 lixiang
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2136e3b838
1.分开kepler与Venus 漏气检测ui，删除多余代码
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10 months ago |
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lixiang
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9163903164
Kepler2200优化
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10 months ago |
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lixiang
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ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
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11 months ago |
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lixiang
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464c53cd94
1.Datalog添加高温Haeter开关显示
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11 months ago |
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lixiang
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d938a9e54c
PM/TM swap pick 开门前加压力wait
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11 months ago |
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lixiang
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608cf43d67
1.做工艺前pump down 根据底压确定是否执行
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11 months ago |
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lixiang
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d33079596b
1.优化新版跑片动画
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11 months ago |
 zhouhr
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b0e5581d4e
delete some item in SE Config && add WallChiller in DE && add ConfigItem for pump check ForelinePressure in every chambertype
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1 year ago |
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lixiang
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caba8d94c6
Duplicated Wafer UI显示
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1 year ago |
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lixiang
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552d60ca99
1.Stable与Tolerance 功能优化
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1 year ago |
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lixiang
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f03139a580
1.应tps需求添加，VenusSE工艺结束，PM主界面信息保存
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1 year ago |
 sangwq
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2a6a20fefc
fix the wrong position for singleArm Option definition while upper in lower out.
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1 year ago |
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sangwq
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746ece5800
restore System.Name configure item
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1 year ago |
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sangwq
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a05e9eaa1b
Loadlock/TM Robot slot In/Out Options.
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1 year ago |
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lixiang
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87f1121180
1.Recipe UI 界面Name优化
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1 year ago |
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lixiang
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d35b997884
1.优化RevtechMatch状态机
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1 year ago |
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lixiang
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6bbe2e529b
1.删除或注释 Venus ChamberType
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1 year ago |
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lixiang
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0f0650b80f
1.PM 界面 run recipe 变为手动模式
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1 year ago |
 chenkui
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63d58afa42
1、SecsGem增加了UTF-8编码的支持；
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1 year ago |
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chenkui
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587ffe27b5
1、配置文件中增加了FA.Encoding
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1 year ago |
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lixiang
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9e14bbee6a
1.由于PM种类变多，且分配置，PM 加载device 功能重写
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1 year ago |
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lixiang
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b2406d6f78
1.添加signalTonwer ui界面
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1 year ago |
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lixiang
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1929a3510b
1.新版ui界面开发
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1 year ago |
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lixiang
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7ff42d4eca
1.添加 Process 切换step Match/BiasMatch设置值 offset功能，c1/c2小于offset不设置
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1 year ago |
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lixiang
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6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
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1 year ago |
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lixiang
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8b2a01fcc3
kepler2200配置文件也添加IsEnableEthercat
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1 year ago |
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lixiang
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ee26035034
1.添加Ethercat 励兆 Match DeviceData
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1 year ago |
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lixiang
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bdcf0556c9
1.将kepler2200与其它项目配置文件分开
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1 year ago |
