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@@ -99,7 +99,7 @@
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<config default="false" name="IgnoreWaterFlowError" nameView="Ignore water flow alarm" description="是否忽略冷却水报警" max="" min="" paramter="" tag="" unit="" type="Bool" />
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<config default="40" name="DelayTimeBeforeLiftDown" nameView="Delay Time before lift down" description="冷却前，lift pin停留多久再落下" max="600" min="0" paramter="" tag="" unit="second" type="Integer" />
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- <config default="0" name="SingleArmOption" nameView="Single Arm Option" description="0, Both; 1, Blade1; 2, Blade2; 3, Blade1 In Blade2 Out; 4, Blade2 In Blade1 Out" max="4" min="0" paramter="" tag="" unit="" type="Integer" />
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+ <config default="0" name="SingleArmOption" nameView="Single Arm Option" description="0, both; 1, Blade1; 2, Blade2" max="2" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="4" name="LLAutoPumpInWaferOpt" nameView="Loadlock Auto Pump Option for Raw Wafer" description="Auto Pumping Loadlock while raw wafer number big or equal then this number" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="0" name="LLAutoPumpOutWaferOpt" nameView="Loadlock Auto Pump Option for Processed Wafer" description="Auto Pumping Loadlock while processed wafer number less or equal than this number" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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@@ -162,7 +162,7 @@
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<config default="90" name="ControlPressureSetPoint" nameView="Control Pressure SetPoint" description="TM Chamber 控压 设定值" max="200" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
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<config default="50" name="WithLLPressureDifference" nameView="TM LL Pressure Difference" description="TM和LL压差" max="100" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
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<config default="50" name="WithPMPressureDifference" nameView="TM PM Pressure Difference" description="TM和PM压差" max="100" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
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- <config default="0" name="SingleArmOption" nameView="Single Arm Option" description="0, both; 1, Blade1; 2, Blade2" max="2" min="0" paramter="" tag="" unit="" type="Integer" />
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+ <config default="0" name="SingleArmOption" nameView="Single Arm Option" description="0, Both; 1, Blade1; 2, Blade2; 3, Blade1 In Blade2 Out; 4, Blade2 In Blade1 Out" max="4" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="0" name="QueryAWCOption" nameView="Query AWC Option" description="0, None; 1, Only TMPick Open; 2, Only TMPlace Open; 3, Both Open" max="3" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="0" name="LLAutoVentInWaferOpt" nameView="Loadlock Aut Vent Option For Raw Wafer" description="Auto Venting Loadlock while raw wafer number less or equal than this number" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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