 zhouhr
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1b999083c8
add WaferTransfer for VenusSE && fix bug in VceControl as param is null && fix bug in Pick,Place as target slot is negative.
|
1 anno fa |
 sangwq
|
e61f018b66
Manual Return wafer while running cycle.
|
1 anno fa |
 lixiang
|
e511d1f387
1.添加PM控压功能
|
1 anno fa |
|
zhouhr
|
cc3f68a0f1
enhance the check in MoveWafer
|
1 anno fa |
|
zhouhr
|
5a2ac08f6f
fix bug in MoveWafer Dialog && SEMFPickRoutine
|
1 anno fa |
|
sangwq
|
faa496c2b0
fix a routing bug for single PM sequence.
|
1 anno fa |
|
lixiang
|
6910d4754e
代码合并
|
1 anno fa |
|
lixiang
|
12bf5aaba7
高温heater功能添加
|
1 anno fa |
|
zhouhr
|
187a5c453d
Kepler operation页面增加PMB、PMC、TM压力值和真空大气信号 去除MFVentRoutine结束后关闭N2valve
|
1 anno fa |
|
zhouhr
|
376ce10782
增加LOG模块中特定eEvent id触发委托函数 && 移除UI中触发PMError && add SE TM Cycle throughput && fix vcedoor not show
|
1 anno fa |
|
sangwq
|
88b91b4ea3
fix routing bugs.
|
1 anno fa |
|
sangwq
|
19499bd319
fix a routing bug.
|
1 anno fa |
|
zhouhr
|
3b204e2259
modify VCEControl's pic source to relative path
|
1 anno fa |
|
sangwq
|
0e0a0459a5
fix the slot exceeds limit bug.
|
1 anno fa |
|
lixiang
|
6d7ee9b8a3
1.根据新版kepler2200A IO跟新kepler2200A PM功能
|
1 anno fa |
 intern02
|
0dfd2f80f0
add VCE view in UI && add currentSlot for VceEntity while GotoSlot over && fix bug of SE SwapRoutine.
|
1 anno fa |
|
sangwq
|
73f0d306a7
Enhance routing algorithm.
|
1 anno fa |
|
zhouhr
|
a83b38ac11
Add SE VCE|TM FsmState in TopView && Fix bug of CycledWafer number in SE Cycle && Add VCE Goto slot in SwapRoutine
|
1 anno fa |
|
zhouhr
|
a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
|
1 anno fa |
 hecl
|
78c80a0896
fix bugs
|
2 anni fa |
|
lixiang
|
c48ba3a928
添加初版kepler2200A Pick/Place功能（PLC点位未跟新）
|
2 anni fa |
|
hecl
|
7e0a676b69
Improve datalog performance
|
2 anni fa |
|
sangwq
|
61173b6866
Added Auto Vent/Pump log for tracing trigger issue.
|
2 anni fa |
|
sangwq
|
22c9fb9a5c
Fixed the routing path blocked bug.
|
2 anni fa |
|
sangwq
|
4a783d7213
发现 (_atmMoveFinishTrig.Q) 未能捕捉到问题， 暂时没发现原因， 更改实现算法。
|
2 anni fa |
|
sangwq
|
b447d07d5a
fix list pointer exceeds limit bug.
|
2 anni fa |
|
sangwq
|
c3bef13a6e
Enhance Auto pump/vent algorithm.
|
2 anni fa |
|
lixiang
|
c457973fa2
1.添加Revtech Match
|
2 anni fa |
|
sangwq
|
91d10bde6f
Bypass Auto pump/vent functions while ATM mode.
|
2 anni fa |
|
sangwq
|
b3faba0e62
typing error.
|
2 anni fa |
