lixiang
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0f0650b80f
1.PM 界面 run recipe 变为手动模式
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1 year ago |
lixiang
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2cbab729fb
添加小标题 home/online/offineInclude/Exclude功能
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1 year ago |
lixiang
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feed6f1c8e
修复手动流气bug
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1 year ago |
lixiang
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7ff42d4eca
1.添加 Process 切换step Match/BiasMatch设置值 offset功能,c1/c2小于offset不设置
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1 year ago |
lixiang
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 year ago |
lixiang
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33ba42d9ef
1.添加RT关闭同时关闭钟摆阀和RF的功能
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1 year ago |
lixiang
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fdb9fa780e
修复PM界面钟摆阀与加热可以打开多个窗体的bug
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1 year ago |
lixiang
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665bb2ee1d
域名测试
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1 year ago |
lixiang
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08e85396fc
1.添加eventview分页功能
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1 year ago |
lixiang
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4338503e2a
1.添加霍庭格RF Device
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1 year ago |
lixiang
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818383115c
UI优化
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1 year ago |
lixiang
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c0ff9f251e
1.添加kepler2200B
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1 year ago |
lixiang
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e511d1f387
1.添加PM控压功能
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1 year ago |
lixiang
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6d7ee9b8a3
1.根据新版kepler2200A IO跟新kepler2200A PM功能
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1 year ago |
lixiang
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ac251b02cc
1.主界面添加LLA/LLB ATM/VAV显示
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1 year ago |
lixiang
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9e1de0e343
1.run recipe 参数bool改recipetype
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1 year ago |
lixiang
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7a6912dc9c
添加cleanrecipe界面
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1 year ago |
lixiang
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f0c8f8caa5
解决pm界面不能run recipe bug
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1 year ago |
lixiang
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f53a5428e6
1.将rt向ui传递robot状态放在线程安全队列,避免数据包丢失
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1 year ago |
lixiang
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b253c8fadd
1.添加旋转动画
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1 year ago |
lixiang
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5139f41e19
添加PM Abort 下拉菜单功能
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1 year ago |
lixiang
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5f00a42d13
kepler2200A 添加 IOHighTemperatureHeater驱动,并添加模拟器与UI界面功能
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1 year ago |
lixiang
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edb5ad6960
1.添加数据分析 Recipe step功能
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1 year ago |
lixiang
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b1e6a9ce63
bug提交
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1 year ago |
lixiang
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ad6fa7b5dc
1.添加chamber界面创建wafer,开关门功能
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1 year ago |
Intern01
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987f0abae5
1.Slove TuroN2Flow don't show problem
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1 year ago |
lixiang
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76a22f462f
1.根据tps提供sequence 添加控压功能
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1 year ago |
lixiang
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124b11b9f3
1.kepler2300 添加三个chiller功能(模拟器功能暂无)
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1 year ago |
zhouhr
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bcc9d2faf8
1、Chamber add the waferID
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1 year ago |
lixiang
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708d655cae
1.将Kepler/Venus DeviceModel里面的ProcessGauge与PressureGauge重新定义
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1 year ago |