RtState.cs 4.6 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Linq;
  4. using System.Text;
  5. using System.Threading.Tasks;
  6. namespace Venus_Core
  7. {
  8. public enum RtState
  9. {
  10. Init,
  11. Initializing,
  12. Idle,
  13. Manual,
  14. Transfer,
  15. AutoIdle,
  16. AutoRunning,
  17. AutoRunningPaused,
  18. ReturningCassette,
  19. Cycle,
  20. PrepareCycle,
  21. PostCycle,
  22. SetSpeed,
  23. Error,
  24. Reset,
  25. Processing,
  26. PostProcess,
  27. PauseProcess,
  28. //Maintenance,
  29. //WaferMapping,
  30. //Cycling,
  31. TMCycle,
  32. SETMCycle,
  33. SERunning,
  34. ReturnWafer,
  35. SETransfer,
  36. SEReturnWafer,
  37. Aborting
  38. }
  39. public enum PMState
  40. {
  41. Init,
  42. Idle,
  43. Homing,
  44. GasFlowing,
  45. RfPowering,
  46. Heating,
  47. LaunchingPump,
  48. LaunchingTurboPump,
  49. Pumping,
  50. Venting,
  51. Purging,
  52. GasLinePurge,
  53. PumpingLoadLock,
  54. VentingLoadLock,
  55. PurgingLoadLock,
  56. LoadLockLeakCheck,
  57. MoveLift,
  58. Purge,
  59. // transfer
  60. LLPlacing,
  61. LLPicking,
  62. Transfer,
  63. Error,
  64. PrepareTransfer,
  65. PostTransfer,
  66. TransferHandoff,
  67. //Process,
  68. LeakCheck,
  69. GasBoxLeakCheck,
  70. LiftpinMoving,
  71. LiftpinWaiting,
  72. GuidePinMoving,
  73. Clean,
  74. LoadProcessRecipe,
  75. PreProcess,
  76. Processing,
  77. PostProcess,
  78. OpeningLid,
  79. ClosingLid,
  80. MFCVerification,
  81. AllMFCVerification,
  82. // exchange wafer with TM
  83. PreparePick,
  84. PreparePlace,
  85. ReadyForPick,
  86. ReadyForPlace,
  87. DropDownWafer,
  88. LiftUpWafer,
  89. DropDownReady,
  90. LiftUpReady,
  91. FinishPick,
  92. FinishPlace,
  93. PartialPressureTesting,
  94. VATPerformanceTesting
  95. }
  96. public enum TMState
  97. {
  98. Unknown,
  99. Init,
  100. Initializing,
  101. InitializingRB,
  102. Idle,
  103. Error,
  104. Pumping,
  105. Venting,
  106. Purging,
  107. Leakcheck,
  108. Picking,
  109. Placing,
  110. Swaping,
  111. PMPicking,
  112. PMPlacing,
  113. PMSwaping,
  114. Aligning,
  115. Mapping,
  116. Extending,
  117. Retracting,
  118. Swapping,
  119. Gotoing,
  120. ControllingPressure,
  121. SetSpeeding,
  122. QuerySpeeding,
  123. SaveSpeeding
  124. }
  125. public enum LLState
  126. {
  127. //Unknown,
  128. //Init,
  129. //Initializing,
  130. //Idle,
  131. //Error,
  132. //Pumping,
  133. //Venting,
  134. //Purging,
  135. //Leakchecking,
  136. //Picking,
  137. //Placing,
  138. //Swaping,
  139. //PMPicking,
  140. //PMPlacing,
  141. //PMSwaping,
  142. //Aligning,
  143. //Mapping,
  144. //Extending,
  145. //Retracting,
  146. //Swapping,
  147. //Gotoing,
  148. Unknown,
  149. Init,
  150. Initializing,
  151. Idle,
  152. Error,
  153. Pumping,
  154. Venting,
  155. Purging,
  156. Cooling,
  157. LeakCheck,
  158. Prepare_For_TM,
  159. Prepare_For_EFEM,
  160. Ready_For_TM,
  161. Ready_For_EFEM,
  162. WaitCooling,
  163. AutoCooling,
  164. }
  165. public enum EFEMSTATE
  166. {
  167. Unknown, // 0
  168. Initializing, // 1
  169. Idle, // 2
  170. Error, // 3
  171. Picking, // 4
  172. Placing, // 5
  173. Aligning, // 6
  174. Mapping, // 7
  175. Init, // 8
  176. Orgshing, // 9
  177. Lifting, // 10
  178. InitingAL, // 11
  179. InitingRB, // 12
  180. Extending, // 13
  181. Retracting, // 14
  182. //SettingLamp, // 15
  183. Swapping,
  184. Gotoing,
  185. Gripping,
  186. Ungripping,
  187. Fliping,
  188. }
  189. public enum VceSTATE
  190. {
  191. Init,//初始化
  192. Idle,//空闲
  193. Error,//错误
  194. ClearError,
  195. Homing,//home操作 对应HM
  196. DoorOpenning,//开门操作 对应DC
  197. DoorClosing,//关门操作 对应DO
  198. Loading,//取cassette操作 包括开门关门 对应LOAD,
  199. UnLoading,
  200. Mapping,//扫片
  201. ReadingMap, //对应MP 包括三种格式 hex binary 智能(只有智能模式可以判断复杂情况)
  202. Goting,//指定槽到达窗口 对应 GC
  203. GotingLP,
  204. CheckStatus,
  205. Resetting,//重置
  206. LoadingWithSMIF,//有SMIF的load
  207. UnLoadingWithSMIF,//有SMIF的load
  208. LoadPreparing,//准备
  209. SafeLoading,
  210. SafeUnloading,
  211. Pumping,
  212. Venting,
  213. LeakChecking,
  214. Unknown
  215. }
  216. }