1.根据长鑫要求Process Hietory界面添加eap提供的wafeid与lottype信息

2.优化all进all出不做cooling bug

Venus/Framework/Common/DBCore/DatabaseCleaner.cs

@@ -10,6 +10,7 @@ using Aitex.Core.RT.Log;
 using Aitex.Core.RT.SCCore;
 using Aitex.Core.Util;
 using log4net.Repository.Hierarchy;
+using MECF.Framework.Common.Equipment;
 using Npgsql;
 
 namespace MECF.Framework.Common.DBCore
@@ -94,6 +95,7 @@ namespace MECF.Framework.Common.DBCore
                         command.ExecuteNonQuery();
                         double elapsedTime = timer.GetElapseTime() / 1000;
                         log = string.Format("当前日期为{0},删除目录表{1}里{2}天前的记录,用时{3}秒", System.DateTime.Now.ToString("D"), timeStamp[i, 0], _daysOfRetainData, elapsedTime);
+                        LOG.Write(eEvent.EV_DEVICE_INFO, ModuleName.System, log);
                         //LOG.Info(log);
                         System.Threading.Thread.Sleep(50);
                     }
@@ -117,7 +119,7 @@ namespace MECF.Framework.Common.DBCore
             }
             catch (Exception ex)
             {
-                LOG.WriteExeption(ex);
+                //LOG.WriteExeption(ex);
                 if (conn != null)
                 {
                     conn.Close();

Venus/Framework/Common/DBCore/DatabaseTable.cs

@@ -78,6 +78,8 @@ namespace MECF.Framework.Common.DBCore
                 {"lot_data_guid", typeof(string)},
                 {"wafer_data_guid", typeof(string)},
                 {"carrier_id", typeof(string)},
+                
+
             };
 
 
@@ -122,7 +124,7 @@ namespace MECF.Framework.Common.DBCore
                 {"lot_id", typeof(string) },
                 {"slot_id", typeof(string) },
                 {"carrier_id", typeof(string)},
-
+                {"lot_type", typeof(string)},
             });
         }
     }

Venus/Framework/Common/DBCore/ProcessDataRecorder.cs

@@ -132,10 +132,10 @@ namespace MECF.Framework.Common.DBCore
             }
         }
 
-        public static void RecordPrecess(string guid, DateTime startTime, DateTime endTime, string recipeName,string status, string waferDataGuid, string processIn, string lotID, string slotID, string recipe_type,string carrierId)
+        public static void RecordPrecess(string guid, DateTime startTime, DateTime endTime, string recipeName,string status, string waferDataGuid, string processIn, string lotID, string slotID, string recipe_type,string carrierId,string lotType)
         {
             string sql = string.Format(
-                "INSERT INTO \"process_data\"(\"guid\", \"process_begin_time\",\"process_end_time\", \"recipe_name\" ,\"process_status\", \"wafer_data_guid\", \"process_in\", \"lot_id\", \"slot_id\", \"recipe_type\", \"carrier_id\")VALUES ('{0}', '{1}', '{2}', '{3}', '{4}', '{5}', '{6}','{7}' ,'{8}','{9}','{10}');",
+                "INSERT INTO \"process_data\"(\"guid\", \"process_begin_time\",\"process_end_time\", \"recipe_name\" ,\"process_status\", \"wafer_data_guid\", \"process_in\", \"lot_id\", \"slot_id\", \"recipe_type\", \"carrier_id\", \"lot_type\")VALUES ('{0}', '{1}', '{2}', '{3}', '{4}', '{5}', '{6}','{7}' ,'{8}','{9}','{10}','{11}');",
                 guid,
                 startTime.ToString("yyyy/MM/dd HH:mm:ss.fff"),
                 endTime.ToString("yyyy/MM/dd HH:mm:ss.fff"),
@@ -146,7 +146,8 @@ namespace MECF.Framework.Common.DBCore
                 lotID,
                 string.IsNullOrEmpty(slotID) ? "" : (int.Parse(slotID) + 1).ToString(),
                 recipe_type,
-                carrierId
+                carrierId,
+                lotType
                 );
             DB.Insert(sql);
         }

Venus/Framework/Common/SubstrateTrackings/WaferInfo.cs

@@ -84,8 +84,35 @@ namespace Aitex.Core.Common
 			    InvokePropertyChanged("WaferID");
 			}
 		}
-
-		private string _waferOrigin;
+		private string lotType;
+        [DataMember]
+        public string  LotType
+        {
+            get
+            {
+                return lotType;
+            }
+            set
+            {
+                lotType = value;
+                InvokePropertyChanged("LotType");
+            }
+        }
+        private string eapWaferID;
+        [DataMember]
+        public string EAPWaferID
+        {
+            get
+            {
+                return eapWaferID;
+            }
+            set
+            {
+                eapWaferID = value;
+                InvokePropertyChanged("EAPWaferID");
+            }
+        }
+        private string _waferOrigin;
 		[DataMember]
 		public string WaferOrigin
 		{
@@ -350,6 +377,8 @@ namespace Aitex.Core.Common
 
 		    ProcessJob = source.ProcessJob;
 		    NextSequenceStep = source.NextSequenceStep;
+			EAPWaferID = source.EAPWaferID;
+			LotType= source.LotType;
 		}
 
 	    public void SetEmpty()

Venus/Framework/Common/Utilities/PeriodicJob.cs

@@ -124,7 +124,7 @@ namespace Aitex.Core.Util
                 }
                 catch (Exception ex)
                 {
-                    LOG.WriteExeption(ex);
+                    //LOG.WriteExeption(ex);
                 }
 
                 _sleepFlag.WaitOne(Math.Max(_interval - (int)_elapseTimer.GetElapseTime(), 30));

Venus/Venus_Core/RtState.cs

@@ -42,7 +42,8 @@ namespace Venus_Core
         SERunning,
         ReturnWafer,
         SETransfer,
-        SEReturnWafer
+        SEReturnWafer,
+        Aborting
     }
 
     public enum PMState

Venus/Venus_MainPages/ViewModels/KeplerProcessHistoryViewModel.cs

@@ -224,6 +224,10 @@ namespace Venus_MainPages.ViewModels
                 item.Status = dbData.Rows[i]["process_status"].ToString();
                 item.SlotID = dbData.Rows[i]["slot_id"].ToString();
                 item.RecipeType = dbData.Rows[i]["recipe_type"].ToString();
+                item.WaferId = dbData.Rows[i]["wafer_data_guid"].ToString();
+                item.LotType = dbData.Rows[i]["lot_type"].ToString();
+
+
                 item.LotID = dbData.Rows[i]["lot_id"].ToString();
                 item.CarrierId = dbData.Rows[i]["carrier_id"].ToString();
                 if (!dbData.Rows[i]["process_begin_time"].Equals(DBNull.Value))
@@ -303,6 +307,9 @@ namespace Venus_MainPages.ViewModels
                         item.Status = dbData.Rows[i]["process_status"].ToString();
                         item.SlotID = dbData.Rows[i]["slot_id"].ToString();
                         item.LotID = dbData.Rows[i]["lot_id"].ToString();
+                        item.WaferId = dbData.Rows[i]["wafer_data_guid"].ToString();
+                        item.LotType = dbData.Rows[i]["lot_type"].ToString();
+
                         item.RecipeType = dbData.Rows[i]["recipe_type"].ToString();
                         if (!dbData.Rows[i]["process_begin_time"].Equals(DBNull.Value))
                             item.StartTime = ((DateTime)dbData.Rows[i]["process_begin_time"]).ToString("yyyy-MM-dd HH:mm:ss");
@@ -397,6 +404,8 @@ namespace Venus_MainPages.ViewModels
                     item.RecipeType = dbData.Rows[i]["recipe_type"].ToString();
                     item.LotID = dbData.Rows[i]["lot_id"].ToString();
                     item.CarrierId = dbData.Rows[i]["carrier_id"].ToString();
+                    item.WaferId = dbData.Rows[i]["wafer_data_guid"].ToString();
+                    item.LotType = dbData.Rows[i]["lot_type"].ToString();
 
                     if (!dbData.Rows[i]["process_begin_time"].Equals(DBNull.Value))
                         item.StartTime = ((DateTime)dbData.Rows[i]["process_begin_time"]).ToString("yyyy-MM-dd HH:mm:ss");

Venus/Venus_MainPages/ViewModels/OverKepler2200AViewModel.cs

@@ -1678,8 +1678,8 @@ namespace Venus_MainPages.ViewModels
             MFC6SetPoint = 0;
             MFC7SetPoint = 0;
             MFC8SetPoint = 0;
-            HighTemperatureHeaterTemperatureSetpoint = 0;
-            HighTemperatureHeaterRatioSetpoint = 0;
+            //HighTemperatureHeaterTemperatureSetpoint = 0;
+            //HighTemperatureHeaterRatioSetpoint = 0;
         }
         private IEnumerable<string> GetFilesNames(string path)
         {

Venus/Venus_MainPages/ViewModels/OverKepler2200BViewModel.cs

@@ -1689,8 +1689,8 @@ namespace Venus_MainPages.ViewModels
             MFC7SetPoint = 0;
             MFC8SetPoint = 0;
             RFBoxC1Setpoint = 0;
-            HighTemperatureHeaterTemperatureSetpoint = 0;
-            HighTemperatureHeaterRatioSetpoint = 0;
+            //HighTemperatureHeaterTemperatureSetpoint = 0;
+            //HighTemperatureHeaterRatioSetpoint = 0;
 
         }
         private IEnumerable<string> GetFilesNames(string path)

Venus/Venus_MainPages/ViewModels/ProcessHistoryViewModel.cs

@@ -889,6 +889,10 @@ namespace Venus_MainPages.ViewModels
         public string CarrierId { get; set; }
 
         public string RecipeType { get; set; }
+
+        public string WaferId { get; set; }
+
+        public string LotType { get;set; }
     }
     public class StepData
     {

Venus/Venus_MainPages/Views/KeplerProcessHistoryView.xaml

@@ -112,21 +112,35 @@
                     </i:EventTrigger>
                 </i:Interaction.Triggers>
                 <DataGrid.Columns>
-                    <DataGridTemplateColumn Header="Carrier ID" Width="100">
+                    <DataGridTemplateColumn Header="Carrier ID" Width="80">
                         <DataGridTemplateColumn.CellTemplate>
                             <DataTemplate>
                                 <TextBlock Text="{Binding CarrierId}" VerticalAlignment="Center" HorizontalAlignment="Center" />
                             </DataTemplate>
                         </DataGridTemplateColumn.CellTemplate>
                     </DataGridTemplateColumn>
-                    <DataGridTemplateColumn Header="Lot ID" Width="320">
+                    <DataGridTemplateColumn Header="Lot ID" Width="200">
                         <DataGridTemplateColumn.CellTemplate>
                             <DataTemplate>
                                 <TextBlock Text="{Binding LotID}" Margin="5,0" FontFamily="Arial" FontSize="14" Foreground="{DynamicResource FG_Black}" HorizontalAlignment="Center" VerticalAlignment="Center" />
                             </DataTemplate>
                         </DataGridTemplateColumn.CellTemplate>
                     </DataGridTemplateColumn>
-                    <DataGridTemplateColumn Header="Slot ID" Width="120">
+                    <DataGridTemplateColumn Header="Lot Type" Width="100">
+                        <DataGridTemplateColumn.CellTemplate>
+                            <DataTemplate>
+                                <TextBlock Text="{Binding LotType}" Margin="5,0" FontFamily="Arial" FontSize="14" Foreground="{DynamicResource FG_Black}" HorizontalAlignment="Center" VerticalAlignment="Center" />
+                            </DataTemplate>
+                        </DataGridTemplateColumn.CellTemplate>
+                    </DataGridTemplateColumn>
+                    <DataGridTemplateColumn Header="Wafer ID" Width="300">
+                        <DataGridTemplateColumn.CellTemplate>
+                            <DataTemplate>
+                                <TextBlock Text="{Binding WaferId}" Margin="5,0" FontFamily="Arial" FontSize="14" Foreground="{DynamicResource FG_Black}" HorizontalAlignment="Center" VerticalAlignment="Center" />
+                            </DataTemplate>
+                        </DataGridTemplateColumn.CellTemplate>
+                    </DataGridTemplateColumn>
+                    <DataGridTemplateColumn Header="Slot ID" Width="50">
                         <DataGridTemplateColumn.CellTemplate>
                             <DataTemplate>
                                 <TextBlock Text="{Binding SlotID}" Margin="5,0" FontFamily="Arial" FontSize="14" Foreground="{DynamicResource FG_Black}" HorizontalAlignment="Center" VerticalAlignment="Center" />
@@ -134,14 +148,14 @@
                         </DataGridTemplateColumn.CellTemplate>
                     </DataGridTemplateColumn>
 
-                    <DataGridTemplateColumn Header="Start" Width="280">
+                    <DataGridTemplateColumn Header="Start" Width="200">
                         <DataGridTemplateColumn.CellTemplate>
                             <DataTemplate>
                                 <TextBlock Text="{Binding StartTime}" Margin="5,0" FontFamily="Arial" FontSize="14" Foreground="{DynamicResource FG_Black}" HorizontalAlignment="Center" VerticalAlignment="Center" />
                             </DataTemplate>
                         </DataGridTemplateColumn.CellTemplate>
                     </DataGridTemplateColumn>
-                    <DataGridTemplateColumn Header="End" Width="280">
+                    <DataGridTemplateColumn Header="End" Width="200">
                         <DataGridTemplateColumn.CellTemplate>
                             <DataTemplate>
                                 <TextBlock Text="{Binding EndTime}" Margin="5,0" FontFamily="Arial" FontSize="14" Foreground="{DynamicResource FG_Black}" HorizontalAlignment="Center" VerticalAlignment="Center" />
@@ -155,7 +169,7 @@
                             </DataTemplate>
                         </DataGridTemplateColumn.CellTemplate>
                     </DataGridTemplateColumn>
-                    <DataGridTemplateColumn Header="Recipe type" Width="180">
+                    <DataGridTemplateColumn Header="Recipe type" Width="120">
                         <DataGridTemplateColumn.CellTemplate>
                             <DataTemplate>
                                 <TextBlock Text="{Binding RecipeType}" Margin="5,0" FontFamily="Arial" FontSize="14" Foreground="{DynamicResource FG_Black}" HorizontalAlignment="Center" VerticalAlignment="Center" />

Venus/Venus_RT/Config/EquipmentVariables.xml

@@ -221,7 +221,7 @@
 		<StatusVariable id="430101119" valueType="Boolean" logicalName="TM.LLALid.IsClosed" eventTrigger="" units="" />
 		<StatusVariable id="430101120" valueType="F8" logicalName="TM.LLAPCWFlowSwitch" eventTrigger="" units="" />
 		<StatusVariable id="430101121" valueType="F8" logicalName="TM.LLAPCWFlowSwitch.Value" eventTrigger="" units="" />
-		<StatusVariable id="430101122" valueType="Boolean" logicalName="TM.LLAPressure" eventTrigger="" units="" />
+		<StatusVariable id="430101122" valueType="F8" logicalName="TM.LLAPressure" eventTrigger="" units="" />
 		<StatusVariable id="430101123" valueType="Boolean" logicalName="TM.LLATSlitDoor" eventTrigger="" units="" />
 		<StatusVariable id="430101124" valueType="Boolean" logicalName="TM.LLATSlitDoor.IsClosed" eventTrigger="" units="" />
 		<StatusVariable id="430101125" valueType="Boolean" logicalName="TM.LLAVacSwitch" eventTrigger="" units="" />
@@ -237,7 +237,7 @@
 		<StatusVariable id="430101135" valueType="Boolean" logicalName="TM.LLBLid.IsClosed" eventTrigger="" units="" />
 		<StatusVariable id="430101136" valueType="F8" logicalName="TM.LLBPCWFlowSwitch" eventTrigger="" units="" />
 		<StatusVariable id="430101137" valueType="F8" logicalName="TM.LLBPCWFlowSwitch.Value" eventTrigger="" units="" />
-		<StatusVariable id="430101138" valueType="Boolean" logicalName="TM.LLBPressure" eventTrigger="" units="" />
+		<StatusVariable id="430101138" valueType="F8" logicalName="TM.LLBPressure" eventTrigger="" units="" />
 		<StatusVariable id="430101139" valueType="Boolean" logicalName="TM.LLBTSlitDoor" eventTrigger="" units="" />
 		<StatusVariable id="430101140" valueType="Boolean" logicalName="TM.LLBTSlitDoor.IsClosed" eventTrigger="" units="" />
 		<StatusVariable id="430101141" valueType="Boolean" logicalName="TM.LLBVacSwitch" eventTrigger="" units="" />

Venus/Venus_RT/Config/System_Kepler2200.sccfg

@@ -39,9 +39,11 @@
 			<config default="Thick" name="LP2WaferThicknessType" nameView="LP2 wafer thickness type" description="Thin；Thick" max="" min="" paramter="" tag="" unit="0" type="String" />
 		</configs>-->
 
-		<configs name="Job" nameView="Job"  >
+		<configs name="Job" nameView="Job">
 			<config default="10" name="BuzzerTimeWhenJobDone" nameView="Buzzer Time When Job Done"  description="buzzer time after job done, -1=never stop, 0=silent,xxx=buzzer time" max="300" min="0" paramter="" tag="" unit="s" type="Integer" />
 			<config default="0" name="PPSelectFoupMode" nameView="PP-Select Foup Mode"  description="0:从下往上是1-25，1:从上往下是1-25" max="1" min="0" paramter="" tag="" unit="s" type="Integer" />
+			<config default="60" name="PreCleanIdleMaxTime" nameView="Pre Clean Idle Max Time"  description="PreClean 超过最大时间再做" max="86400" min="0" paramter="" tag="" unit="s" type="Integer" />
+
 		</configs>
 	</configs>
 
@@ -93,7 +95,7 @@
 		<config default="false" name="IgnoreWaterFlowError" nameView="Ignore water flow alarm" description="是否忽略冷却水报警" max="" min="" paramter="" tag="" unit="N/A" type="Bool" />
 
 		<config default="40" name="DelayTimeBeforeLiftDown" nameView="Delay Time before lift down" description="冷却前，lift pin停留多久再落下" max="600" min="0" paramter="" tag="" unit="second" type="Integer" />
-		<config default="0" name="SingleArmOption"   nameView="Single Arm Option"   description="0, both; 1, Blade1; 2, Blade2" max="2" min="0" paramter="" tag="" unit="N/A" type="Integer" Restart="1" />
+		<config default="0" name="SingleArmOption"   nameView="Single Arm Option"   description="0, both; 1, Blade1; 2, Blade2" max="2" min="0" paramter="" tag="" unit="N/A" type="Integer" Restart="0" />
 
 		<config default="4" name="LLAutoPumpInWaferOpt" nameView="Loadlock Auto Pump Option for Raw Wafer" description="当没作工艺wafer数量大于或等于此数量时，自动开始Pump" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" />
 		<config default="0" name="LLAutoPumpOutWaferOpt" nameView="Loadlock Auto Pump Option for Processed Wafer" description="当完成工艺wafer数量小于或等于此数量时，自动开始Pump" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" />
@@ -143,6 +145,8 @@
 		<config default="100" name="SoftVentEndPressure" nameView="Soft Vent End Pressure" description="SoftVent转FastVent压力设定" max="30000" min="0" paramter="" tag="" unit="Pa" type="Integer" />
 		<config default="60" name="VentingTimeout" nameView="Venting Timeout" description="Vent到大气压超时" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
 		<config default="2000" name="OverVentTime" nameView="Over Vent Time Delay" description="结束Vent时延时时间" max="60000" min="0" paramter="" tag="" unit="ms" type="Integer" />
+		<config default="1000" name="ExhaustValveOffDelayTime" nameView="Exhaust Valve Off Delay Time" description="结束Vent时延时时间" max="60000" min="0" paramter="" tag="" unit="ms" type="Integer" />
+
 		<config default="2000" name="PurgeVentPressure" description="purge时vent至的压力" max="760000" min="0" paramter="" tag="" unit="Pa" type="Double" />
 		<config default="30" name="PurgeCycleCount" description="Purge循环次数" max="200" min="0" paramter="" tag="" unit="N/A" type="Integer" />
 		<config default="120" name="PurgePumpTime" description="purge时pumpdown至设定压力时间" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
@@ -167,6 +171,7 @@
 
 		<config default="0" name="LLAutoVentInWaferOpt" nameView="Loadlock Aut Vent Option For Raw Wafer" description="当未做工艺wafer数量小于或等于此数量时，自动做Vent" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" />
 		<config default="4" name="LLAutoVentOutWaferOpt" nameView="Loadlock Auto Vent Option For Processed Wafer" description="当已做工艺wafer数量大于或等于此数量时，自动做Vent" max="10" min="0" paramter="" tag="" unit="N/A" type="Integer" />
+
 		<configs name="TM_MFC1" nameView="MFC1" >
 			<config default="true" name="Enable" nameView="Enable" description="启用气路" tag="" unit="N/A" type="Bool" />
 			<config default="O2" name="GasName" nameView="Gas Name" description="气体名称" tag="" unit="N/A" type="String" />
@@ -222,6 +227,9 @@
 		<config default="30" name="LeakRate" description="Leak rate 触发上限" max="756000" min="0" paramter="" tag="" unit="PaPerMin" type="Double" />
 		<config default="2" name="SlotNumber" nameView="Slot number"  description="槽位个数" max="60" min="1" paramter="" tag="" unit="N/A" type="Integer" Restart="1" />
 		<config default="2000" name="OverVentTime" nameView="Over Vent Time Delay" description="Vent完成后延时时间" max="60000" min="0" paramter="" tag="" unit="ms" type="Integer"/>
+		<config default="1000" name="ExhaustValveOffDelayTime" nameView="Exhaust Valve Off Delay Time" description="关闭Exhaust Valve延时时间" max="60000" min="0" paramter="" tag="" unit="ms" type="Integer" />
+		<config default="3000" name="OverVentFlow" nameView="Over Vent Flow" description="" max="5000" min="0" paramter="" tag="" unit="sccm" type="Integer" />
+
 		<!--<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="N/A" type="Integer" />-->
 		<config default="100" name="ControlPressureCheckPoint" nameView="Control Pressure CheckPoint" description="LLA Chamber 控压 检测值" max="300" min="0" paramter="" tag="" unit="Pa" type="Integer" />
 		<config default="90"  name="ControlPressureSetPoint"   nameView="Control Pressure SetPoint"   description="LLA Chamber 控压 设定值" max="200" min="0" paramter="" tag="" unit="Pa" type="Integer" />
@@ -282,6 +290,9 @@
 		<config default="30" name="LeakRate" description="Leak rate 触发上限" max="756000" min="0" paramter="" tag="" unit="PaPerMin" type="Double" />
 		<config default="4" name="SlotNumber" nameView="Slot number"  description="槽位个数" max="60" min="1" paramter="" tag="" unit="N/A" type="Integer" Restart="1" />
 		<config default="2000" name="OverVentTime" nameView="Over Vent Time Delay" description="Vent完成后延时时间" max="60000" min="0" paramter="" tag="" unit="ms" type="Integer" />
+		<config default="1000" name="ExhaustValveOffDelayTime" nameView="Exhaust Valve Off Delay Time" description="关闭Exhaust Valve延时时间" max="60000" min="0" paramter="" tag="" unit="ms" type="Integer" />
+		<config default="3000" name="OverVentFlow" nameView="Over Vent Flow" description="" max="5000" min="0" paramter="" tag="" unit="sccm" type="Integer" />
+
 		<!--<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="N/A" type="Integer" />-->
 		<config default="100" name="ControlPressureCheckPoint" nameView="Control Pressure CheckPoint" description="LLA Chamber 控压 检测值" max="300" min="0" paramter="" tag="" unit="Pa" type="Integer" />
 		<config default="90"  name="ControlPressureSetPoint"   nameView="Control Pressure SetPoint"   description="LLA Chamber 控压 设定值" max="200" min="0" paramter="" tag="" unit="Pa" type="Integer" />
@@ -613,7 +624,7 @@
 		</configs>
 		<configs name="PendulumValve" nameView="Pendulum Valve">
 			<config default="COM66" name="Port" nameView="Port" description="端口号" max="" min="" paramter="" tag="" unit="N/A" type="String" Restart="1" />
-			<config default="400" name="PressureFullRange" nameView="PressureFullRange" description="钟摆阀压力范围" max="13000" min="0" paramter="" tag="" unit="Pa" type="Integer" />
+			<config default="400" name="PressureFullRange" nameView="PressureFullRange" description="钟摆阀压力范围" max="13000" min="0" paramter="" tag="" unit="Pa" type="Integer" Restart="1"/>
 			<config default="100"  name="ForelinePressureLimit" nameView="ForelinePressureLimit" description="前级管压力限制范围" max="250" min="0" paramter="" tag="" unit="Pa" type="Integer" />
 			<config default="80"  name="ChamberPressureLimit" nameView="ForelinePressureLimit" description="腔体压力限制范围" max="250" min="0" paramter="" tag="" unit="Pa" type="Integer" />
 			<config default="100"  name="TurboPumpSpeedLimit"  nameView="Turbo PumpSpeed Limit" description="分子泵转速限制范围" max="3000" min="0" paramter="" tag="" unit="N/A" type="Integer" />
@@ -947,7 +958,7 @@
 		</configs>
 		<configs name="PendulumValve" nameView="Pendulum Valve">
 			<config default="COM66" name="Port" nameView="Port" description="端口号" max="" min="" paramter="" tag="" unit="N/A" type="String" Restart="1" />
-			<config default="400" name="PressureFullRange" nameView="PressureFullRange" description="钟摆阀压力范围" max="13000" min="0" paramter="" tag="" unit="Pa" type="Integer" />
+			<config default="400" name="PressureFullRange" nameView="PressureFullRange" description="钟摆阀压力范围" max="13000" min="0" paramter="" tag="" unit="Pa" type="Integer" Restart="1"/>
 			<config default="100"  name="ForelinePressureLimit" nameView="ForelinePressureLimit" description="前级管压力限制范围" max="250" min="0" paramter="" tag="" unit="Pa" type="Integer" />
 			<config default="80"  name="ChamberPressureLimit" nameView="ForelinePressureLimit" description="腔体压力限制范围" max="250" min="0" paramter="" tag="" unit="Pa" type="Integer" />
 			<config default="100"  name="TurboPumpSpeedLimit"  nameView="Turbo PumpSpeed Limit" description="分子泵转速限制范围" max="3000" min="0" paramter="" tag="" unit="N/A" type="Integer" />
@@ -1281,7 +1292,7 @@
 		</configs>
 		<configs name="PendulumValve" nameView="Pendulum Valve">
 			<config default="COM66" name="Port" nameView="Port" description="端口号" max="" min="" paramter="" tag="" unit="N/A" type="String" Restart="1" />
-			<config default="400" name="PressureFullRange" nameView="PressureFullRange" description="钟摆阀压力范围" max="13000" min="0" paramter="" tag="" unit="Pa" type="Integer" />
+			<config default="400" name="PressureFullRange" nameView="PressureFullRange" description="钟摆阀压力范围" max="13000" min="0" paramter="" tag="" unit="Pa" type="Integer" Restart="1"/>
 			<config default="100"  name="ForelinePressureLimit" nameView="ForelinePressureLimit" description="前级管压力限制范围" max="250" min="0" paramter="" tag="" unit="Pa" type="Integer" />
 			<config default="80"  name="ChamberPressureLimit" nameView="ForelinePressureLimit" description="腔体压力限制范围" max="250" min="0" paramter="" tag="" unit="Pa" type="Integer" />
 			<config default="100"  name="TurboPumpSpeedLimit"  nameView="Turbo PumpSpeed Limit" description="分子泵转速限制范围" max="3000" min="0" paramter="" tag="" unit="N/A" type="Integer" />
@@ -1615,7 +1626,7 @@
 		</configs>
 		<configs name="PendulumValve" nameView="Pendulum Valve">
 			<config default="COM66" name="Port" nameView="Port" description="端口号" max="" min="" paramter="" tag="" unit="N/A" type="String" Restart="1" />
-			<config default="400" name="PressureFullRange" nameView="PressureFullRange" description="钟摆阀压力范围" max="13000" min="0" paramter="" tag="" unit="Pa" type="Integer" />
+			<config default="400" name="PressureFullRange" nameView="PressureFullRange" description="钟摆阀压力范围" max="13000" min="0" paramter="" tag="" unit="Pa" type="Integer" Restart="1"/>
 			<config default="100"  name="ForelinePressureLimit" nameView="ForelinePressureLimit" description="前级管压力限制范围" max="250" min="0" paramter="" tag="" unit="Pa" type="Integer" />
 			<config default="80"  name="ChamberPressureLimit" nameView="ForelinePressureLimit" description="腔体压力限制范围" max="250" min="0" paramter="" tag="" unit="Pa" type="Integer" />
 			<config default="100"  name="TurboPumpSpeedLimit"  nameView="Turbo PumpSpeed Limit" description="分子泵转速限制范围" max="3000" min="0" paramter="" tag="" unit="N/A" type="Integer" />

Venus/Venus_RT/Config/System_Kepler2300.sccfg

@@ -47,8 +47,10 @@
 			<config default="Thick" name="LP2WaferThicknessType" nameView="LP2 wafer thickness type" description="Thin；Thick" max="" min="" paramter="" tag="" unit="0" type="String" />
 		</configs>
 
-		<configs name="Job" nameView="Job"  >
+		<configs name="Job" nameView="Job">
 			<config default="10" name="BuzzerTimeWhenJobDone" nameView="Buzzer Time When Job Done"  description="buzzer time after job done, -1=never stop, 0=silent,xxx=buzzer time" max="300" min="0" paramter="" tag="" unit="s" type="Integer" />
+			<config default="60" name="PreCleanMaxIdleTime" nameView="Pre Clean Idle Max Time"  description="PreClean 超过最大时间再做" max="86400" min="0" paramter="" tag="" unit="s" type="Integer" />
+
 		</configs>
 	</configs>
 

Venus/Venus_RT/Devices/EFEM/JetEfem.cs

@@ -922,12 +922,12 @@ namespace Venus_RT.Devices.EFEM
                             LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, "System Sensor Vacuum/Air Pressure for PreAligner Abnormal");
                             Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error);
                         }
-                        if (!baData1[13])   // Bit[13] ON=Normal, OFF=Abnormal
-                        {
-                            //EV.Notify(EFEMFFUAlarm);
-                            LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, "System Sensor Vacuum/Air Pressure for PreAligner2 Abnormal");
-                            Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error);
-                        }
+                        //if (!baData1[13])   // Bit[13] ON=Normal, OFF=Abnormal
+                        //{
+                        //    //EV.Notify(EFEMFFUAlarm);
+                        //    LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, "System Sensor Vacuum/Air Pressure for PreAligner2 Abnormal");
+                        //    Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error);
+                        //}
 
                         // DATA2
                         _signalT.ChangeLightStatus(LightType.RED, baData2[0] ? LightStatus.ON : baData2[5] ? LightStatus.BLINK : LightStatus.OFF);

Venus/Venus_RT/Devices/IODevices/IoTMPressureCtl.cs

@@ -96,18 +96,19 @@ namespace Venus_RT.Devices
 
         public void Monitor()
         {
-            _trigTMPressureGauge.CLK = TMPressureGauge.GaugeAlarm;
-            if (_trigTMPressureGauge.Q) LOG.Write(eEvent.ERR_DEVICE_INFO, Module, "MF pressure gauge Alarm");
-            _trigLLAPressureGauge.CLK = LLAPressureGauge.GaugeAlarm;
-            if (_trigLLAPressureGauge.Q) LOG.Write(eEvent.ERR_DEVICE_INFO, Module, "Chamber pressure gauge Alarm");
-            _trigLLBPressureGauge.CLK = LLBPressureGauge.GaugeAlarm;
-            if (_trigLLBPressureGauge.Q) LOG.Write(eEvent.ERR_DEVICE_INFO, Module, "Foreline pressure gauge Alarm");
-
-            _trigMFForelineGauge.CLK = MFForelineGauge.GaugeAlarm;
-            if (_trigMFForelineGauge.Q) LOG.Write(eEvent.ERR_DEVICE_INFO, Module, "Process High Gauge Alarm");
-
-            _trigLLAForelineGauge.CLK = LLAForelineGauge.GaugeAlarm;
-            if (_trigLLAForelineGauge.Q) LOG.Write(eEvent.ERR_DEVICE_INFO, Module, "Process Low Gauge Alarm");
+            //_trigTMPressureGauge.CLK = TMPressureGauge.GaugeAlarm;
+            //if (_trigTMPressureGauge.Q) LOG.Write(eEvent.ERR_DEVICE_INFO, Module, "MF pressure gauge Alarm");
+
+            //_trigLLAPressureGauge.CLK = LLAPressureGauge.GaugeAlarm;
+            //if (_trigLLAPressureGauge.Q) LOG.Write(eEvent.ERR_DEVICE_INFO, Module, "Chamber pressure gauge Alarm");
+            //_trigLLBPressureGauge.CLK = LLBPressureGauge.GaugeAlarm;
+            //if (_trigLLBPressureGauge.Q) LOG.Write(eEvent.ERR_DEVICE_INFO, Module, "Foreline pressure gauge Alarm");
+
+            //_trigMFForelineGauge.CLK = MFForelineGauge.GaugeAlarm;
+            //if (_trigMFForelineGauge.Q) LOG.Write(eEvent.ERR_DEVICE_INFO, Module, "Process High Gauge Alarm");
+
+            //_trigLLAForelineGauge.CLK = LLAForelineGauge.GaugeAlarm;
+            //if (_trigLLAForelineGauge.Q) LOG.Write(eEvent.ERR_DEVICE_INFO, Module, "Process Low Gauge Alarm");
         }
 
 

Venus/Venus_RT/Modules/PMs/PMProcessRoutine.cs

@@ -667,9 +667,9 @@ namespace Venus_RT.Modules.PMs
             WaferInfo waferInfo = WaferManager.Instance.GetWafer(ModuleHelper.Converter(Module.ToString()), 0);
             if (!waferInfo.IsEmpty)
             {
-                WaferId = waferInfo.InnerId.ToString();
+                WaferId =string.IsNullOrEmpty(waferInfo.EAPWaferID) ? waferInfo.InnerId.ToString(): waferInfo.EAPWaferID;
                 SlotID = waferInfo.OriginSlot.ToString();
-                LotID = waferInfo.ProcessJob == null || string.IsNullOrEmpty(waferInfo.ProcessJob.ControlJobName) ? "" : waferInfo.ProcessJob.ControlJobName;
+                LotID = waferInfo.ProcessJob == null || string.IsNullOrEmpty(waferInfo.ProcessJob.LotName) ? "" : waferInfo.ProcessJob.LotName;
                 if (RtInstance.ConfigType == ConfigType.Kepler2200 && waferInfo.ProcessJob!=null)
                 {
                    string lp = waferInfo.ProcessJob.SlotWafers[0].Item1.ToString();
@@ -681,12 +681,13 @@ namespace Venus_RT.Modules.PMs
             switch (_currentRecipe.Header.Type)
             {
                 case RecipeType.Clean:
-                    ProcessDataRecorder.RecordPrecess(RecipeId, RecipeStartTime, RecipeEndTime, _currentRecipe.Header.Name, result, "", _chamber.Name, "", "", _currentRecipe.Header.Type.ToString(),"");
+                    ProcessDataRecorder.RecordPrecess(RecipeId, RecipeStartTime, RecipeEndTime, _currentRecipe.Header.Name, result, "", _chamber.Name, "", "", _currentRecipe.Header.Type.ToString(),"","");
                     break;
                 case RecipeType.Chuck:
                 case RecipeType.DeChuck:
                 case RecipeType.Process:
-                    ProcessDataRecorder.RecordPrecess(RecipeId, RecipeStartTime, RecipeEndTime, _currentRecipe.Header.Name, result, WaferId, _chamber.Name, LotID, SlotID, _currentRecipe.Header.Type.ToString(), carrierId);
+
+                    ProcessDataRecorder.RecordPrecess(RecipeId, RecipeStartTime, RecipeEndTime, _currentRecipe.Header.Name, result, WaferId, _chamber.Name, LotID, SlotID, _currentRecipe.Header.Type.ToString(), carrierId, waferInfo.LotType) ;
                     break;
             }
 

Venus/Venus_RT/Modules/RouteManager.cs

@@ -1257,7 +1257,14 @@ namespace Venus_RT.Modules
             switch (command.ToUpper())
             {
                 case "PP-SELECT":
-                    return FaCreateJob(paras, out reason);
+                    if (RtInstance.ConfigType == ConfigType.Kepler2200)
+                    {
+                        return FaKepler2200CreateJob(paras, out reason);
+                    }
+                    else
+                    {
+                        return FaCreateJob(paras, out reason);
+                    }                   
                 case "STARTJOB":
                     //return FaStartJob(paras[0].ToString(), out reason);
                     return CheckToPostMessage((int)MSG.StartEAPJob, paras);
@@ -1305,7 +1312,49 @@ namespace Venus_RT.Modules
                 object[] tmpArys=(object[])paras[3];
                 string[] strAry = new string[tmpArys.Length];
 
-                if (RtInstance.ConfigType == ConfigType.Kepler2200 && SC.GetValue<int>("System.Job.PPSelectFoupMode") == 0)
+                for (int i = 0; i < tmpArys.Length; i++)
+                {
+                    strAry[i] = tmpArys[i].ToString();
+                }
+                
+                           
+                createParams["SlotSequence"] = strAry;
+                
+                createParams["AutoStart"] = true;
+                if (paras.Length >= 5)
+                {
+                    createParams["PreCleanRecipeName"] = paras[4].ToString();
+                }
+                if (paras.Length >= 6)
+                {
+                    createParams["PostCleabRecipeName"] = paras[5].ToString();
+                }
+                return _AutoCycle.CreateJob(createParams, out reason);
+            }
+        }
+        /// <summary>
+        /// Fa创建任务
+        /// </summary>
+        /// <param name="paras"></param>
+        /// <param name="reason"></param>
+        /// <returns></returns>
+        private bool FaKepler2200CreateJob(object[] paras, out string reason)
+        {
+            if (!CheckAuto())
+            {
+                reason = "System is not in Auto,cannot create job";
+                return false;
+            }
+            else
+            {
+                Dictionary<string, object> createParams = new Dictionary<string, object>();
+                createParams["Module"] = $"LP{paras[0]}";
+                createParams["JobId"] = paras[1].ToString();
+                createParams["LotId"] = paras[2].ToString();
+                object[] tmpArys = (object[])paras[3];
+                string[] strAry = new string[tmpArys.Length];
+
+                if (SC.GetValue<int>("System.Job.PPSelectFoupMode") == 0)
                 {
                     for (int i = 0; i < tmpArys.Length; i++)
                     {
@@ -1319,17 +1368,34 @@ namespace Venus_RT.Modules
                         strAry[i] = tmpArys[i].ToString();
                     }
                 }
-                           
-                createParams["SlotSequence"] = strAry;
-                createParams["AutoStart"] = true;
+                string[] stringWaferIds = new string[tmpArys.Length];
+                string lotType = "";
                 if (paras.Length >= 5)
                 {
-                    createParams["PreCleanRecipeName"] = paras[4].ToString();
+                    object[] waferIdArys = (object[])paras[4];
+
+                    if (RtInstance.ConfigType == ConfigType.Kepler2200 && SC.GetValue<int>("System.Job.PPSelectFoupMode") == 0)
+                    {
+                        for (int i = 0; i < waferIdArys.Length; i++)
+                        {
+                            stringWaferIds[i] = waferIdArys[waferIdArys.Length - 1 - i].ToString();
+                        }
+                    }
+                    else
+                    {
+                        for (int i = 0; i < waferIdArys.Length; i++)
+                        {
+                            stringWaferIds[i] = waferIdArys[i].ToString();
+                        }
+                    }
                 }
                 if (paras.Length >= 6)
                 {
-                    createParams["PostCleabRecipeName"] = paras[5].ToString();
+                    createParams["LotType"] = paras[5].ToString();
                 }
+                createParams["SlotSequence"] = strAry;
+                createParams["WaferId"] = stringWaferIds;
+                createParams["AutoStart"] = true;
                 return _AutoCycle.CreateJob(createParams, out reason);
             }
         }

Venus/Venus_RT/Modules/SystemDispatcher.cs

@@ -27,6 +27,7 @@ using Venus_Unity;
 using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
 using System.Linq.Expressions;
 using Aitex.Core.UI.Control;
+using SecsGem.Core.ItemModel;
 
 namespace Venus_RT.Modules
 {
@@ -91,11 +92,12 @@ namespace Venus_RT.Modules
 
         private DateTime _scheduledTime;
 
+        public ModuleName DestinationPM { get; set; }
         public WaferTask(ModuleName source, int srcSlot, ModuleName dest, int dstSlot, float temp, Guid waferID, Guid lotID, string recipeName, string wtwClean, SequenceLLInOutPath inOutPath, int LLDelay, bool needAlign)
         {
             sourceMod = currentMod = nextMod = routedMod = source;
             sourceSlot = currentSlot = nextSlot = routedSlot = srcSlot;
-
+            DestinationPM = dest;
             destMod = dest;
             destSlot = dstSlot;
             hand = Hand.None;
@@ -593,6 +595,7 @@ namespace Venus_RT.Modules
 
         public void InvokePreJobClean(string preJobClean)
         {
+
             _preJobCleanRecipe = preJobClean;
             _pendingCleanTask.Enqueue(CleanType.PreJobClean);
             //LOG.Write(eEvent.INFO_TROUGHPUT_ENHANCE_TRACE, Module, $"Invoke preClean {preJobClean}");
@@ -947,6 +950,9 @@ namespace Venus_RT.Modules
         public List<string> LP1InUseRecipes = new List<string>();
         public List<string> LP2InUseRecipes = new List<string>();
         public List<string> LP3InUseRecipes = new List<string>();
+
+        private Dictionary<ModuleName, DateTime> _pmLastWaferEndTime = new Dictionary<ModuleName, DateTime>();
+        private int _preCleanMaxIdleTime = 60;
         #region public interface
         public SystemDispatcher()
         {
@@ -984,6 +990,15 @@ namespace Venus_RT.Modules
             {
                 LOG.ModuleErrorInterrupt += (modulename, id) => ModuleErrorInterrupt(modulename, id);
             }
+
+            ModuleHelper.InstalledModules.ForEach(x =>
+            {
+                if (ModuleHelper.IsPm(x))
+                {
+                    _pmLastWaferEndTime.Add(x, DateTime.Now.AddDays(-1));
+                }
+            });
+
         }
         private void ModuleErrorInterrupt(ModuleName pmname, eEvent eEventid)
         {
@@ -993,7 +1008,7 @@ namespace Venus_RT.Modules
                 x.Sequence.PMs.ForEach(m => modules.Add(m));
             });
             if (modules.Contains(pmname) && (eEventid == eEvent.ERR_PM_SCRUBBER_NOOK_CONTINUEPROCESS || eEventid == eEvent.ERR_PM_SCRUBBER_NOOK_STOPPROCESS))
-            { 
+            {
                 Singleton<RouteManager>.Instance.InvokeAbort(new object[] { ModuleName.System });
                 LOG.Write(eEvent.ERR_PM_SCRUBBER_NOOK_STOPTRANSFER, ModuleName.System, $"{pmname} Scrubber Alarm ,Tranfer Stop");
             }
@@ -1027,7 +1042,7 @@ namespace Venus_RT.Modules
             _tmRobotSingleArmOption = SC.GetValue<int>("TM.SingleArmOption");
             _LLSlotInOutOption = (LLSlotInOutOpt)SC.GetValue<int>("System.LoadlockSlotInOutOption");
             _specialRoutingPattern = (SpecialRoutingPattern)SC.GetValue<int>("System.SpecialRoutingPattern");
-
+            _preCleanMaxIdleTime = SC.GetValue<int>("System.Job.PreCleanIdleMaxTime");
             // rounding TM robot single arm option
             if (_tmRobotSingleArmOption > 2 && _LLSlotInOutOption == LLSlotInOutOpt.AllInAllOut)
             {
@@ -1062,7 +1077,7 @@ namespace Venus_RT.Modules
             RoutingVacWafers();
 
             epilogue();
-           
+
             return _cycleState;
         }
 
@@ -1075,6 +1090,26 @@ namespace Venus_RT.Modules
             reason = "";
 
             string[] slotSequence = (string[])param["SlotSequence"];
+            string[] slotWaferId = new string[slotSequence.Length];
+            if (param.Keys.Contains("WaferId"))
+            {
+                slotWaferId = (string[])param["WaferId"];
+            }
+            else
+            {
+                for (int i = 0; i < slotWaferId.Length; i++)
+                {
+                    slotWaferId[i] = "";
+                }
+            }
+
+            string lotType = "";
+            if (param.Keys.Contains("LotType"))
+            {
+                lotType = (string)param["LotType"];
+            }
+
+
             string module = (string)param["Module"];
 
             string jobId = (string)param["JobId"];
@@ -1188,6 +1223,8 @@ namespace Venus_RT.Modules
                 WaferInfo waferInfo = WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i);
                 cj.LotWafers.Add(waferInfo);
                 waferInfo.SequenceName = slotSequence[i];
+                waferInfo.EAPWaferID = slotWaferId[i];
+                waferInfo.LotType = lotType;
                 waferInfo.LotId = lotId;
                 //--- 2024-03-21 增加了waferinfo 相应的lotId信息 end---
 
@@ -1580,26 +1617,26 @@ namespace Venus_RT.Modules
             ModuleName SourceModule = (ModuleName)objs[0];
             int SourceSlot = (int)objs[1];
 
-            if (!_dictModuleTask.Keys.Contains(SourceModule))
-            {
-                LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"Invalid source module {SourceModule} for manual return wafer");
-                return false;
-            }
+            //if (!_dictModuleTask.Keys.Contains(SourceModule))
+            //{
+            //    LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"Invalid source module {SourceModule} for manual return wafer");
+            //    return false;
+            //}
 
-            if (WaferManager.Instance.CheckNoWafer(SourceModule, SourceSlot))
-            {
-                LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"Can not return wafer as {SourceModule} {SourceSlot} has no wafer");
-                return false;
-            }
+            //if (WaferManager.Instance.CheckNoWafer(SourceModule, SourceSlot))
+            //{
+            //    LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"Can not return wafer as {SourceModule} {SourceSlot} has no wafer");
+            //    return false;
+            //}
 
-            if (!_dictModuleTask[SourceModule].Scheduler.IsIdle)
-            {
-                LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"The module: {SourceModule} is not ready for return wafer");
-                return false;
-            }
+            //if (!_dictModuleTask[SourceModule].Scheduler.IsIdle)
+            //{
+            //    LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"The module: {SourceModule} is not ready for return wafer");
+            //    return false;
+            //}
 
             var wafer = WaferManager.Instance.GetWafer(SourceModule, SourceSlot);
-            LOG.Write(eEvent.EV_ROUTER, ModuleName.System, $"Manual return  wafer: {wafer.WaferOrigin} at {SourceModule} {SourceSlot} while system is auto running");
+            //LOG.Write(eEvent.EV_ROUTER, ModuleName.System, $"Manual return  wafer: {wafer.WaferOrigin} at {SourceModule} {SourceSlot} while system is auto running");
 
             _qeReturnWafers.Enqueue(wafer);
             return true;
@@ -1609,17 +1646,17 @@ namespace Venus_RT.Modules
         {
             var pmWaferCount = _dictModuleTask.Where(mod => ModuleHelper.IsPm(mod.Key) && WaferManager.Instance.CheckHasWafer(mod.Key, 0)).Count();
             var tmRobotWaferCount = (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 0) ? 1 : 0) + (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 1) ? 1 : 0);
-            if (!_dictModuleTask[ModuleName.TMRobot].Scheduler.IsIdle && (pmWaferCount > 0 || tmRobotWaferCount > 0))
-            {
-                LOG.Write(eEvent.ERR_ROUTER, ModuleName.TMRobot, $"The TM Robot is not ready for return wafer.");
-                return RState.Failed;
-            }
+            //if (!_dictModuleTask[ModuleName.TMRobot].Scheduler.IsIdle && (pmWaferCount > 0 || tmRobotWaferCount > 0))
+            //{
+            //    LOG.Write(eEvent.ERR_ROUTER, ModuleName.TMRobot, $"The TM Robot is not ready for return wafer.");
+            //    return RState.Failed;
+            //}
 
-            if (!_dictModuleTask[ModuleName.EfemRobot].Scheduler.IsIdle)
-            {
-                LOG.Write(eEvent.ERR_ROUTER, ModuleName.EfemRobot, $"The EFEM Robot is not ready for return wafer.");
-                return RState.Failed;
-            }
+            //if (!_dictModuleTask[ModuleName.EfemRobot].Scheduler.IsIdle)
+            //{
+            //    LOG.Write(eEvent.ERR_ROUTER, ModuleName.EfemRobot, $"The EFEM Robot is not ready for return wafer.");
+            //    return RState.Failed;
+            //}
 
             foreach (var mod in _dictModuleTask)
             {
@@ -1629,11 +1666,11 @@ namespace Venus_RT.Modules
                 if (!mod.Value.Scheduler.IsInclude)
                     continue;
 
-                if (!mod.Value.Scheduler.IsIdle)
-                {
-                    LOG.Write(eEvent.ERR_ROUTER, mod.Key, $"{mod.Key} is not ready for return wafer.");
-                    return RState.Failed;
-                }
+                //if (!mod.Value.Scheduler.IsIdle)
+                //{
+                //    LOG.Write(eEvent.ERR_ROUTER, mod.Key, $"{mod.Key} is not ready for return wafer.");
+                //    return RState.Failed;
+                //}
 
                 int nSlotNumber = ModuleHelper.IsLoadLock(mod.Key) ? (mod.Key == ModuleName.LLA ? _LLASlotNumber : _LLBSlotNumber) : (ModuleHelper.IsTMRobot(mod.Key) || ModuleHelper.IsEFEMRobot(mod.Key) ? 2 : 1);
                 for (int slot = 0; slot < nSlotNumber; slot++)
@@ -1643,18 +1680,19 @@ namespace Venus_RT.Modules
                         continue;
 
                     var destLP = (ModuleName)wafer.OriginStation;
-                    if (!_dictModuleTask[destLP].Scheduler.IsAvailable)
-                    {
-                        LOG.Write(eEvent.ERR_ROUTER, destLP, $"The destination Loadport {destLP} is not ready for return wafer.");
-                        return RState.Failed;
-                    }
+                    //if (!_dictModuleTask[destLP].Scheduler.IsAvailable)
+                    //{
+                    //    LOG.Write(eEvent.ERR_ROUTER, destLP, $"The destination Loadport {destLP} is not ready for return wafer.");
+                    //    return RState.Failed;
+                    //}
 
-                    if (!ModuleHelper.IsLoadPort(destLP))
-                    {
-                        LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"The wafer {wafer.WaferOrigin} cannot be return, please manually drag it.");
-                        return RState.Failed;
-                    }
+                    //if (!ModuleHelper.IsLoadPort(destLP))
+                    //{
+                    //    LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"The wafer {wafer.WaferOrigin} cannot be return, please manually drag it.");
+                    //    return RState.Failed;
+                    //}
                 }
+
             }
 
             Clear();
@@ -1696,6 +1734,7 @@ namespace Venus_RT.Modules
             if (systemWaferCount == 0)
                 return RState.End;
 
+
             if (_qeWaitCoolingLLs.Count > 0 && _dictModuleTask[_qeWaitCoolingLLs.First()].Scheduler.IsIdle && !IsLLReservedByEFEM(_qeWaitCoolingLLs.First()) && !IsLLReservedByTM(_qeWaitCoolingLLs.First()))
             {
                 if ((_dictModuleTask[_qeWaitCoolingLLs.First()] as LoadlockTask).Cooling())
@@ -1770,6 +1809,17 @@ namespace Venus_RT.Modules
             RunLotCleanTasks();
 
             CreateNewWaferTask();
+
+            //var endWaferTask = _lstWaferTasks.Where(item => ModuleHelper.IsLoadPort(item.destMod) && ModuleHelper.IsLoadPort(item.currentMod) && item.pressureStatus == RState.End);
+            //if (endWaferTask.Count() > 0)
+            //{
+            //    foreach (var waferTask in endWaferTask)
+            //    {
+            //        var pj = _lstProcessJobs.Find(process => process.InnerId == waferTask.lotId);
+            //        //_pmLastWaferEndTime[waferTask.DestinationPM] = DateTime.Now;
+            //    }
+            //}
+
             _lstWaferTasks.RemoveAll(item => ModuleHelper.IsLoadPort(item.destMod) && ModuleHelper.IsLoadPort(item.currentMod) && item.pressureStatus == RState.End);
 
             ReDispatchBlockingWafers();
@@ -2242,6 +2292,10 @@ namespace Venus_RT.Modules
         private void WaferLeaved(WaferTask wafer, MoveItem item)
         {
             _dictModuleTask[item.SourceModule].WaferLeaved(wafer, item.DestinationSlot);
+            if (ModuleHelper.IsPm(item.SourceModule))
+            {
+                _pmLastWaferEndTime[item.SourceModule] = DateTime.Now;
+            }
 
             //--2024-03-21 增加了PortJobWaferStart 上报事件 start--
             if (ModuleHelper.IsLoadPort(item.SourceModule))
@@ -3199,7 +3253,6 @@ namespace Venus_RT.Modules
                         hands.Add((Hand)i);
                 }
             }
-
             return hands;
         }
 
@@ -3527,7 +3580,7 @@ namespace Venus_RT.Modules
                         var inLLWafers = _lstWaferTasks.FindAll(wt => wt.currentMod == inLL).ToList();
 
                         int pickCount = 0;
-                        foreach(var inWafer in inLLWafers)
+                        foreach (var inWafer in inLLWafers)
                         {
                             if (!_dictModuleTask[inWafer.destMod].HasWafer && _dictModuleTask[inWafer.destMod].TimeToReady < 20 && pickCount < freeHands.Count)
                             {
@@ -3537,21 +3590,21 @@ namespace Venus_RT.Modules
                             }
                         }
 
-                        if(pickCount == 2)
+                        if (pickCount == 2)
                         {
                             _tmSchdActions.Enqueue(pickActions);
-                            foreach(var ac in placeActions)
+                            foreach (var ac in placeActions)
                             {
                                 _tmSchdActions.Enqueue(new List<MoveItem> { ac });
                             }
                         }
-                        else if(pickCount == 1)
+                        else if (pickCount == 1)
                         {
-                            if(inLLWafers.Count == 2 && freeHands.Count == 2)
+                            if (inLLWafers.Count == 2 && freeHands.Count == 2)
                             {
                                 var peerSlot = 1 - pickActions.First().SourceSlot;
                                 var peerWafer = inLLWafers.Find(wt => wt.currentSlot == peerSlot);
-                                if(peerWafer != null && _dictModuleTask[peerWafer.destMod].TimeToReady < 60)
+                                if (peerWafer != null && _dictModuleTask[peerWafer.destMod].TimeToReady < 60)
                                 {
                                     pickActions.Add(new MoveItem(peerWafer.currentMod, peerWafer.currentSlot, ModuleName.TMRobot, (int)freeHands[pickCount], freeHands[pickCount]));
                                 }
@@ -4146,7 +4199,7 @@ namespace Venus_RT.Modules
                             destLL = readyPushInLLs.Last().Key;
                         }
 
-                       var pickHand = SelectTMPickArm(destLL);
+                        var pickHand = SelectTMPickArm(destLL);
                         var llWafers = _lstWaferTasks.Where(x => x.currentMod == destLL).ToList();
                         if (llWafers.Count() == 0)
                         {
@@ -4154,11 +4207,11 @@ namespace Venus_RT.Modules
                         }
                         for (int i = 0; i < llWafers.Count(); i++)
                         {
-                            if (_lstWaferTasks.Count(x => ModuleHelper.IsPm(x.currentMod) && llWafers[i].destMod==x.currentMod)==0)
+                            if (_lstWaferTasks.Count(x => ModuleHelper.IsPm(x.currentMod) && llWafers[i].destMod == x.currentMod) == 0)
                             {
                                 _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(destLL, GetLLFixedReadyInOutSlots(destLL).tOutSlot.First(), ModuleName.TMRobot, (int)pickHand, pickHand) });
                             }
-                        } 
+                        }
                         //if (_lstWaferTasks.Count(x => ModuleHelper.IsPm(x.currentMod)) == 0)
                         //{ 
                         //_tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(destLL, GetLLFixedReadyInOutSlots(destLL).tOutSlot.First(), ModuleName.TMRobot, (int)pickHand, pickHand) });
@@ -4705,7 +4758,7 @@ namespace Venus_RT.Modules
                         schdPumpingLLs.Add(ModuleName.LLA);
                 }
                 else if ((llaWaferStatus.outSlot.Count == _LLASlotNumber) ||
-                         (llaWaferStatus.outSlot.Count > 0 && llaWaferStatus.outSlot.Count < _LLASlotNumber && !NeedPairingForNexWafer()))
+                         (llaWaferStatus.outSlot.Count > 0 && llaWaferStatus.outSlot.Count < _LLASlotNumber))
                 {
                     if (!schdVentingLLs.Contains(ModuleName.LLA))
                         schdCoolingLLs.Add(ModuleName.LLA);
@@ -4718,7 +4771,7 @@ namespace Venus_RT.Modules
                         schdPumpingLLs.Add(ModuleName.LLB);
                 }
                 else if ((llbWaferStatus.outSlot.Count == _LLBSlotNumber) ||
-                         (llbWaferStatus.outSlot.Count > 0 && llbWaferStatus.outSlot.Count < _LLBSlotNumber && !NeedPairingForNexWafer()))
+                         (llbWaferStatus.outSlot.Count > 0 && llbWaferStatus.outSlot.Count < _LLBSlotNumber))
                 {
                     if (!schdVentingLLs.Contains(ModuleName.LLB))
                         schdCoolingLLs.Add(ModuleName.LLB);
@@ -4781,7 +4834,10 @@ namespace Venus_RT.Modules
                         var preClean = pj.Sequence.GetPreCleanRecipe(pm.Key);
                         if (!string.IsNullOrWhiteSpace(preClean))
                         {
-                            pmTask.InvokePreJobClean(preClean);
+                            if (DateTime.Now.Subtract(_pmLastWaferEndTime[pm.Key]).TotalSeconds > _preCleanMaxIdleTime)
+                            {
+                                pmTask.InvokePreJobClean(preClean);
+                            }
                             _preLotCleanMarks[pm.Key].Add(waitInWafer.lotId);
                         }
                     }
@@ -5011,7 +5067,7 @@ namespace Venus_RT.Modules
                         return;
 
                     var llActions = _curTmAction.Find(ac => ModuleHelper.IsLoadLock(ac.DestinationModule));
-                    if(llActions != null && !_qeWaitCoolingLLs.Contains(llActions.DestinationModule) && !RouteManager.IsATMMode)
+                    if (llActions != null && !_qeWaitCoolingLLs.Contains(llActions.DestinationModule) && !RouteManager.IsATMMode)
                     {
                         _qeWaitCoolingLLs.Enqueue(llActions.DestinationModule);
                     }

Venus/Venus_RT/Modules/TM/MFPurgeRoutine.cs

@@ -83,6 +83,14 @@ namespace Venus_RT.Modules.TM
 
         public void Abort()
         {
+            if (Module == ModuleName.LLA)
+            {
+                _JetTM.SetLLAFlow(0);
+            }
+            else if (Module == ModuleName.LLB)
+            {
+                _JetTM.SetLLBFlow(0);
+            }
             _JetTM.CloseModuleAllValves(Module);
         }
 
@@ -101,8 +109,16 @@ namespace Venus_RT.Modules.TM
                 _JetTM.TurnVentValve(Module, true);
             }
             else
-            { 
-               _JetTM.TurnPurgeValve(Module, true);
+            {
+                if (Module == ModuleName.LLA)
+                { 
+                    _JetTM.SetLLAFlow(2000);
+                }
+                else if(Module == ModuleName.LLB)
+                {
+                    _JetTM.SetLLBFlow(2000);
+                }
+                _JetTM.TurnPurgeValve(Module, true);
             }
             return true;
         }
@@ -115,6 +131,14 @@ namespace Venus_RT.Modules.TM
             }
             else
             {
+                if (Module == ModuleName.LLA)
+                {
+                    _JetTM.SetLLAFlow(0);
+                }
+                else if (Module == ModuleName.LLB)
+                {
+                    _JetTM.SetLLBFlow(0);
+                }
                 _JetTM.TurnPurgeValve(Module, false);
             }
             return true;

Venus/Venus_RT/Venus_RT.csproj

@@ -349,6 +349,7 @@
     <Compile Include="Modules\TM\MFSwapRoutine.cs" />
     <Compile Include="Modules\TM\MFVentRoutine.cs" />
     <Compile Include="Modules\TM\TMEntity.cs" />
+    <Compile Include="Modules\TM\Vent.cs" />
     <Compile Include="Modules\TM\VenusEntity\SEMFHomeRoutine.cs" />
     <Compile Include="Modules\TM\VenusEntity\SEMFLeakCheckRoutine.cs" />
     <Compile Include="Modules\TM\VenusEntity\SEMFPickRoutine.cs" />

Venus/Venus_Simulator/Devices/AdTecGeneratorMockPMA.cs

@@ -46,7 +46,7 @@ namespace Venus_Simulator.Devices
                     case "Q":
                         if (_simGeneratorStatus == GeneratorStatus.ON)
                         {
-                            sRes = "2010000 12345 00900 00100 45678\r";
+                            sRes = "2010000 12345 00900 00010 45678\r";
                         }
                         else if (_simGeneratorStatus == GeneratorStatus.OFF)
                         {