 sangwq
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03770198be
Skip auto Vent/pump while ATM mode.
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1 year ago |
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sangwq
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5d9198550f
Enhance the throughput with align sequence.
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1 year ago |
 zhouhr
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8cf03142ec
Add the PreClean,PostClean in SequenceInfo && Add DESequenceFormat.xml for Sequence && Add Venus DETM IO && fix VCEA pump Open in UI
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1 year ago |
 lixiang
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ed7c537c19
1.添加TM/LLA/LLB 平衡阀
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1 year ago |
 hecl
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f814cf53a8
1.Add simulator read RF ConfigType function
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1 year ago |
|
lixiang
|
d33079596b
1.优化新版跑片动画
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1 year ago |
|
sangwq
|
54ed40c8b1
enhance kepler throughput
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1 year ago |
|
zhouhr
|
9b93f58d68
Add Venus DE OperationView && add the compatibility of the TM&VCE between SETM&DETM
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1 year ago |
|
sangwq
|
82703d4497
enhance throughput with loadlock delay.
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1 year ago |
|
hecl
|
aed602cdc9
1.Add Tru rf/match Reconnect function
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1 year ago |
|
hecl
|
0a2d5ac547
Venus DE TM simulator add
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1 year ago |
|
sangwq
|
57281fce55
Enhance throughput while not pass by aligner.
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1 year ago |
|
hecl
|
ca830385e4
Fix bug
|
1 year ago |
|
hecl
|
996eacc709
VenusDE recipe tolerance enhance
|
1 year ago |
|
zhouhr
|
13460815b8
add PM ALARM_Notify while PM sensor Alarm && add TMBase for SETM&&DETM && add HongHuDETM For DE && fix some bugs in DETMUI
|
1 year ago |
|
sangwq
|
f53fecc7bb
Enhance sequence aligner configurability
|
1 year ago |
|
lixiang
|
7513d2e586
TM View 添加wafer
|
1 year ago |
|
lixiang
|
8d613c7d1f
奈思UI 新版动画
|
1 year ago |
|
lixiang
|
6dc3e20037
添加Mfc calibration 流气后，等待钟摆阀完全关闭的step
|
1 year ago |
|
lixiang
|
3e00375ce8
1.FDC代码逻辑移到PricessDefine
|
1 year ago |
|
hecl
|
09a72490a8
1.enhance Tru match logical
|
1 year ago |
 intern02
|
df6a3ad304
upload Venus_MainPages.csproj and Venus_Themes.csproj.
|
1 year ago |
|
intern02
|
7d6765cd44
Added and uploaded VenusDETMViewModel.cs, VenusDETMView.xaml, VCEleft1.png, VCEright1.png, detm.png, DEVceA.xaml, DEVceB.xaml, and VenusDETM.xaml.
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1 year ago |
|
zhouhr
|
1d4d3733e5
fix the bug in DETMOperationView
|
1 year ago |
|
zhouhr
|
cc62abde94
fix some bug in DETMOperationView
|
1 year ago |
|
zhouhr
|
662fb997fa
add DETMOperationView in UI
|
1 year ago |
|
zhouhr
|
d95b8c7876
cancel Open PVN22 in SE,DE && add VenusVentRoutine && fix the bug in GasBoxLeakCheck && Change Logic in pumpdown&Vent in SE,DE
|
1 year ago |
|
hecl
|
b7ebfa6adf
Add Tru match release stop mode command
|
1 year ago |
|
sangwq
|
e806a46292
Enhance the EFEMM design for thread safe and throughput issues.
|
1 year ago |
|
sangwq
|
7a1faeac74
Redesign the EFEM module for thread safe issue.
|
1 year ago |
