 lixiang
|
6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
|
il y a 1 an |
|
lixiang
|
bdcf0556c9
1.将kepler2200与其它项目配置文件分开
|
il y a 1 an |
|
lixiang
|
68b4ba9640
1.添加mtorr与Pa切换功能
|
il y a 1 an |
 hecl
|
db7e4fc9d5
PMProcessRoutine naming conventions & Lot id record adjustment
|
il y a 1 an |
|
hecl
|
2aa8eecc79
Enhancement of PMProcessRoutine recipe processing flow
|
il y a 1 an |
|
lixiang
|
fd2d6f9a5c
解决冲突
|
il y a 1 an |
|
hecl
|
091efd8f64
1.enhance PMdataRecord about waferstatus update
|
il y a 1 an |
|
hecl
|
eb71335c9e
1.VenusDE UI Viewmodel update and fix pipelines switch bugs
|
il y a 1 an |
|
lixiang
|
15742217b9
添加工艺结束流气与关GasFinal阀中间添加1s延时
|
il y a 1 an |
|
lixiang
|
f8026cadbc
控压结束动作bug修复
|
il y a 1 an |
|
lixiang
|
967f6b6b9c
添加控压结束，保持一秒流气功能
|
il y a 1 an |
 chenkui
|
44fc6989ef
1、Remove FabConnect dll file;
|
il y a 1 an |
|
lixiang
|
6d7ee9b8a3
1.根据新版kepler2200A IO跟新kepler2200A PM功能
|
il y a 1 an |
|
lixiang
|
c48ba3a928
添加初版kepler2200A Pick/Place功能（PLC点位未跟新）
|
il y a 1 an |
|
hecl
|
7e0a676b69
Improve datalog performance
|
il y a 1 an |
|
lixiang
|
c457973fa2
1.添加Revtech Match
|
il y a 1 an |
|
lixiang
|
ab095ba2a8
修复钟摆阀状态错误bug
|
il y a 1 an |
|
lixiang
|
9e1de0e343
1.run recipe 参数bool改recipetype
|
il y a 1 an |
 sangwq
|
bc21537c54
Clean Job
|
il y a 1 an |
|
lixiang
|
f0c8f8caa5
解决pm界面不能run recipe bug
|
il y a 1 an |
|
lixiang
|
f53a5428e6
1.将rt向ui传递robot状态放在线程安全队列，避免数据包丢失
|
il y a 1 an |
|
sangwq
|
b4c441532d
Clean Recipe functions, include IdleClean/PreJobClean/WTWJobClean/PostJobClean.
|
il y a 1 an |
|
lixiang
|
a2426eb90b
Recipe 添加bias step ramp设值功能
|
il y a 1 an |
 Intern01
|
81bc054dc3
fix bugs
|
il y a 1 an |
|
Intern01
|
dfc9174ac8
VenusSE TM PM Simulator Update
|
il y a 1 an |
|
sangwq
|
03063bae6a
Enhance the routine framework.
|
il y a 1 an |
|
lixiang
|
5139f41e19
添加PM Abort 下拉菜单功能
|
il y a 1 an |
|
lixiang
|
edb5ad6960
1.添加数据分析 Recipe step功能
|
il y a 1 an |
|
Intern01
|
4d950d1f31
Fix some bugs about PM process data
|
il y a 1 an |
|
lixiang
|
7ca9f5b9cf
修复TM跑片bug
|
il y a 1 an |
