 zhouhr
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cc62abde94
fix some bug in DETMOperationView
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11 months ago |
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zhouhr
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662fb997fa
add DETMOperationView in UI
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11 months ago |
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zhouhr
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d95b8c7876
cancel Open PVN22 in SE,DE && add VenusVentRoutine && fix the bug in GasBoxLeakCheck && Change Logic in pumpdown&Vent in SE,DE
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11 months ago |
 hecl
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b7ebfa6adf
Add Tru match release stop mode command
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11 months ago |
 sangwq
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e806a46292
Enhance the EFEMM design for thread safe and throughput issues.
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11 months ago |
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sangwq
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7a1faeac74
Redesign the EFEM module for thread safe issue.
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11 months ago |
|
zhouhr
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9d5c55e2d2
fix the bug in SETMOperationView as offline.
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11 months ago |
|
zhouhr
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16530979b1
DE pendulum set pressure/10 as the difference between SE and DE.
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11 months ago |
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zhouhr
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28a7e74cc0
Let PVN22 open before PumpDown start in SE&DE.
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11 months ago |
|
zhouhr
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a0f20d03ac
add ChillerCheck and Interval to 1s && SE DE Chamber can operate TurboPump freely && fix the bug in GasLeakCheck && close PVN22 after PMPumpDown
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11 months ago |
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hecl
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4bebab5f8b
Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/Venus
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11 months ago |
 lixiang
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07b8ea7e19
让fdc只支持Process Type
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11 months ago |
|
hecl
|
27c33aa98d
Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/Venus
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11 months ago |
|
lixiang
|
a98efc8a0b
1.修改kepler2300 FDC 运行报错bug
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11 months ago |
|
hecl
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4109b056f2
Fix exception caused by skypump recivemessage length && socket don't connect
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11 months ago |
|
lixiang
|
17ae6db63c
kepler2200/Kepler2300 添加FDC 功能
|
11 months ago |
|
hecl
|
9a410e084a
fix exception:
|
11 months ago |
|
zhouhr
|
5836f3ed1c
fix bugs in ShareDrive && add Online in SETM
|
11 months ago |
|
sangwq
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4f7a01400f
fix the sync issue for efem socket.
|
11 months ago |
|
hecl
|
21d202af0e
Add VenusDE WallChiller UI & ViewModel
|
11 months ago |
|
zhouhr
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b0e5581d4e
delete some item in SE Config && add WallChiller in DE && add ConfigItem for pump check ForelinePressure in every chambertype
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11 months ago |
|
zhouhr
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cc436f1ac6
add DE shareChiller && add check items before PM Pump down.
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11 months ago |
|
lixiang
|
88fb4d096c
添加界面登出功能
|
11 months ago |
|
hecl
|
fedcc95273
1.Venus DE process enhance
|
11 months ago |
|
sangwq
|
cc43a1d632
enhance the EFEM driver.
|
11 months ago |
|
zhouhr
|
273e8dcfae
fix bug in ShareChiller.
|
11 months ago |
|
sangwq
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337c20b54d
compatible with Venus.
|
11 months ago |
|
sangwq
|
7862a9be38
solve the sync problem while set signal tower light.
|
11 months ago |
|
lixiang
|
75dbbd4da8
添加KeplerSignaltower功能
|
11 months ago |
|
hecl
|
3bf4e310a3
Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/Venus
|
11 months ago |
