 zhouhr
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3aee4d6673
1. Add the function of StatsDataManager in UI,RT
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9 months ago |
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zhouhr
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dd99f38e54
change the system by configtype in App.config in RT,Simulator && change the temp by chillertype in VenusDE
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10 months ago |
 lixiang
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2136e3b838
1.分开kepler与Venus 漏气检测ui，删除多余代码
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10 months ago |
 hecl
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c1ae6b6ea1
1.Fix Chamber DE recipe process bugs
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10 months ago |
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hecl
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0f361d7301
1.Fix SETM robot ArmExtend bugs
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11 months ago |
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hecl
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996eacc709
VenusDE recipe tolerance enhance
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11 months ago |
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lixiang
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3e00375ce8
1.FDC代码逻辑移到PricessDefine
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11 months ago |
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zhouhr
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a0f20d03ac
add ChillerCheck and Interval to 1s && SE DE Chamber can operate TurboPump freely && fix the bug in GasLeakCheck && close PVN22 after PMPumpDown
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1 year ago |
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hecl
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9d28f8ee7d
1.Add Tru match
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1 year ago |
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hecl
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b3a13fc6c7
1.IoMagnet device Logical supplement
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1 year ago |
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hecl
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68754c24af
1.add venuse SE/DE turbopump&pendulum interlock
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1 year ago |
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hecl
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c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
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1 year ago |
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lixiang
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0f0650b80f
1.PM 界面 run recipe 变为手动模式
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1 year ago |
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hecl
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2ffdf6e535
1Venus DE LinerDoor update
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1 year ago |
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hecl
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d331213da1
1.SETM Pressure Control update
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1 year ago |
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lixiang
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2cbab729fb
添加小标题 home/online/offineInclude/Exclude功能
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1 year ago |
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hecl
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f9d4a74265
1.Venus DE/SE Gasverification add missing pipes
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1 year ago |
|
hecl
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4c8cdc5b4a
1.Update Venus SE IO
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1 year ago |
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hecl
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dbe33e8d29
Venus DE ui&viewmodel update
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1 year ago |
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zhouhr
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136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
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1 year ago |
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hecl
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9de8ce9b11
Venus SE UI &&Venus DE pump,purge,start turbo routine update
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1 year ago |
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zhouhr
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984e634945
1. Add check before Open VCE Outer Door based on ATM sensor and OutDoorOpenPressure
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1 year ago |
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hecl
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8d8b960858
Venus DE chamber UI change && Venus SE simulator update
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1 year ago |
|
zhouhr
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9d9b666ea4
Venus SE Update
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1 year ago |
|
lixiang
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bdcf0556c9
1.将kepler2200与其它项目配置文件分开
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1 year ago |
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lixiang
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 year ago |
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zhouhr
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57607fb800
add IsHome =>false when error happened in driver of HongHu Robot && Change storage unit from GB to MB in ResourceMonitor
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1 year ago |
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zhouhr
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e187642592
commit Venus SE TM IO and DeviceModel&& PM view.
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1 year ago |
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zhouhr
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3e18a3a534
Add compatibility for VenusSE in Process,GasFlowRoutine && add More Gas define in config for VenusSE PM && fix bug in IoDefine
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1 year ago |
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zhouhr
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904ca94945
fix bug in VenusSE PM valve.
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1 year ago |
