 lixiang
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1931fc55d3
1.根据长鑫要求Process Hietory界面添加eap提供的wafeid与lottype信息
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8 months ago |
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lixiang
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add331513f
1.WaferHistory与ProcessHistory 添加 Carrier ID，Process History 切recipe 保留原查询信息
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8 months ago |
 zhouhr
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b6309f712c
upload for Venus SE/DE
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8 months ago |
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lixiang
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7556c43a4c
1.Gas漏气检测结束ui界面不更新bug修复
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10 months ago |
 chenkui
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9ffd49dd2d
update pp-select object[] to string[] bug
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10 months ago |
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lixiang
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ca702b093b
1.alarm List 收集到300+条，并添加到程序里
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10 months ago |
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chenkui
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c7f9243ef5
add S1F11,S1F15,S1F17 and S2F29 command & add client connection log
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10 months ago |
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lixiang
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33d0cd73dd
1.修复Pump Counter 显示错误bug
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11 months ago |
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lixiang
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b67769ec2c
ui优化
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1 year ago |
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chenkui
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4cf93bf193
补充了CreateJob中LotId项
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1 year ago |
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lixiang
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652daaa81a
cycle uncheck bug修复
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1 year ago |
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zhouhr
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7a07ffa5ca
1. add SignalTower for Venus System by VenusSignalTower.xml
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1 year ago |
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lixiang
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5ce110574e
1，添加cooling功能
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1 year ago |
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chenkui
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83714d769e
add vce module SafeLoad/SafeUnload/Map function
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1 year ago |
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zhouhr
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afa8662437
Changed from VPA to Aligner1 && Removed PreClean, PostClean in SequenceInfo
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1 year ago |
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zhouhr
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dd99f38e54
change the system by configtype in App.config in RT,Simulator && change the temp by chillertype in VenusDE
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1 year ago |
 hecl
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1a56dd552c
fix bugs
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1 year ago |
|
hecl
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e2836bfbda
1.Chamber DE process enhance
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1 year ago |
|
zhouhr
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3c1ae4babb
add abort for VenusDE && fix bug in UI && add AbortJob,StopJob
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1 year ago |
 sangwq
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7bf784cc5a
New routing algorithm for Venus SE/DE system.
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1 year ago |
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sangwq
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2edb43d393
fix the crash issue.
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1 year ago |
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sangwq
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bcbd783654
avoid crash issue for temporary fix.
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1 year ago |
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lixiang
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608cf43d67
1.做工艺前pump down 根据底压确定是否执行
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1 year ago |
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zhouhr
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9b93f58d68
Add Venus DE OperationView && add the compatibility of the TM&VCE between SETM&DETM
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1 year ago |
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zhouhr
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13460815b8
add PM ALARM_Notify while PM sensor Alarm && add TMBase for SETM&&DETM && add HongHuDETM For DE && fix some bugs in DETMUI
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1 year ago |
|
hecl
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c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
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1 year ago |
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lixiang
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d4d56a3cf3
1.添加Recipe内部外部名称，chamberTYpe 比对
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1 year ago |
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sangwq
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6d393bb86d
new routing algorithm with prediction.
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1 year ago |
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chenkui
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587ffe27b5
1、配置文件中增加了FA.Encoding
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1 year ago |
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chenkui
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5cf3c54d79
1、RouteManager增加了StopJob,AbortJob等
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1 year ago |
