 sangwq
|
72419fe36a
enhance throughput and skip repeat loadlock pumping/venting.
|
9 months ago |
|
sangwq
|
a17bb0b227
keep on enhance throughput.
|
9 months ago |
|
sangwq
|
8cb06f14db
fix routing new wafer algorithm bug and add throughput trace log.
|
9 months ago |
|
sangwq
|
02266cbd46
optimize routing algorithm.
|
9 months ago |
|
sangwq
|
5e8f478558
temporary change avoiding blocking issue.
|
9 months ago |
|
sangwq
|
51dd2374a5
temporary change for avoiding blocking issue.
|
9 months ago |
|
sangwq
|
67703ea413
enhance routing algorithm.
|
9 months ago |
|
sangwq
|
5014ced260
enhance the routing algorithm.
|
9 months ago |
|
sangwq
|
9d0da84ad2
added cooling safety check.
|
9 months ago |
 chenkui
|
ec9cc202de
fiexd host connected equipment,after equipment disable EAP FaEnable ,system can not reenable eap
|
9 months ago |
|
sangwq
|
c7ca9fa97d
Keep on enhance routing algorithm.
|
9 months ago |
|
sangwq
|
6898a40b85
fix a routing bug.
|
9 months ago |
|
sangwq
|
970b052f18
keep on enhance throughput.
|
9 months ago |
|
sangwq
|
5687e44ebc
Enhance routing algorithm.
|
9 months ago |
|
sangwq
|
3d62905adf
cycle number setpoint bug.
|
9 months ago |
|
sangwq
|
0c9d2dbd96
New routing algorithm for cooling function.
|
9 months ago |
 lixiang
|
ced69ea3b9
新版本Recioeview界面开发
|
9 months ago |
|
lixiang
|
652daaa81a
cycle uncheck bug修复
|
9 months ago |
|
lixiang
|
df2593530e
1.提交cycle功能
|
9 months ago |
|
lixiang
|
401ccfc861
1.修复TM控压不稳bug，LL Vent未计时关闭原因
|
9 months ago |
|
sangwq
|
5163d9153b
Fix the double place to lp bug while destinations are different loadports.
|
9 months ago |
|
sangwq
|
a81c73cdbf
Enhance Venus routing algorithm for clean task.
|
9 months ago |
|
sangwq
|
ec6ba70d8e
Parallel routing algorithm for kepler/venus.
|
9 months ago |
|
sangwq
|
5469baaa63
Parallel cycle mode
|
9 months ago |
 zhouhr
|
7a07ffa5ca
1. add SignalTower for Venus System by VenusSignalTower.xml
|
9 months ago |
|
lixiang
|
465f0690e7
Cooling功能bug修复
|
9 months ago |
|
lixiang
|
9fdde379d4
cooling加条件限制
|
9 months ago |
|
lixiang
|
5ce110574e
1，添加cooling功能
|
9 months ago |
|
sangwq
|
8a8ff0ced1
Fixed the cycle blocking bug with one wafer per cycle.
|
9 months ago |
 kuangzl
|
eaf2ce039b
Added PMChamberLabel display for VenusDE and VenusSE.
|
10 months ago |
