发现 (_atmMoveFinishTrig.Q) 未能捕捉到问题， 暂时没发现原因， 更改实现算法。

Venus/Venus_RT/Modules/AutoCycle.cs

@@ -2340,8 +2340,8 @@ namespace Venus_RT.Modules
                 }
             }
 
-            _atmMoveFinishTrig.CLK = _atmWaferTargets.Count == 0 && _efemRobot.RobotStatus != RState.Running;
-            if (_atmMoveFinishTrig.Q)
+            //_atmMoveFinishTrig.CLK = _atmWaferTargets.Count == 0 && _efemRobot.RobotStatus != RState.Running;
+            if (_atmWaferTargets.Count == 0 && _efemRobot.RobotStatus != RState.Running && _efemMovingItems.Count > 0)
             {
                 foreach (var item in _efemMovingItems)
                 {
@@ -2353,6 +2353,7 @@ namespace Venus_RT.Modules
 
                 //UpateSequenceStep(_efemMovingItems);
                 _efemMovingItems.Clear();
+                LOG.Write(eEvent.EV_ROUTER, ModuleName.System, $"All EFEM commands complete!");
             }
         }