 lixiang
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477c4954ad
1.添加CarrierId
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11 月之前 |
|
lixiang
|
17c3d36a2b
Sequence 界面 PM REcipe 支持选择 Pre Clean/Post Clean/WTW Clean 和 Process Recipe
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11 月之前 |
|
lixiang
|
bfd7d2def6
手动添加冲突bug 代码
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11 月之前 |
|
lixiang
|
1c2b8b53bb
1.添加用户权限功能
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11 月之前 |
 sangwq
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87cdf166a0
restore the dispatcher version which been broken by source merge.
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11 月之前 |
|
sangwq
|
5b961e44db
fix blocking issue while no wafer waiting in LL.
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11 月之前 |
|
lixiang
|
fe62e9a11b
优化 Process History界面，添加分页，避免查询，内存飙升
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11 月之前 |
|
lixiang
|
2a29981f11
Merge branch 'master' of http://10.4.3.168:3000/JetPlasma/Venus
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11 月之前 |
 chenkui
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2241125f83
fixed EquipmentVariables.xml eventset cannot be empty
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11 月之前 |
|
lixiang
|
33d0cd73dd
1.修复Pump Counter 显示错误bug
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11 月之前 |
|
chenkui
|
b59880dc23
add EquipmentVariables.xml alarmId
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11 月之前 |
|
sangwq
|
9e65346638
Fixed the blocking bug after one control job abort and restart.
|
1 年之前 |
|
sangwq
|
679a0eb967
fix the blocking bug while In loadlock is empty.
|
1 年之前 |
|
sangwq
|
98cc9d6be7
Fixed the blocking bug after error PM restored.
|
1 年之前 |
|
sangwq
|
1f85177a1a
Manual return PM wafer function while error happen.
|
1 年之前 |
|
lixiang
|
74af7f21c4
冲突解决，合并代码
|
1 年之前 |
|
lixiang
|
b67769ec2c
ui优化
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1 年之前 |
 zhouhr
|
3838ce8c36
1. Change the logic of Reset RF/Pump/CustomItem count
|
1 年之前 |
|
zhouhr
|
3b9c2c346d
1. add missing item in SE/DE Sccfg
|
1 年之前 |
|
lixiang
|
65d80057c2
ui优化
|
1 年之前 |
|
zhouhr
|
3aee4d6673
1. Add the function of StatsDataManager in UI,RT
|
1 年之前 |
|
chenkui
|
4cf93bf193
补充了CreateJob中LotId项
|
1 年之前 |
|
sangwq
|
2a342e8e2a
fix runif typing bug.
|
1 年之前 |
|
sangwq
|
0af5bc1e75
throughput enhancement.
|
1 年之前 |
|
lixiang
|
13b51bff63
提交TM Vent配置文件报错gug
|
1 年之前 |
|
lixiang
|
a1cec725e5
修复TM Vent 配置文件报错bug
|
1 年之前 |
|
lixiang
|
99d939492e
1.加登出界面
|
1 年之前 |
|
sangwq
|
af4c050881
refresh throughput on real time with sequential mode.
|
1 年之前 |
|
sangwq
|
72419fe36a
enhance throughput and skip repeat loadlock pumping/venting.
|
1 年之前 |
|
sangwq
|
a17bb0b227
keep on enhance throughput.
|
1 年之前 |
