Commit History

Author SHA1 Message Date
  lixiang 0f0650b80f 1.PM 界面 run recipe 变为手动模式 1 year ago
  lixiang 2cbab729fb 添加小标题 home/online/offineInclude/Exclude功能 1 year ago
  lixiang feed6f1c8e 修复手动流气bug 1 year ago
  lixiang 7ff42d4eca 1.添加 Process 切换step Match/BiasMatch设置值 offset功能,c1/c2小于offset不设置 1 year ago
  lixiang 68b4ba9640 1.添加mtorr与Pa切换功能 1 year ago
  lixiang 33ba42d9ef 1.添加RT关闭同时关闭钟摆阀和RF的功能 1 year ago
  lixiang fdb9fa780e 修复PM界面钟摆阀与加热可以打开多个窗体的bug 1 year ago
  lixiang 665bb2ee1d 域名测试 1 year ago
  lixiang 08e85396fc 1.添加eventview分页功能 1 year ago
  lixiang 4338503e2a 1.添加霍庭格RF Device 1 year ago
  lixiang 818383115c UI优化 1 year ago
  lixiang c0ff9f251e 1.添加kepler2200B 1 year ago
  lixiang e511d1f387 1.添加PM控压功能 1 year ago
  lixiang 6d7ee9b8a3 1.根据新版kepler2200A IO跟新kepler2200A PM功能 1 year ago
  lixiang ac251b02cc 1.主界面添加LLA/LLB ATM/VAV显示 1 year ago
  lixiang 9e1de0e343 1.run recipe 参数bool改recipetype 1 year ago
  lixiang 7a6912dc9c 添加cleanrecipe界面 1 year ago
  lixiang f0c8f8caa5 解决pm界面不能run recipe bug 1 year ago
  lixiang f53a5428e6 1.将rt向ui传递robot状态放在线程安全队列,避免数据包丢失 1 year ago
  lixiang b253c8fadd 1.添加旋转动画 1 year ago
  lixiang 5139f41e19 添加PM Abort 下拉菜单功能 1 year ago
  lixiang 5f00a42d13 kepler2200A 添加 IOHighTemperatureHeater驱动,并添加模拟器与UI界面功能 1 year ago
  lixiang edb5ad6960 1.添加数据分析 Recipe step功能 1 year ago
  lixiang b1e6a9ce63 bug提交 1 year ago
  lixiang ad6fa7b5dc 1.添加chamber界面创建wafer,开关门功能 1 year ago
  Intern01 987f0abae5 1.Slove TuroN2Flow don't show problem 1 year ago
  lixiang 76a22f462f 1.根据tps提供sequence 添加控压功能 1 year ago
  lixiang 124b11b9f3 1.kepler2300 添加三个chiller功能(模拟器功能暂无) 1 year ago
  zhouhr bcc9d2faf8 1、Chamber add the waferID 1 year ago
  lixiang 708d655cae 1.将Kepler/Venus DeviceModel里面的ProcessGauge与PressureGauge重新定义 1 year ago