 zhouhr
|
dd99f38e54
change the system by configtype in App.config in RT,Simulator && change the temp by chillertype in VenusDE
|
9 months ago |
 lixiang
|
3fb3984bd3
1.添加 Heater 伺服到位信号，手臂进腔前check
|
10 months ago |
|
zhouhr
|
9b93f58d68
Add Venus DE OperationView && add the compatibility of the TM&VCE between SETM&DETM
|
11 months ago |
 hecl
|
0a2d5ac547
Venus DE TM simulator add
|
11 months ago |
|
lixiang
|
d35b997884
1.优化RevtechMatch状态机
|
1 year ago |
|
lixiang
|
3ac2e3bc3a
1.删除/注释 PMEntity 里面关于 LoadLock 的代码（Venus样机独有功能）
|
1 year ago |
|
lixiang
|
6bbe2e529b
1.删除或注释 Venus ChamberType
|
1 year ago |
|
lixiang
|
96661cadab
修复efem place ，tm同时有lp1与lp2 wafer时return wafer报错bug
|
1 year ago |
|
lixiang
|
cfed419b0a
解决ValueTuple版本冲突
|
1 year ago |
|
hecl
|
d18b2c8e6a
Add VenusDE PM UI, Viewmodel, Simulator
|
1 year ago |
|
lixiang
|
818383115c
UI优化
|
1 year ago |
|
hecl
|
1b4faf274b
Improve VenusSE pm viewmodel and vent function
|
1 year ago |
|
lixiang
|
c0ff9f251e
1.添加kepler2200B
|
1 year ago |
|
zhouhr
|
36cc58e22c
fix bug in Venus SE PM in UI,RT,Simulator
|
1 year ago |
|
hecl
|
58b65c3ff0
VenusSE Simulator PM Update
|
1 year ago |
|
zhouhr
|
c5b157adf6
add Venus seTMView in simulator
|
1 year ago |
|
zhouhr
|
08029e238d
update Venus SE pick place && drivers of HongHu deivce && ui
|
1 year ago |
|
hecl
|
5396e84cfe
VenusSE TM io simulator update
|
1 year ago |
|
zhouhr
|
b9a935138d
add vpa vce simulator && update honghuvce driver,SETMEntity,seTMEntity pick place home routine && update VenusSEoverviewmodel......
|
1 year ago |
 Intern01
|
dfc9174ac8
VenusSE TM PM Simulator Update
|
1 year ago |
|
zhouhr
|
1e7c808d19
add VenusSE tm related module in ui rt simulator && fix efem backround bug
|
1 year ago |
|
Intern01
|
c5abe7c813
Simulator Communication Port Update
|
1 year ago |
|
Intern01
|
b7129c8da5
PM&Simulator update
|
1 year ago |
|
Intern01
|
b1f52bbe8a
Simulator PMC update
|
1 year ago |
|
lixiang
|
f9a02a739a
添加pmc/kepler2200
|
1 year ago |
|
lixiang
|
be22c5112d
TM 添加两个pump 串口23/24/25/26
|
1 year ago |
|
lixiang
|
a4b75ecb2e
1.每个Chamber做成可配，默认PMA Venus，PMB Kepler2300
|
1 year ago |
|
lixiang
|
de406b964e
1.添加EFEM等ui界面
|
1 year ago |
 sangwq
|
5b037046f9
Add TM/LL modules.
|
2 years ago |
|
sangwq
|
bf48d9b6c5
AIRSYS CHILLER AND GAS VERIFICATION
|
2 years ago |
