update rf match adtech.

Venus/Framework/Common/Device/Bases/RfMatchBase.cs

@@ -210,7 +210,7 @@ namespace MECF.Framework.Common.Device.Bases
             TunePosition2 = c2;
         }
 
-        public bool SetMatchMode(string mode, out string reason)
+        public virtual bool SetMatchMode(EnumRfMatchTuneMode enumRfMatchTuneMode, out string reason)
         {
             reason = string.Empty;
             return true;

Venus/Venus_RT/Devices/AdTecRF.cs

@@ -752,7 +752,7 @@ namespace Venus_RT.Devices
 
             OP.Subscribe($"{Module}.{Name}.{AITRfOperation.SetMatchProcessMode}", (out string reason, int time, object[] param) =>
             {
-                SetMatchMode((string)param[0], out reason);
+                SetMatchMode((string)param[0] == "Auto" ? EnumRfMatchTuneMode.Auto : EnumRfMatchTuneMode.Manual, out reason);
                 return true;
             });
 
@@ -794,15 +794,15 @@ namespace Venus_RT.Devices
         /// <param name="c2"></param>
         public override void SetMatchPosition(float c1, float c2, out string reason)
         {
-            //base.SetMatchPosition(c1, c2, out reason);
+            base.SetMatchPosition(c1, c2, out reason);
 
-            ////this.SetWorkMode(EnumRfMatchTuneMode.Manual);
-            //this.SetPosition(c1, c2);
-            ////this.SetPresetMemory(0);
-            ////this.SetWorkMode(EnumRfMatchTuneMode.Auto);
+            this.SetWorkMode(EnumRfMatchTuneMode.Manual);
+            this.SetPosition(c1, c2);
+            this.SetPresetMemory(0);
+            this.SetWorkMode(EnumRfMatchTuneMode.Auto);
 
-            //TunePosition1 = c1;
-            //TunePosition2 = c2;
+            TunePosition1 = c1;
+            TunePosition2 = c2;
             reason = "";
         }
 
@@ -875,6 +875,14 @@ namespace Venus_RT.Devices
             this.SendCmd(cmd);
         }
 
+        public override bool SetMatchMode(EnumRfMatchTuneMode enumRfMatchTuneMode, out string reason)
+        {
+            reason = string.Empty;
+            SetWorkMode(enumRfMatchTuneMode);
+
+            return true;
+        }
+
         private void SetWorkMode(EnumRfMatchTuneMode mode)
         {
             this.SendCmd(mode == EnumRfMatchTuneMode.Auto ? AdTecMatchMessage.AUTO :

Venus/Venus_RT/Devices/ESC5HighVoltage.cs

@@ -87,7 +87,6 @@ namespace Venus_RT.Devices
         };
 
         private readonly int _readInterval = 1000;
-        private readonly int _readTimeout = 5000;
         private readonly AsyncSerialPort _serial;
         private Stopwatch _queryWatch = new Stopwatch();
         private int _opFlag = 0;
@@ -176,7 +175,7 @@ namespace Venus_RT.Devices
                         if (int.TryParse(obj.Substring(5, 4), out nData))
                         {
                             OutputVoltage = nData;
-                            LOG.Write(eEvent.EV_DEVICE_INFO, Module, $" HV OutputVoltage: {OutputVoltage}");
+                            //LOG.Write(eEvent.EV_DEVICE_INFO, Module, $" HV OutputVoltage: {OutputVoltage}");
                         }
                         break;
                 }
@@ -263,7 +262,7 @@ namespace Venus_RT.Devices
         public bool SetPowerOnOff(bool on)
         {
             var _chamber = DEVICE.GetDevice<JetPM>(Module);
-            if (on && !_chamber.CheckGeneratorAndHVInterlock(VenusDevice.Rf))
+            if (on && !_chamber.CheckGeneratorAndHVInterlock(VenusDevice.ESCHV))
             {
                 return false;
             }

Venus/Venus_RT/Devices/JetPM.cs

@@ -15,6 +15,8 @@ using Venus_RT.Devices.EPD;
 using Aitex.Core.RT.DataCenter;
 using Aitex.Core.RT.OperationCenter;
 
+using MECF.Framework.Common.SubstrateTrackings;
+
 namespace Venus_RT.Devices
 {
     enum ValveType
@@ -952,6 +954,12 @@ namespace Venus_RT.Devices
                 return false;
             }
 
+            if(WaferManager.Instance.CheckNoWafer(Module, 0))
+            {
+                LOG.Write(evt, Module, $"Cannot Power ON {deviceName} as {Module} has no wafer");
+                return false;
+            }
+
             return true;
         }