 zhouhr
|
586b0de7a3
修改alignroutine、AdTecRF、DBModel
|
1 year ago |
 lixiang
|
546436c2c7
模拟器读取chamber bug修改
|
1 year ago |
|
lixiang
|
7fe847dfd8
1.分开Venus/Kepler OverView界面，之前公用一个Overview界面
|
1 year ago |
|
lixiang
|
de406b964e
1.添加EFEM等ui界面
|
1 year ago |
|
lixiang
|
a48b743e88
1.完成PartialPressure功能
|
2 years ago |
|
lixiang
|
e867b47d0c
1.添加VAT VATPerformance和PartialPressure界面及数据对比图标
|
2 years ago |
 sangwq
|
5b037046f9
Add TM/LL modules.
|
2 years ago |
|
lixiang
|
cc17390336
Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/Venus
|
2 years ago |
|
sangwq
|
096c873956
Sequence SPEC update.
|
2 years ago |
|
lixiang
|
fdec3cda1a
现场提交
|
2 years ago |
|
lixiang
|
e30c3e7c9c
现场调试 ，添加match c1/c2下发功能
|
2 years ago |
|
lixiang
|
d56749cbf3
合并代码
|
2 years ago |
|
sangwq
|
57661c7f78
adtech
|
2 years ago |
|
sangwq
|
3e5adf7db8
update rf match adtech.
|
2 years ago |
|
sangwq
|
75710d35d8
RF Match.
|
2 years ago |
|
sangwq
|
2b930e56b9
Log output for exception.
|
2 years ago |
|
sangwq
|
3222fa143a
Process module and Interlock .
|
2 years ago |
|
sangwq
|
0606b882bc
process module 1215
|
2 years ago |
|
sangwq
|
630c7b7548
Wafer transfer routine done.
|
2 years ago |
|
sangwq
|
af96d139ff
2022年11月24日 提交 RT 部分更改
|
2 years ago |
|
lixiang
|
896c7407de
优化log功能
|
2 years ago |
|
sangwq
|
9760d40cf7
port simulator
|
2 years ago |
|
sangwq
|
53e362a33e
update
|
2 years ago |
|
sangwq
|
3cad102221
更新 RT
|
2 years ago |
