; set; }
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- public string Barcode { get; set; }
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- public string BasePressure { get; set; }
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- public string PumpDownLimit { get; set; }
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- //public string ElectrodeTemp { get; set; }
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- //public string HeaterTemp { get; set; }
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- public string PurgeActive { get; set; }
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- public string MatchPositionC1 { get; set; }
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- public string MatchPositionC2 { get; set; }
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- public string SubstrateTemp { get; set; }
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- public string PumpingPinState { get; set; }
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- public string NotToPurgeOrVent { get; set; } //For keep vacuum after idle clean
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- public string VentingPinState { get; set; }
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- public string PinDownPressure { get; set; }
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- }
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-
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- public class RecipeStep
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- {
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- public string StepName;
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- public double StepTime;
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- public bool IsJumpStep;
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- public bool IsLoopStartStep;
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- public bool IsLoopEndStep;
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- public int LoopCount;
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- public string EndBy;
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- public string EndPointConfig;
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- public bool FaultIfNoEPDTrigger;
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-
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- //public double EndByValue;
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- public Dictionary<string, string> RecipeCommands = new Dictionary<string, string>();
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- public Dictionary<string, object[]> ToleranceCommands = new Dictionary<string, object[]>();
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- }
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-
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- public class Recipe
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- {
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- /// <summary>
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- /// 当前Recipe Run 记录对应的Guid
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- /// 每个Recipe Run 都对应有一个唯一的Guid
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- /// </summary>
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- public static Guid CurrentRecipeRunGuid;
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-
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- /// <summary>
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- /// 解析工艺程序文件
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- /// </summary>
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- /// <param name="recipeName">工艺程序名</param>
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- /// <param name="xmlRecipeData">xml格式的工艺数据内容</param>
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- /// <param name="recipeData">返回解析的工艺数据变量</param>
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- /// <returns>True：解析成功 | False：解析失败</returns>
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- public static bool Parse(string chamberId, string recipe, out RecipeHead recipeHead, out List<RecipeStep> recipeData)
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- {
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- recipeHead = new RecipeHead();
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- recipeData = new List<RecipeStep>();
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-
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- try
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- {
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- //获取工艺程序文件中允许的命令字符串列表
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- //目的：如果工艺程序文件中含有规定之外的命令，则被禁止执行
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- HashSet<string> recipeAllowedCommands = new HashSet<string>();
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- XmlDocument rcpFormatDoc = new XmlDocument();
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-
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- string recipeSchema = PathManager.GetCfgDir() + "RecipeFormat.xml";
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- rcpFormatDoc.Load(recipeSchema);
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-
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- XmlNodeList rcpItemNodeList = rcpFormatDoc.SelectNodes("/Aitex/TableRecipeFormat/Catalog/Group/Step");
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- foreach (XmlElement item in rcpItemNodeList)
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- recipeAllowedCommands.Add(item.Attributes["ControlName"].Value);
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-
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- //获取工艺程序文件中所有步的内容
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- XmlDocument rcpDataDoc = new XmlDocument();
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- rcpDataDoc.LoadXml(recipe);
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-
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- recipeHead.PressureMode = rcpDataDoc.DocumentElement.HasAttribute("PressureMode") ? rcpDataDoc.DocumentElement.Attributes["PressureMode"].Value : "";
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-
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- recipeHead.BasePressure = rcpDataDoc.DocumentElement.HasAttribute("BasePressure") ? rcpDataDoc.DocumentElement.Attributes["BasePressure"].Value : "";
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-
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- recipeHead.PumpDownLimit = rcpDataDoc.DocumentElement.HasAttribute("PumpDownLimit") ? rcpDataDoc.DocumentElement.Attributes["PumpDownLimit"].Value : "";
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-
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- recipeHead.PurgeActive = rcpDataDoc.DocumentElement.HasAttribute("PurgeActive") ? rcpDataDoc.DocumentElement.Attributes["PurgeActive"].Value : "";
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-
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- recipeHead.MatchPositionC1 = rcpDataDoc.DocumentElement.HasAttribute("MatchPositionC1") ? rcpDataDoc.DocumentElement.Attributes["MatchPositionC1"].Value : "";
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-
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- recipeHead.MatchPositionC2 = rcpDataDoc.DocumentElement.HasAttribute("MatchPositionC2") ? rcpDataDoc.DocumentElement.Attributes["MatchPositionC2"].Value : "";
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-
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- recipeHead.Barcode = rcpDataDoc.DocumentElement.HasAttribute("Barcode") ? rcpDataDoc.DocumentElement.Attributes["Barcode"].Value : "";
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-
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- recipeHead.SubstrateTemp = rcpDataDoc.DocumentElement.HasAttribute("SubstrateTemp") ? rcpDataDoc.DocumentElement.Attributes["SubstrateTemp"].Value : "";
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-
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- recipeHead.PumpingPinState = rcpDataDoc.DocumentElement.HasAttribute("PumpingPinState") ? rcpDataDoc.DocumentElement.Attributes["PumpingPinState"].Value : "Down";
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-
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- //For keep vacuum after idle clean
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- recipeHead.NotToPurgeOrVent = rcpDataDoc.DocumentElement.HasAttribute("NotToPurgeOrVent") ? rcpDataDoc.DocumentElement.Attributes["NotToPurgeOrVent"].Value : "";
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-
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- recipeHead.VentingPinState = rcpDataDoc.DocumentElement.HasAttribute("VentingPinState") ? rcpDataDoc.DocumentElement.Attributes["VentingPinState"].Value : "Down";
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-
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- recipeHead.PinDownPressure = rcpDataDoc.DocumentElement.HasAttribute("PinDownPressure") ? rcpDataDoc.DocumentElement.Attributes["PinDownPressure"].Value : "1000";
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-
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- XmlNodeList stepNodeList = rcpDataDoc.SelectNodes("/TableRecipeData/Step");
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- for (int i = 0; i < stepNodeList.Count; i++)
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- {
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- var recipeStep = new RecipeStep();
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- recipeData.Add(recipeStep);
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-
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- XmlElement stepNode = stepNodeList[i] as XmlElement;
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- Dictionary<string, string> dic = new Dictionary<string, string>();
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-
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- //遍历Step节点
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- foreach (XmlAttribute att in stepNode.Attributes)
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- {
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- if (recipeAllowedCommands.Contains(att.Name))
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- {
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- dic.Add(att.Name, att.Value);
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- }
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- }
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- //遍历Step子节点中所有的attribute属性节点
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- foreach (XmlElement subStepNode in stepNode.ChildNodes)
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- {
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- foreach (XmlAttribute att in subStepNode.Attributes)
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- {
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- if (recipeAllowedCommands.Contains(att.Name))
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- {
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- dic.Add(att.Name, att.Value);
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- }
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- }
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- //遍历Step子节点的子节点中所有的attribute属性节点
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- foreach (XmlElement subsubStepNode in subStepNode.ChildNodes)
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- {
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- foreach (XmlAttribute att in subsubStepNode.Attributes)
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- {
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- if (recipeAllowedCommands.Contains(att.Name))
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- {
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- dic.Add(att.Name, att.Value);
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- }
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- }
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- }
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- }
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-
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- recipeStep.IsJumpStep = true;//!Convert.ToBoolean(dic["Ramp"]);
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- recipeStep.StepName = dic["Name"];
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- recipeStep.StepTime = double.Parse(dic["Time"]);
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- string loopStr = dic["Loop"];
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- recipeStep.IsLoopStartStep = System.Text.RegularExpressions.Regex.Match(loopStr, @"Loop\x20\d+\s*$").Success;
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- recipeStep.IsLoopEndStep = System.Text.RegularExpressions.Regex.Match(loopStr, @"Loop End$").Success;
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- if (recipeStep.IsLoopStartStep)
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- recipeStep.LoopCount = Convert.ToInt32(loopStr.Replace("Loop", string.Empty));
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- else
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- recipeStep.LoopCount = 0;
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- //recipeStep.EndByValue = Convert.ToDouble(dic["EndValue"]);
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- recipeStep.EndBy = dic["EndBy"];
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-
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- if (recipeStep.EndBy == "EndByRfTime")
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- {
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- recipeStep.StepTime = double.Parse(dic["Rf.SetPowerOnTime"]);
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-
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- if (recipeStep.StepTime <= 0)
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- {
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- //LOG.Error("recipe 没有定义RF Power on的时间");
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- return false;
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- }
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- }
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-
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- int rfPower = (int)Convert.ToDouble(dic["Rf.SetPower"]);
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- dic.Add("Rf.SetPowerOnOff", rfPower > 0 ? "true" : "false");
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- if (SC.GetValue<bool>($"{chamberId}.BiasRf.EnableBiasRF"))
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- {
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- int rfPowerBias = (int)Convert.ToDouble(dic["BiasRf.SetPower"]);
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- dic.Add("BiasRf.SetPowerOnOff", rfPowerBias > 0 ? "true" : "false");
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- }
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- else
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- {
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- dic.Remove("BiasRf.SetPower");
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- dic.Remove("BiasRf.SetMatchProcessMode");
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- dic.Remove("BiasRf.SetMatchPositionC1");
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- dic.Remove("BiasRf.SetMatchPositionC2");
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- }
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-
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- bool epdInstalled = SC.ContainsItem("System.SetUp.EPDInstalled") && SC.GetValue<bool>($"System.SetUp.EPDInstalled");
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-
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- if (!epdInstalled)
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- {
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- if (dic.ContainsKey("EPD.SetConfig"))
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- dic.Remove("EPD.SetConfig");
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- }
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- else
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- {
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- recipeStep.EndPointConfig = dic.ContainsKey("EPD.SetConfig") ? dic["EPD.SetConfig"] : null;
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-
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- if (string.IsNullOrEmpty(recipeStep.EndPointConfig))
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- {
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- if (recipeStep.EndBy == "EndByEndPoint")
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- {
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- EV.PostWarningLog("System", "EndPoint is empty");
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- return false;
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- }
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- recipeStep.EndPointConfig = SC.GetStringValue("System.EndPoint.EndPointDefaultValue");
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- }
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- else
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- {
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- //if (!ParseEPD(recipeStep.EndPointConfig, out EPDConfig config))
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- //{
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- // EV.PostWarningLog("System", "EndPoint config is not valid");
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- // return false;
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- //}
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-
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- //recipeStep.FaultIfNoEPDTrigger = config.FaultIfNoEPDTrigger;
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- }
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- }
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-
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- //tolerance
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- List<string> items = new List<string>() { "MfcGas1", "MfcGas2", "MfcGas3", "MfcGas4", "MfcGas5", "PressureControl", "Rf", "BiasRf" };
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- Dictionary<string, object[]> tolerance = new Dictionary<string, object[]>();
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- foreach (var item in items)
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- {
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- if (item == "BiasRf" && !SC.GetValue<bool>($"{chamberId}.BiasRf.EnableBiasRF"))
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- {
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- dic.Remove(($"{item}.SoftTolerance"));
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- dic.Remove(($"{item}.HardTolerance"));
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- continue;
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- }
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-
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- var time = SC.GetValue<int>($"{chamberId}.RecipeToleranceIgnoreTime");
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- var warning = dic.ContainsKey($"{item}.SoftTolerance") ? dic[$"{item}.SoftTolerance"] : "0";
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- var alarm = dic.ContainsKey($"{item}.HardTolerance") ? dic[$"{item}.HardTolerance"] : "0";
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- tolerance[$"{item}.SetRecipeTolerance"] = new object[]
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- {
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- time, warning, alarm
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- };
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-
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- dic.Remove(($"{item}.SoftTolerance"));
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- dic.Remove(($"{item}.HardTolerance"));
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- }
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-
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- recipeStep.ToleranceCommands = tolerance;
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-
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- //dic.Remove("Ramp");
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- dic.Remove("StepNo");
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- dic.Remove("Name");
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- dic.Remove("Loop");
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- dic.Remove("Time");
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- dic.Remove("EndBy");
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- //dic.Remove("EndValue");
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- dic.Remove("Rf.SetPowerOnTime");
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-
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- foreach (string key in dic.Keys)
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- recipeStep.RecipeCommands.Add(key, dic[key]);
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- }
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- }
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- catch (Exception ex)
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- {
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- //LOG.Write(ex);
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- return false;
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- }
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- return true;
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- }
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-
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- //private static bool ParseEPD(string config, out EPDConfig epdConfig)
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- //{
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- // epdConfig = new EPDConfig();
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-
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- // try
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- // {
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- // epdConfig.nParameterCount = 1;
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-
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- // string[] items = config.Split(';');
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- // foreach (var item in items)
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- // {
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- // if (string.IsNullOrEmpty(item))
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- // continue;
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-
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- // string[] pairs = item.Split('=');
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- // if (pairs.Length != 2)
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- // continue;
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-
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- // switch (pairs[0])
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- // {
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- // case "ExposureTime":
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- // epdConfig.Columns[0].nCCDExposureTime = int.Parse(pairs[1]);
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- // break;
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- // case "WaveLengthA":
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- // epdConfig.Columns[0].nWaveLength[0] = ushort.Parse(pairs[1]);
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- // break;
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- // case "BinningA":
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- // epdConfig.Columns[0].nBinning[0] = ushort.Parse(pairs[1]);
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- // break;
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- // case "WaveLengthB":
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- // epdConfig.Columns[0].nWaveLength[1] = ushort.Parse(pairs[1]);
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- // break;
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- // case "BinningB":
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- // epdConfig.Columns[0].nBinning[1] = ushort.Parse(pairs[1]);
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- // break;
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- // case "WaveLengthC":
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- // epdConfig.Columns[0].nWaveLength[2] = ushort.Parse(pairs[1]);
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- // break;
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- // case "BinningC":
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- // epdConfig.Columns[0].nBinning[2] = ushort.Parse(pairs[1]);
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- // break;
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- // case "WaveLengthD":
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- // epdConfig.Columns[0].nWaveLength[3] = ushort.Parse(pairs[1]);
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- // break;
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- // case "BinningD":
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- // epdConfig.Columns[0].nBinning[3] = ushort.Parse(pairs[1]);
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- // break;
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-
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- // case "Fd":
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- // epdConfig.Columns[0].cFunc = pairs[1];
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- // break;
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- // case "PrefilterTime":
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- // epdConfig.Columns[0].nPreFilterTime = int.Parse(pairs[1]);
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- // break;
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- // case "PostfilterTime":
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- // epdConfig.Columns[0].nPostFilterTime = int.Parse(pairs[1]);
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- // break;
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- // case "AlgorithmType":
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- // epdConfig.Columns[0].algorithmType = MapType(pairs[1]);
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- // break;
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- // case "Criteria":
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- // epdConfig.Columns[0].nCriteria = float.Parse(pairs[1]);
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- // break;
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-
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- // case "DelayTime":
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- // epdConfig.Columns[0].nDelayTime = int.Parse(pairs[1]);
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- // break;
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- // case "ValidationTime":
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- // epdConfig.Columns[0].nValidationTime = int.Parse(pairs[1]);
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- // break;
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- // case "ValidationValue":
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- // epdConfig.Columns[0].nValidationValue = int.Parse(pairs[1]);
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- // break;
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- // case "TimeWindow":
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- // epdConfig.Columns[0].nTimeWindow = int.Parse(pairs[1]);
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- // break;
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- // case "MinimalTime":
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- // epdConfig.Columns[0].nMinimalTime = int.Parse(pairs[1]);
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- // break;
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- // case "PostponeTime":
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- // epdConfig.Columns[0].nPostponeTime = int.Parse(pairs[1]);
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- // break;
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-
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- // case "Control":
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- // epdConfig.Columns[0].bControl = Convert.ToBoolean(pairs[1]);
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- // break;
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- // case "Normalization":
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- // epdConfig.Columns[0].bNormalization = Convert.ToBoolean(pairs[1]);
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- // break;
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- // case "EnablePostponePercent":
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- // epdConfig.Columns[0].bPostponePercent = Convert.ToBoolean(pairs[1]);
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- // break;
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- // case "EnableCriterialPercent":
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- // epdConfig.Columns[0].bCriteriaPercent = Convert.ToBoolean(pairs[1]);
|
|
|
- // break;
|
|
|
-
|
|
|
-
|
|
|
- // case "EnableEventTrigger":
|
|
|
- // epdConfig.Columns[0].bEvtTrigger = Convert.ToBoolean(pairs[1]);
|
|
|
- // break;
|
|
|
-
|
|
|
-
|
|
|
-
|
|
|
- // case "IsFaultIfNoTrigger":
|
|
|
- // epdConfig.FaultIfNoEPDTrigger = Convert.ToBoolean(pairs[1]);
|
|
|
- // break;
|
|
|
-
|
|
|
- // }
|
|
|
- // }
|
|
|
-
|
|
|
- // return true;
|
|
|
- // }
|
|
|
- // catch (Exception ex)
|
|
|
- // {
|
|
|
- // LOG.Write(ex);
|
|
|
- // EV.PostMessage("System", EventEnum.DefaultAlarm, "EPD config input not valid, ", ex.Message);
|
|
|
- // return false;
|
|
|
- // }
|
|
|
-
|
|
|
-
|
|
|
- //}
|
|
|
-
|
|
|
-
|
|
|
- //private static AlgorithmType MapType(string type)
|
|
|
- //{
|
|
|
- // switch (type)
|
|
|
- // {
|
|
|
- // case "Unknown": return AlgorithmType.ALG_NONE;
|
|
|
- // case "Above_ABS_Value": return AlgorithmType.ALG_RISE_VALUE;
|
|
|
- // case "Below_ABS_Value": return AlgorithmType.ALG_FALL_VALUE;
|
|
|
- // case "Drop_Percent": return AlgorithmType.ALG_FALL_PERCENT;
|
|
|
- // case "Up_Percent": return AlgorithmType.ALG_RISE_PERCENT;
|
|
|
- // case "Range_In": return AlgorithmType.ALG_RANGE_IN;
|
|
|
- // case "Gradient": return AlgorithmType.ALG_GRADIENT;
|
|
|
- // case "Peek": return AlgorithmType.ALG_PEAK;
|
|
|
- // case "Valley": return AlgorithmType.ALG_VALLEY;
|
|
|
- // case "Min_Drop_Percent": return AlgorithmType.ALG_MIN_FALL_PERCENT;
|
|
|
- // case "Min_Up_Percent": return AlgorithmType.ALG_MIN_RISE_PERCENT;
|
|
|
- // case "Max_Drop_Percent": return AlgorithmType.ALG_MAX_FALL_PERCENT;
|
|
|
- // case "Max_Up_Percent": return AlgorithmType.ALG_MAX_RISE_PERCENT;
|
|
|
- // case "Rise_Fall": return AlgorithmType.ALG_RISE_FALL;
|
|
|
- // case "Fall_Rise": return AlgorithmType.ALG_FALL_RISE;
|
|
|
- // }
|
|
|
-
|
|
|
- // return AlgorithmType.ALG_NONE;
|
|
|
- //}
|
|
|
-
|
|
|
- }
|
|
|
-
|
|
|
-
|
|
|
-}
|
