 lixiang
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608cf43d67
1.做工艺前pump down 根据底压确定是否执行
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il y a 10 mois |
 zhouhr
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9b93f58d68
Add Venus DE OperationView && add the compatibility of the TM&VCE between SETM&DETM
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il y a 11 mois |
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zhouhr
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13460815b8
add PM ALARM_Notify while PM sensor Alarm && add TMBase for SETM&&DETM && add HongHuDETM For DE && fix some bugs in DETMUI
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il y a 11 mois |
 hecl
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c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
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il y a 1 an |
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lixiang
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d4d56a3cf3
1.添加Recipe内部外部名称，chamberTYpe 比对
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il y a 1 an |
 sangwq
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6d393bb86d
new routing algorithm with prediction.
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il y a 1 an |
 chenkui
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587ffe27b5
1、配置文件中增加了FA.Encoding
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il y a 1 an |
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chenkui
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5cf3c54d79
1、RouteManager增加了StopJob,AbortJob等
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il y a 1 an |
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chenkui
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a3f01b0830
1、重新引用最新版本的SecsGem动态库，用于实现FA相应的功能；
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il y a 1 an |
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sangwq
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20606c1ffb
check in new routing algorithm code.
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il y a 1 an |
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sangwq
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12eb71a75f
Redesign the Clean recipe algorithm and fix the throughput calculation bug.
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il y a 1 an |
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chenkui
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44fc6989ef
1、Remove FabConnect dll file;
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il y a 1 an |
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sangwq
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dbb753dd44
Pause functionality.
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il y a 1 an |
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sangwq
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a80b5af3fd
enhance manual return wafer algorithm.
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il y a 1 an |
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zhouhr
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0728fdc25a
Add Abort while SE Cycle, ReturnWafer, manual transfer && fix bug in SETM simulator && update UI in SE Operation,TM View
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il y a 1 an |
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zhouhr
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26a6aa8f41
fix bug in SE Swap && SE Cycle
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il y a 1 an |
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zhouhr
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f5a709d29f
enhance ReturnWafer for VenusSE && fix bugs in VCE Routine, HongHuTM
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il y a 1 an |
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zhouhr
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724b0ca304
add ReturnWafer for Venus SE.
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il y a 1 an |
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zhouhr
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1b999083c8
add WaferTransfer for VenusSE && fix bug in VceControl as param is null && fix bug in Pick,Place as target slot is negative.
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il y a 1 an |
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sangwq
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faa496c2b0
fix a routing bug for single PM sequence.
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il y a 1 an |
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sangwq
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73f0d306a7
Enhance routing algorithm.
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il y a 1 an |
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zhouhr
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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il y a 1 an |
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sangwq
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c3bef13a6e
Enhance Auto pump/vent algorithm.
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il y a 1 an |
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zhouhr
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f7228d247a
restore Venus TM Robot Simulator
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il y a 1 an |
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zhouhr
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08029e238d
update Venus SE pick place && drivers of HongHu deivce && ui
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il y a 1 an |
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zhouhr
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b9a935138d
add vpa vce simulator && update honghuvce driver,SETMEntity,seTMEntity pick place home routine && update VenusSEoverviewmodel......
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il y a 1 an |
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zhouhr
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1e7c808d19
add VenusSE tm related module in ui rt simulator && fix efem backround bug
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il y a 1 an |
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lixiang
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3f6c65223f
1.删除部分不需要插入数据库数据
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il y a 1 an |
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sangwq
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a88d0012df
fix some AutoCycle/manualMove/ReturnWafer/Abort bugs.
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il y a 1 an |
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sangwq
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d49b8f65dd
fix the RouteManager instance initialize bug.
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il y a 1 an |
