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+ LOG.Write(eEvent.EV_EFEM_ROBOT, Module, $"NotifyLLDone() => {_targetModule}, Sequence Pattern{Singleton<RouteManager>.Instance.LLInOutPath}, unprocessed wafer:{waferStatus.unprocessed}, processed wafer: {waferStatus.processed},bAutoPump = {bAutoPump}, Config Option:{_autoPumpOptInWafer},{_autoPumpOptOutWafer}");
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