add EquipmentVariables.xml alarmId

Venus/Venus_RT/Config/EquipmentVariables.xml

@@ -3071,25 +3071,17 @@
     <DataVariable id="10002" valueType="I4" logicalName="PortTransferState" eventTrigger="" />
   </DataVariables>
   <AlarmVariables>
-    <AlarmVariable id="10101001" logicalName="System.EFEM.AirErrorForRobot" description="EFEM Robot Air Error" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="1000101" eventClear="2000101" />
-    <AlarmVariable id="10101002" logicalName="System.EFEM.DoorOpen" description="EFEM door open" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="1000101" eventClear="2000101" />
-    <AlarmVariable id="10101003" logicalName="System.EFEM.EmoAlarm" description="EFEM EMO error" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="1000101" eventClear="2000101" />
-    <AlarmVariable id="10101004" logicalName="System.EFEM.FFUAlarm" description="EFEM FFU Error" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="1000101" eventClear="2000101" />
-    <AlarmVariable id="10101005" logicalName="System.EFEM.IonizerAlarm" description="EFEM Ionizer Error" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="1000101" eventClear="2000101" />
-    <AlarmVariable id="10101006" logicalName="System.EFEM.IsMaintain" description="EFEM in Maintenance Mode, switch to online and turn key to auto" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="1000101" eventClear="2000101" />
-    <AlarmVariable id="10101007" logicalName="System.EFEM.CompressedAirPressureAlarm" description="EFEM Compressed Air Pressure Alarm" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="1000101" eventClear="2000101" />
-    <AlarmVariable id="10101008" logicalName="System.EFEM.DifferentialPressureSensorSetting1Alarm" description="EFEM Differential Pressure Sensor Setting1 Alarm" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="1000101" eventClear="2000101" />
-    <AlarmVariable id="10101009" logicalName="System.EFEM.DifferentialPressureSensorSetting2Alarm" description="EFEM Differential Pressure Sensor Setting2 Alarm" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="1000101" eventClear="2000101" />
-    <AlarmVariable id="10101010" logicalName="System.EFEM.DrivePowerAlarm" description="EFEM Drive Power Alarm" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="1000101" eventClear="2000101" />
-    <AlarmVariable id="10101011" logicalName="System.EFEM.FlowGaugeWarning" description="EFEM Flow Gauge Warning" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="1000101" eventClear="2000101" />
-    <AlarmVariable id="10101012" logicalName="System.EFEM.VacuumSourcePressureAlarm" description="EFEM Vacuum Source Pressure Alarm" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="1000101" eventClear="2000101" />
-    <AlarmVariable id="10101013" logicalName="System.EFEM.WaterLeakWarning" description="EFEM Water Leak Warning" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="1000101" eventClear="2000101" />
-    <AlarmVariable id="10202001" logicalName="System.io.CommunicationError" description="Can not Communication " alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="1000101" eventClear="2000101" />
-    <AlarmVariable id="10202002" logicalName="System.io.ConnectionError" description="Can not connect with " alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="1000101" eventClear="2000101" />
-    <AlarmVariable id="620101001" logicalName="PMA.io.CommunicationError" description="Can not Communication PMA" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="1006201" eventClear="2006201" />
-    <AlarmVariable id="620101002" logicalName="PMA.io.ConnectionError" description="Can not connect with PMA" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="1006201" eventClear="2006201" />
-    <AlarmVariable id="630101001" logicalName="PMB.io.CommunicationError" description="Can not Communication PMB" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="1006301" eventClear="2006301" />
-    <AlarmVariable id="630101002" logicalName="PMB.io.ConnectionError" description="Can not connect with PMB" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="1006301" eventClear="2006301" />
+    <AlarmVariable id="10101001" logicalName="ERR_MATCH" description="match报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="" eventClear="" />
+    <AlarmVariable id="10101002" logicalName="ERR_RF" description="RF 报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="" eventClear="" />
+    <AlarmVariable id="10101003" logicalName="ERR_PENDULUM_VALVE" description="钟摆阀报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="" eventClear="" />
+    <AlarmVariable id="10101004" logicalName="ERR_DEVICE_INFO" description="设备报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="" eventClear="" />
+    <AlarmVariable id="10101005" logicalName="ERR_DRY_PUMP" description="干泵报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="" eventClear="" />
+    <AlarmVariable id="10101006" logicalName="ERR_HighTemperatureHeater" description="Heater报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="" eventClear="" />
+    <AlarmVariable id="10101007" logicalName="ERR_PM_TOLERANCE" description="工艺过程中Tolerance 报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="" eventClear="" />
+    <AlarmVariable id="10101008" logicalName="ERR_PROCESS" description="PM process过程报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="" eventClear="" />
+    <AlarmVariable id="10101009" logicalName="ERR_ROUTINE_FAILED" description="routine 报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="" eventClear="" />
+    <AlarmVariable id="10101010" logicalName="ERR_RFBox" description="RF Box报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="" eventClear="" />
+    <AlarmVariable id="10101011" logicalName="ERR_TM_ROBOT" description="TM Robot报警" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="" eventClear="" />
   </AlarmVariables>
   <Reports>
     <Report id="1" logicalName="HostDefinedReport_1">