minor change.

Venus/Framework/Common/SubstrateTrackings/WaferInfo.cs

@@ -424,12 +424,14 @@ namespace Aitex.Core.Common
                 {
 					newValue.ProcessJob.Sequence = new SequenceInfo(source.ProcessJob.Sequence.Name);
 					newValue.ProcessJob.Sequence.InnerId = source.ProcessJob.Sequence.InnerId;
+					newValue.ProcessJob.Sequence.ThicknessType = source.ProcessJob.Sequence.ThicknessType;
 					foreach(var step in source.ProcessJob.Sequence.Steps)
                     {
 						var newStep = new SequenceStepInfo();
 						newStep.AlignAngle = step.AlignAngle;
 						newStep.StepModules = new List<MECF.Framework.Common.Equipment.ModuleName>(step.StepModules.ToArray());
-						newStep.StepParameter = new Dictionary<string, object>(step.StepParameter);
+						newStep.StepParameter = step.StepParameter.ToDictionary(entry => entry.Key, entry => entry.Value);
+
 						newValue.ProcessJob.Sequence.Steps.Add(newStep);
                     }
                 }

Venus/Venus_RT/Devices/JetKepler2300PM.cs

@@ -766,7 +766,7 @@ namespace Venus_RT.Devices
                     double maxPressureDifference = SC.GetValue<double>("System.PMTMMaxPressureDifference");
                     if (Math.Abs(TMPressure - ChamberPressure) > maxPressureDifference)
                     {
-                        reason = $"{Module} and TM pressure difference exceeds the max limit {maxPressureDifference}";
+                        reason = $"{Module} and TM pressure difference exceeds the max limit {maxPressureDifference}, TMPressure:{TMPressure}, {Module}Pressure:{ChamberPressure}";
                         LOG.Write(eEvent.ERR_DEVICE_INFO, Module, reason);
                         return false;
                     }

Venus/Venus_RT/Modules/AutoCycle.cs

@@ -2045,7 +2045,7 @@ namespace Venus_RT.Modules
             if (Wafer.IsEmpty || Wafer.ProcessJob == null || Wafer.ProcessJob.Sequence == null)
                 return Wafer;
 
-            var cloneWafer = SerializeHelper.DeepCopyJson(Wafer);
+            var cloneWafer = Wafer.Clone(Wafer);
 
             if (Wafer.IsEmpty || Wafer.ProcessJob == null || Wafer.ProcessJob.Sequence == null)
                 return Wafer;