 lixiang
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ed7c537c19
1.添加TM/LLA/LLB 平衡阀
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il y a 11 mois |
 hecl
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f814cf53a8
1.Add simulator read RF ConfigType function
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il y a 11 mois |
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lixiang
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d33079596b
1.优化新版跑片动画
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il y a 11 mois |
 sangwq
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54ed40c8b1
enhance kepler throughput
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il y a 11 mois |
 zhouhr
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9b93f58d68
Add Venus DE OperationView && add the compatibility of the TM&VCE between SETM&DETM
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il y a 11 mois |
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sangwq
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82703d4497
enhance throughput with loadlock delay.
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il y a 11 mois |
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hecl
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aed602cdc9
1.Add Tru rf/match Reconnect function
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il y a 11 mois |
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hecl
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0a2d5ac547
Venus DE TM simulator add
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il y a 11 mois |
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sangwq
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57281fce55
Enhance throughput while not pass by aligner.
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il y a 11 mois |
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hecl
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ca830385e4
Fix bug
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il y a 11 mois |
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hecl
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996eacc709
VenusDE recipe tolerance enhance
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il y a 11 mois |
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zhouhr
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13460815b8
add PM ALARM_Notify while PM sensor Alarm && add TMBase for SETM&&DETM && add HongHuDETM For DE && fix some bugs in DETMUI
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il y a 11 mois |
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sangwq
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f53fecc7bb
Enhance sequence aligner configurability
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il y a 11 mois |
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lixiang
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7513d2e586
TM View 添加wafer
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il y a 11 mois |
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lixiang
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8d613c7d1f
奈思UI 新版动画
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il y a 11 mois |
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lixiang
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6dc3e20037
添加Mfc calibration 流气后，等待钟摆阀完全关闭的step
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il y a 1 an |
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lixiang
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3e00375ce8
1.FDC代码逻辑移到PricessDefine
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il y a 1 an |
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hecl
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09a72490a8
1.enhance Tru match logical
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il y a 1 an |
 intern02
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df6a3ad304
upload Venus_MainPages.csproj and Venus_Themes.csproj.
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il y a 1 an |
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intern02
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7d6765cd44
Added and uploaded VenusDETMViewModel.cs, VenusDETMView.xaml, VCEleft1.png, VCEright1.png, detm.png, DEVceA.xaml, DEVceB.xaml, and VenusDETM.xaml.
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il y a 1 an |
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zhouhr
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1d4d3733e5
fix the bug in DETMOperationView
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il y a 1 an |
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zhouhr
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cc62abde94
fix some bug in DETMOperationView
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il y a 1 an |
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zhouhr
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662fb997fa
add DETMOperationView in UI
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il y a 1 an |
|
zhouhr
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d95b8c7876
cancel Open PVN22 in SE,DE && add VenusVentRoutine && fix the bug in GasBoxLeakCheck && Change Logic in pumpdown&Vent in SE,DE
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il y a 1 an |
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hecl
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b7ebfa6adf
Add Tru match release stop mode command
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il y a 1 an |
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sangwq
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e806a46292
Enhance the EFEMM design for thread safe and throughput issues.
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il y a 1 an |
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sangwq
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7a1faeac74
Redesign the EFEM module for thread safe issue.
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il y a 1 an |
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zhouhr
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9d5c55e2d2
fix the bug in SETMOperationView as offline.
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il y a 1 an |
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zhouhr
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16530979b1
DE pendulum set pressure/10 as the difference between SE and DE.
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il y a 1 an |
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zhouhr
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28a7e74cc0
Let PVN22 open before PumpDown start in SE&DE.
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il y a 1 an |
