 zhouhr
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b9a935138d
add vpa vce simulator && update honghuvce driver,SETMEntity,seTMEntity pick place home routine && update VenusSEoverviewmodel......
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2 years ago |
|
zhouhr
|
4e5194bce2
add Analysis of EFEM Hardware Error Codes && Monitor of Current Application Resources
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2 years ago |
 sangwq
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501997ac38
TM/EFEM robot single arm option.
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2 years ago |
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sangwq
|
c223835b1e
enhance AutoCycle module.
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2 years ago |
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sangwq
|
8f9b95ae8f
Develop transfer cycle.
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2 years ago |
 yangdb
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045eae5c75
1.sequence和recipe修改日志输出格式
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2 years ago |
 Intern01
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23c59d3c86
1.完成FA模块的功能开发
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2 years ago |
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sangwq
|
f211c4242f
Efem module raw design.
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2 years ago |
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sangwq
|
ed992dd631
Enhance the Log Info
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2 years ago |
|
sangwq
|
44ec74603f
TM Transfer
|
2 years ago |
|
sangwq
|
bdee4a05ba
TM Robot Pick/Place/Swap simulation ready.
|
2 years ago |
 lixiang
|
f48943cfd1
解决冲突
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2 years ago |
|
lixiang
|
b6c2517c51
1.添加加热功能
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2 years ago |
|
sangwq
|
5b037046f9
Add TM/LL modules.
|
2 years ago |
|
lixiang
|
7a6556869f
1.整理主界面UI
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2 years ago |
|
sangwq
|
096c873956
Sequence SPEC update.
|
2 years ago |
|
sangwq
|
46261ca338
enhance wafer manager.
|
2 years ago |
|
sangwq
|
c4864f5546
debug gas verification.
|
2 years ago |
|
sangwq
|
2b930e56b9
Log output for exception.
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2 years ago |
|
sangwq
|
4e8a55f733
Endpoint Module.
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2 years ago |
|
sangwq
|
d8e5f1dc2c
2022 last update
|
2 years ago |
|
sangwq
|
0606b882bc
process module 1215
|
2 years ago |
|
sangwq
|
630c7b7548
Wafer transfer routine done.
|
2 years ago |
|
sangwq
|
af96d139ff
2022年11月24日 提交 RT 部分更改
|
2 years ago |
|
sangwq
|
8f2e8686aa
VenusDevice.cs
|
3 years ago |
