 lixiang
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031a4236bf
1.添加TMP Water Flow与Lid Water Flow 报警
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1 month ago |
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lixiang
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54c8557dd6
调度优化
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2 months ago |
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lixiang
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f92e6abb17
1.添加Kepler2300 功能代码
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2 months ago |
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lixiang
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6ec37ea42c
1.与Venus分开，删除冗余代码
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3 months ago |
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lixiang
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6447434c5b
Venus代码删除
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3 months ago |
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lixiang
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1931fc55d3
1.根据长鑫要求Process Hietory界面添加eap提供的wafeid与lottype信息
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4 months ago |
 zhouhr
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dba64f7240
1. add the driver of SunWayVPA && the item in config/setmentity
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5 months ago |
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zhouhr
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b6309f712c
upload for Venus SE/DE
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5 months ago |
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lixiang
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ca702b093b
1.alarm List 收集到300+条，并添加到程序里
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7 months ago |
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lixiang
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33d0cd73dd
1.修复Pump Counter 显示错误bug
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8 months ago |
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zhouhr
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7a07ffa5ca
1. add SignalTower for Venus System by VenusSignalTower.xml
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9 months ago |
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zhouhr
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dd99f38e54
change the system by configtype in App.config in RT,Simulator && change the temp by chillertype in VenusDE
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9 months ago |
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zhouhr
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253fcb8be2
add CassetteArrive,CurrentSlot in UI,RT,Simulator
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10 months ago |
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lixiang
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2136e3b838
1.分开kepler与Venus 漏气检测ui，删除多余代码
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10 months ago |
 sangwq
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75b6c4548e
submit new venus routing algorithm.
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10 months ago |
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zhouhr
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0bea20360b
add LeakCheckRoutine in DE,VCE && add online for TM,VCE && fix bug in PM-PartialPressure && add LP in VCE && add sensor in VCE from TM
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10 months ago |
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lixiang
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5a4c70257b
1.Recipe 添加给eap recipe的内容
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10 months ago |
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zhouhr
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8cf03142ec
Add the PreClean,PostClean in SequenceInfo && Add DESequenceFormat.xml for Sequence && Add Venus DETM IO && fix VCEA pump Open in UI
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10 months ago |
 hecl
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0a2d5ac547
Venus DE TM simulator add
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11 months ago |
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zhouhr
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13460815b8
add PM ALARM_Notify while PM sensor Alarm && add TMBase for SETM&&DETM && add HongHuDETM For DE && fix some bugs in DETMUI
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11 months ago |
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zhouhr
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662fb997fa
add DETMOperationView in UI
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11 months ago |
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zhouhr
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d95b8c7876
cancel Open PVN22 in SE,DE && add VenusVentRoutine && fix the bug in GasBoxLeakCheck && Change Logic in pumpdown&Vent in SE,DE
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11 months ago |
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lixiang
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17ae6db63c
kepler2200/Kepler2300 添加FDC 功能
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11 months ago |
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lixiang
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75dbbd4da8
添加KeplerSignaltower功能
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11 months ago |
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zhouhr
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12fa756895
1. SETM will be Init while While SETM Abort Homing
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11 months ago |
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lixiang
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4634f3f91a
1。设置log最大500M，超出分文件（解决文件太大，log打不开）
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1 year ago |
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hecl
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0b8a98a845
IoDevice IoMagnet Add
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1 year ago |
|
lixiang
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d35b997884
1.优化RevtechMatch状态机
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1 year ago |
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lixiang
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3ac2e3bc3a
1.删除/注释 PMEntity 里面关于 LoadLock 的代码（Venus样机独有功能）
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1 year ago |
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lixiang
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6bbe2e529b
1.删除或注释 Venus ChamberType
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1 year ago |
