 sangwq
|
d714771195
fix atm prepare pressure bugs.
|
1 year ago |
|
sangwq
|
3aa9742231
Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/Venus
|
1 year ago |
|
sangwq
|
694c2524ad
enhance the pause function and fix the atm prepare pressure bugs.
|
1 year ago |
 lixiang
|
f8c50b602a
修复Tolerance对流气不开阀的bug
|
1 year ago |
|
sangwq
|
e61f018b66
Manual Return wafer while running cycle.
|
1 year ago |
|
sangwq
|
73f0d306a7
Enhance routing algorithm.
|
1 year ago |
|
sangwq
|
c3bef13a6e
Enhance Auto pump/vent algorithm.
|
2 years ago |
|
sangwq
|
0a0308458e
Enable drag wafer while module offline.
|
2 years ago |
|
sangwq
|
74c52de151
Enhance throughput.
|
2 years ago |
|
sangwq
|
9144014f90
enhance the routing algorithm and module online/offline control logic.
|
2 years ago |
|
sangwq
|
501997ac38
TM/EFEM robot single arm option.
|
2 years ago |
|
sangwq
|
c223835b1e
enhance AutoCycle module.
|
2 years ago |
|
sangwq
|
2fb8490f3a
Update TM software interlock about Loadlock slit door open issue.
|
2 years ago |
|
sangwq
|
ff17e9c447
develop autycylce/manualmove module.
|
2 years ago |
|
sangwq
|
8f9b95ae8f
Develop transfer cycle.
|
2 years ago |
|
sangwq
|
d900c241bd
开发 AutoCycle 模块， 进行中
|
2 years ago |
|
sangwq
|
8826cc0cd0
开发 AutoCycle 模块， 增加TMRobot module id.
|
2 years ago |
|
lixiang
|
530ddcbae7
优化topview界面
|
2 years ago |
|
sangwq
|
ed992dd631
Enhance the Log Info
|
2 years ago |
|
sangwq
|
b741650da1
TM Cycle ready.
|
2 years ago |
|
sangwq
|
66557b65bb
TMCycle not finished.
|
2 years ago |
|
sangwq
|
44ec74603f
TM Transfer
|
2 years ago |
