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Autors SHA1 Ziņojums Datums
  lixiang 465f0690e7 Cooling功能bug修复 10 mēneši atpakaļ
  lixiang 5ce110574e 1,添加cooling功能 10 mēneši atpakaļ
  lixiang 2136e3b838 1.分开kepler与Venus 漏气检测ui,删除多余代码 11 mēneši atpakaļ
  lixiang 9163903164 Kepler2200优化 11 mēneši atpakaļ
  lixiang ecd991d2f4 1.修复kepler 气缸开关信号只读on或者off bug 1 gadu atpakaļ
  lixiang 464c53cd94 1.Datalog添加高温Haeter开关显示 1 gadu atpakaļ
  lixiang d938a9e54c PM/TM swap pick 开门前加压力wait 1 gadu atpakaļ
  lixiang 608cf43d67 1.做工艺前pump down 根据底压确定是否执行 1 gadu atpakaļ
  lixiang d33079596b 1.优化新版跑片动画 1 gadu atpakaļ
  zhouhr b0e5581d4e delete some item in SE Config && add WallChiller in DE && add ConfigItem for pump check ForelinePressure in every chambertype 1 gadu atpakaļ
  lixiang caba8d94c6 Duplicated Wafer UI显示 1 gadu atpakaļ
  lixiang 552d60ca99 1.Stable与Tolerance 功能优化 1 gadu atpakaļ
  lixiang f03139a580 1.应tps需求添加,VenusSE工艺结束,PM主界面信息保存 1 gadu atpakaļ
  sangwq 2a6a20fefc fix the wrong position for singleArm Option definition while upper in lower out. 1 gadu atpakaļ
  sangwq 746ece5800 restore System.Name configure item 1 gadu atpakaļ
  sangwq a05e9eaa1b Loadlock/TM Robot slot In/Out Options. 1 gadu atpakaļ
  lixiang 87f1121180 1.Recipe UI 界面Name优化 1 gadu atpakaļ
  lixiang d35b997884 1.优化RevtechMatch状态机 1 gadu atpakaļ
  lixiang 6bbe2e529b 1.删除或注释 Venus ChamberType 1 gadu atpakaļ
  lixiang 0f0650b80f 1.PM 界面 run recipe 变为手动模式 1 gadu atpakaļ
  chenkui 63d58afa42 1、SecsGem增加了UTF-8编码的支持; 1 gadu atpakaļ
  chenkui 587ffe27b5 1、配置文件中增加了FA.Encoding 1 gadu atpakaļ
  lixiang 9e14bbee6a 1.由于PM种类变多,且分配置,PM 加载device 功能重写 1 gadu atpakaļ
  lixiang b2406d6f78 1.添加signalTonwer ui界面 1 gadu atpakaļ
  lixiang 1929a3510b 1.新版ui界面开发 1 gadu atpakaļ
  lixiang 7ff42d4eca 1.添加 Process 切换step Match/BiasMatch设置值 offset功能,c1/c2小于offset不设置 1 gadu atpakaļ
  lixiang 6d6f659b77 1.Kepler2200 TM/PM控大压力10Pa,添加工艺结束,等待压力稳定(TM/PM压差满足要求)TM再Pick功能 1 gadu atpakaļ
  lixiang 8b2a01fcc3 kepler2200配置文件也添加IsEnableEthercat 1 gadu atpakaļ
  lixiang ee26035034 1.添加Ethercat 励兆 Match DeviceData 1 gadu atpakaļ
  lixiang bdcf0556c9 1.将kepler2200与其它项目配置文件分开 1 gadu atpakaļ