 lixiang
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b253c8fadd
1.添加旋转动画
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1 gadu atpakaļ |
|
lixiang
|
5139f41e19
添加PM Abort 下拉菜单功能
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1 gadu atpakaļ |
|
lixiang
|
5f00a42d13
kepler2200A 添加 IOHighTemperatureHeater驱动，并添加模拟器与UI界面功能
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1 gadu atpakaļ |
|
lixiang
|
edb5ad6960
1.添加数据分析 Recipe step功能
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1 gadu atpakaļ |
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lixiang
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b1e6a9ce63
bug提交
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1 gadu atpakaļ |
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lixiang
|
ad6fa7b5dc
1.添加chamber界面创建wafer，开关门功能
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1 gadu atpakaļ |
 Intern01
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987f0abae5
1.Slove TuroN2Flow don't show problem
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1 gadu atpakaļ |
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lixiang
|
76a22f462f
1.根据tps提供sequence 添加控压功能
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1 gadu atpakaļ |
|
lixiang
|
124b11b9f3
1.kepler2300 添加三个chiller功能（模拟器功能暂无）
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1 gadu atpakaļ |
 zhouhr
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bcc9d2faf8
1、Chamber add the waferID
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1 gadu atpakaļ |
|
lixiang
|
708d655cae
1.将Kepler/Venus DeviceModel里面的ProcessGauge与PressureGauge重新定义
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1 gadu atpakaļ |
|
zhouhr
|
296cd4b8a4
1、recipe页面chuck、dechuck选项名称缩略并设置最大最小长度
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1 gadu atpakaļ |
|
lixiang
|
cb91599d02
修复recipe Ui信息显示
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1 gadu atpakaļ |
|
Intern01
|
41052afc3b
recipeviewmodel uodate && simulator update
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1 gadu atpakaļ |
|
lixiang
|
b6acfe2e29
优化TM leak check功能
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1 gadu atpakaļ |
|
lixiang
|
f3bd6b016b
添加部分efem功能
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1 gadu atpakaļ |
|
lixiang
|
bdec2c0d74
1.修改TM robot模拟器
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1 gadu atpakaļ |
|
lixiang
|
a5813eb09d
1.修改chamber wafer样式
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1 gadu atpakaļ |
|
lixiang
|
a4b75ecb2e
1.每个Chamber做成可配，默认PMA Venus，PMB Kepler2300
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1 gadu atpakaļ |
