 zhouhr
|
56f7c900fe
add VenusSEPM class and IODefine && Set the pressure value in the simulation to always be no less than 0
|
2 years ago |
 lixiang
|
b5616b7378
解决冲突，合并代码
|
2 years ago |
|
zhouhr
|
efafd434f0
save only the last 200 entries in simulator's logs && add some key in UI
|
2 years ago |
|
zhouhr
|
a980a39acf
add read delay in IoCylinder && add unknown error codes with VPA driver && add VceEntity
|
2 years ago |
|
zhouhr
|
038e0b984a
1.Add LL pump preemptive lock
|
2 years ago |
|
lixiang
|
76a22f462f
1.根据tps提供sequence 添加控压功能
|
2 years ago |
 sangwq
|
ff17e9c447
develop autycylce/manualmove module.
|
2 years ago |
|
lixiang
|
b6acfe2e29
优化TM leak check功能
|
2 years ago |
|
lixiang
|
f9a02a739a
添加pmc/kepler2200
|
2 years ago |
 Intern01
|
aaff066e93
EFEM Align UI RT 更新
|
2 years ago |
|
sangwq
|
68c484e4c3
兼容去胶机使用的Endpoint.
|
2 years ago |
|
lixiang
|
bdec2c0d74
1.修改TM robot模拟器
|
2 years ago |
|
Intern01
|
c8473cb60c
1.增加Fa模块事件上报相关接口FaEvet，与recipejob,loadportjob事件上报接口
|
2 years ago |
|
lixiang
|
a4b75ecb2e
1.每个Chamber做成可配，默认PMA Venus，PMB Kepler2300
|
2 years ago |
|
lixiang
|
3a078d515d
1.修复ui灯闪烁错误bug
|
2 years ago |
|
lixiang
|
530ddcbae7
优化topview界面
|
2 years ago |
|
lixiang
|
8f80478982
1.添加IoSwitch
|
2 years ago |
|
sangwq
|
f211c4242f
Efem module raw design.
|
2 years ago |
|
lixiang
|
de406b964e
1.添加EFEM等ui界面
|
2 years ago |
|
lixiang
|
a48b743e88
1.完成PartialPressure功能
|
2 years ago |
|
sangwq
|
44ec74603f
TM Transfer
|
2 years ago |
|
sangwq
|
a54944a308
PM TM Wafer Transfer Ready.
|
2 years ago |
|
sangwq
|
bdee4a05ba
TM Robot Pick/Place/Swap simulation ready.
|
2 years ago |
|
sangwq
|
b8bd250b4e
TM/LL Pump/Vent/Purge done.
|
2 years ago |
|
sangwq
|
241a8a2f5d
UPDATE 20230324
|
2 years ago |
|
sangwq
|
e1226fdd9e
update for disable difference pressure checking under atm mode according electrical team request.
|
2 years ago |
|
sangwq
|
5b037046f9
Add TM/LL modules.
|
2 years ago |
|
lixiang
|
ffda76b488
修改rt与ui交互功能
|
2 years ago |
|
lixiang
|
a268651d10
1.添加configview和部分mfcverificationview
|
2 years ago |
|
sangwq
|
bf48d9b6c5
AIRSYS CHILLER AND GAS VERIFICATION
|
2 years ago |
