 hecl
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1a56dd552c
fix bugs
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10 月之前 |
|
hecl
|
e2836bfbda
1.Chamber DE process enhance
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10 月之前 |
|
hecl
|
c1ae6b6ea1
1.Fix Chamber DE recipe process bugs
|
11 月之前 |
 zhouhr
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7b69f42c04
fix the bug in DE-ReadyForPickStatus
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11 月之前 |
|
zhouhr
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d425906355
add Cassette arrive, leave, map with all empty or full in VCE's Simulator && Change the logic of control SlitDoor in PM && Change SE Pick Place Swap DoublePick for PM & VCE && fix some bug in View for Venus VCE && DE UI Design.
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11 月之前 |
 lixiang
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ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
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11 月之前 |
|
zhouhr
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0bea20360b
add LeakCheckRoutine in DE,VCE && add online for TM,VCE && fix bug in PM-PartialPressure && add LP in VCE && add sensor in VCE from TM
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11 月之前 |
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hecl
|
0f361d7301
1.Fix SETM robot ArmExtend bugs
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11 月之前 |
|
hecl
|
f814cf53a8
1.Add simulator read RF ConfigType function
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11 月之前 |
|
zhouhr
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9b93f58d68
Add Venus DE OperationView && add the compatibility of the TM&VCE between SETM&DETM
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11 月之前 |
|
hecl
|
aed602cdc9
1.Add Tru rf/match Reconnect function
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11 月之前 |
|
hecl
|
996eacc709
VenusDE recipe tolerance enhance
|
11 月之前 |
|
zhouhr
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13460815b8
add PM ALARM_Notify while PM sensor Alarm && add TMBase for SETM&&DETM && add HongHuDETM For DE && fix some bugs in DETMUI
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11 月之前 |
|
lixiang
|
3e00375ce8
1.FDC代码逻辑移到PricessDefine
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11 月之前 |
|
hecl
|
09a72490a8
1.enhance Tru match logical
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11 月之前 |
|
zhouhr
|
d95b8c7876
cancel Open PVN22 in SE,DE && add VenusVentRoutine && fix the bug in GasBoxLeakCheck && Change Logic in pumpdown&Vent in SE,DE
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11 月之前 |
|
hecl
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b7ebfa6adf
Add Tru match release stop mode command
|
1 年之前 |
|
zhouhr
|
16530979b1
DE pendulum set pressure/10 as the difference between SE and DE.
|
1 年之前 |
|
hecl
|
21d202af0e
Add VenusDE WallChiller UI & ViewModel
|
1 年之前 |
|
zhouhr
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b0e5581d4e
delete some item in SE Config && add WallChiller in DE && add ConfigItem for pump check ForelinePressure in every chambertype
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1 年之前 |
|
zhouhr
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cc436f1ac6
add DE shareChiller && add check items before PM Pump down.
|
1 年之前 |
|
hecl
|
fedcc95273
1.Venus DE process enhance
|
1 年之前 |
|
hecl
|
7fe748b93a
1.Add Venus DE processdefine content
|
1 年之前 |
|
hecl
|
f501000473
1.Fix Tru RF/match bugs
|
1 年之前 |
|
hecl
|
9d28f8ee7d
1.Add Tru match
|
1 年之前 |
|
hecl
|
b3a13fc6c7
1.IoMagnet device Logical supplement
|
1 年之前 |
|
lixiang
|
552d60ca99
1.Stable与Tolerance 功能优化
|
1 年之前 |
|
hecl
|
0b8a98a845
IoDevice IoMagnet Add
|
1 年之前 |
|
hecl
|
8b0b067448
Add chamber ISO valve status
|
1 年之前 |
|
hecl
|
68754c24af
1.add venuse SE/DE turbopump&pendulum interlock
|
1 年之前 |
