 hecl
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996eacc709
VenusDE recipe tolerance enhance
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1 year ago |
 lixiang
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3e00375ce8
1.FDC代码逻辑移到PricessDefine
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1 year ago |
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hecl
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b7ebfa6adf
Add Tru match release stop mode command
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1 year ago |
 zhouhr
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a0f20d03ac
add ChillerCheck and Interval to 1s && SE DE Chamber can operate TurboPump freely && fix the bug in GasLeakCheck && close PVN22 after PMPumpDown
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1 year ago |
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hecl
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9a410e084a
fix exception:
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1 year ago |
|
hecl
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21d202af0e
Add VenusDE WallChiller UI & ViewModel
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1 year ago |
|
hecl
|
fedcc95273
1.Venus DE process enhance
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1 year ago |
|
hecl
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7fe748b93a
1.Add Venus DE processdefine content
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1 year ago |
|
hecl
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9d28f8ee7d
1.Add Tru match
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1 year ago |
|
hecl
|
b3a13fc6c7
1.IoMagnet device Logical supplement
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1 year ago |
|
hecl
|
0b8a98a845
IoDevice IoMagnet Add
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1 year ago |
|
hecl
|
c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
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1 year ago |
|
lixiang
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0f0650b80f
1.PM 界面 run recipe 变为手动模式
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1 year ago |
|
hecl
|
2ffdf6e535
1Venus DE LinerDoor update
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1 year ago |
|
lixiang
|
2cbab729fb
添加小标题 home/online/offineInclude/Exclude功能
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1 year ago |
|
hecl
|
f9d4a74265
1.Venus DE/SE Gasverification add missing pipes
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1 year ago |
|
hecl
|
dbe33e8d29
Venus DE ui&viewmodel update
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1 year ago |
|
hecl
|
9de8ce9b11
Venus SE UI &&Venus DE pump,purge,start turbo routine update
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1 year ago |
|
hecl
|
1b165a2e61
Venus DE update && Venus SE simulator update
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1 year ago |
|
hecl
|
8d8b960858
Venus DE chamber UI change && Venus SE simulator update
|
1 year ago |
|
hecl
|
7875fff8f4
1Venus DE UI Update && Venus SE Simulator update
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1 year ago |
|
lixiang
|
bdcf0556c9
1.将kepler2200与其它项目配置文件分开
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1 year ago |
|
lixiang
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 year ago |
|
hecl
|
eb71335c9e
1.VenusDE UI Viewmodel update and fix pipelines switch bugs
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1 year ago |
|
hecl
|
d18b2c8e6a
Add VenusDE PM UI, Viewmodel, Simulator
|
1 year ago |
