 lixiang
|
d6b8d32004
1.修复不能跑atm模式的bug
|
7 months ago |
|
lixiang
|
a9d8e56970
1.扩展alarm list
|
7 months ago |
 sangwq
|
a850db5a2d
Enhance the cooling algorithm to avoid processed wafer stay loadlock too long.
|
7 months ago |
|
lixiang
|
e29f6e8e46
1.优化UI界面性能
|
8 months ago |
|
lixiang
|
17c3d36a2b
Sequence 界面 PM REcipe 支持选择 Pre Clean/Post Clean/WTW Clean 和 Process Recipe
|
8 months ago |
|
lixiang
|
b67769ec2c
ui优化
|
8 months ago |
|
sangwq
|
0af5bc1e75
throughput enhancement.
|
9 months ago |
|
lixiang
|
99d939492e
1.加登出界面
|
9 months ago |
|
lixiang
|
465f0690e7
Cooling功能bug修复
|
9 months ago |
|
lixiang
|
5ce110574e
1，添加cooling功能
|
9 months ago |
|
lixiang
|
2136e3b838
1.分开kepler与Venus 漏气检测ui，删除多余代码
|
10 months ago |
|
lixiang
|
9163903164
Kepler2200优化
|
10 months ago |
|
lixiang
|
ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
|
11 months ago |
|
lixiang
|
464c53cd94
1.Datalog添加高温Haeter开关显示
|
11 months ago |
|
lixiang
|
d938a9e54c
PM/TM swap pick 开门前加压力wait
|
11 months ago |
|
lixiang
|
608cf43d67
1.做工艺前pump down 根据底压确定是否执行
|
11 months ago |
|
lixiang
|
d33079596b
1.优化新版跑片动画
|
11 months ago |
 zhouhr
|
b0e5581d4e
delete some item in SE Config && add WallChiller in DE && add ConfigItem for pump check ForelinePressure in every chambertype
|
1 year ago |
|
lixiang
|
caba8d94c6
Duplicated Wafer UI显示
|
1 year ago |
|
lixiang
|
552d60ca99
1.Stable与Tolerance 功能优化
|
1 year ago |
|
lixiang
|
f03139a580
1.应tps需求添加，VenusSE工艺结束，PM主界面信息保存
|
1 year ago |
|
sangwq
|
2a6a20fefc
fix the wrong position for singleArm Option definition while upper in lower out.
|
1 year ago |
|
sangwq
|
746ece5800
restore System.Name configure item
|
1 year ago |
|
sangwq
|
a05e9eaa1b
Loadlock/TM Robot slot In/Out Options.
|
1 year ago |
|
lixiang
|
87f1121180
1.Recipe UI 界面Name优化
|
1 year ago |
|
lixiang
|
d35b997884
1.优化RevtechMatch状态机
|
1 year ago |
|
lixiang
|
6bbe2e529b
1.删除或注释 Venus ChamberType
|
1 year ago |
|
lixiang
|
0f0650b80f
1.PM 界面 run recipe 变为手动模式
|
1 year ago |
 chenkui
|
63d58afa42
1、SecsGem增加了UTF-8编码的支持；
|
1 year ago |
|
chenkui
|
587ffe27b5
1、配置文件中增加了FA.Encoding
|
1 year ago |
