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@@ -469,37 +469,37 @@ namespace Venus_RT.Modules.PMs
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var ProcessUnit = unit as GasControlUnit;
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Chamber.FlowGas(0, ProcessUnit.Gas1);
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- if (ProcessUnit.Gas1 >= 1 && ProcessUnit.ToleranceDelayTime_ms > 0)
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+ if (ProcessUnit.Gas1 >= 1 )
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{
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Chamber.OpenValve(ValveType.PV11, true);
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- if (ProcessUnit.ToleranceMode != ToleranceMode.None)
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+ if (ProcessUnit.ToleranceMode != ToleranceMode.None && ProcessUnit.ToleranceDelayTime_ms > 0)
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{
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toleranceObjects.Add(new ToleranceObject("Gas1", ProcessUnit.Gas1, ProcessUnit.Gas1WarningRange, ProcessUnit.Gas1AlarmRange, ProcessUnit.ToleranceDelayTime_ms, ProcessUnit.ToleranceMode));
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}
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}
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Chamber.FlowGas(1, ProcessUnit.Gas2);
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- if (ProcessUnit.Gas2 >= 1 && ProcessUnit.ToleranceDelayTime_ms > 0)
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+ if (ProcessUnit.Gas2 >= 1 )
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{
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Chamber.OpenValve(ValveType.PV21, true);
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- if (ProcessUnit.ToleranceMode != ToleranceMode.None)
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+ if (ProcessUnit.ToleranceMode != ToleranceMode.None && ProcessUnit.ToleranceDelayTime_ms > 0)
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{
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toleranceObjects.Add(new ToleranceObject("Gas2", ProcessUnit.Gas2, ProcessUnit.Gas2WarningRange, ProcessUnit.Gas2AlarmRange, ProcessUnit.ToleranceDelayTime_ms, ProcessUnit.ToleranceMode));
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}
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}
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Chamber.FlowGas(2, ProcessUnit.Gas3);
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- if (ProcessUnit.Gas3 >= 1 && ProcessUnit.ToleranceDelayTime_ms > 0)
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+ if (ProcessUnit.Gas3 >= 1)
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{
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Chamber.OpenValve(ValveType.PV31, true);
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- if (ProcessUnit.ToleranceMode != ToleranceMode.None)
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+ if (ProcessUnit.ToleranceMode != ToleranceMode.None && ProcessUnit.ToleranceDelayTime_ms > 0)
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{
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toleranceObjects.Add(new ToleranceObject("Gas3", ProcessUnit.Gas3, ProcessUnit.Gas3WarningRange, ProcessUnit.Gas3AlarmRange, ProcessUnit.ToleranceDelayTime_ms, ProcessUnit.ToleranceMode));
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}
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}
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Chamber.FlowGas(3, ProcessUnit.Gas4);
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- if (ProcessUnit.Gas4 >= 1 && ProcessUnit.ToleranceDelayTime_ms > 0)
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+ if (ProcessUnit.Gas4 >= 1 )
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{
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Chamber.OpenValve(ValveType.PV41, true);
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- if (ProcessUnit.ToleranceMode != ToleranceMode.None)
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+ if (ProcessUnit.ToleranceMode != ToleranceMode.None && ProcessUnit.ToleranceDelayTime_ms > 0)
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{
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toleranceObjects.Add(new ToleranceObject("Gas4", ProcessUnit.Gas3, ProcessUnit.Gas3WarningRange, ProcessUnit.Gas3AlarmRange, ProcessUnit.ToleranceDelayTime_ms, ProcessUnit.ToleranceMode));
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}
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@@ -628,7 +628,7 @@ namespace Venus_RT.Modules.PMs
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private RState Kepler2200GasControlUnit_Check(ProcessUnitBase unit, RecipeStep step)
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{
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- var ProcessUnit = unit as GasControlUnit;
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+ var ProcessUnit = unit as Kepler2200GasControlUnit;
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if (ProcessUnit.ToleranceMode != ToleranceMode.None)
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{
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_GasFlowToleranceChecker.Monitor(Chamber.MFC1FeedBack, Chamber.MFC2FeedBack, Chamber.MFC3FeedBack, Chamber.MFC4FeedBack, Chamber.MFC5FeedBack, Chamber.MFC6FeedBack);
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@@ -644,7 +644,7 @@ namespace Venus_RT.Modules.PMs
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Chamber.FlowGas(3, 0);
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Chamber.FlowGas(4, 0);
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Chamber.FlowGas(5, 0);
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- var ProcessUnit = unit as GasControlUnit;
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+ var ProcessUnit = unit as Kepler2200GasControlUnit;
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if (ProcessUnit.ToleranceMode != ToleranceMode.None)
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{
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_GasFlowToleranceChecker.End();
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