 sangwq
|
052baa3ed3
fix the clear error command confirm sequence problem and PM pressure bug.
|
2 years ago |
|
sangwq
|
8567277de8
typing error.
|
2 years ago |
|
sangwq
|
d89a4c81f9
Enhance Routing algorithm and simulator configure file path.
|
2 years ago |
 lixiang
|
d26cf018d7
修复自动计算c1c2值bug
|
2 years ago |
|
lixiang
|
649ac00032
添加rfmatch/biasrfmatch自动计算c1/c2功能
|
2 years ago |
|
lixiang
|
20cc441578
1.kepler2200 ui优化
|
2 years ago |
|
sangwq
|
271930f900
minor change.
|
2 years ago |
 zhouhr
|
4c7076a950
change FSM when EFEM receives the error message
|
2 years ago |
|
zhouhr
|
ef5f92cb47
Modify the out-of-bounds error caused by unknown EFEM errors
|
2 years ago |
|
zhouhr
|
4e5194bce2
add Analysis of EFEM Hardware Error Codes && Monitor of Current Application Resources
|
2 years ago |
|
sangwq
|
3e445737a6
Align functions.
|
2 years ago |
|
sangwq
|
d708f4c76a
minor change for simulator.
|
2 years ago |
 Intern01
|
9c618d6866
DataHistory&&ProcessDataHistory update
|
2 years ago |
|
lixiang
|
3f6c65223f
1.删除部分不需要插入数据库数据
|
2 years ago |
|
zhouhr
|
56f7c900fe
add VenusSEPM class and IODefine && Set the pressure value in the simulation to always be no less than 0
|
2 years ago |
|
Intern01
|
e2dc10679e
Solve conflict
|
2 years ago |
|
Intern01
|
33f3e3a72e
1.complete parameters writing in pm routine
|
2 years ago |
|
lixiang
|
9c33424896
解决冲突
|
2 years ago |
|
lixiang
|
b5616b7378
解决冲突，合并代码
|
2 years ago |
|
zhouhr
|
4dc245305f
change ValveType
|
2 years ago |
|
lixiang
|
3f2b687dbc
1.数据库加入Run Recipe失败数据
|
2 years ago |
|
zhouhr
|
efafd434f0
save only the last 200 entries in simulator's logs && add some key in UI
|
2 years ago |
|
Intern01
|
171eef8acc
Add to chart@@to slot switch page function
|
2 years ago |
|
lixiang
|
ad6fa7b5dc
1.添加chamber界面创建wafer，开关门功能
|
2 years ago |
|
lixiang
|
cdf41d68fe
1.优化数据库实时数据插入功能，恢复数据查询/实时数据查看等功能
|
2 years ago |
|
sangwq
|
501997ac38
TM/EFEM robot single arm option.
|
2 years ago |
|
lixiang
|
379fe79c7b
1.根据tps sequence修改tm/ll vent/pump等功能
|
2 years ago |
|
zhouhr
|
c71aa92a49
add time on Topview
|
2 years ago |
|
zhouhr
|
4ed3a26b1b
add Combox Style for TM/LoadLock Operation
|
2 years ago |
|
zhouhr
|
f11765e064
Add TMHome abort
|
2 years ago |
