Kepler-Release/Venus/Venus_RT/Config/EquipmentVariables.xml

<?xml version="1.0"?>
<EquipmentVariables xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
	<SpoolingStreamFunctions />
	<SystemInfo clockFormat="yyMMddHHmmss" traceSampleMax="20" traceMaxCount="5" supportValidIpRestrict="false" validIps="" Encoding="ASCII" name="EfemDual" version="1.0.1" />
	<CommunicationInfo remoteIpAddress="127.0.0.1" port="5000" supportHeartCheck="true" heartInterval="5" />
	<StatusVariables>
		<StatusVariable id="1" valueType="List" logicalName="AlarmsEnabled" eventTrigger="" units="" />
		<StatusVariable id="2" valueType="List" logicalName="AlarmsSet" eventTrigger="" units="" />
		<StatusVariable id="3" valueType="Ascii" logicalName="Clock" eventTrigger="" units="" />
		<StatusVariable id="4" valueType="U4" logicalName="ControlState" eventTrigger="" units="" />
		<StatusVariable id="5" valueType="List" logicalName="EventsEnabled" eventTrigger="" units="" />
		<StatusVariable id="6" valueType="Ascii" logicalName="PPExecName" eventTrigger="" units="" />
		<StatusVariable id="7" valueType="U1" logicalName="PreviousProcessState" eventTrigger="" units="" />
		<StatusVariable id="8" valueType="U1" logicalName="ProcessState" eventTrigger="" units="" />
		<StatusVariable id="9" valueType="U4" logicalName="SpoolCountActual" eventTrigger="" units="" />
		<StatusVariable id="10" valueType="U4" logicalName="SpoolCountTotal" eventTrigger="" units="" />
		<StatusVariable id="11" valueType="Ascii" logicalName="SpoolFullTime" eventTrigger="" units="" />
		<StatusVariable id="12" valueType="Ascii" logicalName="SpoolStartTime" eventTrigger="" units="" />
		<StatusVariable id="13" valueType="Ascii" logicalName="SpoolState" eventTrigger="" units="" />
		<StatusVariable id="14" valueType="Ascii" logicalName="SpoolSubstate" eventTrigger="" units="" />
		<StatusVariable id="10101001" valueType="Ascii" logicalName="CJQueue_Space" eventTrigger="" units="" />
		<StatusVariable id="10101002" valueType="Ascii" logicalName="PJQueue_Space" eventTrigger="" units="" />
		<StatusVariable id="10101003" valueType="Boolean" logicalName="System.HasActiveAlarm" eventTrigger="" units="" />
		<StatusVariable id="10101004" valueType="Boolean" logicalName="System.IsAlarm" eventTrigger="" units="" />
		<StatusVariable id="10101005" valueType="Boolean" logicalName="System.IsAutoRunning" eventTrigger="" units="" />
		<StatusVariable id="10101006" valueType="Boolean" logicalName="System.IsBusy" eventTrigger="" units="" />
		<StatusVariable id="10101007" valueType="Boolean" logicalName="System.IsIdle" eventTrigger="" units="" />
		<StatusVariable id="10101008" valueType="Boolean" logicalName="System.IsSpoolingEnable" eventTrigger="" units="" />
		<StatusVariable id="10101009" valueType="Ascii" logicalName="System.SpoolingState" eventTrigger="" units="" />
		<StatusVariable id="10101010" valueType="Boolean" logicalName="System.IsAutoMode" eventTrigger="" units="" />
		<StatusVariable id="10101011" valueType="Boolean" logicalName="System.IsConnectedWithHost" eventTrigger="" units="" />
		<StatusVariable id="10101012" valueType="Ascii" logicalName="System.EquipmentMode" eventTrigger="" units="" />
		<StatusVariable id="10101013" valueType="Ascii" logicalName="System.EquipmentStatus" eventTrigger="" units="" />
		<StatusVariable id="10202001" valueType="Boolean" logicalName="System.EFEM.AirErrorForRobot" eventTrigger="" units="" />
		<StatusVariable id="10202002" valueType="Boolean" logicalName="System.EFEM.DoorOpen" eventTrigger="" units="" />
		<StatusVariable id="10202003" valueType="Boolean" logicalName="System.EFEM.EmoAlarm" eventTrigger="" units="" />
		<StatusVariable id="10202004" valueType="Boolean" logicalName="System.EFEM.FFUAlarm" eventTrigger="" units="" />
		<StatusVariable id="10202005" valueType="Boolean" logicalName="System.EFEM.IonizerAlarm" eventTrigger="" units="" />
		<StatusVariable id="10202006" valueType="Boolean" logicalName="System.EFEM.IsMaintain" eventTrigger="" units="" />
		<StatusVariable id="10202007" valueType="Boolean" logicalName="System.EFEM.CompressedAirPressuF8arm" eventTrigger="" units="" />
		<StatusVariable id="10202008" valueType="Boolean" logicalName="System.EFEM.DifferentialPressureSensorSetting1Alarm" eventTrigger="" units="" />
		<StatusVariable id="10202009" valueType="Boolean" logicalName="System.EFEM.DifferentialPressureSensorSetting2Alarm" eventTrigger="" units="" />
		<StatusVariable id="10202010" valueType="Boolean" logicalName="System.EFEM.DrivePowerAlarm" eventTrigger="" units="" />
		<StatusVariable id="10202011" valueType="Boolean" logicalName="System.EFEM.FlowGaugeWarning" eventTrigger="" units="" />
		<StatusVariable id="10202012" valueType="Boolean" logicalName="System.EFEM.VacuumSourcePressuF8arm" eventTrigger="" units="" />
		<StatusVariable id="10202013" valueType="Boolean" logicalName="System.EFEM.WaterLeakWarning" eventTrigger="" units="" />
		<StatusVariable id="10203001" valueType="Boolean" logicalName="System.io.IsConnected" eventTrigger="" units="" />
		<StatusVariable id="10214001" valueType="Boolean" logicalName="System.SensorCDAPressureSW.Value" eventTrigger="" units="" />
		<StatusVariable id="10215001" valueType="Boolean" logicalName="System.SensorEFEMSidePlanClosed.Value" eventTrigger="" units="" />
		<StatusVariable id="10216001" valueType="Boolean" logicalName="System.SensorINONormal.Value" eventTrigger="" units="" />
		<StatusVariable id="10217001" valueType="Boolean" logicalName="System.SensorLowArmPressure.Value" eventTrigger="" units="" />
		<StatusVariable id="10218001" valueType="Boolean" logicalName="System.SensorTMBufferOTSW.Value" eventTrigger="" units="" />
		<StatusVariable id="10219001" valueType="Boolean" logicalName="System.SensorTMFFUNormal.Value" eventTrigger="" units="" />
		<StatusVariable id="10220001" valueType="Boolean" logicalName="System.SensorTMInSafety.Value" eventTrigger="" units="" />
		<StatusVariable id="10221001" valueType="Boolean" logicalName="System.SensorTMPowerOn.Value" eventTrigger="" units="" />
		<StatusVariable id="10222001" valueType="Boolean" logicalName="System.SensorTMRobotAlarm.Value" eventTrigger="" units="" />
		<StatusVariable id="10223001" valueType="Boolean" logicalName="System.SensorUpArmPressure.Value" eventTrigger="" units="" />
		<StatusVariable id="10224001" valueType="Boolean" logicalName="System.SensorVaccumPressureSW.Value" eventTrigger="" units="" />
		<StatusVariable id="10225001" valueType="Boolean" logicalName="System.SensorWaterFlowSW.Value" eventTrigger="" units="" />
		<StatusVariable id="10226001" valueType="Boolean" logicalName="System.SensorWaterLeakSW.Value" eventTrigger="" units="" />
		<StatusVariable id="10227001" valueType="Boolean" logicalName="System.SensorTMSideDoorClosed.Value" eventTrigger="" units="" />
		<StatusVariable id="10228001" valueType="Boolean" logicalName="System.SensorWaterInletValve.Value" eventTrigger="" units="" />
		<StatusVariable id="10301001" valueType="Boolean" logicalName="System.IoValve.WaterInletValve.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="10301002" valueType="Boolean" logicalName="System.IoValve.WaterInletValve.Status" eventTrigger="" units="" />
		<StatusVariable id="20101001" valueType="Boolean" logicalName="LP1.CassettePlaced" eventTrigger="" units="" />
		<StatusVariable id="20101002" valueType="U4" logicalName="LP1.CassettePresent" eventTrigger="" units="" />
		<StatusVariable id="20101003" valueType="Boolean" logicalName="LP1.IsClamped" eventTrigger="" units="" />
		<StatusVariable id="20101004" valueType="Boolean" logicalName="LP1.IsDocked" eventTrigger="" units="" />
		<StatusVariable id="20101005" valueType="Boolean" logicalName="LP1.IsLoaded" eventTrigger="" units="" />
		<StatusVariable id="20101006" valueType="Boolean" logicalName="LP1.IsMapped" eventTrigger="" units="" />
		<StatusVariable id="20101007" valueType="Boolean" logicalName="LP1.IsWaferProtrude" eventTrigger="" units="" />
		<StatusVariable id="20101008" valueType="Boolean" logicalName="LP2.CassettePlaced" eventTrigger="" units="" />
		<StatusVariable id="20101009" valueType="U4" logicalName="LP2.CassettePresent" eventTrigger="" units="" />
		<StatusVariable id="20101010" valueType="Boolean" logicalName="LP2.IsClamped" eventTrigger="" units="" />
		<StatusVariable id="20101011" valueType="Boolean" logicalName="LP2.IsDocked" eventTrigger="" units="" />
		<StatusVariable id="20101012" valueType="Boolean" logicalName="LP2.IsLoaded" eventTrigger="" units="" />
		<StatusVariable id="20101013" valueType="Boolean" logicalName="LP2.IsMapped" eventTrigger="" units="" />
		<StatusVariable id="20101014" valueType="Boolean" logicalName="LP2.IsWaferProtrude" eventTrigger="" units="" />
		<StatusVariable id="20101015" valueType="Boolean" logicalName="LP3.CassettePlaced" eventTrigger="" units="" />
		<StatusVariable id="20101016" valueType="U4" logicalName="LP3.CassettePresent" eventTrigger="" units="" />
		<StatusVariable id="20101017" valueType="Boolean" logicalName="LP3.IsClamped" eventTrigger="" units="" />
		<StatusVariable id="20101018" valueType="Boolean" logicalName="LP3.IsDocked" eventTrigger="" units="" />
		<StatusVariable id="20101019" valueType="Boolean" logicalName="LP3.IsLoaded" eventTrigger="" units="" />
		<StatusVariable id="20101020" valueType="Boolean" logicalName="LP3.IsMapped" eventTrigger="" units="" />
		<StatusVariable id="20101021" valueType="U4" logicalName="LP1.AccessMode" eventTrigger="" units="" />
		<StatusVariable id="20101022" valueType="U4" logicalName="LP1.State" eventTrigger="" units="" />
		<StatusVariable id="20101023" valueType="U4" logicalName="LP2.AccessMode" eventTrigger="" units="" />
		<StatusVariable id="20101024" valueType="U4" logicalName="LP2.State" eventTrigger="" units="" />
		<StatusVariable id="20101025" valueType="U4" logicalName="LP3.AccessMode" eventTrigger="" units="" />
		<StatusVariable id="20101026" valueType="U4" logicalName="LP3.State" eventTrigger="" units="" />
		<StatusVariable id="310101001" valueType="Boolean" logicalName="LLA.MainPump" eventTrigger="" units="" />
		<StatusVariable id="310101002" valueType="Boolean" logicalName="LLA.MainPump.IsEoor" eventTrigger="" units="" />
		<StatusVariable id="310101003" valueType="Boolean" logicalName="LLA.MainPump.IsOn" eventTrigger="" units="" />
		<StatusVariable id="310101004" valueType="Boolean" logicalName="LLA.MainPump.IsRunning" eventTrigger="" units="" />
		<StatusVariable id="310101005" valueType="F8" logicalName="LLA.MainPump.Speed" eventTrigger="" units="" />
		<StatusVariable id="310101006" valueType="F8" logicalName="LLA.MainPump.Temperature" eventTrigger="" units="" />
		<StatusVariable id="310101007" valueType="Boolean" logicalName="LLB.MainPump" eventTrigger="" units="" />
		<StatusVariable id="310101008" valueType="Boolean" logicalName="LLB.MainPump.IsEoor" eventTrigger="" units="" />
		<StatusVariable id="310101009" valueType="Boolean" logicalName="LLB.MainPump.IsOn" eventTrigger="" units="" />
		<StatusVariable id="310101010" valueType="Boolean" logicalName="LLB.MainPump.IsRunning" eventTrigger="" units="" />
		<StatusVariable id="310101011" valueType="F8" logicalName="LLB.MainPump.Speed" eventTrigger="" units="" />
		<StatusVariable id="310101012" valueType="F8" logicalName="LLB.MainPump.Temperature" eventTrigger="" units="" />
		<StatusVariable id="430101001" valueType="Boolean" logicalName="TM.CDAPressureSwitch" eventTrigger="" units="" />
		<StatusVariable id="430101002" valueType="Boolean" logicalName="TM.CDAPressureSwitch.Value" eventTrigger="" units="" />
		<StatusVariable id="430101003" valueType="F8" logicalName="TM.ChamberPressure" eventTrigger="" units="" />
		<StatusVariable id="430101004" valueType="Boolean" logicalName="TM.EfemRobotNotExtendLLA" eventTrigger="" units="" />
		<StatusVariable id="430101005" valueType="Boolean" logicalName="TM.EfemRobotNotExtendLLA.Value" eventTrigger="" units="" />
		<StatusVariable id="430101006" valueType="Boolean" logicalName="TM.EfemRobotNotExtendLLB" eventTrigger="" units="" />
		<StatusVariable id="430101007" valueType="Boolean" logicalName="TM.EfemRobotNotExtendLLB.Value" eventTrigger="" units="" />
		<StatusVariable id="430101008" valueType="Boolean" logicalName="TM.EFEMSideDoorClosed" eventTrigger="" units="" />
		<StatusVariable id="430101009" valueType="Boolean" logicalName="TM.EFEMSideDoorClosed.Value" eventTrigger="" units="" />
		<StatusVariable id="430101010" valueType="F8" logicalName="TM.ForelinePressure" eventTrigger="" units="" />
		<StatusVariable id="430101011" valueType="F8" logicalName="TM.IoSensor" eventTrigger="" units="" />
		<StatusVariable id="430101012" valueType="Boolean" logicalName="TM.IoSensor.CDAPressureSwitch" eventTrigger="" units="" />
		<StatusVariable id="430101013" valueType="Boolean" logicalName="TM.IoSensor.CDAPressureSwitch.Value" eventTrigger="" units="" />
		<StatusVariable id="430101014" valueType="Boolean" logicalName="TM.IoSensor.EfemRobotNotExtendLLA" eventTrigger="" units="" />
		<StatusVariable id="430101015" valueType="Boolean" logicalName="TM.IoSensor.EfemRobotNotExtendLLA.Value" eventTrigger="" units="" />
		<StatusVariable id="430101016" valueType="Boolean" logicalName="TM.IoSensor.EfemRobotNotExtendLLB" eventTrigger="" units="" />
		<StatusVariable id="430101017" valueType="Boolean" logicalName="TM.IoSensor.EfemRobotNotExtendLLB.Value" eventTrigger="" units="" />
		<StatusVariable id="430101018" valueType="Boolean" logicalName="TM.IoSensor.EFEMSideDoorClosed" eventTrigger="" units="" />
		<StatusVariable id="430101019" valueType="Boolean" logicalName="TM.IoSensor.EFEMSideDoorClosed.Value" eventTrigger="" units="" />
		<StatusVariable id="430101020" valueType="Boolean" logicalName="TM.IoSensor.LLAATMSwitch" eventTrigger="" units="" />
		<StatusVariable id="430101021" valueType="Boolean" logicalName="TM.IoSensor.LLAATMSwitch.Value" eventTrigger="" units="" />
		<StatusVariable id="430101022" valueType="Boolean" logicalName="TM.IoSensor.LLAPCWFlowSwitch" eventTrigger="" units="" />
		<StatusVariable id="430101023" valueType="Boolean" logicalName="TM.IoSensor.LLAPCWFlowSwitch.Value" eventTrigger="" units="" />
		<StatusVariable id="430101024" valueType="Boolean" logicalName="TM.IoSensor.LLAVacSwitch" eventTrigger="" units="" />
		<StatusVariable id="430101025" valueType="Boolean" logicalName="TM.IoSensor.LLAVacSwitch.Value" eventTrigger="" units="" />
		<StatusVariable id="430101026" valueType="Boolean" logicalName="TM.IoSensor.LLBATMSwitch" eventTrigger="" units="" />
		<StatusVariable id="430101027" valueType="Boolean" logicalName="TM.IoSensor.LLBATMSwitch.Value" eventTrigger="" units="" />
		<StatusVariable id="430101028" valueType="Boolean" logicalName="TM.IoSensor.LLBPCWFlowSwitch" eventTrigger="" units="" />
		<StatusVariable id="430101029" valueType="Boolean" logicalName="TM.IoSensor.LLBPCWFlowSwitch.Value" eventTrigger="" units="" />
		<StatusVariable id="430101030" valueType="Boolean" logicalName="TM.IoSensor.LLBVacSwitch" eventTrigger="" units="" />
		<StatusVariable id="430101031" valueType="Boolean" logicalName="TM.IoSensor.LLBVacSwitch.Value" eventTrigger="" units="" />
		<StatusVariable id="430101032" valueType="Boolean" logicalName="TM.IoSensor.N2PressureSwitch" eventTrigger="" units="" />
		<StatusVariable id="430101033" valueType="Boolean" logicalName="TM.IoSensor.N2PressureSwitch.Value" eventTrigger="" units="" />
		<StatusVariable id="430101034" valueType="Boolean" logicalName="TM.IoSensor.TMATMSwitch" eventTrigger="" units="" />
		<StatusVariable id="430101035" valueType="Boolean" logicalName="TM.IoSensor.TMATMSwitch.Value" eventTrigger="" units="" />
		<StatusVariable id="430101036" valueType="Boolean" logicalName="TM.IoSensor.TMInSafety" eventTrigger="" units="" />
		<StatusVariable id="430101037" valueType="Boolean" logicalName="TM.IoSensor.TMInSafety.Value" eventTrigger="" units="" />
		<StatusVariable id="430101038" valueType="Boolean" logicalName="TM.IoSensor.TMLidClosed" eventTrigger="" units="" />
		<StatusVariable id="430101039" valueType="Boolean" logicalName="TM.IoSensor.TMLidClosed.Value" eventTrigger="" units="" />
		<StatusVariable id="430101040" valueType="Boolean" logicalName="TM.IoSensor.TMPCWFlowSwitch" eventTrigger="" units="" />
		<StatusVariable id="430101041" valueType="Boolean" logicalName="TM.IoSensor.TMPCWFlowSwitch.Value" eventTrigger="" units="" />
		<StatusVariable id="430101042" valueType="Boolean" logicalName="TM.IoSensor.TMPowerOn" eventTrigger="" units="" />
		<StatusVariable id="430101043" valueType="Boolean" logicalName="TM.IoSensor.TMPowerOn.Value" eventTrigger="" units="" />
		<StatusVariable id="430101044" valueType="Boolean" logicalName="TM.IoSensor.TMRobotNotExtendLLA" eventTrigger="" units="" />
		<StatusVariable id="430101045" valueType="Boolean" logicalName="TM.IoSensor.TMRobotNotExtendLLA.Value" eventTrigger="" units="" />
		<StatusVariable id="430101046" valueType="Boolean" logicalName="TM.IoSensor.TMRobotNotExtendLLB" eventTrigger="" units="" />
		<StatusVariable id="430101047" valueType="Boolean" logicalName="TM.IoSensor.TMRobotNotExtendLLB.Value" eventTrigger="" units="" />
		<StatusVariable id="430101048" valueType="Boolean" logicalName="TM.IoSensor.TMRobotNotExtendPMA" eventTrigger="" units="" />
		<StatusVariable id="430101049" valueType="Boolean" logicalName="TM.IoSensor.TMRobotNotExtendPMA.Value" eventTrigger="" units="" />
		<StatusVariable id="430101050" valueType="Boolean" logicalName="TM.IoSensor.TMRobotNotExtendPMB" eventTrigger="" units="" />
		<StatusVariable id="430101051" valueType="Boolean" logicalName="TM.IoSensor.TMRobotNotExtendPMB.Value" eventTrigger="" units="" />
		<StatusVariable id="430101052" valueType="Boolean" logicalName="TM.IoSensor.TMRobotNotExtendPMC" eventTrigger="" units="" />
		<StatusVariable id="430101053" valueType="Boolean" logicalName="TM.IoSensor.TMRobotNotExtendPMC.Value" eventTrigger="" units="" />
		<StatusVariable id="430101054" valueType="Boolean" logicalName="TM.IoSensor.TMRobotNotExtendPMD" eventTrigger="" units="" />
		<StatusVariable id="430101055" valueType="Boolean" logicalName="TM.IoSensor.TMRobotNotExtendPMD.Value" eventTrigger="" units="" />
		<StatusVariable id="430101056" valueType="Boolean" logicalName="TM.IoSensor.TMVacSwitch" eventTrigger="" units="" />
		<StatusVariable id="430101057" valueType="Boolean" logicalName="TM.IoSensor.TMVacSwitch.Value" eventTrigger="" units="" />
		<StatusVariable id="430101058" valueType="Boolean" logicalName="TM.IoSensor.VaccumPressureSwitch" eventTrigger="" units="" />
		<StatusVariable id="430101059" valueType="Boolean" logicalName="TM.IoSensor.VaccumPressureSwitch.Value" eventTrigger="" units="" />
		<StatusVariable id="430101060" valueType="Boolean" logicalName="TM.IoSensor.WaferLeakSensor" eventTrigger="" units="" />
		<StatusVariable id="430101061" valueType="Boolean" logicalName="TM.IoSensor.WaferLeakSensor.Value" eventTrigger="" units="" />
		<StatusVariable id="430101062" valueType="Boolean" logicalName="TM.IoValve" eventTrigger="" units="" />
		<StatusVariable id="430101063" valueType="Boolean" logicalName="TM.IoValve.LLAFastPumpValve" eventTrigger="" units="" />
		<StatusVariable id="430101064" valueType="Boolean" logicalName="TM.IoValve.LLAFastPumpValve.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="430101065" valueType="Boolean" logicalName="TM.IoValve.LLAFastPumpValve.Status" eventTrigger="" units="" />
		<StatusVariable id="430101066" valueType="Boolean" logicalName="TM.IoValve.LLAPurgeValve" eventTrigger="" units="" />
		<StatusVariable id="430101067" valueType="Boolean" logicalName="TM.IoValve.LLAPurgeValve.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="430101068" valueType="Boolean" logicalName="TM.IoValve.LLAPurgeValve.Status" eventTrigger="" units="" />
		<StatusVariable id="430101069" valueType="Boolean" logicalName="TM.IoValve.LLASoftPumpValve" eventTrigger="" units="" />
		<StatusVariable id="430101070" valueType="Boolean" logicalName="TM.IoValve.LLASoftPumpValve.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="430101071" valueType="Boolean" logicalName="TM.IoValve.LLASoftPumpValve.Status" eventTrigger="" units="" />
		<StatusVariable id="430101072" valueType="Boolean" logicalName="TM.IoValve.LLAVentValve" eventTrigger="" units="" />
		<StatusVariable id="430101073" valueType="Boolean" logicalName="TM.IoValve.LLAVentValve.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="430101074" valueType="Boolean" logicalName="TM.IoValve.LLAVentValve.Status" eventTrigger="" units="" />
		<StatusVariable id="430101075" valueType="Boolean" logicalName="TM.IoValve.LLBFastPumpValve" eventTrigger="" units="" />
		<StatusVariable id="430101076" valueType="Boolean" logicalName="TM.IoValve.LLBFastPumpValve.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="430101077" valueType="Boolean" logicalName="TM.IoValve.LLBFastPumpValve.Status" eventTrigger="" units="" />
		<StatusVariable id="430101078" valueType="Boolean" logicalName="TM.IoValve.LLBPurgeValve" eventTrigger="" units="" />
		<StatusVariable id="430101079" valueType="Boolean" logicalName="TM.IoValve.LLBPurgeValve.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="430101080" valueType="Boolean" logicalName="TM.IoValve.LLBPurgeValve.Status" eventTrigger="" units="" />
		<StatusVariable id="430101081" valueType="Boolean" logicalName="TM.IoValve.LLBSoftPumpValve" eventTrigger="" units="" />
		<StatusVariable id="430101082" valueType="Boolean" logicalName="TM.IoValve.LLBSoftPumpValve.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="430101083" valueType="Boolean" logicalName="TM.IoValve.LLBSoftPumpValve.Status" eventTrigger="" units="" />
		<StatusVariable id="430101084" valueType="Boolean" logicalName="TM.IoValve.LLBVentValve" eventTrigger="" units="" />
		<StatusVariable id="430101085" valueType="Boolean" logicalName="TM.IoValve.LLBVentValve.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="430101086" valueType="Boolean" logicalName="TM.IoValve.LLBVentValve.Status" eventTrigger="" units="" />
		<StatusVariable id="430101087" valueType="Boolean" logicalName="TM.IoValve.TMFastPumpValve" eventTrigger="" units="" />
		<StatusVariable id="430101088" valueType="Boolean" logicalName="TM.IoValve.TMFastPumpValve.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="430101089" valueType="Boolean" logicalName="TM.IoValve.TMFastPumpValve.Status" eventTrigger="" units="" />
		<StatusVariable id="430101090" valueType="Boolean" logicalName="TM.IoValve.TMPurgeValve" eventTrigger="" units="" />
		<StatusVariable id="430101091" valueType="Boolean" logicalName="TM.IoValve.TMPurgeValve.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="430101092" valueType="Boolean" logicalName="TM.IoValve.TMPurgeValve.Status" eventTrigger="" units="" />
		<StatusVariable id="430101093" valueType="Boolean" logicalName="TM.IoValve.TMSoftPumpValve" eventTrigger="" units="" />
		<StatusVariable id="430101094" valueType="Boolean" logicalName="TM.IoValve.TMSoftPumpValve.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="430101095" valueType="Boolean" logicalName="TM.IoValve.TMSoftPumpValve.Status" eventTrigger="" units="" />
		<StatusVariable id="430101096" valueType="Boolean" logicalName="TM.IoValve.TMVacAtmMode" eventTrigger="" units="" />
		<StatusVariable id="430101097" valueType="Boolean" logicalName="TM.IoValve.TMVacAtmMode.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="430101098" valueType="Boolean" logicalName="TM.IoValve.TMVacAtmMode.Status" eventTrigger="" units="" />
		<StatusVariable id="430101099" valueType="Boolean" logicalName="TM.IoValve.TMValveN2" eventTrigger="" units="" />
		<StatusVariable id="430101100" valueType="Boolean" logicalName="TM.IoValve.TMValveN2.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="430101101" valueType="Boolean" logicalName="TM.IoValve.TMValveN2.Status" eventTrigger="" units="" />
		<StatusVariable id="430101102" valueType="Boolean" logicalName="TM.IoValve.TMVentValve" eventTrigger="" units="" />
		<StatusVariable id="430101103" valueType="Boolean" logicalName="TM.IoValve.TMVentValve.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="430101104" valueType="Boolean" logicalName="TM.IoValve.TMVentValve.Status" eventTrigger="" units="" />
		<StatusVariable id="430101105" valueType="Boolean" logicalName="TM.IoValve.ValveWaterRelay" eventTrigger="" units="" />
		<StatusVariable id="430101106" valueType="Boolean" logicalName="TM.IoValve.ValveWaterRelay.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="430101107" valueType="Boolean" logicalName="TM.IoValve.ValveWaterRelay.Status" eventTrigger="" units="" />
		<StatusVariable id="430101108" valueType="Boolean" logicalName="TM.IsAtm" eventTrigger="" units="" />
		<StatusVariable id="430101109" valueType="Boolean" logicalName="TM.IsOnline" eventTrigger="" units="" />
		<StatusVariable id="430101110" valueType="Boolean" logicalName="TM.IsVacuum" eventTrigger="" units="" />
		<StatusVariable id="430101111" valueType="Boolean" logicalName="TM.LLA_MFC1" eventTrigger="" units="" />
		<StatusVariable id="430101112" valueType="F8" logicalName="TM.LLA_MFC1.FeedBack" eventTrigger="" units="" />
		<StatusVariable id="430101113" valueType="F8" logicalName="TM.LLA_MFC1.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="430101114" valueType="Boolean" logicalName="TM.LLAATMSwitch" eventTrigger="" units="" />
		<StatusVariable id="430101115" valueType="Boolean" logicalName="TM.LLAATMSwitch.Value" eventTrigger="" units="" />
		<StatusVariable id="430101116" valueType="Boolean" logicalName="TM.LLAESlitDoor" eventTrigger="" units="" />
		<StatusVariable id="430101117" valueType="Boolean" logicalName="TM.LLAESlitDoor.IsClosed" eventTrigger="" units="" />
		<StatusVariable id="430101118" valueType="Boolean" logicalName="TM.LLALid" eventTrigger="" units="" />
		<StatusVariable id="430101119" valueType="Boolean" logicalName="TM.LLALid.IsClosed" eventTrigger="" units="" />
		<StatusVariable id="430101120" valueType="F8" logicalName="TM.LLAPCWFlowSwitch" eventTrigger="" units="" />
		<StatusVariable id="430101121" valueType="F8" logicalName="TM.LLAPCWFlowSwitch.Value" eventTrigger="" units="" />
		<StatusVariable id="430101122" valueType="F8" logicalName="TM.LLAPressure" eventTrigger="" units="" />
		<StatusVariable id="430101123" valueType="Boolean" logicalName="TM.LLATSlitDoor" eventTrigger="" units="" />
		<StatusVariable id="430101124" valueType="Boolean" logicalName="TM.LLATSlitDoor.IsClosed" eventTrigger="" units="" />
		<StatusVariable id="430101125" valueType="Boolean" logicalName="TM.LLAVacSwitch" eventTrigger="" units="" />
		<StatusVariable id="430101126" valueType="Boolean" logicalName="TM.LLAVacSwitch.Value" eventTrigger="" units="" />
		<StatusVariable id="430101127" valueType="F8" logicalName="TM.LLB_MFC1" eventTrigger="" units="" />
		<StatusVariable id="430101128" valueType="F8" logicalName="TM.LLB_MFC1.FeedBack" eventTrigger="" units="" />
		<StatusVariable id="430101129" valueType="F8" logicalName="TM.LLB_MFC1.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="430101130" valueType="Boolean" logicalName="TM.LLBATMSwitch" eventTrigger="" units="" />
		<StatusVariable id="430101131" valueType="Boolean" logicalName="TM.LLBATMSwitch.Value" eventTrigger="" units="" />
		<StatusVariable id="430101132" valueType="Boolean" logicalName="TM.LLBESlitDoor" eventTrigger="" units="" />
		<StatusVariable id="430101133" valueType="Boolean" logicalName="TM.LLBESlitDoor.IsClosed" eventTrigger="" units="" />
		<StatusVariable id="430101134" valueType="Boolean" logicalName="TM.LLBLid" eventTrigger="" units="" />
		<StatusVariable id="430101135" valueType="Boolean" logicalName="TM.LLBLid.IsClosed" eventTrigger="" units="" />
		<StatusVariable id="430101136" valueType="F8" logicalName="TM.LLBPCWFlowSwitch" eventTrigger="" units="" />
		<StatusVariable id="430101137" valueType="F8" logicalName="TM.LLBPCWFlowSwitch.Value" eventTrigger="" units="" />
		<StatusVariable id="430101138" valueType="F8" logicalName="TM.LLBPressure" eventTrigger="" units="" />
		<StatusVariable id="430101139" valueType="Boolean" logicalName="TM.LLBTSlitDoor" eventTrigger="" units="" />
		<StatusVariable id="430101140" valueType="Boolean" logicalName="TM.LLBTSlitDoor.IsClosed" eventTrigger="" units="" />
		<StatusVariable id="430101141" valueType="Boolean" logicalName="TM.LLBVacSwitch" eventTrigger="" units="" />
		<StatusVariable id="430101142" valueType="Boolean" logicalName="TM.LLBVacSwitch.Value" eventTrigger="" units="" />
		<StatusVariable id="430101143" valueType="Boolean" logicalName="TM.MainPump" eventTrigger="" units="" />
		<StatusVariable id="430101144" valueType="Boolean" logicalName="TM.MainPump.IsError" eventTrigger="" units="" />
		<StatusVariable id="430101145" valueType="Boolean" logicalName="TM.MainPump.IsOn" eventTrigger="" units="" />
		<StatusVariable id="430101146" valueType="Boolean" logicalName="TM.MainPump.IsRunning" eventTrigger="" units="" />
		<StatusVariable id="430101147" valueType="Boolean" logicalName="TM.MainPump.Speed" eventTrigger="" units="" />
		<StatusVariable id="430101148" valueType="Boolean" logicalName="TM.MainPump.Temperature" eventTrigger="" units="" />
		<StatusVariable id="430101149" valueType="Boolean" logicalName="TM.N2PressureSwitch" eventTrigger="" units="" />
		<StatusVariable id="430101150" valueType="Boolean" logicalName="TM.N2PressureSwitch.Value" eventTrigger="" units="" />
		<StatusVariable id="430101151" valueType="Boolean" logicalName="TM.PMALid" eventTrigger="" units="" />
		<StatusVariable id="430101152" valueType="Boolean" logicalName="TM.PMALid.IsClosed" eventTrigger="" units="" />
		<StatusVariable id="430101153" valueType="Boolean" logicalName="TM.PMASlitDoor" eventTrigger="" units="" />
		<StatusVariable id="430101154" valueType="Boolean" logicalName="TM.PMASlitDoor.IsClosed" eventTrigger="" units="" />
		<StatusVariable id="430101155" valueType="Boolean" logicalName="TM.PMBLid" eventTrigger="" units="" />
		<StatusVariable id="430101156" valueType="Boolean" logicalName="TM.PMBLid.IsClosed" eventTrigger="" units="" />
		<StatusVariable id="430101157" valueType="Boolean" logicalName="TM.PMBSlitDoor" eventTrigger="" units="" />
		<StatusVariable id="430101158" valueType="Boolean" logicalName="TM.PMBSlitDoor.IsClosed" eventTrigger="" units="" />
		<StatusVariable id="430101159" valueType="Boolean" logicalName="TM.PMCLid" eventTrigger="" units="" />
		<StatusVariable id="430101160" valueType="Boolean" logicalName="TM.PMCLid.IsClosed" eventTrigger="" units="" />
		<StatusVariable id="430101161" valueType="Boolean" logicalName="TM.PMCSlitDoor" eventTrigger="" units="" />
		<StatusVariable id="430101162" valueType="Boolean" logicalName="TM.PMCSlitDoor.IsClosed" eventTrigger="" units="" />
		<StatusVariable id="430101163" valueType="Boolean" logicalName="TM.PMDLid" eventTrigger="" units="" />
		<StatusVariable id="430101164" valueType="Boolean" logicalName="TM.PMDLid.IsClosed" eventTrigger="" units="" />
		<StatusVariable id="430101165" valueType="Boolean" logicalName="TM.PMDSlitDoor" eventTrigger="" units="" />
		<StatusVariable id="430101166" valueType="Boolean" logicalName="TM.PMDSlitDoor.IsClosed" eventTrigger="" units="" />
		<StatusVariable id="430101167" valueType="F8" logicalName="TM.TM_MFC1" eventTrigger="" units="" />
		<StatusVariable id="430101168" valueType="F8" logicalName="TM.TM_MFC1.FeedBack" eventTrigger="" units="" />
		<StatusVariable id="430101169" valueType="F8" logicalName="TM.TM_MFC1.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="430101170" valueType="Boolean" logicalName="TM.TMATMSwitch" eventTrigger="" units="" />
		<StatusVariable id="430101171" valueType="Boolean" logicalName="TM.TMATMSwitch.Value" eventTrigger="" units="" />
		<StatusVariable id="430101172" valueType="Boolean" logicalName="TM.TMInSafty" eventTrigger="" units="" />
		<StatusVariable id="430101173" valueType="Boolean" logicalName="TM.TMInSafty.Value" eventTrigger="" units="" />
		<StatusVariable id="430101174" valueType="Boolean" logicalName="TM.TMLid" eventTrigger="" units="" />
		<StatusVariable id="430101175" valueType="Boolean" logicalName="TM.TMLid.IsClosed" eventTrigger="" units="" />
		<StatusVariable id="430101176" valueType="Boolean" logicalName="TM.TMLidClosed" eventTrigger="" units="" />
		<StatusVariable id="430101177" valueType="Boolean" logicalName="TM.TMLidClosed.Value" eventTrigger="" units="" />
		<StatusVariable id="430101178" valueType="Boolean" logicalName="TM.TMPCWFlowSwith" eventTrigger="" units="" />
		<StatusVariable id="430101179" valueType="Boolean" logicalName="TM.TMPCWFlowSwith.Value" eventTrigger="" units="" />
		<StatusVariable id="430101180" valueType="Boolean" logicalName="TM.TMPowerOn" eventTrigger="" units="" />
		<StatusVariable id="430101181" valueType="Boolean" logicalName="TM.TMPowerOn.Value" eventTrigger="" units="" />
		<StatusVariable id="430101182" valueType="Boolean" logicalName="TM.TMPressureCtrl" eventTrigger="" units="" />
		<StatusVariable id="430101183" valueType="Boolean" logicalName="TM.TMPressureCtrl.LLAChamberSetPoint" eventTrigger="" units="" />
		<StatusVariable id="430101184" valueType="Boolean" logicalName="TM.TMPressureCtrl.LLBChamberSetPoint" eventTrigger="" units="" />
		<StatusVariable id="430101185" valueType="Boolean" logicalName="TM.TMPressureCtrl.TMChamberSetPoint" eventTrigger="" units="" />
		<StatusVariable id="430101186" valueType="Boolean" logicalName="TM.TMRobotNotExtendLLA" eventTrigger="" units="" />
		<StatusVariable id="430101187" valueType="Boolean" logicalName="TM.TMRobotNotExtendLLA.Value" eventTrigger="" units="" />
		<StatusVariable id="430101188" valueType="Boolean" logicalName="TM.TMRobotNotExtendLLB" eventTrigger="" units="" />
		<StatusVariable id="430101189" valueType="Boolean" logicalName="TM.TMRobotNotExtendLLB.Value" eventTrigger="" units="" />
		<StatusVariable id="430101190" valueType="Boolean" logicalName="TM.TMRobotNotExtendPMA" eventTrigger="" units="" />
		<StatusVariable id="430101191" valueType="Boolean" logicalName="TM.TMRobotNotExtendPMA.Value" eventTrigger="" units="" />
		<StatusVariable id="430101192" valueType="Boolean" logicalName="TM.TMRobotNotExtendPMB" eventTrigger="" units="" />
		<StatusVariable id="430101193" valueType="Boolean" logicalName="TM.TMRobotNotExtendPMB.Value" eventTrigger="" units="" />
		<StatusVariable id="430101194" valueType="Boolean" logicalName="TM.TMRobotNotExtendPMC" eventTrigger="" units="" />
		<StatusVariable id="430101195" valueType="Boolean" logicalName="TM.TMRobotNotExtendPMC.Value" eventTrigger="" units="" />
		<StatusVariable id="430101196" valueType="Boolean" logicalName="TM.TMRobotNotExtendPMD" eventTrigger="" units="" />
		<StatusVariable id="430101197" valueType="Boolean" logicalName="TM.TMRobotNotExtendPMD.Value" eventTrigger="" units="" />
		<StatusVariable id="430101198" valueType="Boolean" logicalName="TM.TMVacSwitch" eventTrigger="" units="" />
		<StatusVariable id="430101199" valueType="Boolean" logicalName="TM.TMVacSwitch.Value" eventTrigger="" units="" />
		<StatusVariable id="430101200" valueType="Boolean" logicalName="TM.VaccumPressureSwitch" eventTrigger="" units="" />
		<StatusVariable id="430101201" valueType="Boolean" logicalName="TM.VaccumPressureSwitch.Value" eventTrigger="" units="" />
		<StatusVariable id="430101202" valueType="Boolean" logicalName="TM.WaferLeakSensor" eventTrigger="" units="" />
		<StatusVariable id="430101203" valueType="Boolean" logicalName="TM.WaferLeakSensor.Value" eventTrigger="" units="" />
		<StatusVariable id="620101001" valueType="F4" logicalName="PMA.AI_CHB_M-HT_Current_Speed" eventTrigger="" units="" />
		<StatusVariable id="620101002" valueType="F4" logicalName="PMA.AI_CHB_M-HT_Max_Power" eventTrigger="" units="" />
		<StatusVariable id="620101003" valueType="F4" logicalName="PMA.AI_CHB_M-HT_Min_Power" eventTrigger="" units="" />
		<StatusVariable id="620101004" valueType="F4" logicalName="PMA.AI_CHB_M-HT_Reference_Power_Output" eventTrigger="" units="" />
		<StatusVariable id="620101005" valueType="F4" logicalName="PMA.ChamberPressure" eventTrigger="" units="" />
		<StatusVariable id="620101006" valueType="Boolean" logicalName="PMA.CHBWallOTSWAlarm.Value" eventTrigger="" units="" />
		<StatusVariable id="620101007" valueType="F8" logicalName="PMA.Chiller.Temp" eventTrigger="" units="" />
		<StatusVariable id="620101008" valueType="F4" logicalName="PMA.ChillerInnerTemp" eventTrigger="" units="" />
		<StatusVariable id="620101009" valueType="F4" logicalName="PMA.ChillerOuterTemp" eventTrigger="" units="" />
		<StatusVariable id="620101010" valueType="F4" logicalName="PMA.ChillerTopTemp" eventTrigger="" units="" />
		<StatusVariable id="620101011" valueType="F8" logicalName="PMA.ESCHePressure" eventTrigger="" units="" />
		<StatusVariable id="620101012" valueType="F8" logicalName="PMA.ESCHV.Temp" eventTrigger="" units="" />
		<StatusVariable id="620101013" valueType="F8" logicalName="PMA.ForelinePressure" eventTrigger="" units="" />
		<StatusVariable id="620101014" valueType="Boolean" logicalName="PMA.GasBoxDoorSW.Value" eventTrigger="" units="" />
		<StatusVariable id="620101015" valueType="Boolean" logicalName="PMA.GasBoxPressureSW.Value" eventTrigger="" units="" />
		<StatusVariable id="620101016" valueType="Boolean" logicalName="PMA.GeneratorInterlock.Value" eventTrigger="" units="" />
		<StatusVariable id="620101017" valueType="F8" logicalName="PMA.GetPVPosition" eventTrigger="" units="" />
		<StatusVariable id="620101018" valueType="F8" logicalName="PMA.HighTemperatureHeater.Position" eventTrigger="" units="" />
		<StatusVariable id="620101019" valueType="F8" logicalName="PMA.HighTemperatureHeater.Temperature" eventTrigger="" units="" />
		<StatusVariable id="620101020" valueType="F8" logicalName="PMA.IoHeater.PendulumHeater.ControlTcFeedback" eventTrigger="" units="" />
		<StatusVariable id="620101021" valueType="F8" logicalName="PMA.IoHeater.PendulumHeater.ControlTcSetPointView" eventTrigger="" units="" />
		<StatusVariable id="620101022" valueType="F8" logicalName="PMA.IoHeater.PendulumHeater.IsPowerOnFeedback" eventTrigger="" units="" />
		<StatusVariable id="620101023" valueType="F8" logicalName="PMA.IoHeater.PendulumHeater.IsPowerOnSetPoint" eventTrigger="" units="" />
		<StatusVariable id="620101024" valueType="Boolean" logicalName="PMA.IoHeater.ValveHeater.ControlTcFeedback" eventTrigger="" units="" />
		<StatusVariable id="620101025" valueType="Boolean" logicalName="PMA.IoHeater.ValveHeater.ControlTcSetPointView" eventTrigger="" units="" />
		<StatusVariable id="620101026" valueType="Boolean" logicalName="PMA.IoHeater.IsPowerOnFeedback" eventTrigger="" units="" />
		<StatusVariable id="620101027" valueType="Boolean" logicalName="PMA.IoHeater.IsPowerOnSetPoint" eventTrigger="" units="" />
		<StatusVariable id="620101028" valueType="Boolean" logicalName="PMA.IoHeater.WallHeater.ControlTcFeedback" eventTrigger="" units="" />
		<StatusVariable id="620101029" valueType="Boolean" logicalName="PMA.IoHeater.WallHeater.ControlTcSetPointView" eventTrigger="" units="" />
		<StatusVariable id="620101030" valueType="Boolean" logicalName="PMA.IoHeater.WallHeater.IsPowerOnFeedback" eventTrigger="" units="" />
		<StatusVariable id="620101031" valueType="Boolean" logicalName="PMA.IoHeater.WallHeater.IsPowerOnSetPoint" eventTrigger="" units="" />
		<StatusVariable id="620101032" valueType="Boolean" logicalName="PMA.IoSensor.CHBWallOTSWAlarm.Value" eventTrigger="" units="" />
		<StatusVariable id="620101033" valueType="Boolean" logicalName="PMA.IoSensor.GasBoxDoorSW.Value" eventTrigger="" units="" />
		<StatusVariable id="620101034" valueType="Boolean" logicalName="PMA.IoSensor.GasBoxPressureSW.Value" eventTrigger="" units="" />
		<StatusVariable id="620101035" valueType="Boolean" logicalName="PMA.IoSensor.GeneratorInterlock.Value" eventTrigger="" units="" />
		<StatusVariable id="620101036" valueType="Boolean" logicalName="PMA.IoSensor.N2PressureOk.Value" eventTrigger="" units="" />
		<StatusVariable id="620101037" valueType="Boolean" logicalName="PMA.IoSensor.RFMatchInterlock.Value" eventTrigger="" units="" />
		<StatusVariable id="620101038" valueType="Boolean" logicalName="PMA.IoSensor.SensorATMSwitch.Value" eventTrigger="" units="" />
		<StatusVariable id="620101039" valueType="Boolean" logicalName="PMA.IoSensor.SensorCDAPressureOk.Value" eventTrigger="" units="" />
		<StatusVariable id="620101040" valueType="Boolean" logicalName="PMA.IoSensor.SensorLoadlockATMSwitch.Value" eventTrigger="" units="" />
		<StatusVariable id="620101041" valueType="Boolean" logicalName="PMA.IoSensor.SensorPMLidClosed.Value" eventTrigger="" units="" />
		<StatusVariable id="620101042" valueType="Boolean" logicalName="PMA.IoSensor.SensorSlitDoorClosed.Value" eventTrigger="" units="" />
		<StatusVariable id="620101043" valueType="Boolean" logicalName="PMA.IoSensor.SensorSmallWaferInPos.Value" eventTrigger="" units="" />
		<StatusVariable id="620101044" valueType="Boolean" logicalName="PMA.IoSensor.SensorSourceRFFan.Value" eventTrigger="" units="" />
		<StatusVariable id="620101045" valueType="Boolean" logicalName="PMA.IoSensor.SensorVacSwitch.Value" eventTrigger="" units="" />
		<StatusVariable id="620101046" valueType="Boolean" logicalName="PMA.IoSensor.SensorWaterLeakOk.Value" eventTrigger="" units="" />
		<StatusVariable id="620101047" valueType="Boolean" logicalName="PMA.IoSensor.TurboPumpInterlock.Value" eventTrigger="" units="" />
		<StatusVariable id="620101048" valueType="Boolean" logicalName="PMA.IoValve.ValveFastPump.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="620101049" valueType="Boolean" logicalName="PMA.IoValve.ValveFastPump.Status" eventTrigger="" units="" />
		<StatusVariable id="620101050" valueType="Boolean" logicalName="PMA.IoValve.ValveGasFinal.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="620101051" valueType="Boolean" logicalName="PMA.IoValve.ValveGasFinal.Status" eventTrigger="" units="" />
		<StatusVariable id="620101052" valueType="Boolean" logicalName="PMA.IoValve.ValveGuage.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="620101053" valueType="Boolean" logicalName="PMA.IoValve.ValveGuage.Status" eventTrigger="" units="" />
		<StatusVariable id="620101054" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc1.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="620101055" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc1.Status" eventTrigger="" units="" />
		<StatusVariable id="620101056" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc2.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="620101057" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc2.Status" eventTrigger="" units="" />
		<StatusVariable id="620101058" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc3.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="620101059" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc3.Status" eventTrigger="" units="" />
		<StatusVariable id="620101060" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc4.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="620101061" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc4.Status" eventTrigger="" units="" />
		<StatusVariable id="620101062" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc5.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="620101063" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc5.Status" eventTrigger="" units="" />
		<StatusVariable id="620101064" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc6.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="620101065" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc6.Status" eventTrigger="" units="" />
		<StatusVariable id="620101066" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc7.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="620101067" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc7.Status" eventTrigger="" units="" />
		<StatusVariable id="620101068" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc8.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="620101069" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc8.Status" eventTrigger="" units="" />
		<StatusVariable id="620101070" valueType="Boolean" logicalName="PMA.IoValve.ValveN2.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="620101071" valueType="Boolean" logicalName="PMA.IoValve.ValveN2.Status" eventTrigger="" units="" />
		<StatusVariable id="620101072" valueType="Boolean" logicalName="PMA.IoValve.ValvePurge.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="620101073" valueType="Boolean" logicalName="PMA.IoValve.ValvePV11.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="620101074" valueType="Boolean" logicalName="PMA.IoValve.ValvePV11.Status" eventTrigger="" units="" />
		<StatusVariable id="620101075" valueType="Boolean" logicalName="PMA.IoValve.ValvePV12.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="620101076" valueType="Boolean" logicalName="PMA.IoValve.ValvePV12.Status" eventTrigger="" units="" />
		<StatusVariable id="620101077" valueType="Boolean" logicalName="PMA.IoValve.ValvePV21.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="620101078" valueType="Boolean" logicalName="PMA.IoValve.ValvePV21.Status" eventTrigger="" units="" />
		<StatusVariable id="620101079" valueType="Boolean" logicalName="PMA.IoValve.ValvePV22.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="620101080" valueType="Boolean" logicalName="PMA.IoValve.ValvePV22.Status" eventTrigger="" units="" />
		<StatusVariable id="620101081" valueType="Boolean" logicalName="PMA.IoValve.ValvePV31.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="620101082" valueType="Boolean" logicalName="PMA.IoValve.ValvePV31.Status" eventTrigger="" units="" />
		<StatusVariable id="620101083" valueType="Boolean" logicalName="PMA.IoValve.ValvePV32.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="620101084" valueType="Boolean" logicalName="PMA.IoValve.ValvePV32.Status" eventTrigger="" units="" />
		<StatusVariable id="620101085" valueType="Boolean" logicalName="PMA.IoValve.ValvePV41.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="620101086" valueType="Boolean" logicalName="PMA.IoValve.ValvePV41.Status" eventTrigger="" units="" />
		<StatusVariable id="620101087" valueType="Boolean" logicalName="PMA.IoValve.ValvePV42.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="620101088" valueType="Boolean" logicalName="PMA.IoValve.ValvePV42.Status" eventTrigger="" units="" />
		<StatusVariable id="620101089" valueType="Boolean" logicalName="PMA.IoValve.ValvePVHe1.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="620101090" valueType="Boolean" logicalName="PMA.IoValve.ValvePVHe1.Status" eventTrigger="" units="" />
		<StatusVariable id="620101091" valueType="Boolean" logicalName="PMA.IoValve.ValvePVHe2.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="620101092" valueType="Boolean" logicalName="PMA.IoValve.ValvePVHe2.Status" eventTrigger="" units="" />
		<StatusVariable id="620101093" valueType="Boolean" logicalName="PMA.IoValve.ValvePVN21.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="620101094" valueType="Boolean" logicalName="PMA.IoValve.ValvePVN21.Status" eventTrigger="" units="" />
		<StatusVariable id="620101095" valueType="Boolean" logicalName="PMA.IoValve.ValvePVN22.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="620101096" valueType="Boolean" logicalName="PMA.IoValve.ValvePVN22.Status" eventTrigger="" units="" />
		<StatusVariable id="620101097" valueType="Boolean" logicalName="PMA.IoValve.ValveSoftPump.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="620101098" valueType="Boolean" logicalName="PMA.IoValve.ValveSoftPump.Status" eventTrigger="" units="" />
		<StatusVariable id="620101099" valueType="Boolean" logicalName="PMA.IoValve.ValveTurboPumpPumping.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="620101100" valueType="Boolean" logicalName="PMA.IoValve.ValveTurboPumpPumping.Status" eventTrigger="" units="" />
		<StatusVariable id="620101101" valueType="Boolean" logicalName="PMA.IoValve.ValveTurboPumpPurge.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="620101102" valueType="Boolean" logicalName="PMA.IoValve.ValveTurboPumpPurge.Status" eventTrigger="" units="" />
		<StatusVariable id="620101103" valueType="Boolean" logicalName="PMA.IsTurboPumpAtSpeed" eventTrigger="" units="" />
		<StatusVariable id="620101104" valueType="Boolean" logicalName="PMA.Lid.IsClosed" eventTrigger="" units="" />
		<StatusVariable id="620101105" valueType="F8" logicalName="PMA.LoadlockPressure" eventTrigger="" units="" />
		<StatusVariable id="620101106" valueType="Boolean" logicalName="PMA.MainPump.IsError" eventTrigger="" units="" />
		<StatusVariable id="620101107" valueType="Boolean" logicalName="PMA.MainPump.IsOn" eventTrigger="" units="" />
		<StatusVariable id="620101108" valueType="Boolean" logicalName="PMA.MainPump.IsRunning" eventTrigger="" units="" />
		<StatusVariable id="620101109" valueType="F8" logicalName="PMA.MainPump.Speed" eventTrigger="" units="" />
		<StatusVariable id="620101110" valueType="F8" logicalName="PMA.MainPump.Temperature" eventTrigger="" units="" />
		<StatusVariable id="620101111" valueType="F8" logicalName="PMA.Match.C1" eventTrigger="" units="" />
		<StatusVariable id="620101112" valueType="F8" logicalName="PMA.Match.C2" eventTrigger="" units="" />
		<StatusVariable id="620101113" valueType="F8" logicalName="PMA.MfcGas1.FeedBack" eventTrigger="" units="" />
		<StatusVariable id="620101114" valueType="F8" logicalName="PMA.MfcGas1.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="620101115" valueType="F8" logicalName="PMA.MfcGas2.FeedBack" eventTrigger="" units="" />
		<StatusVariable id="620101116" valueType="F8" logicalName="PMA.MfcGas2.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="620101117" valueType="F8" logicalName="PMA.MfcGas3.FeedBack" eventTrigger="" units="" />
		<StatusVariable id="620101118" valueType="F8" logicalName="PMA.MfcGas3.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="620101119" valueType="F8" logicalName="PMA.MfcGas4.FeedBack" eventTrigger="" units="" />
		<StatusVariable id="620101120" valueType="F8" logicalName="PMA.MfcGas4.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="620101121" valueType="F8" logicalName="PMA.MfcGas5.FeedBack" eventTrigger="" units="" />
		<StatusVariable id="620101122" valueType="F8" logicalName="PMA.MfcGas5.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="620101123" valueType="F8" logicalName="PMA.MfcGas6.FeedBack" eventTrigger="" units="" />
		<StatusVariable id="620101124" valueType="F8" logicalName="PMA.MfcGas6.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="620101125" valueType="F8" logicalName="PMA.MfcGas7.FeedBack" eventTrigger="" units="" />
		<StatusVariable id="620101126" valueType="F8" logicalName="PMA.MfcGas7.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="620101127" valueType="F8" logicalName="PMA.MfcGas8.FeedBack" eventTrigger="" units="" />
		<StatusVariable id="620101128" valueType="F8" logicalName="PMA.MfcGas8.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="620101129" valueType="F8" logicalName="PMA.MfcHe.FeedBack" eventTrigger="" units="" />
		<StatusVariable id="620101130" valueType="F8" logicalName="PMA.MfcHe.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="620101131" valueType="F8" logicalName="PMA.MfcN2.FeedBack" eventTrigger="" units="" />
		<StatusVariable id="620101132" valueType="F8" logicalName="PMA.MfcN2.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="620101133" valueType="Boolean" logicalName="PMA.N2PressureOk.Value" eventTrigger="" units="" />
		<StatusVariable id="620101134" valueType="F8" logicalName="PMA.ProcessPressure" eventTrigger="" units="" />
		<StatusVariable id="620101135" valueType="F8" logicalName="PMA.Rf.ForwardPower" eventTrigger="" units="" />
		<StatusVariable id="620101136" valueType="F8" logicalName="PMA.Rf.Frequency" eventTrigger="" units="" />
		<StatusVariable id="620101137" valueType="F8" logicalName="PMA.Rf.PowerSetPoint" eventTrigger="" units="" />
		<StatusVariable id="620101138" valueType="F8" logicalName="PMA.Rf.PulsingDutyCycle" eventTrigger="" units="" />
		<StatusVariable id="620101139" valueType="F8" logicalName="PMA.Rf.PulsingFrequency" eventTrigger="" units="" />
		<StatusVariable id="620101140" valueType="F8" logicalName="PMA.Rf.ReflectPower" eventTrigger="" units="" />
		<StatusVariable id="620101141" valueType="Boolean" logicalName="PMA.RFMatchInterlock.Value" eventTrigger="" units="" />
		<StatusVariable id="620101142" valueType="F8" logicalName="PMA.SCR1" eventTrigger="" units="" />
		<StatusVariable id="620101143" valueType="F8" logicalName="PMA.SCR2" eventTrigger="" units="" />
		<StatusVariable id="620101144" valueType="Boolean" logicalName="PMA.SensorATMSwitch.Value" eventTrigger="" units="" />
		<StatusVariable id="620101145" valueType="Boolean" logicalName="PMA.SensorCDAPressureOk.Value" eventTrigger="" units="" />
		<StatusVariable id="620101146" valueType="Boolean" logicalName="PMA.SensorLoadlockATMSwitch.Value" eventTrigger="" units="" />
		<StatusVariable id="620101147" valueType="Boolean" logicalName="PMA.SensorPMLidClosed.Value" eventTrigger="" units="" />
		<StatusVariable id="620101148" valueType="Boolean" logicalName="PMA.SensorSlitDoorClosed.Value" eventTrigger="" units="" />
		<StatusVariable id="620101149" valueType="Boolean" logicalName="PMA.SensorSmallWaferInPos.Value" eventTrigger="" units="" />
		<StatusVariable id="620101150" valueType="Boolean" logicalName="PMA.SensorSourceRFFan.Value" eventTrigger="" units="" />
		<StatusVariable id="620101151" valueType="Boolean" logicalName="PMA.SensorVacSwitch.Value" eventTrigger="" units="" />
		<StatusVariable id="620101152" valueType="Boolean" logicalName="PMA.SensorWaterLeakOk.Value" eventTrigger="" units="" />
		<StatusVariable id="620101153" valueType="Boolean" logicalName="PMA.SlitDoor.IsClosed" eventTrigger="" units="" />
		<StatusVariable id="620101154" valueType="Boolean" logicalName="PMA.TurboPumpInterlock.Value" eventTrigger="" units="" />
		<StatusVariable id="620101155" valueType="F8" logicalName="PMA.TurboPumpRotationalSpeed" eventTrigger="" units="" />
		<StatusVariable id="620101156" valueType="Boolean" logicalName="PMA.BiasRf.CommunicationStatus" eventTrigger="" units="" />
		<StatusVariable id="620101157" valueType="F8" logicalName="PMA.BiasRf.ForwardPower" eventTrigger="" units="" />
		<StatusVariable id="620101158" valueType="F8" logicalName="PMA.BiasRf.Frequency" eventTrigger="" units="" />
		<StatusVariable id="620101159" valueType="F8" logicalName="PMA.BiasRf.IsPowerOn" eventTrigger="" units="" />
		<StatusVariable id="620101160" valueType="F8" logicalName="PMA.BiasRf.PowerSetPoint" eventTrigger="" units="" />
		<StatusVariable id="620101161" valueType="F8" logicalName="PMA.BiasRf.PulsingDutyCycle" eventTrigger="" units="" />
		<StatusVariable id="620101162" valueType="F8" logicalName="PMA.BiasRf.PulsingFrequency" eventTrigger="" units="" />
		<StatusVariable id="620101163" valueType="F8" logicalName="PMA.BiasRf.ReflectPower" eventTrigger="" units="" />
		<StatusVariable id="620101164" valueType="F8" logicalName="IO.PMA.AI_Chamber_Pressure_10t" eventTrigger="" units="" />
		<StatusVariable id="620101165" valueType="F8" logicalName="IO.PMA.AI_CHB_M_HT_Control_TC_Temp" eventTrigger="" units="" />
		<StatusVariable id="620101166" valueType="F8" logicalName="IO.PMA.AI_Day" eventTrigger="" units="" />
		<StatusVariable id="620101167" valueType="F8" logicalName="IO.PMA.AI_Foreline_Pressure_10t" eventTrigger="" units="" />
		<StatusVariable id="620101168" valueType="F8" logicalName="IO.PMA.AI_Heartbeat_FB" eventTrigger="" units="" />
		<StatusVariable id="620101169" valueType="F8" logicalName="IO.PMA.AI_MFC1_Flow" eventTrigger="" units="" />
		<StatusVariable id="620101170" valueType="F8" logicalName="IO.PMA.AI_MFC2_Flow" eventTrigger="" units="" />
		<StatusVariable id="620101171" valueType="F8" logicalName="IO.PMA.AI_MFC3_Flow" eventTrigger="" units="" />
		<StatusVariable id="620101172" valueType="F8" logicalName="IO.PMA.AI_MFC4_Flow" eventTrigger="" units="" />
		<StatusVariable id="620101173" valueType="F8" logicalName="IO.PMA.AI_MFC5_Flow" eventTrigger="" units="" />
		<StatusVariable id="620101174" valueType="F8" logicalName="IO.PMA.AI_MFC6_Flow" eventTrigger="" units="" />
		<StatusVariable id="620101175" valueType="F8" logicalName="IO.PMA.AI_Minute" eventTrigger="" units="" />
		<StatusVariable id="620101176" valueType="F8" logicalName="IO.PMA.AI_Month" eventTrigger="" units="" />
		<StatusVariable id="620101177" valueType="F8" logicalName="IO.PMA.AI_Process_Pressure_2t" eventTrigger="" units="" />
		<StatusVariable id="620101178" valueType="F8" logicalName="IO.PMA.AI_Second" eventTrigger="" units="" />
		<StatusVariable id="620101179" valueType="F8" logicalName="IO.PMA.AI_Time" eventTrigger="" units="" />
		<StatusVariable id="620101180" valueType="F8" logicalName="IO.PMA.AI_Year" eventTrigger="" units="" />
		<StatusVariable id="620101181" valueType="F8" logicalName="IO.PMA.AO_CHB_M_HT_Temperature_Setpoint" eventTrigger="" units="" />
		<StatusVariable id="620101182" valueType="F8" logicalName="IO.PMA.AO_CHB_M_HT_Temp_Limit_Setpoint" eventTrigger="" units="" />
		<StatusVariable id="620101183" valueType="F8" logicalName="IO.PMA.AO_Heartbeat" eventTrigger="" units="" />
		<StatusVariable id="620101184" valueType="F8" logicalName="IO.PMA.AO_MFC1_Flow_Setpoint" eventTrigger="" units="" />
		<StatusVariable id="620101185" valueType="F8" logicalName="IO.PMA.AO_MFC2_Flow_Setpoint" eventTrigger="" units="" />
		<StatusVariable id="620101186" valueType="F8" logicalName="IO.PMA.AO_MFC3_Flow_Setpoint" eventTrigger="" units="" />
		<StatusVariable id="620101187" valueType="F8" logicalName="IO.PMA.AO_MFC4_Flow_Setpoint" eventTrigger="" units="" />
		<StatusVariable id="620101188" valueType="F8" logicalName="IO.PMA.AO_MFC5_Flow_Setpoint" eventTrigger="" units="" />
		<StatusVariable id="620101189" valueType="F8" logicalName="IO.PMA.AO_MFC6_Flow_Setpoint" eventTrigger="" units="" />
		<StatusVariable id="620101190" valueType="Boolean" logicalName="IO.PMA.DI_1_SlitDoorClosePos" eventTrigger="" units="" />
		<StatusVariable id="620101191" valueType="Boolean" logicalName="IO.PMA.DI_1_SlitDoorOpenPos" eventTrigger="" units="" />
		<StatusVariable id="620101192" valueType="Boolean" logicalName="IO.PMA.DI_ATMSW" eventTrigger="" units="" />
		<StatusVariable id="620101193" valueType="Boolean" logicalName="IO.PMA.DI_Chamber_Pressure_10t_Gauge_Alarm" eventTrigger="" units="" />
		<StatusVariable id="620101194" valueType="Boolean" logicalName="IO.PMA.DI_CHB_M-HT_Control_TC_Broken_Alarm" eventTrigger="" units="" />
		<StatusVariable id="620101195" valueType="Boolean" logicalName="IO.PMA.DI_CHB_M-HT_Heater_On_FB" eventTrigger="" units="" />
		<StatusVariable id="620101196" valueType="Boolean" logicalName="IO.PMA.DI_Foreline_Pressure_10t_Gauge_Alarm" eventTrigger="" units="" />
		<StatusVariable id="620101197" valueType="Boolean" logicalName="IO.PMA.DI_MFC1_Pressure_Switch" eventTrigger="" units="" />
		<StatusVariable id="620101198" valueType="Boolean" logicalName="IO.PMA.DI_MFC2_Pressure_Switch" eventTrigger="" units="" />
		<StatusVariable id="620101199" valueType="Boolean" logicalName="IO.PMA.DI_MFC3_Pressure_Switch" eventTrigger="" units="" />
		<StatusVariable id="620101200" valueType="Boolean" logicalName="IO.PMA.DI_MFC4_Pressure_Switch" eventTrigger="" units="" />
		<StatusVariable id="620101201" valueType="Boolean" logicalName="IO.PMA.DI_MFC5_Pressure_Switch" eventTrigger="" units="" />
		<StatusVariable id="620101202" valueType="Boolean" logicalName="IO.PMA.DI_MFC6_Pressure_Switch" eventTrigger="" units="" />
		<StatusVariable id="620101203" valueType="Boolean" logicalName="IO.PMA.DI_N2_Purge_Pressure_Switch" eventTrigger="" units="" />
		<StatusVariable id="620101204" valueType="Boolean" logicalName="IO.PMA.DI_Process_Pressure_2t_Gauge_Alarm" eventTrigger="" units="" />
		<StatusVariable id="620101205" valueType="Boolean" logicalName="IO.PMA.DI_TM_Safety_Door_Colse" eventTrigger="" units="" />
		<StatusVariable id="620101206" valueType="Boolean" logicalName="IO.PMA.DI_Arm_Not_Extend_to_PM" eventTrigger="" units="" />
		<StatusVariable id="620101207" valueType="Boolean" logicalName="IO.PMA.DI_VACSW" eventTrigger="" units="" />
		<StatusVariable id="620101208" valueType="Boolean" logicalName="IO.PMA.DI_WaterLeak" eventTrigger="" units="" />
		<StatusVariable id="620101209" valueType="Boolean" logicalName="IO.PMA.DO_Purge_Valve" eventTrigger="" units="" />
		<StatusVariable id="620101210" valueType="Boolean" logicalName="IO.PMA.DO_CHB_M_HT_Heater_On" eventTrigger="" units="" />
		<StatusVariable id="620101211" valueType="Boolean" logicalName="IO.PMA.DO_Fast_Pumping_Valve" eventTrigger="" units="" />
		<StatusVariable id="620101212" valueType="Boolean" logicalName="IO.PMA.DO_MFC1_Valve" eventTrigger="" units="" />
		<StatusVariable id="620101213" valueType="Boolean" logicalName="IO.PMA.DO_MFC2_Valve" eventTrigger="" units="" />
		<StatusVariable id="620101214" valueType="Boolean" logicalName="IO.PMA.DO_MFC3_Valve" eventTrigger="" units="" />
		<StatusVariable id="620101215" valueType="Boolean" logicalName="IO.PMA.DO_MFC4_Valve" eventTrigger="" units="" />
		<StatusVariable id="620101216" valueType="Boolean" logicalName="IO.PMA.DO_MFC5_Valve" eventTrigger="" units="" />
		<StatusVariable id="620101217" valueType="Boolean" logicalName="IO.PMA.DO_MFC6_Valve" eventTrigger="" units="" />
		<StatusVariable id="620101218" valueType="Boolean" logicalName="IO.PMA.DO_N2_Valve" eventTrigger="" units="" />
		<StatusVariable id="620101219" valueType="Boolean" logicalName="IO.PMA.DO_Gas_Final_Valve" eventTrigger="" units="" />
		<StatusVariable id="620101220" valueType="Boolean" logicalName="IO.PMA.DO_Reset_Signal" eventTrigger="" units="" />
		<StatusVariable id="620101221" valueType="Boolean" logicalName="IO.PMA.DO_Soft_Pumping_Valve" eventTrigger="" units="" />
		<StatusVariable id="620101222" valueType="Boolean" logicalName="IO.PMA.DI_RF_BOX_Interlock" eventTrigger="" units="" />
		<StatusVariable id="620101223" valueType="Boolean" logicalName="IO.PMA.DI_Source_RF_Generator_Interlock" eventTrigger="" units="" />
		<StatusVariable id="620101224" valueType="Boolean" logicalName="IO.PMA.DI_Source_RF_Match_Interlock" eventTrigger="" units="" />
		<StatusVariable id="620101225" valueType="Boolean" logicalName="IO.PMA.DI_Turbo_Pump_Interlock" eventTrigger="" units="" />
		<StatusVariable id="620101226" valueType="Boolean" logicalName="IO.PMA.DI_CDA_Pressure_Switch" eventTrigger="" units="" />
		<StatusVariable id="620101227" valueType="Boolean" logicalName="IO.PMA.DI_Top_Safty_Door_SW" eventTrigger="" units="" />
		<StatusVariable id="620101228" valueType="Boolean" logicalName="IO.PMA.DI_Gas_Detector1_Alarm" eventTrigger="" units="" />
		<StatusVariable id="620101229" valueType="Boolean" logicalName="IO.PMA.DI__Gas_Detector2_Alarm" eventTrigger="" units="" />
		<StatusVariable id="620101230" valueType="Boolean" logicalName="IO.PMA.DI_CHB_M-HT_Switch_Alarm" eventTrigger="" units="" />
		<StatusVariable id="620101231" valueType="Boolean" logicalName="IO.PMA.DI_PN2_Pressure_Switch" eventTrigger="" units="" />
		<StatusVariable id="620101232" valueType="F8" logicalName="IO.PMA.DI_MFC7_Pressure_Switch" eventTrigger="" units="" />
		<StatusVariable id="620101233" valueType="F8" logicalName="IO.PMA.DI_MFC8_Pressure_Switch" eventTrigger="" units="" />
		<StatusVariable id="620101234" valueType="Boolean" logicalName="IO.PMA.DI_Gas_Box_Door_Switch" eventTrigger="" units="" />
		<StatusVariable id="620101235" valueType="Boolean" logicalName="IO.PMA.DI_Gas_Box_Pressure_Switch" eventTrigger="" units="" />
		<StatusVariable id="620101236" valueType="Boolean" logicalName="IO.PMA.DI_Turbo_Pump_Water_Flow_Switch" eventTrigger="" units="" />
		<StatusVariable id="620101237" valueType="Boolean" logicalName="IO.PMA.DI_Source_RF_Water_Flow_Switch" eventTrigger="" units="" />
		<StatusVariable id="620101238" valueType="Boolean" logicalName="IO.PMA.DI_Spare_Water_Flow_Switch" eventTrigger="" units="" />
		<StatusVariable id="620101239" valueType="Boolean" logicalName="IO.PMA.DI_P_Valve_TC_Deviation_out_of_Range" eventTrigger="" units="" />
		<StatusVariable id="620101240" valueType="Boolean" logicalName="IO.PMA.DI_P_Valve_Control_TC_Broken_Alarm" eventTrigger="" units="" />
		<StatusVariable id="620101241" valueType="Boolean" logicalName="IO.PMA.DI_P_Valve_Monitor_TC_Broken_Alarm" eventTrigger="" units="" />
		<StatusVariable id="620101242" valueType="Boolean" logicalName="IO.PMA.DI_P_Valve_Heater_On_FB" eventTrigger="" units="" />
		<StatusVariable id="620101243" valueType="Boolean" logicalName="IO.PMA.DI_Gas_Line_Control_TC_Broken_Alarm" eventTrigger="" units="" />
		<StatusVariable id="620101244" valueType="Boolean" logicalName="IO.PMA.DI_Gas_Line_Heater_On_FB" eventTrigger="" units="" />
		<StatusVariable id="620101245" valueType="Boolean" logicalName="IO.PMA.DI_S_Valve_OT_Switch_Alarm" eventTrigger="" units="" />
		<StatusVariable id="620101246" valueType="Boolean" logicalName="IO.PMA.DI_Space_Heater_Ctrl_TC_Broken_Alarm" eventTrigger="" units="" />
		<StatusVariable id="620101247" valueType="Boolean" logicalName="IO.PMA.DI_Space_Heater_Heat_ON" eventTrigger="" units="" />
		<StatusVariable id="620101248" valueType="Boolean" logicalName="IO.PMA.DI_Space_Heater_Over_Temp" eventTrigger="" units="" />
		<StatusVariable id="620101249" valueType="Boolean" logicalName="IO.PMA.DI_Lid_Up_Button" eventTrigger="" units="" />
		<StatusVariable id="620101250" valueType="Boolean" logicalName="IO.PMA.DI_Lid_Down_Button" eventTrigger="" units="" />
		<StatusVariable id="620101251" valueType="Boolean" logicalName="IO.PMA.DI_Lid_Up_Limit_Pos_SW" eventTrigger="" units="" />
		<StatusVariable id="620101252" valueType="Boolean" logicalName="IO.PMA.DI_Lid_Down_Limit_Pos_SW" eventTrigger="" units="" />
		<StatusVariable id="620101253" valueType="Boolean" logicalName="IO.PMA.DI_Top_Plate_Coolant_Flow_SW" eventTrigger="" units="" />
		<StatusVariable id="620101254" valueType="Boolean" logicalName="IO.PMA.DI_Lid_Rotate_Lock_SW" eventTrigger="" units="" />
		<StatusVariable id="620101255" valueType="Boolean" logicalName="IO.PMA.DI_Lid_Serve_Alarm" eventTrigger="" units="" />
		<StatusVariable id="620101256" valueType="Boolean" logicalName="IO.PMA.DI_MFC1_Fauit_Exist" eventTrigger="" units="" />
		<StatusVariable id="620101257" valueType="Boolean" logicalName="IO.PMA.DI_MFC2_Fauit_Exist" eventTrigger="" units="" />
		<StatusVariable id="620101258" valueType="Boolean" logicalName="IO.PMA.DI_MFC3_Fauit_Exist" eventTrigger="" units="" />
		<StatusVariable id="620101259" valueType="Boolean" logicalName="IO.PMA.DI_MFC4_Fauit_Exist" eventTrigger="" units="" />
		<StatusVariable id="620101260" valueType="Boolean" logicalName="IO.PMA.DI_MFC5_Fauit_Exist" eventTrigger="" units="" />
		<StatusVariable id="620101261" valueType="Boolean" logicalName="IO.PMA.DI_MFC6_Fauit_Exist" eventTrigger="" units="" />
		<StatusVariable id="620101262" valueType="Boolean" logicalName="IO.PMA.DI_MFC7_Fauit_Exist" eventTrigger="" units="" />
		<StatusVariable id="620101263" valueType="Boolean" logicalName="IO.PMA.DI_MFC8_Fauit_Exist" eventTrigger="" units="" />
		<StatusVariable id="620101264" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Servo_Alarm" eventTrigger="" units="" />
		<StatusVariable id="620101265" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Up_Limit_Pos_SW" eventTrigger="" units="" />
		<StatusVariable id="620101266" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Down_Limit_Pos_SW" eventTrigger="" units="" />
		<StatusVariable id="620101267" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Servo_ORG_Pos_SW" eventTrigger="" units="" />
		<StatusVariable id="620101268" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Servo_with_origin" eventTrigger="" units="" />
		<StatusVariable id="620101269" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Servo_servo_on" eventTrigger="" units="" />
		<StatusVariable id="620101270" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Servo_alarm" eventTrigger="" units="" />
		<StatusVariable id="620101271" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Servo_ORG_fail_alarm" eventTrigger="" units="" />
		<StatusVariable id="620101272" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Servo_ABS_fail_alarm" eventTrigger="" units="" />
		<StatusVariable id="620101273" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Servo_Over_software_Limt_alarm" eventTrigger="" units="" />
		<StatusVariable id="620101274" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Servo_Go_Position1_Complete" eventTrigger="" units="" />
		<StatusVariable id="620101275" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Servo_Go_Position2_Complete" eventTrigger="" units="" />
		<StatusVariable id="620101276" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Servo_Go_Position3_Complete" eventTrigger="" units="" />
		<StatusVariable id="620101277" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Servo_Go_Position4_Complete" eventTrigger="" units="" />
		<StatusVariable id="620101278" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Servo_Go_Position5_Complete" eventTrigger="" units="" />
		<StatusVariable id="620101279" valueType="Boolean" logicalName="IO.PMA.DO_PVN21" eventTrigger="" units="" />
		<StatusVariable id="620101280" valueType="Boolean" logicalName="IO.PMA.DO_PVN22" eventTrigger="" units="" />
		<StatusVariable id="620101281" valueType="Boolean" logicalName="IO.PMA.DO_PV11" eventTrigger="" units="" />
		<StatusVariable id="620101282" valueType="Boolean" logicalName="IO.PMA.DO_PV12" eventTrigger="" units="" />
		<StatusVariable id="620101283" valueType="Boolean" logicalName="IO.PMA.DO_PV21" eventTrigger="" units="" />
		<StatusVariable id="620101284" valueType="Boolean" logicalName="IO.PMA.DO_PV22" eventTrigger="" units="" />
		<StatusVariable id="620101285" valueType="Boolean" logicalName="IO.PMA.DO_PV31" eventTrigger="" units="" />
		<StatusVariable id="620101286" valueType="Boolean" logicalName="IO.PMA.DO_PV32" eventTrigger="" units="" />
		<StatusVariable id="620101287" valueType="Boolean" logicalName="IO.PMA.DO_PV41" eventTrigger="" units="" />
		<StatusVariable id="620101288" valueType="Boolean" logicalName="IO.PMA.DO_PV42" eventTrigger="" units="" />
		<StatusVariable id="620101289" valueType="Boolean" logicalName="IO.PMA.DO_MFC7_Valve" eventTrigger="" units="" />
		<StatusVariable id="620101290" valueType="Boolean" logicalName="IO.PMA.DO_MFC8_Valve" eventTrigger="" units="" />
		<StatusVariable id="620101291" valueType="Boolean" logicalName="IO.PMA.DO_N2_Purge1_Valve" eventTrigger="" units="" />
		<StatusVariable id="620101292" valueType="Boolean" logicalName="IO.PMA.DO_N2_Purge2_Valve" eventTrigger="" units="" />
		<StatusVariable id="620101293" valueType="Boolean" logicalName="IO.PMA.DO_Turbo_Pump_Pumping_Valve" eventTrigger="" units="" />
		<StatusVariable id="620101294" valueType="Boolean" logicalName="IO.PMA.DO_Pump_Purge_Valve" eventTrigger="" units="" />
		<StatusVariable id="620101295" valueType="Boolean" logicalName="IO.PMA.DO_Gauge_Valve" eventTrigger="" units="" />
		<StatusVariable id="620101296" valueType="Boolean" logicalName="IO.PMA.DO_P_Valve_Heater_On" eventTrigger="" units="" />
		<StatusVariable id="620101297" valueType="Boolean" logicalName="IO.PMA.DO_Gas_Line_Heater_On" eventTrigger="" units="" />
		<StatusVariable id="620101298" valueType="Boolean" logicalName="IO.PMA.DO_Lid_Up" eventTrigger="" units="" />
		<StatusVariable id="620101299" valueType="Boolean" logicalName="IO.PMA.DO_Lid_Down" eventTrigger="" units="" />
		<StatusVariable id="620101300" valueType="Boolean" logicalName="IO.PMA.DO_Lift_Servo_Go_Position1" eventTrigger="" units="" />
		<StatusVariable id="620101301" valueType="Boolean" logicalName="IO.PMA.DO_Lift_Servo_Go_Position2" eventTrigger="" units="" />
		<StatusVariable id="620101302" valueType="Boolean" logicalName="IO.PMA.DO_Lift_Servo_Go_Position3" eventTrigger="" units="" />
		<StatusVariable id="620101303" valueType="Boolean" logicalName="IO.PMA.DO_Lift_Servo_Origin" eventTrigger="" units="" />
		<StatusVariable id="620101304" valueType="Boolean" logicalName="IO.PMA.DO_Lift_Servo_Enable" eventTrigger="" units="" />
		<StatusVariable id="620101305" valueType="Boolean" logicalName="IO.PMA.DO_Lift_Servo_Manual_UP" eventTrigger="" units="" />
		<StatusVariable id="620101306" valueType="Boolean" logicalName="IO.PMA.DO_Lift_Servo_Manual_DOWN" eventTrigger="" units="" />
		<StatusVariable id="620101307" valueType="Boolean" logicalName="IO.PMA.DO_Lift_Servo_Go_Position4" eventTrigger="" units="" />
		<StatusVariable id="620101308" valueType="Boolean" logicalName="IO.PMA.DO_Lift_Servo_Go_Position5" eventTrigger="" units="" />
		<StatusVariable id="620101309" valueType="Boolean" logicalName="IO.PMA.DO_Lift_Servo_Estop" eventTrigger="" units="" />
		<StatusVariable id="620101310" valueType="Boolean" logicalName="IO.PMA.DO_Lift_Servo_MATC_Mode" eventTrigger="" units="" />
		<StatusVariable id="620101311" valueType="F8" logicalName="IO.PMA.AI_MFC7_Flow" eventTrigger="" units="" />
		<StatusVariable id="620101312" valueType="F8" logicalName="IO.PMA.AI_MFC8_Flow" eventTrigger="" units="" />
		<StatusVariable id="620101313" valueType="F8" logicalName="IO.PMA.AI_Turbo_Pump_N2_Flow" eventTrigger="" units="" />
		<StatusVariable id="620101314" valueType="F8" logicalName="IO.PMA.AI_Penning_Gauge_Pressure1" eventTrigger="" units="" />
		<StatusVariable id="620101315" valueType="F8" logicalName="IO.PMA.AI_CHB_M_HT_SCR1_PWR_OUT" eventTrigger="" units="" />
		<StatusVariable id="620101316" valueType="F8" logicalName="IO.PMA.AI_CHB_M_HT_SCR2_PWR_OUT" eventTrigger="" units="" />
		<StatusVariable id="620101317" valueType="F8" logicalName="IO.PMA.AI_Spare_Heater_Control_TC_Temp" eventTrigger="" units="" />
		<StatusVariable id="620101318" valueType="F8" logicalName="IO.PMA.AI_Chamber_Pressure_Virtual" eventTrigger="" units="" />
		<StatusVariable id="620101319" valueType="F8" logicalName="IO.PMA.AI_P_Valve_Control_TC_Temp" eventTrigger="" units="" />
		<StatusVariable id="620101320" valueType="F8" logicalName="IO.PMA.AI_Gas_Line_Control_TC_Temp" eventTrigger="" units="" />
		<StatusVariable id="620101321" valueType="F8" logicalName="IO.PMA.AI_Lift_Servo_Current_Posi_Mm" eventTrigger="" units="" />
		<StatusVariable id="620101322" valueType="F8" logicalName="IO.PMA.AI_CHB_M_HT_Reference_Power_Out" eventTrigger="" units="" />
		<StatusVariable id="620101323" valueType="F8" logicalName="IO.PMA.AI_CHB_M_HT_Max_Power" eventTrigger="" units="" />
		<StatusVariable id="620101324" valueType="F8" logicalName="IO.PMA.AI_CHB_M_HT_Min_Power" eventTrigger="" units="" />
		<StatusVariable id="620101325" valueType="F8" logicalName="IO.PMA.AI_CHB_M_HT_Current_Speed" eventTrigger="" units="" />
		<StatusVariable id="620101326" valueType="F8" logicalName="IO.PMA.AO_MFC7_Flow_Swtpoint" eventTrigger="" units="" />
		<StatusVariable id="620101327" valueType="F8" logicalName="IO.PMA.AO_MFC8_Flow_Swtpoint" eventTrigger="" units="" />
		<StatusVariable id="620101328" valueType="F8" logicalName="IO.PMA.AO_Turbo_Pump_N2_Flow_Setpoint" eventTrigger="" units="" />
		<StatusVariable id="620101329" valueType="F8" logicalName="IO.PMA.AO_P_Valve_Temperature_Setpoint" eventTrigger="" units="" />
		<StatusVariable id="620101330" valueType="F8" logicalName="IO.PMA.AO_P_Valve_Temp_Limit_Setpoint" eventTrigger="" units="" />
		<StatusVariable id="620101331" valueType="F8" logicalName="IO.PMA.AO_Space_Heater_Heat_Temp_Setpoint" eventTrigger="" units="" />
		<StatusVariable id="620101332" valueType="F8" logicalName="IO.PMA.AO_Space_Heater_Temp_High_Limit_Setpoint" eventTrigger="" units="" />
		<StatusVariable id="620101333" valueType="F8" logicalName="IO.PMA.AO_CHB_H_HT_Power_Distribute_Percent" eventTrigger="" units="" />
		<StatusVariable id="620101334" valueType="Ascii" logicalName="PMA.RecipeStartTime" eventTrigger="" units="" />
		<StatusVariable id="620101335" valueType="Ascii" logicalName="PMA.RecipeEndTime" eventTrigger="" units="" />
		<StatusVariable id="620101336" valueType="F8" logicalName="PMA.RecipeStepTime" eventTrigger="" units="" />
		<StatusVariable id="620101337" valueType="F8" logicalName="PMA.RecipeRfOntime" eventTrigger="" units="" />

		<StatusVariable id="620101338" valueType="F8" logicalName="PMB.RecipeStartTime" eventTrigger="" units="" />
		<StatusVariable id="620101339" valueType="F8" logicalName="PMB.RecipeEndTime" eventTrigger="" units="" />
		<StatusVariable id="620101340" valueType="F8" logicalName="PMB.RecipeStepTime" eventTrigger="" units="" />
		<StatusVariable id="620101341" valueType="F8" logicalName="PMB.RecipeRfOntime" eventTrigger="" units="" />

		<StatusVariable id="620101342" valueType="F8" logicalName="PMC.RecipeStartTime" eventTrigger="" units="" />
		<StatusVariable id="620101343" valueType="F8" logicalName="PMC.RecipeEndTime" eventTrigger="" units="" />
		<StatusVariable id="620101344" valueType="F8" logicalName="PMC.RecipeStepTime" eventTrigger="" units="" />
		<StatusVariable id="620101345" valueType="F8" logicalName="PMC.RecipeRfOntime" eventTrigger="" units="" />

		<StatusVariable id="620101346" valueType="F8" logicalName="PMD.RecipeStartTime" eventTrigger="" units="" />
		<StatusVariable id="620101347" valueType="F8" logicalName="PMD.RecipeEndTime" eventTrigger="" units="" />
		<StatusVariable id="620101348" valueType="F8" logicalName="PMD.RecipeStepTime" eventTrigger="" units="" />
		<StatusVariable id="620101349" valueType="F8" logicalName="PMD.RecipeRfOntime" eventTrigger="" units="" />


		<StatusVariable id="620101350" valueType="U4" logicalName="PMA.WaferCounter" eventTrigger="" units="" />
		<StatusVariable id="620101351" valueType="F8" logicalName="PMA.RfOnTime" eventTrigger="" units="" />
		<StatusVariable id="620101352" valueType="F8" logicalName="PMA.PumpOnTime" eventTrigger="" units="" />

		<StatusVariable id="620101353" valueType="U4" logicalName="PMB.WaferCounter" eventTrigger="" units="" />
		<StatusVariable id="620101354" valueType="F8" logicalName="PMB.RfOnTime" eventTrigger="" units="" />
		<StatusVariable id="620101355" valueType="F8" logicalName="PMB.PumpOnTime" eventTrigger="" units="" />

		<StatusVariable id="620101356" valueType="U4" logicalName="PMC.WaferCounter" eventTrigger="" units="" />
		<StatusVariable id="620101357" valueType="F8" logicalName="PMC.RfOnTime" eventTrigger="" units="" />
		<StatusVariable id="620101358" valueType="F8" logicalName="PMC.PumpOnTime" eventTrigger="" units="" />

		<StatusVariable id="620101359" valueType="U4" logicalName="PMD.WaferCounter" eventTrigger="" units="" />
		<StatusVariable id="620101360" valueType="F8" logicalName="PMD.RfOnTime" eventTrigger="" units="" />
		<StatusVariable id="620101361" valueType="F8" logicalName="PMD.PumpOnTime" eventTrigger="" units="" />

		<StatusVariable id="620101362" valueType="U4" logicalName="PMA.StepNo" eventTrigger="" units="" />
		<StatusVariable id="620101363" valueType="U4" logicalName="PMB.StepNo" eventTrigger="" units="" />
		<StatusVariable id="620101364" valueType="U4" logicalName="PMC.StepNo" eventTrigger="" units="" />
		<StatusVariable id="620101365" valueType="U4" logicalName="PMD.StepNo" eventTrigger="" units="" />

		<StatusVariable id="620101366" valueType="F8" logicalName="PMA.Match.C1SetPoint" eventTrigger="" units="" />
		<StatusVariable id="620101367" valueType="F8" logicalName="PMA.Match.C2SetPoint" eventTrigger="" units="" />
		<StatusVariable id="620101368" valueType="F8" logicalName="PMB.Match.C1SetPoint" eventTrigger="" units="" />
		<StatusVariable id="620101369" valueType="F8" logicalName="PMB.Match.C2SetPoint" eventTrigger="" units="" />
		<StatusVariable id="620101370" valueType="F8" logicalName="PMC.Match.C1SetPoint" eventTrigger="" units="" />
		<StatusVariable id="620101371" valueType="F8" logicalName="PMC.Match.C2SetPoint" eventTrigger="" units="" />
		<StatusVariable id="620101372" valueType="F8" logicalName="PMD.Match.C1SetPoint" eventTrigger="" units="" />
		<StatusVariable id="620101373" valueType="F8" logicalName="PMD.Match.C2SetPoint" eventTrigger="" units="" />
		<StatusVariable id="620101374" valueType="F8" logicalName="PMA.HighTemperatureHeater.InnerPower" eventTrigger="" units="" />
		<StatusVariable id="620101375" valueType="F8" logicalName="PMA.HighTemperatureHeater.OuterPower" eventTrigger="" units="" />
		<StatusVariable id="620101376" valueType="F8" logicalName="PMA.Match.Vpp" eventTrigger="" units="" />


		<StatusVariable id="630101001" valueType="F4" logicalName="PMB.AI_CHB_M-HT_Current_Speed" eventTrigger="" units="" />
		<StatusVariable id="630101002" valueType="F4" logicalName="PMB.AI_CHB_M-HT_Max_Power" eventTrigger="" units="" />
		<StatusVariable id="630101003" valueType="F4" logicalName="PMB.AI_CHB_M-HT_Min_Power" eventTrigger="" units="" />
		<StatusVariable id="630101004" valueType="F4" logicalName="PMB.AI_CHB_M-HT_Reference_Power_Output" eventTrigger="" units="" />
		<StatusVariable id="630101005" valueType="F4" logicalName="PMB.ChamberPressure" eventTrigger="" units="" />
		<StatusVariable id="630101006" valueType="Boolean" logicalName="PMB.CHBWallOTSWAlarm.Value" eventTrigger="" units="" />
		<StatusVariable id="630101007" valueType="F8" logicalName="PMB.Chiller.Temp" eventTrigger="" units="" />
		<StatusVariable id="630101008" valueType="F4" logicalName="PMB.ChillerInnerTemp" eventTrigger="" units="" />
		<StatusVariable id="630101009" valueType="F4" logicalName="PMB.ChillerOuterTemp" eventTrigger="" units="" />
		<StatusVariable id="630101010" valueType="F4" logicalName="PMB.ChillerTopTemp" eventTrigger="" units="" />
		<StatusVariable id="630101011" valueType="F8" logicalName="PMB.ESCHePressure" eventTrigger="" units="" />
		<StatusVariable id="630101012" valueType="F8" logicalName="PMB.ESCHV.Temp" eventTrigger="" units="" />
		<StatusVariable id="630101013" valueType="F8" logicalName="PMB.ForelinePressure" eventTrigger="" units="" />
		<StatusVariable id="630101014" valueType="Boolean" logicalName="PMB.GasBoxDoorSW.Value" eventTrigger="" units="" />
		<StatusVariable id="630101015" valueType="Boolean" logicalName="PMB.GasBoxPressureSW.Value" eventTrigger="" units="" />
		<StatusVariable id="630101016" valueType="Boolean" logicalName="PMB.GeneratorInterlock.Value" eventTrigger="" units="" />
		<StatusVariable id="630101017" valueType="F8" logicalName="PMB.GetPVPosition" eventTrigger="" units="" />
		<StatusVariable id="630101018" valueType="F8" logicalName="PMB.HighTemperatureHeater.Position" eventTrigger="" units="" />
		<StatusVariable id="630101019" valueType="F8" logicalName="PMB.HighTemperatureHeater.Temperature" eventTrigger="" units="" />
		<StatusVariable id="630101020" valueType="F8" logicalName="PMB.IoHeater.PendulumHeater.ControlTcFeedback" eventTrigger="" units="" />
		<StatusVariable id="630101021" valueType="F8" logicalName="PMB.IoHeater.PendulumHeater.ControlTcSetPointView" eventTrigger="" units="" />
		<StatusVariable id="630101022" valueType="F8" logicalName="PMB.IoHeater.PendulumHeater.IsPowerOnFeedback" eventTrigger="" units="" />
		<StatusVariable id="630101023" valueType="F8" logicalName="PMB.IoHeater.PendulumHeater.IsPowerOnSetPoint" eventTrigger="" units="" />
		<StatusVariable id="630101024" valueType="Boolean" logicalName="PMB.IoHeater.ValveHeater.ControlTcFeedback" eventTrigger="" units="" />
		<StatusVariable id="630101025" valueType="Boolean" logicalName="PMB.IoHeater.ValveHeater.ControlTcSetPointView" eventTrigger="" units="" />
		<StatusVariable id="630101026" valueType="Boolean" logicalName="PMB.IoHeater.IsPowerOnFeedback" eventTrigger="" units="" />
		<StatusVariable id="630101027" valueType="Boolean" logicalName="PMB.IoHeater.IsPowerOnSetPoint" eventTrigger="" units="" />
		<StatusVariable id="630101028" valueType="Boolean" logicalName="PMB.IoHeater.WallHeater.ControlTcFeedback" eventTrigger="" units="" />
		<StatusVariable id="630101029" valueType="Boolean" logicalName="PMB.IoHeater.WallHeater.ControlTcSetPointView" eventTrigger="" units="" />
		<StatusVariable id="630101030" valueType="Boolean" logicalName="PMB.IoHeater.WallHeater.IsPowerOnFeedback" eventTrigger="" units="" />
		<StatusVariable id="630101031" valueType="Boolean" logicalName="PMB.IoHeater.WallHeater.IsPowerOnSetPoint" eventTrigger="" units="" />
		<StatusVariable id="630101032" valueType="Boolean" logicalName="PMB.IoSensor.CHBWallOTSWAlarm.Value" eventTrigger="" units="" />
		<StatusVariable id="630101033" valueType="Boolean" logicalName="PMB.IoSensor.GasBoxDoorSW.Value" eventTrigger="" units="" />
		<StatusVariable id="630101034" valueType="Boolean" logicalName="PMB.IoSensor.GasBoxPressureSW.Value" eventTrigger="" units="" />
		<StatusVariable id="630101035" valueType="Boolean" logicalName="PMB.IoSensor.GeneratorInterlock.Value" eventTrigger="" units="" />
		<StatusVariable id="630101036" valueType="Boolean" logicalName="PMB.IoSensor.N2PressureOk.Value" eventTrigger="" units="" />
		<StatusVariable id="630101037" valueType="Boolean" logicalName="PMB.IoSensor.RFMatchInterlock.Value" eventTrigger="" units="" />
		<StatusVariable id="630101038" valueType="Boolean" logicalName="PMB.IoSensor.SensorATMSwitch.Value" eventTrigger="" units="" />
		<StatusVariable id="630101039" valueType="Boolean" logicalName="PMB.IoSensor.SensorCDAPressureOk.Value" eventTrigger="" units="" />
		<StatusVariable id="630101040" valueType="Boolean" logicalName="PMB.IoSensor.SensorLoadlockATMSwitch.Value" eventTrigger="" units="" />
		<StatusVariable id="630101041" valueType="Boolean" logicalName="PMB.IoSensor.SensorPMLidClosed.Value" eventTrigger="" units="" />
		<StatusVariable id="630101042" valueType="Boolean" logicalName="PMB.IoSensor.SensorSlitDoorClosed.Value" eventTrigger="" units="" />
		<StatusVariable id="630101043" valueType="Boolean" logicalName="PMB.IoSensor.SensorSmallWaferInPos.Value" eventTrigger="" units="" />
		<StatusVariable id="630101044" valueType="Boolean" logicalName="PMB.IoSensor.SensorSourceRFFan.Value" eventTrigger="" units="" />
		<StatusVariable id="630101045" valueType="Boolean" logicalName="PMB.IoSensor.SensorVacSwitch.Value" eventTrigger="" units="" />
		<StatusVariable id="630101046" valueType="Boolean" logicalName="PMB.IoSensor.SensorWaterLeakOk.Value" eventTrigger="" units="" />
		<StatusVariable id="630101047" valueType="Boolean" logicalName="PMB.IoSensor.TurboPumpInterlock.Value" eventTrigger="" units="" />
		<StatusVariable id="630101048" valueType="Boolean" logicalName="PMB.IoValve.ValveFastPump.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="630101049" valueType="Boolean" logicalName="PMB.IoValve.ValveFastPump.Status" eventTrigger="" units="" />
		<StatusVariable id="630101050" valueType="Boolean" logicalName="PMB.IoValve.ValveGasFinal.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="630101051" valueType="Boolean" logicalName="PMB.IoValve.ValveGasFinal.Status" eventTrigger="" units="" />
		<StatusVariable id="630101052" valueType="Boolean" logicalName="PMB.IoValve.ValveGuage.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="630101053" valueType="Boolean" logicalName="PMB.IoValve.ValveGuage.Status" eventTrigger="" units="" />
		<StatusVariable id="630101054" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc1.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="630101055" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc1.Status" eventTrigger="" units="" />
		<StatusVariable id="630101056" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc2.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="630101057" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc2.Status" eventTrigger="" units="" />
		<StatusVariable id="630101058" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc3.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="630101059" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc3.Status" eventTrigger="" units="" />
		<StatusVariable id="630101060" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc4.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="630101061" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc4.Status" eventTrigger="" units="" />
		<StatusVariable id="630101062" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc5.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="630101063" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc5.Status" eventTrigger="" units="" />
		<StatusVariable id="630101064" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc6.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="630101065" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc6.Status" eventTrigger="" units="" />
		<StatusVariable id="630101066" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc7.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="630101067" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc7.Status" eventTrigger="" units="" />
		<StatusVariable id="630101068" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc8.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="630101069" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc8.Status" eventTrigger="" units="" />
		<StatusVariable id="630101070" valueType="Boolean" logicalName="PMB.IoValve.ValveN2.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="630101071" valueType="Boolean" logicalName="PMB.IoValve.ValveN2.Status" eventTrigger="" units="" />
		<StatusVariable id="630101072" valueType="Boolean" logicalName="PMB.IoValve.ValvePurge.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="630101073" valueType="Boolean" logicalName="PMB.IoValve.ValvePV11.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="630101074" valueType="Boolean" logicalName="PMB.IoValve.ValvePV11.Status" eventTrigger="" units="" />
		<StatusVariable id="630101075" valueType="Boolean" logicalName="PMB.IoValve.ValvePV12.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="630101076" valueType="Boolean" logicalName="PMB.IoValve.ValvePV12.Status" eventTrigger="" units="" />
		<StatusVariable id="630101077" valueType="Boolean" logicalName="PMB.IoValve.ValvePV21.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="630101078" valueType="Boolean" logicalName="PMB.IoValve.ValvePV21.Status" eventTrigger="" units="" />
		<StatusVariable id="630101079" valueType="Boolean" logicalName="PMB.IoValve.ValvePV22.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="630101080" valueType="Boolean" logicalName="PMB.IoValve.ValvePV22.Status" eventTrigger="" units="" />
		<StatusVariable id="630101081" valueType="Boolean" logicalName="PMB.IoValve.ValvePV31.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="630101082" valueType="Boolean" logicalName="PMB.IoValve.ValvePV31.Status" eventTrigger="" units="" />
		<StatusVariable id="630101083" valueType="Boolean" logicalName="PMB.IoValve.ValvePV32.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="630101084" valueType="Boolean" logicalName="PMB.IoValve.ValvePV32.Status" eventTrigger="" units="" />
		<StatusVariable id="630101085" valueType="Boolean" logicalName="PMB.IoValve.ValvePV41.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="630101086" valueType="Boolean" logicalName="PMB.IoValve.ValvePV41.Status" eventTrigger="" units="" />
		<StatusVariable id="630101087" valueType="Boolean" logicalName="PMB.IoValve.ValvePV42.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="630101088" valueType="Boolean" logicalName="PMB.IoValve.ValvePV42.Status" eventTrigger="" units="" />
		<StatusVariable id="630101089" valueType="Boolean" logicalName="PMB.IoValve.ValvePVHe1.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="630101090" valueType="Boolean" logicalName="PMB.IoValve.ValvePVHe1.Status" eventTrigger="" units="" />
		<StatusVariable id="630101091" valueType="Boolean" logicalName="PMB.IoValve.ValvePVHe2.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="630101092" valueType="Boolean" logicalName="PMB.IoValve.ValvePVHe2.Status" eventTrigger="" units="" />
		<StatusVariable id="630101093" valueType="Boolean" logicalName="PMB.IoValve.ValvePVN21.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="630101094" valueType="Boolean" logicalName="PMB.IoValve.ValvePVN21.Status" eventTrigger="" units="" />
		<StatusVariable id="630101095" valueType="Boolean" logicalName="PMB.IoValve.ValvePVN22.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="630101096" valueType="Boolean" logicalName="PMB.IoValve.ValvePVN22.Status" eventTrigger="" units="" />
		<StatusVariable id="630101097" valueType="Boolean" logicalName="PMB.IoValve.ValveSoftPump.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="630101098" valueType="Boolean" logicalName="PMB.IoValve.ValveSoftPump.Status" eventTrigger="" units="" />
		<StatusVariable id="630101099" valueType="Boolean" logicalName="PMB.IoValve.ValveTurboPumpPumping.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="630101100" valueType="Boolean" logicalName="PMB.IoValve.ValveTurboPumpPumping.Status" eventTrigger="" units="" />
		<StatusVariable id="630101101" valueType="Boolean" logicalName="PMB.IoValve.ValveTurboPumpPurge.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="630101102" valueType="Boolean" logicalName="PMB.IoValve.ValveTurboPumpPurge.Status" eventTrigger="" units="" />
		<StatusVariable id="630101103" valueType="Boolean" logicalName="PMB.IsTurboPumpAtSpeed" eventTrigger="" units="" />
		<StatusVariable id="630101104" valueType="Boolean" logicalName="PMB.Lid.IsClosed" eventTrigger="" units="" />
		<StatusVariable id="630101105" valueType="F8" logicalName="PMB.LoadlockPressure" eventTrigger="" units="" />
		<StatusVariable id="630101106" valueType="Boolean" logicalName="PMB.MainPump.IsError" eventTrigger="" units="" />
		<StatusVariable id="630101107" valueType="Boolean" logicalName="PMB.MainPump.IsOn" eventTrigger="" units="" />
		<StatusVariable id="630101108" valueType="Boolean" logicalName="PMB.MainPump.IsRunning" eventTrigger="" units="" />
		<StatusVariable id="630101109" valueType="F8" logicalName="PMB.MainPump.Speed" eventTrigger="" units="" />
		<StatusVariable id="630101110" valueType="F8" logicalName="PMB.MainPump.Temperature" eventTrigger="" units="" />
		<StatusVariable id="630101111" valueType="F8" logicalName="PMB.Match.C1" eventTrigger="" units="" />
		<StatusVariable id="630101112" valueType="F8" logicalName="PMB.Match.C2" eventTrigger="" units="" />
		<StatusVariable id="630101113" valueType="F8" logicalName="PMB.MfcGas1.FeedBack" eventTrigger="" units="" />
		<StatusVariable id="630101114" valueType="F8" logicalName="PMB.MfcGas1.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="630101115" valueType="F8" logicalName="PMB.MfcGas2.FeedBack" eventTrigger="" units="" />
		<StatusVariable id="630101116" valueType="F8" logicalName="PMB.MfcGas2.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="630101117" valueType="F8" logicalName="PMB.MfcGas3.FeedBack" eventTrigger="" units="" />
		<StatusVariable id="630101118" valueType="F8" logicalName="PMB.MfcGas3.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="630101119" valueType="F8" logicalName="PMB.MfcGas4.FeedBack" eventTrigger="" units="" />
		<StatusVariable id="630101120" valueType="F8" logicalName="PMB.MfcGas4.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="630101121" valueType="F8" logicalName="PMB.MfcGas5.FeedBack" eventTrigger="" units="" />
		<StatusVariable id="630101122" valueType="F8" logicalName="PMB.MfcGas5.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="630101123" valueType="F8" logicalName="PMB.MfcGas6.FeedBack" eventTrigger="" units="" />
		<StatusVariable id="630101124" valueType="F8" logicalName="PMB.MfcGas6.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="630101125" valueType="F8" logicalName="PMB.MfcGas7.FeedBack" eventTrigger="" units="" />
		<StatusVariable id="630101126" valueType="F8" logicalName="PMB.MfcGas7.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="630101127" valueType="F8" logicalName="PMB.MfcGas8.FeedBack" eventTrigger="" units="" />
		<StatusVariable id="630101128" valueType="F8" logicalName="PMB.MfcGas8.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="630101129" valueType="F8" logicalName="PMB.MfcHe.FeedBack" eventTrigger="" units="" />
		<StatusVariable id="630101130" valueType="F8" logicalName="PMB.MfcHe.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="630101131" valueType="F8" logicalName="PMB.MfcN2.FeedBack" eventTrigger="" units="" />
		<StatusVariable id="630101132" valueType="F8" logicalName="PMB.MfcN2.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="630101133" valueType="Boolean" logicalName="PMB.N2PressureOk.Value" eventTrigger="" units="" />
		<StatusVariable id="630101134" valueType="F8" logicalName="PMB.ProcessPressure" eventTrigger="" units="" />
		<StatusVariable id="630101135" valueType="F8" logicalName="PMB.Rf.ForwardPower" eventTrigger="" units="" />
		<StatusVariable id="630101136" valueType="F8" logicalName="PMB.Rf.Frequency" eventTrigger="" units="" />
		<StatusVariable id="630101137" valueType="F8" logicalName="PMB.Rf.PowerSetPoint" eventTrigger="" units="" />
		<StatusVariable id="630101138" valueType="F8" logicalName="PMB.Rf.PulsingDutyCycle" eventTrigger="" units="" />
		<StatusVariable id="630101139" valueType="F8" logicalName="PMB.Rf.PulsingFrequency" eventTrigger="" units="" />
		<StatusVariable id="630101140" valueType="F8" logicalName="PMB.Rf.ReflectPower" eventTrigger="" units="" />
		<StatusVariable id="630101141" valueType="Boolean" logicalName="PMB.RFMatchInterlock.Value" eventTrigger="" units="" />
		<StatusVariable id="630101142" valueType="F8" logicalName="PMB.SCR1" eventTrigger="" units="" />
		<StatusVariable id="630101143" valueType="F8" logicalName="PMB.SCR2" eventTrigger="" units="" />
		<StatusVariable id="630101144" valueType="Boolean" logicalName="PMB.SensorATMSwitch.Value" eventTrigger="" units="" />
		<StatusVariable id="630101145" valueType="Boolean" logicalName="PMB.SensorCDAPressureOk.Value" eventTrigger="" units="" />
		<StatusVariable id="630101146" valueType="Boolean" logicalName="PMB.SensorLoadlockATMSwitch.Value" eventTrigger="" units="" />
		<StatusVariable id="630101147" valueType="Boolean" logicalName="PMB.SensorPMLidClosed.Value" eventTrigger="" units="" />
		<StatusVariable id="630101148" valueType="Boolean" logicalName="PMB.SensorSlitDoorClosed.Value" eventTrigger="" units="" />
		<StatusVariable id="630101149" valueType="Boolean" logicalName="PMB.SensorSmallWaferInPos.Value" eventTrigger="" units="" />
		<StatusVariable id="630101150" valueType="Boolean" logicalName="PMB.SensorSourceRFFan.Value" eventTrigger="" units="" />
		<StatusVariable id="630101151" valueType="Boolean" logicalName="PMB.SensorVacSwitch.Value" eventTrigger="" units="" />
		<StatusVariable id="630101152" valueType="Boolean" logicalName="PMB.SensorWaterLeakOk.Value" eventTrigger="" units="" />
		<StatusVariable id="630101153" valueType="Boolean" logicalName="PMB.SlitDoor.IsClosed" eventTrigger="" units="" />
		<StatusVariable id="630101154" valueType="Boolean" logicalName="PMB.TurboPumpInterlock.Value" eventTrigger="" units="" />
		<StatusVariable id="630101155" valueType="F8" logicalName="PMB.TurboPumpRotationalSpeed" eventTrigger="" units="" />
		<StatusVariable id="630101156" valueType="Boolean" logicalName="PMB.BiasRf.CommunicationStatus" eventTrigger="" units="" />
		<StatusVariable id="630101157" valueType="F8" logicalName="PMB.BiasRf.ForwardPower" eventTrigger="" units="" />
		<StatusVariable id="630101158" valueType="F8" logicalName="PMB.BiasRf.Frequency" eventTrigger="" units="" />
		<StatusVariable id="630101159" valueType="F8" logicalName="PMB.BiasRf.IsPowerOn" eventTrigger="" units="" />
		<StatusVariable id="630101160" valueType="F8" logicalName="PMB.BiasRf.PowerSetPoint" eventTrigger="" units="" />
		<StatusVariable id="630101161" valueType="F8" logicalName="PMB.BiasRf.PulsingDutyCycle" eventTrigger="" units="" />
		<StatusVariable id="630101162" valueType="F8" logicalName="PMB.BiasRf.PulsingFrequency" eventTrigger="" units="" />
		<StatusVariable id="630101163" valueType="F8" logicalName="PMB.BiasRf.ReflectPower" eventTrigger="" units="" />
		<StatusVariable id="630101164" valueType="F8" logicalName="IO.PMB.AI_Chamber_Pressure_10t" eventTrigger="" units="" />
		<StatusVariable id="630101165" valueType="F8" logicalName="IO.PMB.AI_CHB_M_HT_Control_TC_Temp" eventTrigger="" units="" />
		<StatusVariable id="630101166" valueType="F8" logicalName="IO.PMB.AI_Day" eventTrigger="" units="" />
		<StatusVariable id="630101167" valueType="F8" logicalName="IO.PMB.AI_Foreline_Pressure_10t" eventTrigger="" units="" />
		<StatusVariable id="630101168" valueType="F8" logicalName="IO.PMB.AI_Heartbeat_FB" eventTrigger="" units="" />
		<StatusVariable id="630101169" valueType="F8" logicalName="IO.PMB.AI_MFC1_Flow" eventTrigger="" units="" />
		<StatusVariable id="630101170" valueType="F8" logicalName="IO.PMB.AI_MFC2_Flow" eventTrigger="" units="" />
		<StatusVariable id="630101171" valueType="F8" logicalName="IO.PMB.AI_MFC3_Flow" eventTrigger="" units="" />
		<StatusVariable id="630101172" valueType="F8" logicalName="IO.PMB.AI_MFC4_Flow" eventTrigger="" units="" />
		<StatusVariable id="630101173" valueType="F8" logicalName="IO.PMB.AI_MFC5_Flow" eventTrigger="" units="" />
		<StatusVariable id="630101174" valueType="F8" logicalName="IO.PMB.AI_MFC6_Flow" eventTrigger="" units="" />
		<StatusVariable id="630101175" valueType="F8" logicalName="IO.PMB.AI_Minute" eventTrigger="" units="" />
		<StatusVariable id="630101176" valueType="F8" logicalName="IO.PMB.AI_Month" eventTrigger="" units="" />
		<StatusVariable id="630101177" valueType="F8" logicalName="IO.PMB.AI_Process_Pressure_2t" eventTrigger="" units="" />
		<StatusVariable id="630101178" valueType="F8" logicalName="IO.PMB.AI_Second" eventTrigger="" units="" />
		<StatusVariable id="630101179" valueType="F8" logicalName="IO.PMB.AI_Time" eventTrigger="" units="" />
		<StatusVariable id="630101180" valueType="F8" logicalName="IO.PMB.AI_Year" eventTrigger="" units="" />
		<StatusVariable id="630101181" valueType="F8" logicalName="IO.PMB.AO_CHB_M_HT_Temperature_Setpoint" eventTrigger="" units="" />
		<StatusVariable id="630101182" valueType="F8" logicalName="IO.PMB.AO_CHB_M_HT_Temp_Limit_Setpoint" eventTrigger="" units="" />
		<StatusVariable id="630101183" valueType="F8" logicalName="IO.PMB.AO_Heartbeat" eventTrigger="" units="" />
		<StatusVariable id="630101184" valueType="F8" logicalName="IO.PMB.AO_MFC1_Flow_Setpoint" eventTrigger="" units="" />
		<StatusVariable id="630101185" valueType="F8" logicalName="IO.PMB.AO_MFC2_Flow_Setpoint" eventTrigger="" units="" />
		<StatusVariable id="630101186" valueType="F8" logicalName="IO.PMB.AO_MFC3_Flow_Setpoint" eventTrigger="" units="" />
		<StatusVariable id="630101187" valueType="F8" logicalName="IO.PMB.AO_MFC4_Flow_Setpoint" eventTrigger="" units="" />
		<StatusVariable id="630101188" valueType="F8" logicalName="IO.PMB.AO_MFC5_Flow_Setpoint" eventTrigger="" units="" />
		<StatusVariable id="630101189" valueType="F8" logicalName="IO.PMB.AO_MFC6_Flow_Setpoint" eventTrigger="" units="" />
		<StatusVariable id="630101190" valueType="Boolean" logicalName="IO.PMB.DI_1_SlitDoorClosePos" eventTrigger="" units="" />
		<StatusVariable id="630101191" valueType="Boolean" logicalName="IO.PMB.DI_1_SlitDoorOpenPos" eventTrigger="" units="" />
		<StatusVariable id="630101192" valueType="Boolean" logicalName="IO.PMB.DI_ATMSW" eventTrigger="" units="" />
		<StatusVariable id="630101193" valueType="Boolean" logicalName="IO.PMB.DI_Chamber_Pressure_10t_Gauge_Alarm" eventTrigger="" units="" />
		<StatusVariable id="630101194" valueType="Boolean" logicalName="IO.PMB.DI_CHB_M-HT_Control_TC_Broken_Alarm" eventTrigger="" units="" />
		<StatusVariable id="630101195" valueType="Boolean" logicalName="IO.PMB.DI_CHB_M-HT_Heater_On_FB" eventTrigger="" units="" />
		<StatusVariable id="630101196" valueType="Boolean" logicalName="IO.PMB.DI_Foreline_Pressure_10t_Gauge_Alarm" eventTrigger="" units="" />
		<StatusVariable id="630101197" valueType="Boolean" logicalName="IO.PMB.DI_MFC1_Pressure_Switch" eventTrigger="" units="" />
		<StatusVariable id="630101198" valueType="Boolean" logicalName="IO.PMB.DI_MFC2_Pressure_Switch" eventTrigger="" units="" />
		<StatusVariable id="630101199" valueType="Boolean" logicalName="IO.PMB.DI_MFC3_Pressure_Switch" eventTrigger="" units="" />
		<StatusVariable id="630101200" valueType="Boolean" logicalName="IO.PMB.DI_MFC4_Pressure_Switch" eventTrigger="" units="" />
		<StatusVariable id="630101201" valueType="Boolean" logicalName="IO.PMB.DI_MFC5_Pressure_Switch" eventTrigger="" units="" />
		<StatusVariable id="630101202" valueType="Boolean" logicalName="IO.PMB.DI_MFC6_Pressure_Switch" eventTrigger="" units="" />
		<StatusVariable id="630101203" valueType="Boolean" logicalName="IO.PMB.DI_N2_Purge_Pressure_Switch" eventTrigger="" units="" />
		<StatusVariable id="630101204" valueType="Boolean" logicalName="IO.PMB.DI_Process_Pressure_2t_Gauge_Alarm" eventTrigger="" units="" />
		<StatusVariable id="630101205" valueType="Boolean" logicalName="IO.PMB.DI_TM_Safety_Door_Colse" eventTrigger="" units="" />
		<StatusVariable id="630101206" valueType="Boolean" logicalName="IO.PMB.DI_Arm_Not_Extend_to_PM" eventTrigger="" units="" />
		<StatusVariable id="630101207" valueType="Boolean" logicalName="IO.PMB.DI_VACSW" eventTrigger="" units="" />
		<StatusVariable id="630101208" valueType="Boolean" logicalName="IO.PMB.DI_WaterLeak" eventTrigger="" units="" />
		<StatusVariable id="630101209" valueType="Boolean" logicalName="IO.PMB.DO_Purge_Valve" eventTrigger="" units="" />
		<StatusVariable id="630101210" valueType="Boolean" logicalName="IO.PMB.DO_CHB_M_HT_Heater_On" eventTrigger="" units="" />
		<StatusVariable id="630101211" valueType="Boolean" logicalName="IO.PMB.DO_Fast_Pumping_Valve" eventTrigger="" units="" />
		<StatusVariable id="630101212" valueType="Boolean" logicalName="IO.PMB.DO_MFC1_Valve" eventTrigger="" units="" />
		<StatusVariable id="630101213" valueType="Boolean" logicalName="IO.PMB.DO_MFC2_Valve" eventTrigger="" units="" />
		<StatusVariable id="630101214" valueType="Boolean" logicalName="IO.PMB.DO_MFC3_Valve" eventTrigger="" units="" />
		<StatusVariable id="630101215" valueType="Boolean" logicalName="IO.PMB.DO_MFC4_Valve" eventTrigger="" units="" />
		<StatusVariable id="630101216" valueType="Boolean" logicalName="IO.PMB.DO_MFC5_Valve" eventTrigger="" units="" />
		<StatusVariable id="630101217" valueType="Boolean" logicalName="IO.PMB.DO_MFC6_Valve" eventTrigger="" units="" />
		<StatusVariable id="630101218" valueType="Boolean" logicalName="IO.PMB.DO_N2_Valve" eventTrigger="" units="" />
		<StatusVariable id="630101219" valueType="Boolean" logicalName="IO.PMB.DO_Gas_Final_Valve" eventTrigger="" units="" />
		<StatusVariable id="630101220" valueType="Boolean" logicalName="IO.PMB.DO_Reset_Signal" eventTrigger="" units="" />
		<StatusVariable id="630101221" valueType="Boolean" logicalName="IO.PMB.DO_Soft_Pumping_Valve" eventTrigger="" units="" />
		<StatusVariable id="630101222" valueType="Boolean" logicalName="IO.PMB.DI_RF_BOX_Interlock" eventTrigger="" units="" />
		<StatusVariable id="630101223" valueType="Boolean" logicalName="IO.PMB.DI_Source_RF_Generator_Interlock" eventTrigger="" units="" />
		<StatusVariable id="630101224" valueType="Boolean" logicalName="IO.PMB.DI_Source_RF_Match_Interlock" eventTrigger="" units="" />
		<StatusVariable id="630101225" valueType="Boolean" logicalName="IO.PMB.DI_Turbo_Pump_Interlock" eventTrigger="" units="" />
		<StatusVariable id="630101226" valueType="Boolean" logicalName="IO.PMB.DI_CDA_Pressure_Switch" eventTrigger="" units="" />
		<StatusVariable id="630101227" valueType="Boolean" logicalName="IO.PMB.DI_Top_Safty_Door_SW" eventTrigger="" units="" />
		<StatusVariable id="630101228" valueType="Boolean" logicalName="IO.PMB.DI_Gas_Detector1_Alarm" eventTrigger="" units="" />
		<StatusVariable id="630101229" valueType="Boolean" logicalName="IO.PMB.DI__Gas_Detector2_Alarm" eventTrigger="" units="" />
		<StatusVariable id="630101230" valueType="Boolean" logicalName="IO.PMB.DI_CHB_M-HT_Switch_Alarm" eventTrigger="" units="" />
		<StatusVariable id="630101231" valueType="Boolean" logicalName="IO.PMB.DI_PN2_Pressure_Switch" eventTrigger="" units="" />
		<StatusVariable id="630101232" valueType="F8" logicalName="IO.PMB.DI_MFC7_Pressure_Switch" eventTrigger="" units="" />
		<StatusVariable id="630101233" valueType="F8" logicalName="IO.PMB.DI_MFC8_Pressure_Switch" eventTrigger="" units="" />
		<StatusVariable id="630101234" valueType="Boolean" logicalName="IO.PMB.DI_Gas_Box_Door_Switch" eventTrigger="" units="" />
		<StatusVariable id="630101235" valueType="Boolean" logicalName="IO.PMB.DI_Gas_Box_Pressure_Switch" eventTrigger="" units="" />
		<StatusVariable id="630101236" valueType="Boolean" logicalName="IO.PMB.DI_Turbo_Pump_Water_Flow_Switch" eventTrigger="" units="" />
		<StatusVariable id="630101237" valueType="Boolean" logicalName="IO.PMB.DI_Source_RF_Water_Flow_Switch" eventTrigger="" units="" />
		<StatusVariable id="630101238" valueType="Boolean" logicalName="IO.PMB.DI_Spare_Water_Flow_Switch" eventTrigger="" units="" />
		<StatusVariable id="630101239" valueType="Boolean" logicalName="IO.PMB.DI_P_Valve_TC_Deviation_out_of_Range" eventTrigger="" units="" />
		<StatusVariable id="630101240" valueType="Boolean" logicalName="IO.PMB.DI_P_Valve_Control_TC_Broken_Alarm" eventTrigger="" units="" />
		<StatusVariable id="630101241" valueType="Boolean" logicalName="IO.PMB.DI_P_Valve_Monitor_TC_Broken_Alarm" eventTrigger="" units="" />
		<StatusVariable id="630101242" valueType="Boolean" logicalName="IO.PMB.DI_P_Valve_Heater_On_FB" eventTrigger="" units="" />
		<StatusVariable id="630101243" valueType="Boolean" logicalName="IO.PMB.DI_Gas_Line_Control_TC_Broken_Alarm" eventTrigger="" units="" />
		<StatusVariable id="630101244" valueType="Boolean" logicalName="IO.PMB.DI_Gas_Line_Heater_On_FB" eventTrigger="" units="" />
		<StatusVariable id="630101245" valueType="Boolean" logicalName="IO.PMB.DI_S_Valve_OT_Switch_Alarm" eventTrigger="" units="" />
		<StatusVariable id="630101246" valueType="Boolean" logicalName="IO.PMB.DI_Space_Heater_Ctrl_TC_Broken_Alarm" eventTrigger="" units="" />
		<StatusVariable id="630101247" valueType="Boolean" logicalName="IO.PMB.DI_Space_Heater_Heat_ON" eventTrigger="" units="" />
		<StatusVariable id="630101248" valueType="Boolean" logicalName="IO.PMB.DI_Space_Heater_Over_Temp" eventTrigger="" units="" />
		<StatusVariable id="630101249" valueType="Boolean" logicalName="IO.PMB.DI_Lid_Up_Button" eventTrigger="" units="" />
		<StatusVariable id="630101250" valueType="Boolean" logicalName="IO.PMB.DI_Lid_Down_Button" eventTrigger="" units="" />
		<StatusVariable id="630101251" valueType="Boolean" logicalName="IO.PMB.DI_Lid_Up_Limit_Pos_SW" eventTrigger="" units="" />
		<StatusVariable id="630101252" valueType="Boolean" logicalName="IO.PMB.DI_Lid_Down_Limit_Pos_SW" eventTrigger="" units="" />
		<StatusVariable id="630101253" valueType="Boolean" logicalName="IO.PMB.DI_Top_Plate_Coolant_Flow_SW" eventTrigger="" units="" />
		<StatusVariable id="630101254" valueType="Boolean" logicalName="IO.PMB.DI_Lid_Rotate_Lock_SW" eventTrigger="" units="" />
		<StatusVariable id="630101255" valueType="Boolean" logicalName="IO.PMB.DI_Lid_Serve_Alarm" eventTrigger="" units="" />
		<StatusVariable id="630101256" valueType="Boolean" logicalName="IO.PMB.DI_MFC1_Fauit_Exist" eventTrigger="" units="" />
		<StatusVariable id="630101257" valueType="Boolean" logicalName="IO.PMB.DI_MFC2_Fauit_Exist" eventTrigger="" units="" />
		<StatusVariable id="630101258" valueType="Boolean" logicalName="IO.PMB.DI_MFC3_Fauit_Exist" eventTrigger="" units="" />
		<StatusVariable id="630101259" valueType="Boolean" logicalName="IO.PMB.DI_MFC4_Fauit_Exist" eventTrigger="" units="" />
		<StatusVariable id="630101260" valueType="Boolean" logicalName="IO.PMB.DI_MFC5_Fauit_Exist" eventTrigger="" units="" />
		<StatusVariable id="630101261" valueType="Boolean" logicalName="IO.PMB.DI_MFC6_Fauit_Exist" eventTrigger="" units="" />
		<StatusVariable id="630101262" valueType="Boolean" logicalName="IO.PMB.DI_MFC7_Fauit_Exist" eventTrigger="" units="" />
		<StatusVariable id="630101263" valueType="Boolean" logicalName="IO.PMB.DI_MFC8_Fauit_Exist" eventTrigger="" units="" />
		<StatusVariable id="630101264" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Servo_Alarm" eventTrigger="" units="" />
		<StatusVariable id="630101265" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Up_Limit_Pos_SW" eventTrigger="" units="" />
		<StatusVariable id="630101266" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Down_Limit_Pos_SW" eventTrigger="" units="" />
		<StatusVariable id="630101267" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Servo_ORG_Pos_SW" eventTrigger="" units="" />
		<StatusVariable id="630101268" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Servo_with_origin" eventTrigger="" units="" />
		<StatusVariable id="630101269" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Servo_servo_on" eventTrigger="" units="" />
		<StatusVariable id="630101270" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Servo_alarm" eventTrigger="" units="" />
		<StatusVariable id="630101271" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Servo_ORG_fail_alarm" eventTrigger="" units="" />
		<StatusVariable id="630101272" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Servo_ABS_fail_alarm" eventTrigger="" units="" />
		<StatusVariable id="630101273" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Servo_Over_software_Limt_alarm" eventTrigger="" units="" />
		<StatusVariable id="630101274" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Servo_Go_Position1_Complete" eventTrigger="" units="" />
		<StatusVariable id="630101275" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Servo_Go_Position2_Complete" eventTrigger="" units="" />
		<StatusVariable id="630101276" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Servo_Go_Position3_Complete" eventTrigger="" units="" />
		<StatusVariable id="630101277" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Servo_Go_Position4_Complete" eventTrigger="" units="" />
		<StatusVariable id="630101278" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Servo_Go_Position5_Complete" eventTrigger="" units="" />
		<StatusVariable id="630101279" valueType="Boolean" logicalName="IO.PMB.DO_PVN21" eventTrigger="" units="" />
		<StatusVariable id="630101280" valueType="Boolean" logicalName="IO.PMB.DO_PVN22" eventTrigger="" units="" />
		<StatusVariable id="630101281" valueType="Boolean" logicalName="IO.PMB.DO_PV11" eventTrigger="" units="" />
		<StatusVariable id="630101282" valueType="Boolean" logicalName="IO.PMB.DO_PV12" eventTrigger="" units="" />
		<StatusVariable id="630101283" valueType="Boolean" logicalName="IO.PMB.DO_PV21" eventTrigger="" units="" />
		<StatusVariable id="630101284" valueType="Boolean" logicalName="IO.PMB.DO_PV22" eventTrigger="" units="" />
		<StatusVariable id="630101285" valueType="Boolean" logicalName="IO.PMB.DO_PV31" eventTrigger="" units="" />
		<StatusVariable id="630101286" valueType="Boolean" logicalName="IO.PMB.DO_PV32" eventTrigger="" units="" />
		<StatusVariable id="630101287" valueType="Boolean" logicalName="IO.PMB.DO_PV41" eventTrigger="" units="" />
		<StatusVariable id="630101288" valueType="Boolean" logicalName="IO.PMB.DO_PV42" eventTrigger="" units="" />
		<StatusVariable id="630101289" valueType="Boolean" logicalName="IO.PMB.DO_MFC7_Valve" eventTrigger="" units="" />
		<StatusVariable id="630101290" valueType="Boolean" logicalName="IO.PMB.DO_MFC8_Valve" eventTrigger="" units="" />
		<StatusVariable id="630101291" valueType="Boolean" logicalName="IO.PMB.DO_N2_Purge1_Valve" eventTrigger="" units="" />
		<StatusVariable id="630101292" valueType="Boolean" logicalName="IO.PMB.DO_N2_Purge2_Valve" eventTrigger="" units="" />
		<StatusVariable id="630101293" valueType="Boolean" logicalName="IO.PMB.DO_Turbo_Pump_Pumping_Valve" eventTrigger="" units="" />
		<StatusVariable id="630101294" valueType="Boolean" logicalName="IO.PMB.DO_Pump_Purge_Valve" eventTrigger="" units="" />
		<StatusVariable id="630101295" valueType="Boolean" logicalName="IO.PMB.DO_Gauge_Valve" eventTrigger="" units="" />
		<StatusVariable id="630101296" valueType="Boolean" logicalName="IO.PMB.DO_P_Valve_Heater_On" eventTrigger="" units="" />
		<StatusVariable id="630101297" valueType="Boolean" logicalName="IO.PMB.DO_Gas_Line_Heater_On" eventTrigger="" units="" />
		<StatusVariable id="630101298" valueType="Boolean" logicalName="IO.PMB.DO_Lid_Up" eventTrigger="" units="" />
		<StatusVariable id="630101299" valueType="Boolean" logicalName="IO.PMB.DO_Lid_Down" eventTrigger="" units="" />
		<StatusVariable id="630101300" valueType="Boolean" logicalName="IO.PMB.DO_Lift_Servo_Go_Position1" eventTrigger="" units="" />
		<StatusVariable id="630101301" valueType="Boolean" logicalName="IO.PMB.DO_Lift_Servo_Go_Position2" eventTrigger="" units="" />
		<StatusVariable id="630101302" valueType="Boolean" logicalName="IO.PMB.DO_Lift_Servo_Go_Position3" eventTrigger="" units="" />
		<StatusVariable id="630101303" valueType="Boolean" logicalName="IO.PMB.DO_Lift_Servo_Origin" eventTrigger="" units="" />
		<StatusVariable id="630101304" valueType="Boolean" logicalName="IO.PMB.DO_Lift_Servo_Enable" eventTrigger="" units="" />
		<StatusVariable id="630101305" valueType="Boolean" logicalName="IO.PMB.DO_Lift_Servo_Manual_UP" eventTrigger="" units="" />
		<StatusVariable id="630101306" valueType="Boolean" logicalName="IO.PMB.DO_Lift_Servo_Manual_DOWN" eventTrigger="" units="" />
		<StatusVariable id="630101307" valueType="Boolean" logicalName="IO.PMB.DO_Lift_Servo_Go_Position4" eventTrigger="" units="" />
		<StatusVariable id="630101308" valueType="Boolean" logicalName="IO.PMB.DO_Lift_Servo_Go_Position5" eventTrigger="" units="" />
		<StatusVariable id="630101309" valueType="Boolean" logicalName="IO.PMB.DO_Lift_Servo_Estop" eventTrigger="" units="" />
		<StatusVariable id="630101310" valueType="Boolean" logicalName="IO.PMB.DO_Lift_Servo_MATC_Mode" eventTrigger="" units="" />
		<StatusVariable id="630101311" valueType="F8" logicalName="IO.PMB.AI_MFC7_Flow" eventTrigger="" units="" />
		<StatusVariable id="630101312" valueType="F8" logicalName="IO.PMB.AI_MFC8_Flow" eventTrigger="" units="" />
		<StatusVariable id="630101313" valueType="F8" logicalName="IO.PMB.AI_Turbo_Pump_N2_Flow" eventTrigger="" units="" />
		<StatusVariable id="630101314" valueType="F8" logicalName="IO.PMB.AI_Penning_Gauge_Pressure1" eventTrigger="" units="" />
		<StatusVariable id="630101315" valueType="F8" logicalName="IO.PMB.AI_CHB_M_HT_SCR1_PWR_OUT" eventTrigger="" units="" />
		<StatusVariable id="630101316" valueType="F8" logicalName="IO.PMB.AI_CHB_M_HT_SCR2_PWR_OUT" eventTrigger="" units="" />
		<StatusVariable id="630101317" valueType="F8" logicalName="IO.PMB.AI_Spare_Heater_Control_TC_Temp" eventTrigger="" units="" />
		<StatusVariable id="630101318" valueType="F8" logicalName="IO.PMB.AI_Chamber_Pressure_Virtual" eventTrigger="" units="" />
		<StatusVariable id="630101319" valueType="F8" logicalName="IO.PMB.AI_P_Valve_Control_TC_Temp" eventTrigger="" units="" />
		<StatusVariable id="630101320" valueType="F8" logicalName="IO.PMB.AI_Gas_Line_Control_TC_Temp" eventTrigger="" units="" />
		<StatusVariable id="630101321" valueType="F8" logicalName="IO.PMB.AI_Lift_Servo_Current_Posi_Mm" eventTrigger="" units="" />
		<StatusVariable id="630101322" valueType="F8" logicalName="IO.PMB.AI_CHB_M_HT_Reference_Power_Out" eventTrigger="" units="" />
		<StatusVariable id="630101323" valueType="F8" logicalName="IO.PMB.AI_CHB_M_HT_Max_Power" eventTrigger="" units="" />
		<StatusVariable id="630101324" valueType="F8" logicalName="IO.PMB.AI_CHB_M_HT_Min_Power" eventTrigger="" units="" />
		<StatusVariable id="630101325" valueType="F8" logicalName="IO.PMB.AI_CHB_M_HT_Current_Speed" eventTrigger="" units="" />
		<StatusVariable id="630101326" valueType="F8" logicalName="IO.PMB.AO_MFC7_Flow_Swtpoint" eventTrigger="" units="" />
		<StatusVariable id="630101327" valueType="F8" logicalName="IO.PMB.AO_MFC8_Flow_Swtpoint" eventTrigger="" units="" />
		<StatusVariable id="630101328" valueType="F8" logicalName="IO.PMB.AO_Turbo_Pump_N2_Flow_Setpoint" eventTrigger="" units="" />
		<StatusVariable id="630101329" valueType="F8" logicalName="IO.PMB.AO_P_Valve_Temperature_Setpoint" eventTrigger="" units="" />
		<StatusVariable id="630101330" valueType="F8" logicalName="IO.PMB.AO_P_Valve_Temp_Limit_Setpoint" eventTrigger="" units="" />
		<StatusVariable id="630101331" valueType="F8" logicalName="IO.PMB.AO_Space_Heater_Heat_Temp_Setpoint" eventTrigger="" units="" />
		<StatusVariable id="630101332" valueType="F8" logicalName="IO.PMB.AO_Space_Heater_Temp_High_Limit_Setpoint" eventTrigger="" units="" />
		<StatusVariable id="630101333" valueType="F8" logicalName="IO.PMB.AO_CHB_H_HT_Power_Distribute_Percent" eventTrigger="" units="" />
		<StatusVariable id="640101001" valueType="F4" logicalName="PMC.AI_CHB_M-HT_Current_Speed" eventTrigger="" units="" />
		<StatusVariable id="640101002" valueType="F4" logicalName="PMC.AI_CHB_M-HT_Max_Power" eventTrigger="" units="" />
		<StatusVariable id="640101003" valueType="F4" logicalName="PMC.AI_CHB_M-HT_Min_Power" eventTrigger="" units="" />
		<StatusVariable id="640101004" valueType="F4" logicalName="PMC.AI_CHB_M-HT_Reference_Power_Output" eventTrigger="" units="" />
		<StatusVariable id="640101005" valueType="F4" logicalName="PMC.ChamberPressure" eventTrigger="" units="" />
		<StatusVariable id="640101006" valueType="Boolean" logicalName="PMC.CHBWallOTSWAlarm.Value" eventTrigger="" units="" />
		<StatusVariable id="640101007" valueType="F8" logicalName="PMC.Chiller.Temp" eventTrigger="" units="" />
		<StatusVariable id="640101008" valueType="F4" logicalName="PMC.ChillerInnerTemp" eventTrigger="" units="" />
		<StatusVariable id="640101009" valueType="F4" logicalName="PMC.ChillerOuterTemp" eventTrigger="" units="" />
		<StatusVariable id="640101010" valueType="F4" logicalName="PMC.ChillerTopTemp" eventTrigger="" units="" />
		<StatusVariable id="640101011" valueType="F8" logicalName="PMC.ESCHePressure" eventTrigger="" units="" />
		<StatusVariable id="640101012" valueType="F8" logicalName="PMC.ESCHV.Temp" eventTrigger="" units="" />
		<StatusVariable id="640101013" valueType="F8" logicalName="PMC.ForelinePressure" eventTrigger="" units="" />
		<StatusVariable id="640101014" valueType="Boolean" logicalName="PMC.GasBoxDoorSW.Value" eventTrigger="" units="" />
		<StatusVariable id="640101015" valueType="Boolean" logicalName="PMC.GasBoxPressureSW.Value" eventTrigger="" units="" />
		<StatusVariable id="640101016" valueType="Boolean" logicalName="PMC.GeneratorInterlock.Value" eventTrigger="" units="" />
		<StatusVariable id="640101017" valueType="F8" logicalName="PMC.GetPVPosition" eventTrigger="" units="" />
		<StatusVariable id="640101018" valueType="F8" logicalName="PMC.HighTemperatureHeater.Position" eventTrigger="" units="" />
		<StatusVariable id="640101019" valueType="F8" logicalName="PMC.HighTemperatureHeater.Temperature" eventTrigger="" units="" />
		<StatusVariable id="640101020" valueType="F8" logicalName="PMC.IoHeater.PendulumHeater.ControlTcFeedback" eventTrigger="" units="" />
		<StatusVariable id="640101021" valueType="F8" logicalName="PMC.IoHeater.PendulumHeater.ControlTcSetPointView" eventTrigger="" units="" />
		<StatusVariable id="640101022" valueType="F8" logicalName="PMC.IoHeater.PendulumHeater.IsPowerOnFeedback" eventTrigger="" units="" />
		<StatusVariable id="640101023" valueType="F8" logicalName="PMC.IoHeater.PendulumHeater.IsPowerOnSetPoint" eventTrigger="" units="" />
		<StatusVariable id="640101024" valueType="Boolean" logicalName="PMC.IoHeater.ValveHeater.ControlTcFeedback" eventTrigger="" units="" />
		<StatusVariable id="640101025" valueType="Boolean" logicalName="PMC.IoHeater.ValveHeater.ControlTcSetPointView" eventTrigger="" units="" />
		<StatusVariable id="640101026" valueType="Boolean" logicalName="PMC.IoHeater.IsPowerOnFeedback" eventTrigger="" units="" />
		<StatusVariable id="640101027" valueType="Boolean" logicalName="PMC.IoHeater.IsPowerOnSetPoint" eventTrigger="" units="" />
		<StatusVariable id="640101028" valueType="Boolean" logicalName="PMC.IoHeater.WallHeater.ControlTcFeedback" eventTrigger="" units="" />
		<StatusVariable id="640101029" valueType="Boolean" logicalName="PMC.IoHeater.WallHeater.ControlTcSetPointView" eventTrigger="" units="" />
		<StatusVariable id="640101030" valueType="Boolean" logicalName="PMC.IoHeater.WallHeater.IsPowerOnFeedback" eventTrigger="" units="" />
		<StatusVariable id="640101031" valueType="Boolean" logicalName="PMC.IoHeater.WallHeater.IsPowerOnSetPoint" eventTrigger="" units="" />
		<StatusVariable id="640101032" valueType="Boolean" logicalName="PMC.IoSensor.CHBWallOTSWAlarm.Value" eventTrigger="" units="" />
		<StatusVariable id="640101033" valueType="Boolean" logicalName="PMC.IoSensor.GasBoxDoorSW.Value" eventTrigger="" units="" />
		<StatusVariable id="640101034" valueType="Boolean" logicalName="PMC.IoSensor.GasBoxPressureSW.Value" eventTrigger="" units="" />
		<StatusVariable id="640101035" valueType="Boolean" logicalName="PMC.IoSensor.GeneratorInterlock.Value" eventTrigger="" units="" />
		<StatusVariable id="640101036" valueType="Boolean" logicalName="PMC.IoSensor.N2PressureOk.Value" eventTrigger="" units="" />
		<StatusVariable id="640101037" valueType="Boolean" logicalName="PMC.IoSensor.RFMatchInterlock.Value" eventTrigger="" units="" />
		<StatusVariable id="640101038" valueType="Boolean" logicalName="PMC.IoSensor.SensorATMSwitch.Value" eventTrigger="" units="" />
		<StatusVariable id="640101039" valueType="Boolean" logicalName="PMC.IoSensor.SensorCDAPressureOk.Value" eventTrigger="" units="" />
		<StatusVariable id="640101040" valueType="Boolean" logicalName="PMC.IoSensor.SensorLoadlockATMSwitch.Value" eventTrigger="" units="" />
		<StatusVariable id="640101041" valueType="Boolean" logicalName="PMC.IoSensor.SensorPMLidClosed.Value" eventTrigger="" units="" />
		<StatusVariable id="640101042" valueType="Boolean" logicalName="PMC.IoSensor.SensorSlitDoorClosed.Value" eventTrigger="" units="" />
		<StatusVariable id="640101043" valueType="Boolean" logicalName="PMC.IoSensor.SensorSmallWaferInPos.Value" eventTrigger="" units="" />
		<StatusVariable id="640101044" valueType="Boolean" logicalName="PMC.IoSensor.SensorSourceRFFan.Value" eventTrigger="" units="" />
		<StatusVariable id="640101045" valueType="Boolean" logicalName="PMC.IoSensor.SensorVacSwitch.Value" eventTrigger="" units="" />
		<StatusVariable id="640101046" valueType="Boolean" logicalName="PMC.IoSensor.SensorWaterLeakOk.Value" eventTrigger="" units="" />
		<StatusVariable id="640101047" valueType="Boolean" logicalName="PMC.IoSensor.TurboPumpInterlock.Value" eventTrigger="" units="" />
		<StatusVariable id="640101048" valueType="Boolean" logicalName="PMC.IoValve.ValveFastPump.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="640101049" valueType="Boolean" logicalName="PMC.IoValve.ValveFastPump.Status" eventTrigger="" units="" />
		<StatusVariable id="640101050" valueType="Boolean" logicalName="PMC.IoValve.ValveGasFinal.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="640101051" valueType="Boolean" logicalName="PMC.IoValve.ValveGasFinal.Status" eventTrigger="" units="" />
		<StatusVariable id="640101052" valueType="Boolean" logicalName="PMC.IoValve.ValveGuage.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="640101053" valueType="Boolean" logicalName="PMC.IoValve.ValveGuage.Status" eventTrigger="" units="" />
		<StatusVariable id="640101054" valueType="Boolean" logicalName="PMC.IoValve.ValveMfc1.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="640101055" valueType="Boolean" logicalName="PMC.IoValve.ValveMfc1.Status" eventTrigger="" units="" />
		<StatusVariable id="640101056" valueType="Boolean" logicalName="PMC.IoValve.ValveMfc2.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="640101057" valueType="Boolean" logicalName="PMC.IoValve.ValveMfc2.Status" eventTrigger="" units="" />
		<StatusVariable id="640101058" valueType="Boolean" logicalName="PMC.IoValve.ValveMfc3.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="640101059" valueType="Boolean" logicalName="PMC.IoValve.ValveMfc3.Status" eventTrigger="" units="" />
		<StatusVariable id="640101060" valueType="Boolean" logicalName="PMC.IoValve.ValveMfc4.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="640101061" valueType="Boolean" logicalName="PMC.IoValve.ValveMfc4.Status" eventTrigger="" units="" />
		<StatusVariable id="640101062" valueType="Boolean" logicalName="PMC.IoValve.ValveMfc5.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="640101063" valueType="Boolean" logicalName="PMC.IoValve.ValveMfc5.Status" eventTrigger="" units="" />
		<StatusVariable id="640101064" valueType="Boolean" logicalName="PMC.IoValve.ValveMfc6.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="640101065" valueType="Boolean" logicalName="PMC.IoValve.ValveMfc6.Status" eventTrigger="" units="" />
		<StatusVariable id="640101066" valueType="Boolean" logicalName="PMC.IoValve.ValveMfc7.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="640101067" valueType="Boolean" logicalName="PMC.IoValve.ValveMfc7.Status" eventTrigger="" units="" />
		<StatusVariable id="640101068" valueType="Boolean" logicalName="PMC.IoValve.ValveMfc8.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="640101069" valueType="Boolean" logicalName="PMC.IoValve.ValveMfc8.Status" eventTrigger="" units="" />
		<StatusVariable id="640101070" valueType="Boolean" logicalName="PMC.IoValve.ValveN2.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="640101071" valueType="Boolean" logicalName="PMC.IoValve.ValveN2.Status" eventTrigger="" units="" />
		<StatusVariable id="640101072" valueType="Boolean" logicalName="PMC.IoValve.ValvePurge.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="640101073" valueType="Boolean" logicalName="PMC.IoValve.ValvePV11.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="640101074" valueType="Boolean" logicalName="PMC.IoValve.ValvePV11.Status" eventTrigger="" units="" />
		<StatusVariable id="640101075" valueType="Boolean" logicalName="PMC.IoValve.ValvePV12.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="640101076" valueType="Boolean" logicalName="PMC.IoValve.ValvePV12.Status" eventTrigger="" units="" />
		<StatusVariable id="640101077" valueType="Boolean" logicalName="PMC.IoValve.ValvePV21.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="640101078" valueType="Boolean" logicalName="PMC.IoValve.ValvePV21.Status" eventTrigger="" units="" />
		<StatusVariable id="640101079" valueType="Boolean" logicalName="PMC.IoValve.ValvePV22.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="640101080" valueType="Boolean" logicalName="PMC.IoValve.ValvePV22.Status" eventTrigger="" units="" />
		<StatusVariable id="640101081" valueType="Boolean" logicalName="PMC.IoValve.ValvePV31.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="640101082" valueType="Boolean" logicalName="PMC.IoValve.ValvePV31.Status" eventTrigger="" units="" />
		<StatusVariable id="640101083" valueType="Boolean" logicalName="PMC.IoValve.ValvePV32.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="640101084" valueType="Boolean" logicalName="PMC.IoValve.ValvePV32.Status" eventTrigger="" units="" />
		<StatusVariable id="640101085" valueType="Boolean" logicalName="PMC.IoValve.ValvePV41.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="640101086" valueType="Boolean" logicalName="PMC.IoValve.ValvePV41.Status" eventTrigger="" units="" />
		<StatusVariable id="640101087" valueType="Boolean" logicalName="PMC.IoValve.ValvePV42.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="640101088" valueType="Boolean" logicalName="PMC.IoValve.ValvePV42.Status" eventTrigger="" units="" />
		<StatusVariable id="640101089" valueType="Boolean" logicalName="PMC.IoValve.ValvePVHe1.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="640101090" valueType="Boolean" logicalName="PMC.IoValve.ValvePVHe1.Status" eventTrigger="" units="" />
		<StatusVariable id="640101091" valueType="Boolean" logicalName="PMC.IoValve.ValvePVHe2.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="640101092" valueType="Boolean" logicalName="PMC.IoValve.ValvePVHe2.Status" eventTrigger="" units="" />
		<StatusVariable id="640101093" valueType="Boolean" logicalName="PMC.IoValve.ValvePVN21.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="640101094" valueType="Boolean" logicalName="PMC.IoValve.ValvePVN21.Status" eventTrigger="" units="" />
		<StatusVariable id="640101095" valueType="Boolean" logicalName="PMC.IoValve.ValvePVN22.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="640101096" valueType="Boolean" logicalName="PMC.IoValve.ValvePVN22.Status" eventTrigger="" units="" />
		<StatusVariable id="640101097" valueType="Boolean" logicalName="PMC.IoValve.ValveSoftPump.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="640101098" valueType="Boolean" logicalName="PMC.IoValve.ValveSoftPump.Status" eventTrigger="" units="" />
		<StatusVariable id="640101099" valueType="Boolean" logicalName="PMC.IoValve.ValveTurboPumpPumping.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="640101100" valueType="Boolean" logicalName="PMC.IoValve.ValveTurboPumpPumping.Status" eventTrigger="" units="" />
		<StatusVariable id="640101101" valueType="Boolean" logicalName="PMC.IoValve.ValveTurboPumpPurge.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="640101102" valueType="Boolean" logicalName="PMC.IoValve.ValveTurboPumpPurge.Status" eventTrigger="" units="" />
		<StatusVariable id="640101103" valueType="Boolean" logicalName="PMC.IsTurboPumpAtSpeed" eventTrigger="" units="" />
		<StatusVariable id="640101104" valueType="Boolean" logicalName="PMC.Lid.IsClosed" eventTrigger="" units="" />
		<StatusVariable id="640101105" valueType="F8" logicalName="PMC.LoadlockPressure" eventTrigger="" units="" />
		<StatusVariable id="640101106" valueType="Boolean" logicalName="PMC.MainPump.IsError" eventTrigger="" units="" />
		<StatusVariable id="640101107" valueType="Boolean" logicalName="PMC.MainPump.IsOn" eventTrigger="" units="" />
		<StatusVariable id="640101108" valueType="Boolean" logicalName="PMC.MainPump.IsRunning" eventTrigger="" units="" />
		<StatusVariable id="640101109" valueType="F8" logicalName="PMC.MainPump.Speed" eventTrigger="" units="" />
		<StatusVariable id="640101110" valueType="F8" logicalName="PMC.MainPump.Temperature" eventTrigger="" units="" />
		<StatusVariable id="640101111" valueType="F8" logicalName="PMC.Match.C1" eventTrigger="" units="" />
		<StatusVariable id="640101112" valueType="F8" logicalName="PMC.Match.C2" eventTrigger="" units="" />
		<StatusVariable id="640101113" valueType="F8" logicalName="PMC.MfcGas1.FeedBack" eventTrigger="" units="" />
		<StatusVariable id="640101114" valueType="F8" logicalName="PMC.MfcGas1.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="640101115" valueType="F8" logicalName="PMC.MfcGas2.FeedBack" eventTrigger="" units="" />
		<StatusVariable id="640101116" valueType="F8" logicalName="PMC.MfcGas2.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="640101117" valueType="F8" logicalName="PMC.MfcGas3.FeedBack" eventTrigger="" units="" />
		<StatusVariable id="640101118" valueType="F8" logicalName="PMC.MfcGas3.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="640101119" valueType="F8" logicalName="PMC.MfcGas4.FeedBack" eventTrigger="" units="" />
		<StatusVariable id="640101120" valueType="F8" logicalName="PMC.MfcGas4.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="640101121" valueType="F8" logicalName="PMC.MfcGas5.FeedBack" eventTrigger="" units="" />
		<StatusVariable id="640101122" valueType="F8" logicalName="PMC.MfcGas5.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="640101123" valueType="F8" logicalName="PMC.MfcGas6.FeedBack" eventTrigger="" units="" />
		<StatusVariable id="640101124" valueType="F8" logicalName="PMC.MfcGas6.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="640101125" valueType="F8" logicalName="PMC.MfcGas7.FeedBack" eventTrigger="" units="" />
		<StatusVariable id="640101126" valueType="F8" logicalName="PMC.MfcGas7.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="640101127" valueType="F8" logicalName="PMC.MfcGas8.FeedBack" eventTrigger="" units="" />
		<StatusVariable id="640101128" valueType="F8" logicalName="PMC.MfcGas8.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="640101129" valueType="F8" logicalName="PMC.MfcHe.FeedBack" eventTrigger="" units="" />
		<StatusVariable id="640101130" valueType="F8" logicalName="PMC.MfcHe.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="640101131" valueType="F8" logicalName="PMC.MfcN2.FeedBack" eventTrigger="" units="" />
		<StatusVariable id="640101132" valueType="F8" logicalName="PMC.MfcN2.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="640101133" valueType="Boolean" logicalName="PMC.N2PressureOk.Value" eventTrigger="" units="" />
		<StatusVariable id="640101134" valueType="F8" logicalName="PMC.ProcessPressure" eventTrigger="" units="" />
		<StatusVariable id="640101135" valueType="F8" logicalName="PMC.Rf.ForwardPower" eventTrigger="" units="" />
		<StatusVariable id="640101136" valueType="F8" logicalName="PMC.Rf.Frequency" eventTrigger="" units="" />
		<StatusVariable id="640101137" valueType="F8" logicalName="PMC.Rf.PowerSetPoint" eventTrigger="" units="" />
		<StatusVariable id="640101138" valueType="F8" logicalName="PMC.Rf.PulsingDutyCycle" eventTrigger="" units="" />
		<StatusVariable id="640101139" valueType="F8" logicalName="PMC.Rf.PulsingFrequency" eventTrigger="" units="" />
		<StatusVariable id="640101140" valueType="F8" logicalName="PMC.Rf.ReflectPower" eventTrigger="" units="" />
		<StatusVariable id="640101141" valueType="Boolean" logicalName="PMC.RFMatchInterlock.Value" eventTrigger="" units="" />
		<StatusVariable id="640101142" valueType="F8" logicalName="PMC.SCR1" eventTrigger="" units="" />
		<StatusVariable id="640101143" valueType="F8" logicalName="PMC.SCR2" eventTrigger="" units="" />
		<StatusVariable id="640101144" valueType="Boolean" logicalName="PMC.SensorATMSwitch.Value" eventTrigger="" units="" />
		<StatusVariable id="640101145" valueType="Boolean" logicalName="PMC.SensorCDAPressureOk.Value" eventTrigger="" units="" />
		<StatusVariable id="640101146" valueType="Boolean" logicalName="PMC.SensorLoadlockATMSwitch.Value" eventTrigger="" units="" />
		<StatusVariable id="640101147" valueType="Boolean" logicalName="PMC.SensorPMLidClosed.Value" eventTrigger="" units="" />
		<StatusVariable id="640101148" valueType="Boolean" logicalName="PMC.SensorSlitDoorClosed.Value" eventTrigger="" units="" />
		<StatusVariable id="640101149" valueType="Boolean" logicalName="PMC.SensorSmallWaferInPos.Value" eventTrigger="" units="" />
		<StatusVariable id="640101150" valueType="Boolean" logicalName="PMC.SensorSourceRFFan.Value" eventTrigger="" units="" />
		<StatusVariable id="640101151" valueType="Boolean" logicalName="PMC.SensorVacSwitch.Value" eventTrigger="" units="" />
		<StatusVariable id="640101152" valueType="Boolean" logicalName="PMC.SensorWaterLeakOk.Value" eventTrigger="" units="" />
		<StatusVariable id="640101153" valueType="Boolean" logicalName="PMC.SlitDoor.IsClosed" eventTrigger="" units="" />
		<StatusVariable id="640101154" valueType="Boolean" logicalName="PMC.TurboPumpInterlock.Value" eventTrigger="" units="" />
		<StatusVariable id="640101155" valueType="F8" logicalName="PMC.TurboPumpRotationalSpeed" eventTrigger="" units="" />
		<StatusVariable id="640101156" valueType="Boolean" logicalName="PMC.BiasRf.CommunicationStatus" eventTrigger="" units="" />
		<StatusVariable id="640101157" valueType="F8" logicalName="PMC.BiasRf.ForwardPower" eventTrigger="" units="" />
		<StatusVariable id="640101158" valueType="F8" logicalName="PMC.BiasRf.Frequency" eventTrigger="" units="" />
		<StatusVariable id="640101159" valueType="F8" logicalName="PMC.BiasRf.IsPowerOn" eventTrigger="" units="" />
		<StatusVariable id="640101160" valueType="F8" logicalName="PMC.BiasRf.PowerSetPoint" eventTrigger="" units="" />
		<StatusVariable id="640101161" valueType="F8" logicalName="PMC.BiasRf.PulsingDutyCycle" eventTrigger="" units="" />
		<StatusVariable id="640101162" valueType="F8" logicalName="PMC.BiasRf.PulsingFrequency" eventTrigger="" units="" />
		<StatusVariable id="640101163" valueType="F8" logicalName="PMC.BiasRf.ReflectPower" eventTrigger="" units="" />
		<StatusVariable id="640101164" valueType="F8" logicalName="IO.PMC.AI_Chamber_Pressure_10t" eventTrigger="" units="" />
		<StatusVariable id="640101165" valueType="F8" logicalName="IO.PMC.AI_CHB_M_HT_Control_TC_Temp" eventTrigger="" units="" />
		<StatusVariable id="640101166" valueType="F8" logicalName="IO.PMC.AI_Day" eventTrigger="" units="" />
		<StatusVariable id="640101167" valueType="F8" logicalName="IO.PMC.AI_Foreline_Pressure_10t" eventTrigger="" units="" />
		<StatusVariable id="640101168" valueType="F8" logicalName="IO.PMC.AI_Heartbeat_FB" eventTrigger="" units="" />
		<StatusVariable id="640101169" valueType="F8" logicalName="IO.PMC.AI_MFC1_Flow" eventTrigger="" units="" />
		<StatusVariable id="640101170" valueType="F8" logicalName="IO.PMC.AI_MFC2_Flow" eventTrigger="" units="" />
		<StatusVariable id="640101171" valueType="F8" logicalName="IO.PMC.AI_MFC3_Flow" eventTrigger="" units="" />
		<StatusVariable id="640101172" valueType="F8" logicalName="IO.PMC.AI_MFC4_Flow" eventTrigger="" units="" />
		<StatusVariable id="640101173" valueType="F8" logicalName="IO.PMC.AI_MFC5_Flow" eventTrigger="" units="" />
		<StatusVariable id="640101174" valueType="F8" logicalName="IO.PMC.AI_MFC6_Flow" eventTrigger="" units="" />
		<StatusVariable id="640101175" valueType="F8" logicalName="IO.PMC.AI_Minute" eventTrigger="" units="" />
		<StatusVariable id="640101176" valueType="F8" logicalName="IO.PMC.AI_Month" eventTrigger="" units="" />
		<StatusVariable id="640101177" valueType="F8" logicalName="IO.PMC.AI_Process_Pressure_2t" eventTrigger="" units="" />
		<StatusVariable id="640101178" valueType="F8" logicalName="IO.PMC.AI_Second" eventTrigger="" units="" />
		<StatusVariable id="640101179" valueType="F8" logicalName="IO.PMC.AI_Time" eventTrigger="" units="" />
		<StatusVariable id="640101180" valueType="F8" logicalName="IO.PMC.AI_Year" eventTrigger="" units="" />
		<StatusVariable id="640101181" valueType="F8" logicalName="IO.PMC.AO_CHB_M_HT_Temperature_Setpoint" eventTrigger="" units="" />
		<StatusVariable id="640101182" valueType="F8" logicalName="IO.PMC.AO_CHB_M_HT_Temp_Limit_Setpoint" eventTrigger="" units="" />
		<StatusVariable id="640101183" valueType="F8" logicalName="IO.PMC.AO_Heartbeat" eventTrigger="" units="" />
		<StatusVariable id="640101184" valueType="F8" logicalName="IO.PMC.AO_MFC1_Flow_Setpoint" eventTrigger="" units="" />
		<StatusVariable id="640101185" valueType="F8" logicalName="IO.PMC.AO_MFC2_Flow_Setpoint" eventTrigger="" units="" />
		<StatusVariable id="640101186" valueType="F8" logicalName="IO.PMC.AO_MFC3_Flow_Setpoint" eventTrigger="" units="" />
		<StatusVariable id="640101187" valueType="F8" logicalName="IO.PMC.AO_MFC4_Flow_Setpoint" eventTrigger="" units="" />
		<StatusVariable id="640101188" valueType="F8" logicalName="IO.PMC.AO_MFC5_Flow_Setpoint" eventTrigger="" units="" />
		<StatusVariable id="640101189" valueType="F8" logicalName="IO.PMC.AO_MFC6_Flow_Setpoint" eventTrigger="" units="" />
		<StatusVariable id="640101190" valueType="Boolean" logicalName="IO.PMC.DI_1_SlitDoorClosePos" eventTrigger="" units="" />
		<StatusVariable id="640101191" valueType="Boolean" logicalName="IO.PMC.DI_1_SlitDoorOpenPos" eventTrigger="" units="" />
		<StatusVariable id="640101192" valueType="Boolean" logicalName="IO.PMC.DI_ATMSW" eventTrigger="" units="" />
		<StatusVariable id="640101193" valueType="Boolean" logicalName="IO.PMC.DI_Chamber_Pressure_10t_Gauge_Alarm" eventTrigger="" units="" />
		<StatusVariable id="640101194" valueType="Boolean" logicalName="IO.PMC.DI_CHB_M-HT_Control_TC_Broken_Alarm" eventTrigger="" units="" />
		<StatusVariable id="640101195" valueType="Boolean" logicalName="IO.PMC.DI_CHB_M-HT_Heater_On_FB" eventTrigger="" units="" />
		<StatusVariable id="640101196" valueType="Boolean" logicalName="IO.PMC.DI_Foreline_Pressure_10t_Gauge_Alarm" eventTrigger="" units="" />
		<StatusVariable id="640101197" valueType="Boolean" logicalName="IO.PMC.DI_MFC1_Pressure_Switch" eventTrigger="" units="" />
		<StatusVariable id="640101198" valueType="Boolean" logicalName="IO.PMC.DI_MFC2_Pressure_Switch" eventTrigger="" units="" />
		<StatusVariable id="640101199" valueType="Boolean" logicalName="IO.PMC.DI_MFC3_Pressure_Switch" eventTrigger="" units="" />
		<StatusVariable id="640101200" valueType="Boolean" logicalName="IO.PMC.DI_MFC4_Pressure_Switch" eventTrigger="" units="" />
		<StatusVariable id="640101201" valueType="Boolean" logicalName="IO.PMC.DI_MFC5_Pressure_Switch" eventTrigger="" units="" />
		<StatusVariable id="640101202" valueType="Boolean" logicalName="IO.PMC.DI_MFC6_Pressure_Switch" eventTrigger="" units="" />
		<StatusVariable id="640101203" valueType="Boolean" logicalName="IO.PMC.DI_N2_Purge_Pressure_Switch" eventTrigger="" units="" />
		<StatusVariable id="640101204" valueType="Boolean" logicalName="IO.PMC.DI_Process_Pressure_2t_Gauge_Alarm" eventTrigger="" units="" />
		<StatusVariable id="640101205" valueType="Boolean" logicalName="IO.PMC.DI_TM_Safety_Door_Colse" eventTrigger="" units="" />
		<StatusVariable id="640101206" valueType="Boolean" logicalName="IO.PMC.DI_Arm_Not_Extend_to_PM" eventTrigger="" units="" />
		<StatusVariable id="640101207" valueType="Boolean" logicalName="IO.PMC.DI_VACSW" eventTrigger="" units="" />
		<StatusVariable id="640101208" valueType="Boolean" logicalName="IO.PMC.DI_WaterLeak" eventTrigger="" units="" />
		<StatusVariable id="640101209" valueType="Boolean" logicalName="IO.PMC.DO_Purge_Valve" eventTrigger="" units="" />
		<StatusVariable id="640101210" valueType="Boolean" logicalName="IO.PMC.DO_CHB_M_HT_Heater_On" eventTrigger="" units="" />
		<StatusVariable id="640101211" valueType="Boolean" logicalName="IO.PMC.DO_Fast_Pumping_Valve" eventTrigger="" units="" />
		<StatusVariable id="640101212" valueType="Boolean" logicalName="IO.PMC.DO_MFC1_Valve" eventTrigger="" units="" />
		<StatusVariable id="640101213" valueType="Boolean" logicalName="IO.PMC.DO_MFC2_Valve" eventTrigger="" units="" />
		<StatusVariable id="640101214" valueType="Boolean" logicalName="IO.PMC.DO_MFC3_Valve" eventTrigger="" units="" />
		<StatusVariable id="640101215" valueType="Boolean" logicalName="IO.PMC.DO_MFC4_Valve" eventTrigger="" units="" />
		<StatusVariable id="640101216" valueType="Boolean" logicalName="IO.PMC.DO_MFC5_Valve" eventTrigger="" units="" />
		<StatusVariable id="640101217" valueType="Boolean" logicalName="IO.PMC.DO_MFC6_Valve" eventTrigger="" units="" />
		<StatusVariable id="640101218" valueType="Boolean" logicalName="IO.PMC.DO_N2_Valve" eventTrigger="" units="" />
		<StatusVariable id="640101219" valueType="Boolean" logicalName="IO.PMC.DO_Gas_Final_Valve" eventTrigger="" units="" />
		<StatusVariable id="640101220" valueType="Boolean" logicalName="IO.PMC.DO_Reset_Signal" eventTrigger="" units="" />
		<StatusVariable id="640101221" valueType="Boolean" logicalName="IO.PMC.DO_Soft_Pumping_Valve" eventTrigger="" units="" />
		<StatusVariable id="640101222" valueType="Boolean" logicalName="IO.PMC.DI_RF_BOX_Interlock" eventTrigger="" units="" />
		<StatusVariable id="640101223" valueType="Boolean" logicalName="IO.PMC.DI_Source_RF_Generator_Interlock" eventTrigger="" units="" />
		<StatusVariable id="640101224" valueType="Boolean" logicalName="IO.PMC.DI_Source_RF_Match_Interlock" eventTrigger="" units="" />
		<StatusVariable id="640101225" valueType="Boolean" logicalName="IO.PMC.DI_Turbo_Pump_Interlock" eventTrigger="" units="" />
		<StatusVariable id="640101226" valueType="Boolean" logicalName="IO.PMC.DI_CDA_Pressure_Switch" eventTrigger="" units="" />
		<StatusVariable id="640101227" valueType="Boolean" logicalName="IO.PMC.DI_Top_Safty_Door_SW" eventTrigger="" units="" />
		<StatusVariable id="640101228" valueType="Boolean" logicalName="IO.PMC.DI_Gas_Detector1_Alarm" eventTrigger="" units="" />
		<StatusVariable id="640101229" valueType="Boolean" logicalName="IO.PMC.DI__Gas_Detector2_Alarm" eventTrigger="" units="" />
		<StatusVariable id="640101230" valueType="Boolean" logicalName="IO.PMC.DI_CHB_M-HT_Switch_Alarm" eventTrigger="" units="" />
		<StatusVariable id="640101231" valueType="Boolean" logicalName="IO.PMC.DI_PN2_Pressure_Switch" eventTrigger="" units="" />
		<StatusVariable id="640101232" valueType="F8" logicalName="IO.PMC.DI_MFC7_Pressure_Switch" eventTrigger="" units="" />
		<StatusVariable id="640101233" valueType="F8" logicalName="IO.PMC.DI_MFC8_Pressure_Switch" eventTrigger="" units="" />
		<StatusVariable id="640101234" valueType="Boolean" logicalName="IO.PMC.DI_Gas_Box_Door_Switch" eventTrigger="" units="" />
		<StatusVariable id="640101235" valueType="Boolean" logicalName="IO.PMC.DI_Gas_Box_Pressure_Switch" eventTrigger="" units="" />
		<StatusVariable id="640101236" valueType="Boolean" logicalName="IO.PMC.DI_Turbo_Pump_Water_Flow_Switch" eventTrigger="" units="" />
		<StatusVariable id="640101237" valueType="Boolean" logicalName="IO.PMC.DI_Source_RF_Water_Flow_Switch" eventTrigger="" units="" />
		<StatusVariable id="640101238" valueType="Boolean" logicalName="IO.PMC.DI_Spare_Water_Flow_Switch" eventTrigger="" units="" />
		<StatusVariable id="640101239" valueType="Boolean" logicalName="IO.PMC.DI_P_Valve_TC_Deviation_out_of_Range" eventTrigger="" units="" />
		<StatusVariable id="640101240" valueType="Boolean" logicalName="IO.PMC.DI_P_Valve_Control_TC_Broken_Alarm" eventTrigger="" units="" />
		<StatusVariable id="640101241" valueType="Boolean" logicalName="IO.PMC.DI_P_Valve_Monitor_TC_Broken_Alarm" eventTrigger="" units="" />
		<StatusVariable id="640101242" valueType="Boolean" logicalName="IO.PMC.DI_P_Valve_Heater_On_FB" eventTrigger="" units="" />
		<StatusVariable id="640101243" valueType="Boolean" logicalName="IO.PMC.DI_Gas_Line_Control_TC_Broken_Alarm" eventTrigger="" units="" />
		<StatusVariable id="640101244" valueType="Boolean" logicalName="IO.PMC.DI_Gas_Line_Heater_On_FB" eventTrigger="" units="" />
		<StatusVariable id="640101245" valueType="Boolean" logicalName="IO.PMC.DI_S_Valve_OT_Switch_Alarm" eventTrigger="" units="" />
		<StatusVariable id="640101246" valueType="Boolean" logicalName="IO.PMC.DI_Space_Heater_Ctrl_TC_Broken_Alarm" eventTrigger="" units="" />
		<StatusVariable id="640101247" valueType="Boolean" logicalName="IO.PMC.DI_Space_Heater_Heat_ON" eventTrigger="" units="" />
		<StatusVariable id="640101248" valueType="Boolean" logicalName="IO.PMC.DI_Space_Heater_Over_Temp" eventTrigger="" units="" />
		<StatusVariable id="640101249" valueType="Boolean" logicalName="IO.PMC.DI_Lid_Up_Button" eventTrigger="" units="" />
		<StatusVariable id="640101250" valueType="Boolean" logicalName="IO.PMC.DI_Lid_Down_Button" eventTrigger="" units="" />
		<StatusVariable id="640101251" valueType="Boolean" logicalName="IO.PMC.DI_Lid_Up_Limit_Pos_SW" eventTrigger="" units="" />
		<StatusVariable id="640101252" valueType="Boolean" logicalName="IO.PMC.DI_Lid_Down_Limit_Pos_SW" eventTrigger="" units="" />
		<StatusVariable id="640101253" valueType="Boolean" logicalName="IO.PMC.DI_Top_Plate_Coolant_Flow_SW" eventTrigger="" units="" />
		<StatusVariable id="640101254" valueType="Boolean" logicalName="IO.PMC.DI_Lid_Rotate_Lock_SW" eventTrigger="" units="" />
		<StatusVariable id="640101255" valueType="Boolean" logicalName="IO.PMC.DI_Lid_Serve_Alarm" eventTrigger="" units="" />
		<StatusVariable id="640101256" valueType="Boolean" logicalName="IO.PMC.DI_MFC1_Fauit_Exist" eventTrigger="" units="" />
		<StatusVariable id="640101257" valueType="Boolean" logicalName="IO.PMC.DI_MFC2_Fauit_Exist" eventTrigger="" units="" />
		<StatusVariable id="640101258" valueType="Boolean" logicalName="IO.PMC.DI_MFC3_Fauit_Exist" eventTrigger="" units="" />
		<StatusVariable id="640101259" valueType="Boolean" logicalName="IO.PMC.DI_MFC4_Fauit_Exist" eventTrigger="" units="" />
		<StatusVariable id="640101260" valueType="Boolean" logicalName="IO.PMC.DI_MFC5_Fauit_Exist" eventTrigger="" units="" />
		<StatusVariable id="640101261" valueType="Boolean" logicalName="IO.PMC.DI_MFC6_Fauit_Exist" eventTrigger="" units="" />
		<StatusVariable id="640101262" valueType="Boolean" logicalName="IO.PMC.DI_MFC7_Fauit_Exist" eventTrigger="" units="" />
		<StatusVariable id="640101263" valueType="Boolean" logicalName="IO.PMC.DI_MFC8_Fauit_Exist" eventTrigger="" units="" />
		<StatusVariable id="640101264" valueType="Boolean" logicalName="IO.PMC.DI_Lift_Servo_Alarm" eventTrigger="" units="" />
		<StatusVariable id="640101265" valueType="Boolean" logicalName="IO.PMC.DI_Lift_Up_Limit_Pos_SW" eventTrigger="" units="" />
		<StatusVariable id="640101266" valueType="Boolean" logicalName="IO.PMC.DI_Lift_Down_Limit_Pos_SW" eventTrigger="" units="" />
		<StatusVariable id="640101267" valueType="Boolean" logicalName="IO.PMC.DI_Lift_Servo_ORG_Pos_SW" eventTrigger="" units="" />
		<StatusVariable id="640101268" valueType="Boolean" logicalName="IO.PMC.DI_Lift_Servo_with_origin" eventTrigger="" units="" />
		<StatusVariable id="640101269" valueType="Boolean" logicalName="IO.PMC.DI_Lift_Servo_servo_on" eventTrigger="" units="" />
		<StatusVariable id="640101270" valueType="Boolean" logicalName="IO.PMC.DI_Lift_Servo_alarm" eventTrigger="" units="" />
		<StatusVariable id="640101271" valueType="Boolean" logicalName="IO.PMC.DI_Lift_Servo_ORG_fail_alarm" eventTrigger="" units="" />
		<StatusVariable id="640101272" valueType="Boolean" logicalName="IO.PMC.DI_Lift_Servo_ABS_fail_alarm" eventTrigger="" units="" />
		<StatusVariable id="640101273" valueType="Boolean" logicalName="IO.PMC.DI_Lift_Servo_Over_software_Limt_alarm" eventTrigger="" units="" />
		<StatusVariable id="640101274" valueType="Boolean" logicalName="IO.PMC.DI_Lift_Servo_Go_Position1_Complete" eventTrigger="" units="" />
		<StatusVariable id="640101275" valueType="Boolean" logicalName="IO.PMC.DI_Lift_Servo_Go_Position2_Complete" eventTrigger="" units="" />
		<StatusVariable id="640101276" valueType="Boolean" logicalName="IO.PMC.DI_Lift_Servo_Go_Position3_Complete" eventTrigger="" units="" />
		<StatusVariable id="640101277" valueType="Boolean" logicalName="IO.PMC.DI_Lift_Servo_Go_Position4_Complete" eventTrigger="" units="" />
		<StatusVariable id="640101278" valueType="Boolean" logicalName="IO.PMC.DI_Lift_Servo_Go_Position5_Complete" eventTrigger="" units="" />
		<StatusVariable id="640101279" valueType="Boolean" logicalName="IO.PMC.DO_PVN21" eventTrigger="" units="" />
		<StatusVariable id="640101280" valueType="Boolean" logicalName="IO.PMC.DO_PVN22" eventTrigger="" units="" />
		<StatusVariable id="640101281" valueType="Boolean" logicalName="IO.PMC.DO_PV11" eventTrigger="" units="" />
		<StatusVariable id="640101282" valueType="Boolean" logicalName="IO.PMC.DO_PV12" eventTrigger="" units="" />
		<StatusVariable id="640101283" valueType="Boolean" logicalName="IO.PMC.DO_PV21" eventTrigger="" units="" />
		<StatusVariable id="640101284" valueType="Boolean" logicalName="IO.PMC.DO_PV22" eventTrigger="" units="" />
		<StatusVariable id="640101285" valueType="Boolean" logicalName="IO.PMC.DO_PV31" eventTrigger="" units="" />
		<StatusVariable id="640101286" valueType="Boolean" logicalName="IO.PMC.DO_PV32" eventTrigger="" units="" />
		<StatusVariable id="640101287" valueType="Boolean" logicalName="IO.PMC.DO_PV41" eventTrigger="" units="" />
		<StatusVariable id="640101288" valueType="Boolean" logicalName="IO.PMC.DO_PV42" eventTrigger="" units="" />
		<StatusVariable id="640101289" valueType="Boolean" logicalName="IO.PMC.DO_MFC7_Valve" eventTrigger="" units="" />
		<StatusVariable id="640101290" valueType="Boolean" logicalName="IO.PMC.DO_MFC8_Valve" eventTrigger="" units="" />
		<StatusVariable id="640101291" valueType="Boolean" logicalName="IO.PMC.DO_N2_Purge1_Valve" eventTrigger="" units="" />
		<StatusVariable id="640101292" valueType="Boolean" logicalName="IO.PMC.DO_N2_Purge2_Valve" eventTrigger="" units="" />
		<StatusVariable id="640101293" valueType="Boolean" logicalName="IO.PMC.DO_Turbo_Pump_Pumping_Valve" eventTrigger="" units="" />
		<StatusVariable id="640101294" valueType="Boolean" logicalName="IO.PMC.DO_Pump_Purge_Valve" eventTrigger="" units="" />
		<StatusVariable id="640101295" valueType="Boolean" logicalName="IO.PMC.DO_Gauge_Valve" eventTrigger="" units="" />
		<StatusVariable id="640101296" valueType="Boolean" logicalName="IO.PMC.DO_P_Valve_Heater_On" eventTrigger="" units="" />
		<StatusVariable id="640101297" valueType="Boolean" logicalName="IO.PMC.DO_Gas_Line_Heater_On" eventTrigger="" units="" />
		<StatusVariable id="640101298" valueType="Boolean" logicalName="IO.PMC.DO_Lid_Up" eventTrigger="" units="" />
		<StatusVariable id="640101299" valueType="Boolean" logicalName="IO.PMC.DO_Lid_Down" eventTrigger="" units="" />
		<StatusVariable id="640101300" valueType="Boolean" logicalName="IO.PMC.DO_Lift_Servo_Go_Position1" eventTrigger="" units="" />
		<StatusVariable id="640101301" valueType="Boolean" logicalName="IO.PMC.DO_Lift_Servo_Go_Position2" eventTrigger="" units="" />
		<StatusVariable id="640101302" valueType="Boolean" logicalName="IO.PMC.DO_Lift_Servo_Go_Position3" eventTrigger="" units="" />
		<StatusVariable id="640101303" valueType="Boolean" logicalName="IO.PMC.DO_Lift_Servo_Origin" eventTrigger="" units="" />
		<StatusVariable id="640101304" valueType="Boolean" logicalName="IO.PMC.DO_Lift_Servo_Enable" eventTrigger="" units="" />
		<StatusVariable id="640101305" valueType="Boolean" logicalName="IO.PMC.DO_Lift_Servo_Manual_UP" eventTrigger="" units="" />
		<StatusVariable id="640101306" valueType="Boolean" logicalName="IO.PMC.DO_Lift_Servo_Manual_DOWN" eventTrigger="" units="" />
		<StatusVariable id="640101307" valueType="Boolean" logicalName="IO.PMC.DO_Lift_Servo_Go_Position4" eventTrigger="" units="" />
		<StatusVariable id="640101308" valueType="Boolean" logicalName="IO.PMC.DO_Lift_Servo_Go_Position5" eventTrigger="" units="" />
		<StatusVariable id="640101309" valueType="Boolean" logicalName="IO.PMC.DO_Lift_Servo_Estop" eventTrigger="" units="" />
		<StatusVariable id="640101310" valueType="Boolean" logicalName="IO.PMC.DO_Lift_Servo_MATC_Mode" eventTrigger="" units="" />
		<StatusVariable id="640101311" valueType="F8" logicalName="IO.PMC.AI_MFC7_Flow" eventTrigger="" units="" />
		<StatusVariable id="640101312" valueType="F8" logicalName="IO.PMC.AI_MFC8_Flow" eventTrigger="" units="" />
		<StatusVariable id="640101313" valueType="F8" logicalName="IO.PMC.AI_Turbo_Pump_N2_Flow" eventTrigger="" units="" />
		<StatusVariable id="640101314" valueType="F8" logicalName="IO.PMC.AI_Penning_Gauge_Pressure1" eventTrigger="" units="" />
		<StatusVariable id="640101315" valueType="F8" logicalName="IO.PMC.AI_CHB_M_HT_SCR1_PWR_OUT" eventTrigger="" units="" />
		<StatusVariable id="640101316" valueType="F8" logicalName="IO.PMC.AI_CHB_M_HT_SCR2_PWR_OUT" eventTrigger="" units="" />
		<StatusVariable id="640101317" valueType="F8" logicalName="IO.PMC.AI_Spare_Heater_Control_TC_Temp" eventTrigger="" units="" />
		<StatusVariable id="640101318" valueType="F8" logicalName="IO.PMC.AI_Chamber_Pressure_Virtual" eventTrigger="" units="" />
		<StatusVariable id="640101319" valueType="F8" logicalName="IO.PMC.AI_P_Valve_Control_TC_Temp" eventTrigger="" units="" />
		<StatusVariable id="640101320" valueType="F8" logicalName="IO.PMC.AI_Gas_Line_Control_TC_Temp" eventTrigger="" units="" />
		<StatusVariable id="640101321" valueType="F8" logicalName="IO.PMC.AI_Lift_Servo_Current_Posi_Mm" eventTrigger="" units="" />
		<StatusVariable id="640101322" valueType="F8" logicalName="IO.PMC.AI_CHB_M_HT_Reference_Power_Out" eventTrigger="" units="" />
		<StatusVariable id="640101323" valueType="F8" logicalName="IO.PMC.AI_CHB_M_HT_Max_Power" eventTrigger="" units="" />
		<StatusVariable id="640101324" valueType="F8" logicalName="IO.PMC.AI_CHB_M_HT_Min_Power" eventTrigger="" units="" />
		<StatusVariable id="640101325" valueType="F8" logicalName="IO.PMC.AI_CHB_M_HT_Current_Speed" eventTrigger="" units="" />
		<StatusVariable id="640101326" valueType="F8" logicalName="IO.PMC.AO_MFC7_Flow_Swtpoint" eventTrigger="" units="" />
		<StatusVariable id="640101327" valueType="F8" logicalName="IO.PMC.AO_MFC8_Flow_Swtpoint" eventTrigger="" units="" />
		<StatusVariable id="640101328" valueType="F8" logicalName="IO.PMC.AO_Turbo_Pump_N2_Flow_Setpoint" eventTrigger="" units="" />
		<StatusVariable id="640101329" valueType="F8" logicalName="IO.PMC.AO_P_Valve_Temperature_Setpoint" eventTrigger="" units="" />
		<StatusVariable id="640101330" valueType="F8" logicalName="IO.PMC.AO_P_Valve_Temp_Limit_Setpoint" eventTrigger="" units="" />
		<StatusVariable id="640101331" valueType="F8" logicalName="IO.PMC.AO_Space_Heater_Heat_Temp_Setpoint" eventTrigger="" units="" />
		<StatusVariable id="640101332" valueType="F8" logicalName="IO.PMC.AO_Space_Heater_Temp_High_Limit_Setpoint" eventTrigger="" units="" />
		<StatusVariable id="640101333" valueType="F8" logicalName="IO.PMC.AO_CHB_H_HT_Power_Distribute_Percent" eventTrigger="" units="" />
		<StatusVariable id="650101001" valueType="F4" logicalName="PMD.AI_CHB_M-HT_Current_Speed" eventTrigger="" units="" />
		<StatusVariable id="650101002" valueType="F4" logicalName="PMD.AI_CHB_M-HT_Max_Power" eventTrigger="" units="" />
		<StatusVariable id="650101003" valueType="F4" logicalName="PMD.AI_CHB_M-HT_Min_Power" eventTrigger="" units="" />
		<StatusVariable id="650101004" valueType="F4" logicalName="PMD.AI_CHB_M-HT_Reference_Power_Output" eventTrigger="" units="" />
		<StatusVariable id="650101005" valueType="F4" logicalName="PMD.ChamberPressure" eventTrigger="" units="" />
		<StatusVariable id="650101006" valueType="Boolean" logicalName="PMD.CHBWallOTSWAlarm.Value" eventTrigger="" units="" />
		<StatusVariable id="650101007" valueType="F8" logicalName="PMD.Chiller.Temp" eventTrigger="" units="" />
		<StatusVariable id="650101008" valueType="F4" logicalName="PMD.ChillerInnerTemp" eventTrigger="" units="" />
		<StatusVariable id="650101009" valueType="F4" logicalName="PMD.ChillerOuterTemp" eventTrigger="" units="" />
		<StatusVariable id="650101010" valueType="F4" logicalName="PMD.ChillerTopTemp" eventTrigger="" units="" />
		<StatusVariable id="650101011" valueType="F8" logicalName="PMD.ESCHePressure" eventTrigger="" units="" />
		<StatusVariable id="650101012" valueType="F8" logicalName="PMD.ESCHV.Temp" eventTrigger="" units="" />
		<StatusVariable id="650101013" valueType="F8" logicalName="PMD.ForelinePressure" eventTrigger="" units="" />
		<StatusVariable id="650101014" valueType="Boolean" logicalName="PMD.GasBoxDoorSW.Value" eventTrigger="" units="" />
		<StatusVariable id="650101015" valueType="Boolean" logicalName="PMD.GasBoxPressureSW.Value" eventTrigger="" units="" />
		<StatusVariable id="650101016" valueType="Boolean" logicalName="PMD.GeneratorInterlock.Value" eventTrigger="" units="" />
		<StatusVariable id="650101017" valueType="F8" logicalName="PMD.GetPVPosition" eventTrigger="" units="" />
		<StatusVariable id="650101018" valueType="F8" logicalName="PMD.HighTemperatureHeater.Position" eventTrigger="" units="" />
		<StatusVariable id="650101019" valueType="F8" logicalName="PMD.HighTemperatureHeater.Temperature" eventTrigger="" units="" />
		<StatusVariable id="650101020" valueType="F8" logicalName="PMD.IoHeater.PendulumHeater.ControlTcFeedback" eventTrigger="" units="" />
		<StatusVariable id="650101021" valueType="F8" logicalName="PMD.IoHeater.PendulumHeater.ControlTcSetPointView" eventTrigger="" units="" />
		<StatusVariable id="650101022" valueType="F8" logicalName="PMD.IoHeater.PendulumHeater.IsPowerOnFeedback" eventTrigger="" units="" />
		<StatusVariable id="650101023" valueType="F8" logicalName="PMD.IoHeater.PendulumHeater.IsPowerOnSetPoint" eventTrigger="" units="" />
		<StatusVariable id="650101024" valueType="Boolean" logicalName="PMD.IoHeater.ValveHeater.ControlTcFeedback" eventTrigger="" units="" />
		<StatusVariable id="650101025" valueType="Boolean" logicalName="PMD.IoHeater.ValveHeater.ControlTcSetPointView" eventTrigger="" units="" />
		<StatusVariable id="650101026" valueType="Boolean" logicalName="PMD.IoHeater.IsPowerOnFeedback" eventTrigger="" units="" />
		<StatusVariable id="650101027" valueType="Boolean" logicalName="PMD.IoHeater.IsPowerOnSetPoint" eventTrigger="" units="" />
		<StatusVariable id="650101028" valueType="Boolean" logicalName="PMD.IoHeater.WallHeater.ControlTcFeedback" eventTrigger="" units="" />
		<StatusVariable id="650101029" valueType="Boolean" logicalName="PMD.IoHeater.WallHeater.ControlTcSetPointView" eventTrigger="" units="" />
		<StatusVariable id="650101030" valueType="Boolean" logicalName="PMD.IoHeater.WallHeater.IsPowerOnFeedback" eventTrigger="" units="" />
		<StatusVariable id="650101031" valueType="Boolean" logicalName="PMD.IoHeater.WallHeater.IsPowerOnSetPoint" eventTrigger="" units="" />
		<StatusVariable id="650101032" valueType="Boolean" logicalName="PMD.IoSensor.CHBWallOTSWAlarm.Value" eventTrigger="" units="" />
		<StatusVariable id="650101033" valueType="Boolean" logicalName="PMD.IoSensor.GasBoxDoorSW.Value" eventTrigger="" units="" />
		<StatusVariable id="650101034" valueType="Boolean" logicalName="PMD.IoSensor.GasBoxPressureSW.Value" eventTrigger="" units="" />
		<StatusVariable id="650101035" valueType="Boolean" logicalName="PMD.IoSensor.GeneratorInterlock.Value" eventTrigger="" units="" />
		<StatusVariable id="650101036" valueType="Boolean" logicalName="PMD.IoSensor.N2PressureOk.Value" eventTrigger="" units="" />
		<StatusVariable id="650101037" valueType="Boolean" logicalName="PMD.IoSensor.RFMatchInterlock.Value" eventTrigger="" units="" />
		<StatusVariable id="650101038" valueType="Boolean" logicalName="PMD.IoSensor.SensorATMSwitch.Value" eventTrigger="" units="" />
		<StatusVariable id="650101039" valueType="Boolean" logicalName="PMD.IoSensor.SensorCDAPressureOk.Value" eventTrigger="" units="" />
		<StatusVariable id="650101040" valueType="Boolean" logicalName="PMD.IoSensor.SensorLoadlockATMSwitch.Value" eventTrigger="" units="" />
		<StatusVariable id="650101041" valueType="Boolean" logicalName="PMD.IoSensor.SensorPMLidClosed.Value" eventTrigger="" units="" />
		<StatusVariable id="650101042" valueType="Boolean" logicalName="PMD.IoSensor.SensorSlitDoorClosed.Value" eventTrigger="" units="" />
		<StatusVariable id="650101043" valueType="Boolean" logicalName="PMD.IoSensor.SensorSmallWaferInPos.Value" eventTrigger="" units="" />
		<StatusVariable id="650101044" valueType="Boolean" logicalName="PMD.IoSensor.SensorSourceRFFan.Value" eventTrigger="" units="" />
		<StatusVariable id="650101045" valueType="Boolean" logicalName="PMD.IoSensor.SensorVacSwitch.Value" eventTrigger="" units="" />
		<StatusVariable id="650101046" valueType="Boolean" logicalName="PMD.IoSensor.SensorWaterLeakOk.Value" eventTrigger="" units="" />
		<StatusVariable id="650101047" valueType="Boolean" logicalName="PMD.IoSensor.TurboPumpInterlock.Value" eventTrigger="" units="" />
		<StatusVariable id="650101048" valueType="Boolean" logicalName="PMD.IoValve.ValveFastPump.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="650101049" valueType="Boolean" logicalName="PMD.IoValve.ValveFastPump.Status" eventTrigger="" units="" />
		<StatusVariable id="650101050" valueType="Boolean" logicalName="PMD.IoValve.ValveGasFinal.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="650101051" valueType="Boolean" logicalName="PMD.IoValve.ValveGasFinal.Status" eventTrigger="" units="" />
		<StatusVariable id="650101052" valueType="Boolean" logicalName="PMD.IoValve.ValveGuage.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="650101053" valueType="Boolean" logicalName="PMD.IoValve.ValveGuage.Status" eventTrigger="" units="" />
		<StatusVariable id="650101054" valueType="Boolean" logicalName="PMD.IoValve.ValveMfc1.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="650101055" valueType="Boolean" logicalName="PMD.IoValve.ValveMfc1.Status" eventTrigger="" units="" />
		<StatusVariable id="650101056" valueType="Boolean" logicalName="PMD.IoValve.ValveMfc2.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="650101057" valueType="Boolean" logicalName="PMD.IoValve.ValveMfc2.Status" eventTrigger="" units="" />
		<StatusVariable id="650101058" valueType="Boolean" logicalName="PMD.IoValve.ValveMfc3.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="650101059" valueType="Boolean" logicalName="PMD.IoValve.ValveMfc3.Status" eventTrigger="" units="" />
		<StatusVariable id="650101060" valueType="Boolean" logicalName="PMD.IoValve.ValveMfc4.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="650101061" valueType="Boolean" logicalName="PMD.IoValve.ValveMfc4.Status" eventTrigger="" units="" />
		<StatusVariable id="650101062" valueType="Boolean" logicalName="PMD.IoValve.ValveMfc5.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="650101063" valueType="Boolean" logicalName="PMD.IoValve.ValveMfc5.Status" eventTrigger="" units="" />
		<StatusVariable id="650101064" valueType="Boolean" logicalName="PMD.IoValve.ValveMfc6.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="650101065" valueType="Boolean" logicalName="PMD.IoValve.ValveMfc6.Status" eventTrigger="" units="" />
		<StatusVariable id="650101066" valueType="Boolean" logicalName="PMD.IoValve.ValveMfc7.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="650101067" valueType="Boolean" logicalName="PMD.IoValve.ValveMfc7.Status" eventTrigger="" units="" />
		<StatusVariable id="650101068" valueType="Boolean" logicalName="PMD.IoValve.ValveMfc8.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="650101069" valueType="Boolean" logicalName="PMD.IoValve.ValveMfc8.Status" eventTrigger="" units="" />
		<StatusVariable id="650101070" valueType="Boolean" logicalName="PMD.IoValve.ValveN2.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="650101071" valueType="Boolean" logicalName="PMD.IoValve.ValveN2.Status" eventTrigger="" units="" />
		<StatusVariable id="650101072" valueType="Boolean" logicalName="PMD.IoValve.ValvePurge.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="650101073" valueType="Boolean" logicalName="PMD.IoValve.ValvePV11.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="650101074" valueType="Boolean" logicalName="PMD.IoValve.ValvePV11.Status" eventTrigger="" units="" />
		<StatusVariable id="650101075" valueType="Boolean" logicalName="PMD.IoValve.ValvePV12.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="650101076" valueType="Boolean" logicalName="PMD.IoValve.ValvePV12.Status" eventTrigger="" units="" />
		<StatusVariable id="650101077" valueType="Boolean" logicalName="PMD.IoValve.ValvePV21.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="650101078" valueType="Boolean" logicalName="PMD.IoValve.ValvePV21.Status" eventTrigger="" units="" />
		<StatusVariable id="650101079" valueType="Boolean" logicalName="PMD.IoValve.ValvePV22.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="650101080" valueType="Boolean" logicalName="PMD.IoValve.ValvePV22.Status" eventTrigger="" units="" />
		<StatusVariable id="650101081" valueType="Boolean" logicalName="PMD.IoValve.ValvePV31.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="650101082" valueType="Boolean" logicalName="PMD.IoValve.ValvePV31.Status" eventTrigger="" units="" />
		<StatusVariable id="650101083" valueType="Boolean" logicalName="PMD.IoValve.ValvePV32.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="650101084" valueType="Boolean" logicalName="PMD.IoValve.ValvePV32.Status" eventTrigger="" units="" />
		<StatusVariable id="650101085" valueType="Boolean" logicalName="PMD.IoValve.ValvePV41.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="650101086" valueType="Boolean" logicalName="PMD.IoValve.ValvePV41.Status" eventTrigger="" units="" />
		<StatusVariable id="650101087" valueType="Boolean" logicalName="PMD.IoValve.ValvePV42.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="650101088" valueType="Boolean" logicalName="PMD.IoValve.ValvePV42.Status" eventTrigger="" units="" />
		<StatusVariable id="650101089" valueType="Boolean" logicalName="PMD.IoValve.ValvePVHe1.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="650101090" valueType="Boolean" logicalName="PMD.IoValve.ValvePVHe1.Status" eventTrigger="" units="" />
		<StatusVariable id="650101091" valueType="Boolean" logicalName="PMD.IoValve.ValvePVHe2.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="650101092" valueType="Boolean" logicalName="PMD.IoValve.ValvePVHe2.Status" eventTrigger="" units="" />
		<StatusVariable id="650101093" valueType="Boolean" logicalName="PMD.IoValve.ValvePVN21.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="650101094" valueType="Boolean" logicalName="PMD.IoValve.ValvePVN21.Status" eventTrigger="" units="" />
		<StatusVariable id="650101095" valueType="Boolean" logicalName="PMD.IoValve.ValvePVN22.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="650101096" valueType="Boolean" logicalName="PMD.IoValve.ValvePVN22.Status" eventTrigger="" units="" />
		<StatusVariable id="650101097" valueType="Boolean" logicalName="PMD.IoValve.ValveSoftPump.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="650101098" valueType="Boolean" logicalName="PMD.IoValve.ValveSoftPump.Status" eventTrigger="" units="" />
		<StatusVariable id="650101099" valueType="Boolean" logicalName="PMD.IoValve.ValveTurboPumpPumping.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="650101100" valueType="Boolean" logicalName="PMD.IoValve.ValveTurboPumpPumping.Status" eventTrigger="" units="" />
		<StatusVariable id="650101101" valueType="Boolean" logicalName="PMD.IoValve.ValveTurboPumpPurge.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="650101102" valueType="Boolean" logicalName="PMD.IoValve.ValveTurboPumpPurge.Status" eventTrigger="" units="" />
		<StatusVariable id="650101103" valueType="Boolean" logicalName="PMD.IsTurboPumpAtSpeed" eventTrigger="" units="" />
		<StatusVariable id="650101104" valueType="Boolean" logicalName="PMD.Lid.IsClosed" eventTrigger="" units="" />
		<StatusVariable id="650101105" valueType="F8" logicalName="PMD.LoadlockPressure" eventTrigger="" units="" />
		<StatusVariable id="650101106" valueType="Boolean" logicalName="PMD.MainPump.IsError" eventTrigger="" units="" />
		<StatusVariable id="650101107" valueType="Boolean" logicalName="PMD.MainPump.IsOn" eventTrigger="" units="" />
		<StatusVariable id="650101108" valueType="Boolean" logicalName="PMD.MainPump.IsRunning" eventTrigger="" units="" />
		<StatusVariable id="650101109" valueType="F8" logicalName="PMD.MainPump.Speed" eventTrigger="" units="" />
		<StatusVariable id="650101110" valueType="F8" logicalName="PMD.MainPump.Temperature" eventTrigger="" units="" />
		<StatusVariable id="650101111" valueType="F8" logicalName="PMD.Match.C1" eventTrigger="" units="" />
		<StatusVariable id="650101112" valueType="F8" logicalName="PMD.Match.C2" eventTrigger="" units="" />
		<StatusVariable id="650101113" valueType="F8" logicalName="PMD.MfcGas1.FeedBack" eventTrigger="" units="" />
		<StatusVariable id="650101114" valueType="F8" logicalName="PMD.MfcGas1.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="650101115" valueType="F8" logicalName="PMD.MfcGas2.FeedBack" eventTrigger="" units="" />
		<StatusVariable id="650101116" valueType="F8" logicalName="PMD.MfcGas2.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="650101117" valueType="F8" logicalName="PMD.MfcGas3.FeedBack" eventTrigger="" units="" />
		<StatusVariable id="650101118" valueType="F8" logicalName="PMD.MfcGas3.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="650101119" valueType="F8" logicalName="PMD.MfcGas4.FeedBack" eventTrigger="" units="" />
		<StatusVariable id="650101120" valueType="F8" logicalName="PMD.MfcGas4.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="650101121" valueType="F8" logicalName="PMD.MfcGas5.FeedBack" eventTrigger="" units="" />
		<StatusVariable id="650101122" valueType="F8" logicalName="PMD.MfcGas5.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="650101123" valueType="F8" logicalName="PMD.MfcGas6.FeedBack" eventTrigger="" units="" />
		<StatusVariable id="650101124" valueType="F8" logicalName="PMD.MfcGas6.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="650101125" valueType="F8" logicalName="PMD.MfcGas7.FeedBack" eventTrigger="" units="" />
		<StatusVariable id="650101126" valueType="F8" logicalName="PMD.MfcGas7.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="650101127" valueType="F8" logicalName="PMD.MfcGas8.FeedBack" eventTrigger="" units="" />
		<StatusVariable id="650101128" valueType="F8" logicalName="PMD.MfcGas8.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="650101129" valueType="F8" logicalName="PMD.MfcHe.FeedBack" eventTrigger="" units="" />
		<StatusVariable id="650101130" valueType="F8" logicalName="PMD.MfcHe.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="650101131" valueType="F8" logicalName="PMD.MfcN2.FeedBack" eventTrigger="" units="" />
		<StatusVariable id="650101132" valueType="F8" logicalName="PMD.MfcN2.SetPoint" eventTrigger="" units="" />
		<StatusVariable id="650101133" valueType="Boolean" logicalName="PMD.N2PressureOk.Value" eventTrigger="" units="" />
		<StatusVariable id="650101134" valueType="F8" logicalName="PMD.ProcessPressure" eventTrigger="" units="" />
		<StatusVariable id="650101135" valueType="F8" logicalName="PMD.Rf.ForwardPower" eventTrigger="" units="" />
		<StatusVariable id="650101136" valueType="F8" logicalName="PMD.Rf.Frequency" eventTrigger="" units="" />
		<StatusVariable id="650101137" valueType="F8" logicalName="PMD.Rf.PowerSetPoint" eventTrigger="" units="" />
		<StatusVariable id="650101138" valueType="F8" logicalName="PMD.Rf.PulsingDutyCycle" eventTrigger="" units="" />
		<StatusVariable id="650101139" valueType="F8" logicalName="PMD.Rf.PulsingFrequency" eventTrigger="" units="" />
		<StatusVariable id="650101140" valueType="F8" logicalName="PMD.Rf.ReflectPower" eventTrigger="" units="" />
		<StatusVariable id="650101141" valueType="Boolean" logicalName="PMD.RFMatchInterlock.Value" eventTrigger="" units="" />
		<StatusVariable id="650101142" valueType="F8" logicalName="PMD.SCR1" eventTrigger="" units="" />
		<StatusVariable id="650101143" valueType="F8" logicalName="PMD.SCR2" eventTrigger="" units="" />
		<StatusVariable id="650101144" valueType="Boolean" logicalName="PMD.SensorATMSwitch.Value" eventTrigger="" units="" />
		<StatusVariable id="650101145" valueType="Boolean" logicalName="PMD.SensorCDAPressureOk.Value" eventTrigger="" units="" />
		<StatusVariable id="650101146" valueType="Boolean" logicalName="PMD.SensorLoadlockATMSwitch.Value" eventTrigger="" units="" />
		<StatusVariable id="650101147" valueType="Boolean" logicalName="PMD.SensorPMLidClosed.Value" eventTrigger="" units="" />
		<StatusVariable id="650101148" valueType="Boolean" logicalName="PMD.SensorSlitDoorClosed.Value" eventTrigger="" units="" />
		<StatusVariable id="650101149" valueType="Boolean" logicalName="PMD.SensorSmallWaferInPos.Value" eventTrigger="" units="" />
		<StatusVariable id="650101150" valueType="Boolean" logicalName="PMD.SensorSourceRFFan.Value" eventTrigger="" units="" />
		<StatusVariable id="650101151" valueType="Boolean" logicalName="PMD.SensorVacSwitch.Value" eventTrigger="" units="" />
		<StatusVariable id="650101152" valueType="Boolean" logicalName="PMD.SensorWaterLeakOk.Value" eventTrigger="" units="" />
		<StatusVariable id="650101153" valueType="Boolean" logicalName="PMD.SlitDoor.IsClosed" eventTrigger="" units="" />
		<StatusVariable id="650101154" valueType="Boolean" logicalName="PMD.TurboPumpInterlock.Value" eventTrigger="" units="" />
		<StatusVariable id="650101155" valueType="F8" logicalName="PMD.TurboPumpRotationalSpeed" eventTrigger="" units="" />
		<StatusVariable id="650101156" valueType="Boolean" logicalName="PMD.BiasRf.CommunicationStatus" eventTrigger="" units="" />
		<StatusVariable id="650101157" valueType="F8" logicalName="PMD.BiasRf.ForwardPower" eventTrigger="" units="" />
		<StatusVariable id="650101158" valueType="F8" logicalName="PMD.BiasRf.Frequency" eventTrigger="" units="" />
		<StatusVariable id="650101159" valueType="F8" logicalName="PMD.BiasRf.IsPowerOn" eventTrigger="" units="" />
		<StatusVariable id="650101160" valueType="F8" logicalName="PMD.BiasRf.PowerSetPoint" eventTrigger="" units="" />
		<StatusVariable id="650101161" valueType="F8" logicalName="PMD.BiasRf.PulsingDutyCycle" eventTrigger="" units="" />
		<StatusVariable id="650101162" valueType="F8" logicalName="PMD.BiasRf.PulsingFrequency" eventTrigger="" units="" />
		<StatusVariable id="650101163" valueType="F8" logicalName="PMD.BiasRf.ReflectPower" eventTrigger="" units="" />
		<StatusVariable id="650101164" valueType="F8" logicalName="IO.PMD.AI_Chamber_Pressure_10t" eventTrigger="" units="" />
		<StatusVariable id="650101165" valueType="F8" logicalName="IO.PMD.AI_CHB_M_HT_Control_TC_Temp" eventTrigger="" units="" />
		<StatusVariable id="650101166" valueType="F8" logicalName="IO.PMD.AI_Day" eventTrigger="" units="" />
		<StatusVariable id="650101167" valueType="F8" logicalName="IO.PMD.AI_Foreline_Pressure_10t" eventTrigger="" units="" />
		<StatusVariable id="650101168" valueType="F8" logicalName="IO.PMD.AI_Heartbeat_FB" eventTrigger="" units="" />
		<StatusVariable id="650101169" valueType="F8" logicalName="IO.PMD.AI_MFC1_Flow" eventTrigger="" units="" />
		<StatusVariable id="650101170" valueType="F8" logicalName="IO.PMD.AI_MFC2_Flow" eventTrigger="" units="" />
		<StatusVariable id="650101171" valueType="F8" logicalName="IO.PMD.AI_MFC3_Flow" eventTrigger="" units="" />
		<StatusVariable id="650101172" valueType="F8" logicalName="IO.PMD.AI_MFC4_Flow" eventTrigger="" units="" />
		<StatusVariable id="650101173" valueType="F8" logicalName="IO.PMD.AI_MFC5_Flow" eventTrigger="" units="" />
		<StatusVariable id="650101174" valueType="F8" logicalName="IO.PMD.AI_MFC6_Flow" eventTrigger="" units="" />
		<StatusVariable id="650101175" valueType="F8" logicalName="IO.PMD.AI_Minute" eventTrigger="" units="" />
		<StatusVariable id="650101176" valueType="F8" logicalName="IO.PMD.AI_Month" eventTrigger="" units="" />
		<StatusVariable id="650101177" valueType="F8" logicalName="IO.PMD.AI_Process_Pressure_2t" eventTrigger="" units="" />
		<StatusVariable id="650101178" valueType="F8" logicalName="IO.PMD.AI_Second" eventTrigger="" units="" />
		<StatusVariable id="650101179" valueType="F8" logicalName="IO.PMD.AI_Time" eventTrigger="" units="" />
		<StatusVariable id="650101180" valueType="F8" logicalName="IO.PMD.AI_Year" eventTrigger="" units="" />
		<StatusVariable id="650101181" valueType="F8" logicalName="IO.PMD.AO_CHB_M_HT_Temperature_Setpoint" eventTrigger="" units="" />
		<StatusVariable id="650101182" valueType="F8" logicalName="IO.PMD.AO_CHB_M_HT_Temp_Limit_Setpoint" eventTrigger="" units="" />
		<StatusVariable id="650101183" valueType="F8" logicalName="IO.PMD.AO_Heartbeat" eventTrigger="" units="" />
		<StatusVariable id="650101184" valueType="F8" logicalName="IO.PMD.AO_MFC1_Flow_Setpoint" eventTrigger="" units="" />
		<StatusVariable id="650101185" valueType="F8" logicalName="IO.PMD.AO_MFC2_Flow_Setpoint" eventTrigger="" units="" />
		<StatusVariable id="650101186" valueType="F8" logicalName="IO.PMD.AO_MFC3_Flow_Setpoint" eventTrigger="" units="" />
		<StatusVariable id="650101187" valueType="F8" logicalName="IO.PMD.AO_MFC4_Flow_Setpoint" eventTrigger="" units="" />
		<StatusVariable id="650101188" valueType="F8" logicalName="IO.PMD.AO_MFC5_Flow_Setpoint" eventTrigger="" units="" />
		<StatusVariable id="650101189" valueType="F8" logicalName="IO.PMD.AO_MFC6_Flow_Setpoint" eventTrigger="" units="" />
		<StatusVariable id="650101190" valueType="Boolean" logicalName="IO.PMD.DI_1_SlitDoorClosePos" eventTrigger="" units="" />
		<StatusVariable id="650101191" valueType="Boolean" logicalName="IO.PMD.DI_1_SlitDoorOpenPos" eventTrigger="" units="" />
		<StatusVariable id="650101192" valueType="Boolean" logicalName="IO.PMD.DI_ATMSW" eventTrigger="" units="" />
		<StatusVariable id="650101193" valueType="Boolean" logicalName="IO.PMD.DI_Chamber_Pressure_10t_Gauge_Alarm" eventTrigger="" units="" />
		<StatusVariable id="650101194" valueType="Boolean" logicalName="IO.PMD.DI_CHB_M-HT_Control_TC_Broken_Alarm" eventTrigger="" units="" />
		<StatusVariable id="650101195" valueType="Boolean" logicalName="IO.PMD.DI_CHB_M-HT_Heater_On_FB" eventTrigger="" units="" />
		<StatusVariable id="650101196" valueType="Boolean" logicalName="IO.PMD.DI_Foreline_Pressure_10t_Gauge_Alarm" eventTrigger="" units="" />
		<StatusVariable id="650101197" valueType="Boolean" logicalName="IO.PMD.DI_MFC1_Pressure_Switch" eventTrigger="" units="" />
		<StatusVariable id="650101198" valueType="Boolean" logicalName="IO.PMD.DI_MFC2_Pressure_Switch" eventTrigger="" units="" />
		<StatusVariable id="650101199" valueType="Boolean" logicalName="IO.PMD.DI_MFC3_Pressure_Switch" eventTrigger="" units="" />
		<StatusVariable id="650101200" valueType="Boolean" logicalName="IO.PMD.DI_MFC4_Pressure_Switch" eventTrigger="" units="" />
		<StatusVariable id="650101201" valueType="Boolean" logicalName="IO.PMD.DI_MFC5_Pressure_Switch" eventTrigger="" units="" />
		<StatusVariable id="650101202" valueType="Boolean" logicalName="IO.PMD.DI_MFC6_Pressure_Switch" eventTrigger="" units="" />
		<StatusVariable id="650101203" valueType="Boolean" logicalName="IO.PMD.DI_N2_Purge_Pressure_Switch" eventTrigger="" units="" />
		<StatusVariable id="650101204" valueType="Boolean" logicalName="IO.PMD.DI_Process_Pressure_2t_Gauge_Alarm" eventTrigger="" units="" />
		<StatusVariable id="650101205" valueType="Boolean" logicalName="IO.PMD.DI_TM_Safety_Door_Colse" eventTrigger="" units="" />
		<StatusVariable id="650101206" valueType="Boolean" logicalName="IO.PMD.DI_Arm_Not_Extend_to_PM" eventTrigger="" units="" />
		<StatusVariable id="650101207" valueType="Boolean" logicalName="IO.PMD.DI_VACSW" eventTrigger="" units="" />
		<StatusVariable id="650101208" valueType="Boolean" logicalName="IO.PMD.DI_WaterLeak" eventTrigger="" units="" />
		<StatusVariable id="650101209" valueType="Boolean" logicalName="IO.PMD.DO_Purge_Valve" eventTrigger="" units="" />
		<StatusVariable id="650101210" valueType="Boolean" logicalName="IO.PMD.DO_CHB_M_HT_Heater_On" eventTrigger="" units="" />
		<StatusVariable id="650101211" valueType="Boolean" logicalName="IO.PMD.DO_Fast_Pumping_Valve" eventTrigger="" units="" />
		<StatusVariable id="650101212" valueType="Boolean" logicalName="IO.PMD.DO_MFC1_Valve" eventTrigger="" units="" />
		<StatusVariable id="650101213" valueType="Boolean" logicalName="IO.PMD.DO_MFC2_Valve" eventTrigger="" units="" />
		<StatusVariable id="650101214" valueType="Boolean" logicalName="IO.PMD.DO_MFC3_Valve" eventTrigger="" units="" />
		<StatusVariable id="650101215" valueType="Boolean" logicalName="IO.PMD.DO_MFC4_Valve" eventTrigger="" units="" />
		<StatusVariable id="650101216" valueType="Boolean" logicalName="IO.PMD.DO_MFC5_Valve" eventTrigger="" units="" />
		<StatusVariable id="650101217" valueType="Boolean" logicalName="IO.PMD.DO_MFC6_Valve" eventTrigger="" units="" />
		<StatusVariable id="650101218" valueType="Boolean" logicalName="IO.PMD.DO_N2_Valve" eventTrigger="" units="" />
		<StatusVariable id="650101219" valueType="Boolean" logicalName="IO.PMD.DO_Gas_Final_Valve" eventTrigger="" units="" />
		<StatusVariable id="650101220" valueType="Boolean" logicalName="IO.PMD.DO_Reset_Signal" eventTrigger="" units="" />
		<StatusVariable id="650101221" valueType="Boolean" logicalName="IO.PMD.DO_Soft_Pumping_Valve" eventTrigger="" units="" />
		<StatusVariable id="650101222" valueType="Boolean" logicalName="IO.PMD.DI_RF_BOX_Interlock" eventTrigger="" units="" />
		<StatusVariable id="650101223" valueType="Boolean" logicalName="IO.PMD.DI_Source_RF_Generator_Interlock" eventTrigger="" units="" />
		<StatusVariable id="650101224" valueType="Boolean" logicalName="IO.PMD.DI_Source_RF_Match_Interlock" eventTrigger="" units="" />
		<StatusVariable id="650101225" valueType="Boolean" logicalName="IO.PMD.DI_Turbo_Pump_Interlock" eventTrigger="" units="" />
		<StatusVariable id="650101226" valueType="Boolean" logicalName="IO.PMD.DI_CDA_Pressure_Switch" eventTrigger="" units="" />
		<StatusVariable id="650101227" valueType="Boolean" logicalName="IO.PMD.DI_Top_Safty_Door_SW" eventTrigger="" units="" />
		<StatusVariable id="650101228" valueType="Boolean" logicalName="IO.PMD.DI_Gas_Detector1_Alarm" eventTrigger="" units="" />
		<StatusVariable id="650101229" valueType="Boolean" logicalName="IO.PMD.DI__Gas_Detector2_Alarm" eventTrigger="" units="" />
		<StatusVariable id="650101230" valueType="Boolean" logicalName="IO.PMD.DI_CHB_M-HT_Switch_Alarm" eventTrigger="" units="" />
		<StatusVariable id="650101231" valueType="Boolean" logicalName="IO.PMD.DI_PN2_Pressure_Switch" eventTrigger="" units="" />
		<StatusVariable id="650101232" valueType="F8" logicalName="IO.PMD.DI_MFC7_Pressure_Switch" eventTrigger="" units="" />
		<StatusVariable id="650101233" valueType="F8" logicalName="IO.PMD.DI_MFC8_Pressure_Switch" eventTrigger="" units="" />
		<StatusVariable id="650101234" valueType="Boolean" logicalName="IO.PMD.DI_Gas_Box_Door_Switch" eventTrigger="" units="" />
		<StatusVariable id="650101235" valueType="Boolean" logicalName="IO.PMD.DI_Gas_Box_Pressure_Switch" eventTrigger="" units="" />
		<StatusVariable id="650101236" valueType="Boolean" logicalName="IO.PMD.DI_Turbo_Pump_Water_Flow_Switch" eventTrigger="" units="" />
		<StatusVariable id="650101237" valueType="Boolean" logicalName="IO.PMD.DI_Source_RF_Water_Flow_Switch" eventTrigger="" units="" />
		<StatusVariable id="650101238" valueType="Boolean" logicalName="IO.PMD.DI_Spare_Water_Flow_Switch" eventTrigger="" units="" />
		<StatusVariable id="650101239" valueType="Boolean" logicalName="IO.PMD.DI_P_Valve_TC_Deviation_out_of_Range" eventTrigger="" units="" />
		<StatusVariable id="650101240" valueType="Boolean" logicalName="IO.PMD.DI_P_Valve_Control_TC_Broken_Alarm" eventTrigger="" units="" />
		<StatusVariable id="650101241" valueType="Boolean" logicalName="IO.PMD.DI_P_Valve_Monitor_TC_Broken_Alarm" eventTrigger="" units="" />
		<StatusVariable id="650101242" valueType="Boolean" logicalName="IO.PMD.DI_P_Valve_Heater_On_FB" eventTrigger="" units="" />
		<StatusVariable id="650101243" valueType="Boolean" logicalName="IO.PMD.DI_Gas_Line_Control_TC_Broken_Alarm" eventTrigger="" units="" />
		<StatusVariable id="650101244" valueType="Boolean" logicalName="IO.PMD.DI_Gas_Line_Heater_On_FB" eventTrigger="" units="" />
		<StatusVariable id="650101245" valueType="Boolean" logicalName="IO.PMD.DI_S_Valve_OT_Switch_Alarm" eventTrigger="" units="" />
		<StatusVariable id="650101246" valueType="Boolean" logicalName="IO.PMD.DI_Space_Heater_Ctrl_TC_Broken_Alarm" eventTrigger="" units="" />
		<StatusVariable id="650101247" valueType="Boolean" logicalName="IO.PMD.DI_Space_Heater_Heat_ON" eventTrigger="" units="" />
		<StatusVariable id="650101248" valueType="Boolean" logicalName="IO.PMD.DI_Space_Heater_Over_Temp" eventTrigger="" units="" />
		<StatusVariable id="650101249" valueType="Boolean" logicalName="IO.PMD.DI_Lid_Up_Button" eventTrigger="" units="" />
		<StatusVariable id="650101250" valueType="Boolean" logicalName="IO.PMD.DI_Lid_Down_Button" eventTrigger="" units="" />
		<StatusVariable id="650101251" valueType="Boolean" logicalName="IO.PMD.DI_Lid_Up_Limit_Pos_SW" eventTrigger="" units="" />
		<StatusVariable id="650101252" valueType="Boolean" logicalName="IO.PMD.DI_Lid_Down_Limit_Pos_SW" eventTrigger="" units="" />
		<StatusVariable id="650101253" valueType="Boolean" logicalName="IO.PMD.DI_Top_Plate_Coolant_Flow_SW" eventTrigger="" units="" />
		<StatusVariable id="650101254" valueType="Boolean" logicalName="IO.PMD.DI_Lid_Rotate_Lock_SW" eventTrigger="" units="" />
		<StatusVariable id="650101255" valueType="Boolean" logicalName="IO.PMD.DI_Lid_Serve_Alarm" eventTrigger="" units="" />
		<StatusVariable id="650101256" valueType="Boolean" logicalName="IO.PMD.DI_MFC1_Fauit_Exist" eventTrigger="" units="" />
		<StatusVariable id="650101257" valueType="Boolean" logicalName="IO.PMD.DI_MFC2_Fauit_Exist" eventTrigger="" units="" />
		<StatusVariable id="650101258" valueType="Boolean" logicalName="IO.PMD.DI_MFC3_Fauit_Exist" eventTrigger="" units="" />
		<StatusVariable id="650101259" valueType="Boolean" logicalName="IO.PMD.DI_MFC4_Fauit_Exist" eventTrigger="" units="" />
		<StatusVariable id="650101260" valueType="Boolean" logicalName="IO.PMD.DI_MFC5_Fauit_Exist" eventTrigger="" units="" />
		<StatusVariable id="650101261" valueType="Boolean" logicalName="IO.PMD.DI_MFC6_Fauit_Exist" eventTrigger="" units="" />
		<StatusVariable id="650101262" valueType="Boolean" logicalName="IO.PMD.DI_MFC7_Fauit_Exist" eventTrigger="" units="" />
		<StatusVariable id="650101263" valueType="Boolean" logicalName="IO.PMD.DI_MFC8_Fauit_Exist" eventTrigger="" units="" />
		<StatusVariable id="650101264" valueType="Boolean" logicalName="IO.PMD.DI_Lift_Servo_Alarm" eventTrigger="" units="" />
		<StatusVariable id="650101265" valueType="Boolean" logicalName="IO.PMD.DI_Lift_Up_Limit_Pos_SW" eventTrigger="" units="" />
		<StatusVariable id="650101266" valueType="Boolean" logicalName="IO.PMD.DI_Lift_Down_Limit_Pos_SW" eventTrigger="" units="" />
		<StatusVariable id="650101267" valueType="Boolean" logicalName="IO.PMD.DI_Lift_Servo_ORG_Pos_SW" eventTrigger="" units="" />
		<StatusVariable id="650101268" valueType="Boolean" logicalName="IO.PMD.DI_Lift_Servo_with_origin" eventTrigger="" units="" />
		<StatusVariable id="650101269" valueType="Boolean" logicalName="IO.PMD.DI_Lift_Servo_servo_on" eventTrigger="" units="" />
		<StatusVariable id="650101270" valueType="Boolean" logicalName="IO.PMD.DI_Lift_Servo_alarm" eventTrigger="" units="" />
		<StatusVariable id="650101271" valueType="Boolean" logicalName="IO.PMD.DI_Lift_Servo_ORG_fail_alarm" eventTrigger="" units="" />
		<StatusVariable id="650101272" valueType="Boolean" logicalName="IO.PMD.DI_Lift_Servo_ABS_fail_alarm" eventTrigger="" units="" />
		<StatusVariable id="650101273" valueType="Boolean" logicalName="IO.PMD.DI_Lift_Servo_Over_software_Limt_alarm" eventTrigger="" units="" />
		<StatusVariable id="650101274" valueType="Boolean" logicalName="IO.PMD.DI_Lift_Servo_Go_Position1_Complete" eventTrigger="" units="" />
		<StatusVariable id="650101275" valueType="Boolean" logicalName="IO.PMD.DI_Lift_Servo_Go_Position2_Complete" eventTrigger="" units="" />
		<StatusVariable id="650101276" valueType="Boolean" logicalName="IO.PMD.DI_Lift_Servo_Go_Position3_Complete" eventTrigger="" units="" />
		<StatusVariable id="650101277" valueType="Boolean" logicalName="IO.PMD.DI_Lift_Servo_Go_Position4_Complete" eventTrigger="" units="" />
		<StatusVariable id="650101278" valueType="Boolean" logicalName="IO.PMD.DI_Lift_Servo_Go_Position5_Complete" eventTrigger="" units="" />
		<StatusVariable id="650101279" valueType="Boolean" logicalName="IO.PMD.DO_PVN21" eventTrigger="" units="" />
		<StatusVariable id="650101280" valueType="Boolean" logicalName="IO.PMD.DO_PVN22" eventTrigger="" units="" />
		<StatusVariable id="650101281" valueType="Boolean" logicalName="IO.PMD.DO_PV11" eventTrigger="" units="" />
		<StatusVariable id="650101282" valueType="Boolean" logicalName="IO.PMD.DO_PV12" eventTrigger="" units="" />
		<StatusVariable id="650101283" valueType="Boolean" logicalName="IO.PMD.DO_PV21" eventTrigger="" units="" />
		<StatusVariable id="650101284" valueType="Boolean" logicalName="IO.PMD.DO_PV22" eventTrigger="" units="" />
		<StatusVariable id="650101285" valueType="Boolean" logicalName="IO.PMD.DO_PV31" eventTrigger="" units="" />
		<StatusVariable id="650101286" valueType="Boolean" logicalName="IO.PMD.DO_PV32" eventTrigger="" units="" />
		<StatusVariable id="650101287" valueType="Boolean" logicalName="IO.PMD.DO_PV41" eventTrigger="" units="" />
		<StatusVariable id="650101288" valueType="Boolean" logicalName="IO.PMD.DO_PV42" eventTrigger="" units="" />
		<StatusVariable id="650101289" valueType="Boolean" logicalName="IO.PMD.DO_MFC7_Valve" eventTrigger="" units="" />
		<StatusVariable id="650101290" valueType="Boolean" logicalName="IO.PMD.DO_MFC8_Valve" eventTrigger="" units="" />
		<StatusVariable id="650101291" valueType="Boolean" logicalName="IO.PMD.DO_N2_Purge1_Valve" eventTrigger="" units="" />
		<StatusVariable id="650101292" valueType="Boolean" logicalName="IO.PMD.DO_N2_Purge2_Valve" eventTrigger="" units="" />
		<StatusVariable id="650101293" valueType="Boolean" logicalName="IO.PMD.DO_Turbo_Pump_Pumping_Valve" eventTrigger="" units="" />
		<StatusVariable id="650101294" valueType="Boolean" logicalName="IO.PMD.DO_Pump_Purge_Valve" eventTrigger="" units="" />
		<StatusVariable id="650101295" valueType="Boolean" logicalName="IO.PMD.DO_Gauge_Valve" eventTrigger="" units="" />
		<StatusVariable id="650101296" valueType="Boolean" logicalName="IO.PMD.DO_P_Valve_Heater_On" eventTrigger="" units="" />
		<StatusVariable id="650101297" valueType="Boolean" logicalName="IO.PMD.DO_Gas_Line_Heater_On" eventTrigger="" units="" />
		<StatusVariable id="650101298" valueType="Boolean" logicalName="IO.PMD.DO_Lid_Up" eventTrigger="" units="" />
		<StatusVariable id="650101299" valueType="Boolean" logicalName="IO.PMD.DO_Lid_Down" eventTrigger="" units="" />
		<StatusVariable id="650101300" valueType="Boolean" logicalName="IO.PMD.DO_Lift_Servo_Go_Position1" eventTrigger="" units="" />
		<StatusVariable id="650101301" valueType="Boolean" logicalName="IO.PMD.DO_Lift_Servo_Go_Position2" eventTrigger="" units="" />
		<StatusVariable id="650101302" valueType="Boolean" logicalName="IO.PMD.DO_Lift_Servo_Go_Position3" eventTrigger="" units="" />
		<StatusVariable id="650101303" valueType="Boolean" logicalName="IO.PMD.DO_Lift_Servo_Origin" eventTrigger="" units="" />
		<StatusVariable id="650101304" valueType="Boolean" logicalName="IO.PMD.DO_Lift_Servo_Enable" eventTrigger="" units="" />
		<StatusVariable id="650101305" valueType="Boolean" logicalName="IO.PMD.DO_Lift_Servo_Manual_UP" eventTrigger="" units="" />
		<StatusVariable id="650101306" valueType="Boolean" logicalName="IO.PMD.DO_Lift_Servo_Manual_DOWN" eventTrigger="" units="" />
		<StatusVariable id="650101307" valueType="Boolean" logicalName="IO.PMD.DO_Lift_Servo_Go_Position4" eventTrigger="" units="" />
		<StatusVariable id="650101308" valueType="Boolean" logicalName="IO.PMD.DO_Lift_Servo_Go_Position5" eventTrigger="" units="" />
		<StatusVariable id="650101309" valueType="Boolean" logicalName="IO.PMD.DO_Lift_Servo_Estop" eventTrigger="" units="" />
		<StatusVariable id="650101310" valueType="Boolean" logicalName="IO.PMD.DO_Lift_Servo_MATC_Mode" eventTrigger="" units="" />
		<StatusVariable id="650101311" valueType="F8" logicalName="IO.PMD.AI_MFC7_Flow" eventTrigger="" units="" />
		<StatusVariable id="650101312" valueType="F8" logicalName="IO.PMD.AI_MFC8_Flow" eventTrigger="" units="" />
		<StatusVariable id="650101313" valueType="F8" logicalName="IO.PMD.AI_Turbo_Pump_N2_Flow" eventTrigger="" units="" />
		<StatusVariable id="650101314" valueType="F8" logicalName="IO.PMD.AI_Penning_Gauge_Pressure1" eventTrigger="" units="" />
		<StatusVariable id="650101315" valueType="F8" logicalName="IO.PMD.AI_CHB_M_HT_SCR1_PWR_OUT" eventTrigger="" units="" />
		<StatusVariable id="650101316" valueType="F8" logicalName="IO.PMD.AI_CHB_M_HT_SCR2_PWR_OUT" eventTrigger="" units="" />
		<StatusVariable id="650101317" valueType="F8" logicalName="IO.PMD.AI_Spare_Heater_Control_TC_Temp" eventTrigger="" units="" />
		<StatusVariable id="650101318" valueType="F8" logicalName="IO.PMD.AI_Chamber_Pressure_Virtual" eventTrigger="" units="" />
		<StatusVariable id="650101319" valueType="F8" logicalName="IO.PMD.AI_P_Valve_Control_TC_Temp" eventTrigger="" units="" />
		<StatusVariable id="650101320" valueType="F8" logicalName="IO.PMD.AI_Gas_Line_Control_TC_Temp" eventTrigger="" units="" />
		<StatusVariable id="650101321" valueType="F8" logicalName="IO.PMD.AI_Lift_Servo_Current_Posi_Mm" eventTrigger="" units="" />
		<StatusVariable id="650101322" valueType="F8" logicalName="IO.PMD.AI_CHB_M_HT_Reference_Power_Out" eventTrigger="" units="" />
		<StatusVariable id="650101323" valueType="F8" logicalName="IO.PMD.AI_CHB_M_HT_Max_Power" eventTrigger="" units="" />
		<StatusVariable id="650101324" valueType="F8" logicalName="IO.PMD.AI_CHB_M_HT_Min_Power" eventTrigger="" units="" />
		<StatusVariable id="650101325" valueType="F8" logicalName="IO.PMD.AI_CHB_M_HT_Current_Speed" eventTrigger="" units="" />
		<StatusVariable id="650101326" valueType="F8" logicalName="IO.PMD.AO_MFC7_Flow_Swtpoint" eventTrigger="" units="" />
		<StatusVariable id="650101327" valueType="F8" logicalName="IO.PMD.AO_MFC8_Flow_Swtpoint" eventTrigger="" units="" />
		<StatusVariable id="650101328" valueType="F8" logicalName="IO.PMD.AO_Turbo_Pump_N2_Flow_Setpoint" eventTrigger="" units="" />
		<StatusVariable id="650101329" valueType="F8" logicalName="IO.PMD.AO_P_Valve_Temperature_Setpoint" eventTrigger="" units="" />
		<StatusVariable id="650101330" valueType="F8" logicalName="IO.PMD.AO_P_Valve_Temp_Limit_Setpoint" eventTrigger="" units="" />
		<StatusVariable id="650101331" valueType="F8" logicalName="IO.PMD.AO_Space_Heater_Heat_Temp_Setpoint" eventTrigger="" units="" />
		<StatusVariable id="650101332" valueType="F8" logicalName="IO.PMD.AO_Space_Heater_Temp_High_Limit_Setpoint" eventTrigger="" units="" />
	</StatusVariables>
	<EquipmentConstants>
		<EquipmentConstant id="10101001" valueType="U4" logicalName="system.BuzzerTimeWhenJobDone" value="" min="0" max="300" units="s" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="10101002" valueType="Boolean" logicalName="system.IsSimulatorMode" value="True" min="" max="" units="" defaultValue="True" eventTrigger="" />
		<EquipmentConstant id="10101003" valueType="Boolean" logicalName="system.IsOpenIOEdit" value="True" min="" max="" units="" defaultValue="True" eventTrigger="" />
		<EquipmentConstant id="10101004" valueType="Boolean" logicalName="system.IsOpenDebugLog" value="True" min="" max="" units="" defaultValue="True" eventTrigger="" />
		<EquipmentConstant id="10101005" valueType="Boolean" logicalName="system.IsATMMode" value="False" min="" max="" units="" defaultValue="False" eventTrigger="" />
		<EquipmentConstant id="10101006" valueType="U4" logicalName="system.ATMCyclePMDelayTime" value="5" min="1" max="9999" units="s" defaultValue="5" eventTrigger="" />
		<EquipmentConstant id="10101007" valueType="F8" logicalName="system.MaxTemperatureToleranceTransferwafer" value="25" min="1" max="100" units="℃" defaultValue="25" eventTrigger="" />
		<EquipmentConstant id="10101008" valueType="F8" logicalName="system.MaxTemperatureToleranceToTarget" value="1" min="1" max="100" units="℃" defaultValue="1" eventTrigger="" />
		<EquipmentConstant id="10101009" valueType="Boolean" logicalName="system.DisplayPopDialogwhenJobComplete" value="True" min="" max="" units="" defaultValue="True" eventTrigger="" />
		<EquipmentConstant id="10101010" valueType="F8" logicalName="system.TMLLMaxPressureDifference" value="15" min="3" max="70" units="Pa" defaultValue="15" eventTrigger="" />
		<EquipmentConstant id="10101011" valueType="F8" logicalName="system.PMTMMaxPressureDifference" value="15" min="3" max="70" units="Pa" defaultValue="15" eventTrigger="" />
		<EquipmentConstant id="10101012" valueType="List" logicalName="system.InstalledModules" value="LLA,PMA,EfemRobot" min="" max="" units="" defaultValue="LLA,PMA,EfemRobot" eventTrigger="" />
		<EquipmentConstant id="10101013" valueType="U4" logicalName="system.MaxintemalWaferCount" value="2" min="1" max="8" units="" defaultValue="2" eventTrigger="" />
		<EquipmentConstant id="10101014" valueType="List" logicalName="system.COMLogFlag" value="00000000,00000000,00000000,00000000,00000000,00000000,00000000,00000000" min="" max="" units="" defaultValue="00000000,00000000,00000000,00000000,00000000,00000000,00000000,00000000" eventTrigger="" />
		<EquipmentConstant id="10101015" valueType="Boolean" logicalName="system.IsIgnoreSaveDB" value="True" min="" max="" units="" defaultValue="True" eventTrigger="" />
		<EquipmentConstant id="10101016" valueType="Boolean" logicalName="system.IsEnableEthercat" value="False" min="" max="" units="" defaultValue="False" eventTrigger="" />
		<EquipmentConstant id="10101017" valueType="U4" logicalName="system.CheckResourcelnterval" value="10" min="0" max="60" units="min" defaultValue="10" eventTrigger="" />
		<EquipmentConstant id="10101018" valueType="U4" logicalName="system.DataCollectionInterval" value="1000" min="200" max="2000" units="ms" defaultValue="1000" eventTrigger="" />
		<EquipmentConstant id="10101019" valueType="List" logicalName="system.Name" value="Kepler" min="" max="" units="" defaultValue="Kepler" eventTrigger="" />
		<EquipmentConstant id="10101020" valueType="U4" logicalName="system.LoadlockSlotinoutOption" value="0" min="0" max="2" units="" defaultValue="0" eventTrigger="" />
		<EquipmentConstant id="10101021" valueType="Boolean" logicalName="system.EnableDeviceLog" value="False" min="" max="" units="" defaultValue="False" eventTrigger="" />
		<EquipmentConstant id="10101022" valueType="U4" logicalName="system.SpecialRoutingPattern" value="0" min="" max="" units="" defaultValue="0" eventTrigger="" />
		<EquipmentConstant id="10101023" valueType="List" logicalName="FA.ConnectionMode" value="Passive" min="0" max="0" units="" defaultValue="Passive" eventTrigger="" />
		<EquipmentConstant id="10101024" valueType="List" logicalName="FA.LocallpAddress" value="127.0.0.1" min="0" max="0" units="" defaultValue="127.0.0.1" eventTrigger="" />
		<EquipmentConstant id="10101025" valueType="U4" logicalName="FA.LocalPortNumber" value="5000" min="0" max="99999" units="" defaultValue="5000" eventTrigger="" />
		<EquipmentConstant id="10101026" valueType="List" logicalName="FA.RemotelpAddress" value="127.0.0.1" min="0" max="0" units="" defaultValue="127.0.0.1" eventTrigger="" />
		<EquipmentConstant id="10101027" valueType="U4" logicalName="FA.RemotePortNumber" value="5001" min="0" max="99999" units="" defaultValue="5001" eventTrigger="" />
		<EquipmentConstant id="10101028" valueType="U4" logicalName="FA.T3Timeout" value="45" min="0" max="999" units="s" defaultValue="45" eventTrigger="" />
		<EquipmentConstant id="10101029" valueType="U4" logicalName="FA.T5Timeout" value="10" min="0" max="999" units="s" defaultValue="10" eventTrigger="" />
		<EquipmentConstant id="10101030" valueType="U4" logicalName="FA.T6Timeout" value="5" min="0" max="999" units="s" defaultValue="5" eventTrigger="" />
		<EquipmentConstant id="10101031" valueType="U4" logicalName="FA.T7Timeout" value="10" min="0" max="999" units="s" defaultValue="10" eventTrigger="" />
		<EquipmentConstant id="10101032" valueType="U4" logicalName="FA.T8Timeout" value="5" min="0" max="999" units="s" defaultValue="5" eventTrigger="" />
		<EquipmentConstant id="10101033" valueType="Boolean" logicalName="FA.EnableSpooling" value="False" min="0" max="0" units="" defaultValue="False" eventTrigger="" />
		<EquipmentConstant id="10101034" valueType="U4" logicalName="FA.LinkTestlnterval" value="30" min="0" max="999" units="s" defaultValue="30" eventTrigger="" />
		<EquipmentConstant id="10101035" valueType="List" logicalName="FA.Deviceld" value="0" min="0" max="0" units="" defaultValue="0" eventTrigger="" />
		<EquipmentConstant id="10101036" valueType="U4" logicalName="FA.SpoolingCapability" value="0" min="0" max="99999" units="" defaultValue="0" eventTrigger="" />
		<EquipmentConstant id="10101037" valueType="U4" logicalName="FA.SpoolingMaxTransmit" value="0" min="0" max="99999" units="" defaultValue="0" eventTrigger="" />
		<EquipmentConstant id="10101038" valueType="List" logicalName="FA.SpoolingFullOverwrite" value="True" min="0" max="0" units="" defaultValue="True" eventTrigger="" />
		<EquipmentConstant id="10101039" valueType="List" logicalName="FA.DefaultCommunicationState" value="     Enabled" min="0" max="0" units="" defaultValue="     Enabled" eventTrigger="" />
		<EquipmentConstant id="10101040" valueType="List" logicalName="FA.DefaultControlstate" value="Online" min="0" max="0" units="" defaultValue="Online" eventTrigger="" />
		<EquipmentConstant id="10101041" valueType="List" logicalName="FA.DefaultControlSubState" value="Remote" min="0" max="0" units="" defaultValue="Remote" eventTrigger="" />
		<EquipmentConstant id="10101042" valueType="List" logicalName="FA.HsmsEncoding" value="ASCII" min="0" max="0" units="" defaultValue="ASCII" eventTrigger="" />
		<EquipmentConstant id="10101043" valueType="List" logicalName="FA.SerialEncoding" value="ASCII" min="0" max="0" units="" defaultValue="ASCII" eventTrigger="" />
		<EquipmentConstant id="10101044" valueType="Boolean" logicalName="FA.EnableReWriteStatusVariable" value="True" min="0" max="0" units="" defaultValue="True" eventTrigger="" />
		<EquipmentConstant id="10101045" valueType="Boolean" logicalName="Scheduler.GroupWaferBySequence" value="True" min="0" max="0" units="" defaultValue="True" eventTrigger="" />
		<EquipmentConstant id="10101046" valueType="Boolean" logicalName="Scheduler.IsRunInParalleMode" value="True" min="0" max="0" units="" defaultValue="True" eventTrigger="" />
		<EquipmentConstant id="10101047" valueType="U4" logicalName="EFEM.HomeTimeout" value="30" min="1" max="300" units="s" defaultValue="30" eventTrigger="" />
		<EquipmentConstant id="10101048" valueType="U4" logicalName="EFEM.MotionTimeout" value="60" min="1" max="600" units="s" defaultValue="60" eventTrigger="" />
		<EquipmentConstant id="10101049" valueType="U4" logicalName="EFEM.SlotNumber" value="" min="1" max="60" units="s" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="10101050" valueType="Boolean" logicalName="EFEM.SlotFromBottom" value="True" min="" max="" units="" defaultValue="True" eventTrigger="" />
		<EquipmentConstant id="10101051" valueType="Boolean" logicalName="EFEM.EnableScanner" value="True" min="" max="" units="" defaultValue="True" eventTrigger="" />
		<EquipmentConstant id="10101052" valueType="U4" logicalName="EFEM.AlignAngle" value="1" min="" max="" units="" defaultValue="1" eventTrigger="" />
		<EquipmentConstant id="10101053" valueType="U4" logicalName="EFEM.IncreasingAngle" value="False" min="" max="" units="" defaultValue="False" eventTrigger="" />
		<EquipmentConstant id="10101054" valueType="U4" logicalName="EFEM.HomeTimeout" value="False" min="" max="" units="" defaultValue="False" eventTrigger="" />
		<EquipmentConstant id="10101055" valueType="U4" logicalName="EFEM.MotionTimeout" value="40" min="1" max="60" units="s" defaultValue="40" eventTrigger="" />
		<EquipmentConstant id="10101056" valueType="List" logicalName="EFEM.IPAddress" value="127.0.0.1:13000" min="" max="" units="" defaultValue="127.0.0.1:13000" eventTrigger="" />
		<EquipmentConstant id="10101057" valueType="Boolean" logicalName="EFEM.CheckSideDoorOnEAPMap" value="4" min="" max="" units="" defaultValue="4" eventTrigger="" />
		<EquipmentConstant id="10101058" valueType="Boolean" logicalName="EFEM.CheckCassetteDoorOnEAPMap" value="0" min="" max="" units="" defaultValue="0" eventTrigger="" />
		<EquipmentConstant id="10101059" valueType="U4" logicalName="EFEM.EfemType" value="" min="1" max="300" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="10101060" valueType="Boolean" logicalName="EFEM.AutoUnlockAfterUnload" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="10101061" valueType="Boolean" logicalName="EFEM.IgnoreWaterFlowError" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="10101062" valueType="U4" logicalName="EFEM.DelayTimeBeforeLiftDown" value="" min="0" max="600" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="10101063" valueType="U4" logicalName="EFEM.SingleArmoption" value="" min="0" max="2" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="10101064" valueType="U4" logicalName="EFEM.LLAutoPumpInwaferOpt" value="" min="0" max="10" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="10101065" valueType="U4" logicalName="EFEM.LLAutoPumpOutWaferOpt" value="" min="0" max="10" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101001" valueType="Boolean" logicalName="TM.TM_MFC1.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101002" valueType="List" logicalName="TM.TM_MFC1.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101003" valueType="U4" logicalName="TM.TM_MFC1.MfcN2Scale" value="" min="0" max="10000" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101004" valueType="F8" logicalName="TM.TM_MFC1.MfcScaleFactor" value="" min="0" max="10" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101005" valueType="U4" logicalName="TM.TM_MFC1.DefaultSetPoint" value="" min="0" max="1000" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101006" valueType="U4" logicalName="TM.TM_MFC1.FlowRegulationFactor" value="" min="0" max="10" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101007" valueType="Boolean" logicalName="TM.TM_MFC1.MfcEnableAlarm" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101008" valueType="U4" logicalName="TM.TM_MFC1.MfcAlarmRange" value="" min="0" max="200" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101009" valueType="U4" logicalName="TM.TM_MFC1.MfcAlarmTime" value="" min="0" max="60" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101010" valueType="U4" logicalName="TM.TM_MFC1.MfcWarningRange" value="" min="0" max="200" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101011" valueType="U4" logicalName="TM.TM_MFC1.MfcWarningTime" value="" min="0" max="60" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101012" valueType="U4" logicalName="TM.TM_MFC1.MFCWriteMode" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101013" valueType="U4" logicalName="TM.MFG" value="" min="0" max="10" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101014" valueType="U4" logicalName="TM.CommunicationType" value="" min="0" max="10" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101015" valueType="List" logicalName="TM.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101016" valueType="F8" logicalName="TM.ChamberForelinePressureThreshold" value="" min="0" max="10000" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101017" valueType="U4" logicalName="TM.ChamberForelinePressureTimeout" value="" min="0" max="3000" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101018" valueType="Boolean" logicalName="TM.EnableSwitch" value="" min="0" max="10" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101019" valueType="List" logicalName="TM.PMA" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101020" valueType="List" logicalName="TM.PMB" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101021" valueType="List" logicalName="TM.PMC" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101022" valueType="List" logicalName="TM.PMD" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101023" valueType="List" logicalName="TM.LLA" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101024" valueType="List" logicalName="TM.LLB" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101025" valueType="U4" logicalName="TM.HomeTimeout" value="30" min="1" max="300" units="" defaultValue="30" eventTrigger="" />
		<EquipmentConstant id="430101026" valueType="U4" logicalName="TM.MotionTimeout" value="60" min="1" max="600" units="" defaultValue="60" eventTrigger="" />
		<EquipmentConstant id="430101027" valueType="List" logicalName="TM.IPAddress" value="127.0.0.1:1102" min="" max="" units="" defaultValue="127.0.0.1:1102" eventTrigger="" />
		<EquipmentConstant id="430101028" valueType="U4" logicalName="TM.TMRobotType" value="1" min="1" max="10" units="" defaultValue="1" eventTrigger="" />
		<EquipmentConstant id="430101029" valueType="U4" logicalName="TM.LLAStationNumber" value="1" min="0" max="99" units="" defaultValue="1" eventTrigger="" />
		<EquipmentConstant id="430101030" valueType="U4" logicalName="TM.LLBStationNumber" value="2" min="0" max="99" units="" defaultValue="2" eventTrigger="" />
		<EquipmentConstant id="430101031" valueType="U4" logicalName="TM.PMAStationNumber" value="2" min="0" max="99" units="" defaultValue="2" eventTrigger="" />
		<EquipmentConstant id="430101032" valueType="U4" logicalName="TM.PMBStationNumber" value="3" min="0" max="99" units="" defaultValue="3" eventTrigger="" />
		<EquipmentConstant id="430101033" valueType="U4" logicalName="TM.PMCStationNumber" value="4" min="0" max="99" units="" defaultValue="4" eventTrigger="" />
		<EquipmentConstant id="430101034" valueType="U4" logicalName="TM.PMDStationNumber" value="6" min="0" max="99" units="" defaultValue="6" eventTrigger="" />
		<EquipmentConstant id="430101035" valueType="U4" logicalName="TM.PMEStationNumber" value="7" min="0" max="99" units="" defaultValue="7" eventTrigger="" />
		<EquipmentConstant id="430101036" valueType="U4" logicalName="TM.PMFStationNumber" value="8" min="0" max="99" units="" defaultValue="8" eventTrigger="" />
		<EquipmentConstant id="430101037" valueType="U4" logicalName="TM.CheckLoadstation" value="1" min="0" max="99" units="" defaultValue="1" eventTrigger="" />
		<EquipmentConstant id="430101038" valueType="F8" logicalName="TM.PumpBasePressure" value="100" min="0" max="200" units="" defaultValue="100" eventTrigger="" />
		<EquipmentConstant id="430101039" valueType="F8" logicalName="TM.PumpCrossingPressure" value="2000" min="200" max="3000000" units="" defaultValue="2000" eventTrigger="" />
		<EquipmentConstant id="430101040" valueType="U4" logicalName="TM.PumpingTimeout" value="60" min="0" max="3000" units="" defaultValue="60" eventTrigger="" />
		<EquipmentConstant id="430101041" valueType="U4" logicalName="TM.PumpForelinePressureLimit" value="500" min="0" max="2000" units="" defaultValue="500" eventTrigger="" />
		<EquipmentConstant id="430101042" valueType="U4" logicalName="TM.SoftVentEndPressure" value="100" min="0" max="30000" units="" defaultValue="100" eventTrigger="" />
		<EquipmentConstant id="430101043" valueType="U4" logicalName="TM.VentingTimeout" value="60" min="0" max="3000" units="" defaultValue="60" eventTrigger="" />
		<EquipmentConstant id="430101044" valueType="U4" logicalName="TM.OverventTime" value="2000" min="0" max="60000" units="" defaultValue="2000" eventTrigger="" />
		<EquipmentConstant id="430101045" valueType="F8" logicalName="TM.PurgeVentPressure" value="2000" min="0" max="760000" units="" defaultValue="2000" eventTrigger="" />
		<EquipmentConstant id="430101046" valueType="U4" logicalName="TM.PurgeCycleCount" value="30" min="0" max="200" units="" defaultValue="30" eventTrigger="" />
		<EquipmentConstant id="430101047" valueType="U4" logicalName="TM.PurgePumpTime" value="120" min="0" max="7200" units="" defaultValue="120" eventTrigger="" />
		<EquipmentConstant id="430101048" valueType="U4" logicalName="TM.LeakCheckPumpTime" value="180" min="0" max="7200" units="" defaultValue="180" eventTrigger="" />
		<EquipmentConstant id="430101049" valueType="U4" logicalName="TM.LeakCheckWaitTime" value="300" min="0" max="7200" units="" defaultValue="300" eventTrigger="" />
		<EquipmentConstant id="430101050" valueType="F8" logicalName="TM.LeakRate" value="30" min="0" max="756000" units="" defaultValue="30" eventTrigger="" />
		<EquipmentConstant id="430101051" valueType="U4" logicalName="TM.PickTimeout" value="120" min="0" max="300" units="" defaultValue="120" eventTrigger="" />
		<EquipmentConstant id="430101052" valueType="U4" logicalName="TM.PlaceTimeout" value="120" min="0" max="300" units="" defaultValue="120" eventTrigger="" />
		<EquipmentConstant id="430101053" valueType="U4" logicalName="TM.ExtendTimeout" value="60" min="0" max="300" units="" defaultValue="60" eventTrigger="" />
		<EquipmentConstant id="430101054" valueType="U4" logicalName="TM.RetractTimeout" value="60" min="0" max="300" units="" defaultValue="60" eventTrigger="" />
		<EquipmentConstant id="430101055" valueType="U4" logicalName="TM.SwapTimeout" value="180" min="0" max="300" units="" defaultValue="180" eventTrigger="" />
		<EquipmentConstant id="430101056" valueType="U4" logicalName="TM.ControlPressureCheckPoint" value="100" min="0" max="300" units="" defaultValue="100" eventTrigger="" />
		<EquipmentConstant id="430101057" valueType="U4" logicalName="TM.ControlPressureSetPoint" value="90" min="0" max="200" units="" defaultValue="90" eventTrigger="" />
		<EquipmentConstant id="430101058" valueType="U4" logicalName="TM.SingleArmOption" value="0" min="0" max="4" units="" defaultValue="0" eventTrigger="" />
		<EquipmentConstant id="430101059" valueType="U4" logicalName="TM.QueryAwCOption" value="0" min="0" max="3" units="" defaultValue="0" eventTrigger="" />
		<EquipmentConstant id="430101060" valueType="U4" logicalName="TM.EnterLLAWCAlarmLimit" value="2000" min="0" max="2000" units="" defaultValue="2000" eventTrigger="" />
		<EquipmentConstant id="430101061" valueType="U4" logicalName="TM.EnterPMAWCAlammLimit" value="4000" min="0" max="4000" units="" defaultValue="4000" eventTrigger="" />
		<EquipmentConstant id="430101062" valueType="U4" logicalName="TM.MaxWaitTimePairingOutWafer" value="90" min="0" max="" units="" defaultValue="90" eventTrigger="" />
		<EquipmentConstant id="430101063" valueType="U4" logicalName="TM.LLAutoVentlnwaferOpt" value="0" min="0" max="10" units="" defaultValue="0" eventTrigger="" />
		<EquipmentConstant id="430101064" valueType="U4" logicalName="TM.LLAutoVentOutwaferopt" value="4" min="0" max="10" units="" defaultValue="4" eventTrigger="" />
		<EquipmentConstant id="430101065" valueType="F8" logicalName="LLA.PumpBasePressure" value="100" min="0" max="2000" units="" defaultValue="100" eventTrigger="" />
		<EquipmentConstant id="430101066" valueType="F8" logicalName="LLA.PumpCrossingPressure" value="2000" min="200" max="500000" units="" defaultValue="2000" eventTrigger="" />
		<EquipmentConstant id="430101067" valueType="U4" logicalName="LLA.PumpingTimeout" value="60" min="0" max="3000" units="" defaultValue="60" eventTrigger="" />
		<EquipmentConstant id="430101068" valueType="U4" logicalName="LLA.PumpForelinePressureLimit" value="500" min="0" max="2000" units="" defaultValue="500" eventTrigger="" />
		<EquipmentConstant id="430101069" valueType="U4" logicalName="LLA.VentingTimeout" value="60" min="0" max="3000" units="" defaultValue="60" eventTrigger="" />
		<EquipmentConstant id="430101070" valueType="U4" logicalName="LLA.SoftVentEndPressure" value="100" min="0" max="100000" units="" defaultValue="100" eventTrigger="" />
		<EquipmentConstant id="430101071" valueType="U4" logicalName="LLA.SwitchLLPumpDelay" value="500" min="0" max="5000" units="" defaultValue="500" eventTrigger="" />
		<EquipmentConstant id="430101072" valueType="F8" logicalName="LLA.PurgeVentPressure" value="2000" min="0" max="760000" units="" defaultValue="2000" eventTrigger="" />
		<EquipmentConstant id="430101073" valueType="U4" logicalName="LLA.PurgeCycleCount" value="30" min="0" max="200" units="" defaultValue="30" eventTrigger="" />
		<EquipmentConstant id="430101074" valueType="U4" logicalName="LLA.PurgePumpTime" value="120" min="0" max="7200" units="" defaultValue="120" eventTrigger="" />
		<EquipmentConstant id="430101075" valueType="U4" logicalName="LLA.LeakCheckPumpTime" value="180" min="0" max="7200" units="" defaultValue="180" eventTrigger="" />
		<EquipmentConstant id="430101076" valueType="U4" logicalName="LLA.LeakCheckwaitTime" value="300" min="0" max="7200" units="" defaultValue="300" eventTrigger="" />
		<EquipmentConstant id="430101077" valueType="F8" logicalName="LLA.LeakRate" value="30" min="0" max="756000" units="" defaultValue="30" eventTrigger="" />
		<EquipmentConstant id="430101078" valueType="U4" logicalName="LLA.SlotNumber" value="2" min="1" max="60" units="" defaultValue="2" eventTrigger="" />
		<EquipmentConstant id="430101079" valueType="U4" logicalName="LLA.OverventTime" value="2000" min="0" max="60000" units="" defaultValue="2000" eventTrigger="" />
		<EquipmentConstant id="430101080" valueType="U4" logicalName="LLA.ControlPressureCheckPoint" value="100" min="0" max="300" units="" defaultValue="100" eventTrigger="" />
		<EquipmentConstant id="430101081" valueType="U4" logicalName="LLA.ControlPressureSetPoint" value="90" min="0" max="200" units="" defaultValue="90" eventTrigger="" />
		<EquipmentConstant id="430101082" valueType="U4" logicalName="LLA.VentingTimeout" value="" min="0" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101083" valueType="U4" logicalName="LLA.DryPump.MFG" value="" min="0" max="10" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101084" valueType="U4" logicalName="LLA.DryPump.CommunicationType" value="" min="0" max="10" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101085" valueType="List" logicalName="LLA.DryPump.Port" value="" min="0" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101086" valueType="F8" logicalName="LLA.DryPump.ChamberForelinePressureThreshold" value="" min="0" max="10000" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101087" valueType="U4" logicalName="LLA.DryPump.ChamberForelinePressureTimeout" value="" min="0" max="3000" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101088" valueType="Boolean" logicalName="LLA.DryPump.EnableSwitch" value="" min="0" max="10" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101089" valueType="Boolean" logicalName="LLA.LLA_MFC1.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101090" valueType="List" logicalName="LLA.LLA_MFC1.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101091" valueType="U4" logicalName="LLA.LLA_MFC1.MfcN2Scale" value="" min="0" max="10000" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101092" valueType="F8" logicalName="LLA.LLA_MFC1.MfcScaleFactor" value="" min="0" max="10" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101093" valueType="U4" logicalName="LLA.LLA_MFC1.DefaultSetPoint" value="" min="0" max="1000" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101094" valueType="U4" logicalName="LLA.LLA_MFC1.FlowRegulationFactor" value="" min="0" max="10" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101095" valueType="Boolean" logicalName="LLA.LLA_MFC1.MfcEnableAlarm" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101096" valueType="U4" logicalName="LLA.LLA_MFC1.MfcAlarmRange" value="" min="0" max="200" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101097" valueType="U4" logicalName="LLA.LLA_MFC1.MfcAlarmTime" value="" min="0" max="60" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101098" valueType="U4" logicalName="LLA.LLA_MFC1.MfcWarningRange" value="" min="0" max="200" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101099" valueType="U4" logicalName="LLA.LLA_MFC1.MfcwarningTime" value="" min="0" max="200" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101100" valueType="U4" logicalName="LLA.LLA_MFC1.MFCWriteMode" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101101" valueType="F8" logicalName="LLA.Cooling.MFCflow" value="" min="0" max="10000" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101102" valueType="U4" logicalName="LLA.Cooling.CoolingTime" value="" min="0" max="3000" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101103" valueType="F8" logicalName="LLB.PumpBasePressure" value="100" min="0" max="2000" units="" defaultValue="100" eventTrigger="" />
		<EquipmentConstant id="430101104" valueType="F8" logicalName="LLB.PumpCrossingPressure" value="2000" min="200" max="500000" units="" defaultValue="2000" eventTrigger="" />
		<EquipmentConstant id="430101105" valueType="U4" logicalName="LLB.PumpingTimeout" value="60" min="0" max="3000" units="" defaultValue="60" eventTrigger="" />
		<EquipmentConstant id="430101106" valueType="U4" logicalName="LLB.PumpForelinePressureLimit" value="500" min="0" max="2000" units="" defaultValue="500" eventTrigger="" />
		<EquipmentConstant id="430101107" valueType="U4" logicalName="LLB.VentingTimeout" value="60" min="0" max="3000" units="" defaultValue="60" eventTrigger="" />
		<EquipmentConstant id="430101108" valueType="U4" logicalName="LLB.SoftVentEndPressure" value="100" min="0" max="100000" units="" defaultValue="100" eventTrigger="" />
		<EquipmentConstant id="430101109" valueType="U4" logicalName="LLB.SwitchLLPumpDelay" value="500" min="0" max="5000" units="" defaultValue="500" eventTrigger="" />
		<EquipmentConstant id="430101110" valueType="F8" logicalName="LLB.PurgeVentPressure" value="2000" min="0" max="760000" units="" defaultValue="2000" eventTrigger="" />
		<EquipmentConstant id="430101111" valueType="U4" logicalName="LLB.PurgeCycleCount" value="30" min="0" max="200" units="" defaultValue="30" eventTrigger="" />
		<EquipmentConstant id="430101112" valueType="U4" logicalName="LLB.PurgePumpTime" value="120" min="0" max="7200" units="" defaultValue="120" eventTrigger="" />
		<EquipmentConstant id="430101113" valueType="U4" logicalName="LLB.LeakCheckPumpTime" value="180" min="0" max="7200" units="" defaultValue="180" eventTrigger="" />
		<EquipmentConstant id="430101114" valueType="U4" logicalName="LLB.LeakCheckwaitTime" value="300" min="0" max="7200" units="" defaultValue="300" eventTrigger="" />
		<EquipmentConstant id="430101115" valueType="F8" logicalName="LLB.LeakRate" value="30" min="0" max="756000" units="" defaultValue="30" eventTrigger="" />
		<EquipmentConstant id="430101116" valueType="U4" logicalName="LLB.SlotNumber" value="2" min="1" max="60" units="" defaultValue="2" eventTrigger="" />
		<EquipmentConstant id="430101117" valueType="U4" logicalName="LLB.OverventTime" value="2000" min="0" max="60000" units="" defaultValue="2000" eventTrigger="" />
		<EquipmentConstant id="430101118" valueType="U4" logicalName="LLB.ControlPressureCheckPoint" value="100" min="0" max="300" units="" defaultValue="100" eventTrigger="" />
		<EquipmentConstant id="430101119" valueType="U4" logicalName="LLB.ControlPressureSetPoint" value="90" min="0" max="200" units="" defaultValue="90" eventTrigger="" />
		<EquipmentConstant id="430101120" valueType="U4" logicalName="LLB.VentingTimeout" value="" min="0" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101121" valueType="U4" logicalName="LLB.DryPump.MFG" value="" min="0" max="10" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101122" valueType="U4" logicalName="LLB.DryPump.CommunicationType" value="" min="0" max="10" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101123" valueType="List" logicalName="LLB.DryPump.Port" value="" min="0" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101124" valueType="F8" logicalName="LLB.DryPump.ChamberForelinePressureThreshold" value="" min="0" max="10000" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101125" valueType="U4" logicalName="LLB.DryPump.ChamberForelinePressureTimeout" value="" min="0" max="3000" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101126" valueType="Boolean" logicalName="LLB.DryPump.EnableSwitch" value="" min="0" max="10" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101127" valueType="Boolean" logicalName="LLB.LLB_MFC1.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101128" valueType="List" logicalName="LLB.LLB_MFC1.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101129" valueType="U4" logicalName="LLB.LLB_MFC1.MfcN2Scale" value="" min="0" max="10000" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101130" valueType="F8" logicalName="LLB.LLB_MFC1.MfcScaleFactor" value="" min="0" max="10" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101131" valueType="U4" logicalName="LLB.LLB_MFC1.DefaultSetPoint" value="" min="0" max="1000" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101132" valueType="U4" logicalName="LLB.LLB_MFC1.FlowRegulationFactor" value="" min="0" max="10" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101133" valueType="Boolean" logicalName="LLB.LLB_MFC1.MfcEnableAlarm" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101134" valueType="U4" logicalName="LLB.LLB_MFC1.MfcAlarmRange" value="" min="0" max="200" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101135" valueType="U4" logicalName="LLB.LLB_MFC1.MfcAlarmTime" value="" min="0" max="60" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101136" valueType="U4" logicalName="LLB.LLB_MFC1.MfcWarningRange" value="" min="0" max="200" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101137" valueType="U4" logicalName="LLB.LLB_MFC1.MfcwarningTime" value="" min="0" max="200" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101138" valueType="U4" logicalName="LLB.LLB_MFC1.MFCWriteMode" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101139" valueType="F8" logicalName="LLB.Cooling.MFCflow" value="" min="0" max="10000" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="430101140" valueType="U4" logicalName="LLB.Cooling.CoolingTime" value="" min="0" max="3000" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101001" valueType="U4" logicalName="PMA.ChamberType" value="2" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101002" valueType="F8" logicalName="PMA.TurboN2FlowSetPoint" value="100" min="0" max="200" units="sccm" defaultValue="2" eventTrigger="" />
		<EquipmentConstant id="620101003" valueType="U4" logicalName="PMA.PrepareTransferTimeout" value="120" min="1" max="99999" units="s" defaultValue="100" eventTrigger="" />
		<EquipmentConstant id="620101004" valueType="U4" logicalName="PMA.TransferwaferTimeout" value="120" min="1" max="99999" units="s" defaultValue="120" eventTrigger="" />
		<EquipmentConstant id="620101005" valueType="U4" logicalName="PMA.OpenGasValveTimeout" value="1" min="0" max="60" units="second" defaultValue="120" eventTrigger="" />
		<EquipmentConstant id="620101006" valueType="U4" logicalName="PMA.TimeLimitOfCloseGasValve" value="1" min="0" max="10" units="" defaultValue="1" eventTrigger="" />
		<EquipmentConstant id="620101007" valueType="U4" logicalName="PMA.OpenCloseSlitValveTimeout" value="1" min="0" max="10" units="" defaultValue="1" eventTrigger="" />
		<EquipmentConstant id="620101008" valueType="F8" logicalName="PMA.GasFlowPressureAlarmRange" value="100" min="0" max="10138" units="Pa" defaultValue="1" eventTrigger="" />
		<EquipmentConstant id="620101009" valueType="F8" logicalName="PMA.GasFlowPressureAlarmTime" value="60" min="0" max="3600" units="second" defaultValue="100" eventTrigger="" />
		<EquipmentConstant id="620101010" valueType="F8" logicalName="PMA.GasFlowPressureWarningRange" value="100" min="0" max="10138" units="Pa" defaultValue="60" eventTrigger="" />
		<EquipmentConstant id="620101011" valueType="F8" logicalName="PMA.GasFlowPressureWarningTime" value="60" min="0" max="3600" units="second" defaultValue="100" eventTrigger="" />
		<EquipmentConstant id="620101012" valueType="Boolean" logicalName="PMA.EnableThrottleValve" value="true" min="0" max="10" units="" defaultValue="60" eventTrigger="" />
		<EquipmentConstant id="620101013" valueType="U4" logicalName="PMA.ValveHeaterSetPointLimit" value="150" min="0" max="500" units="" defaultValue="true" eventTrigger="" />
		<EquipmentConstant id="620101014" valueType="U4" logicalName="PMA.ForeLineHeaterSetPointLimit" value="140" min="0" max="500" units="" defaultValue="150" eventTrigger="" />
		<EquipmentConstant id="620101015" valueType="U4" logicalName="PMA.CheckSubstrateTempTimeout" value="120" min="0" max="3600" units="" defaultValue="140" eventTrigger="" />
		<EquipmentConstant id="620101016" valueType="U4" logicalName="PMA.CheckATMTimeout" value="90" min="0" max="3000" units="s" defaultValue="120" eventTrigger="" />
		<EquipmentConstant id="620101017" valueType="U4" logicalName="PMA.OverventTime" value="2000" min="0" max="60000" units="ms" defaultValue="90" eventTrigger="" />
		<EquipmentConstant id="620101018" valueType="F8" logicalName="PMA.ChamberBasePressureThreshold" value="104000" min="0" max="140000" units="Pa" defaultValue="2000" eventTrigger="" />
		<EquipmentConstant id="620101019" valueType="F8" logicalName="PMA.ChamberBaseTemperatureThreshold" value="120" min="0" max="1000" units="℃" defaultValue="104000" eventTrigger="" />
		<EquipmentConstant id="620101020" valueType="F8" logicalName="PMA.ProcessPressureOffset" value="10" min="0" max="14" units="Pa" defaultValue="120" eventTrigger="" />
		<EquipmentConstant id="620101021" valueType="F8" logicalName="PMA.ChamberVolume" value="7500" min="0" max="10000" units="ms" defaultValue="10" eventTrigger="" />
		<EquipmentConstant id="620101022" valueType="F8" logicalName="PMA.GasTemperature" value="25" min="0" max="10000" units="ms" defaultValue="7500" eventTrigger="" />
		<EquipmentConstant id="620101023" valueType="F8" logicalName="PMA.TargetPressureInMFCVerification" value="9" min="0" max="" units="" defaultValue="25" eventTrigger="" />
		<EquipmentConstant id="620101024" valueType="F8" logicalName="PMA.GasFlowTimeInMFCVerification" value="180" min="0" max="" units="" defaultValue="9" eventTrigger="" />
		<EquipmentConstant id="620101025" valueType="U4" logicalName="PMA.PickDelayTime" value="0" min="0" max="10000" units="" defaultValue="180" eventTrigger="" />
		<EquipmentConstant id="620101026" valueType="U4" logicalName="PMA.PlaceDelayTime" value="0" min="0" max="10000" units="" defaultValue="0" eventTrigger="" />
		<EquipmentConstant id="620101027" valueType="List" logicalName="PMA.ChamberLabel" value="Strip" min="" max="" units="" defaultValue="0" eventTrigger="" />
		<EquipmentConstant id="620101028" valueType="F8" logicalName="PMA.MaxDeviationInMFCVerification" value="30" min="0" max="" units="" defaultValue="Strip" eventTrigger="" />
		<EquipmentConstant id="620101029" valueType="U4" logicalName="PMA.WallHeaterSetPointLimit" value="150" min="0" max="" units="" defaultValue="30" eventTrigger="" />
		<EquipmentConstant id="620101030" valueType="U4" logicalName="PMA.PendulumHeaterSetPointLimit" value="150" min="0" max="" units="" defaultValue="150" eventTrigger="" />
		<EquipmentConstant id="620101031" valueType="Boolean" logicalName="PMA.EnableWallHeater" value="false" min="0" max="" units="" defaultValue="150" eventTrigger="" />
		<EquipmentConstant id="620101032" valueType="Boolean" logicalName="PMA.EnableGridHeater" value="false" min="0" max="" units="" defaultValue="false" eventTrigger="" />
		<EquipmentConstant id="620101033" valueType="U4" logicalName="PMA.RecipeTolerancelgnoreTime" value="5" min="0" max="" units="" defaultValue="false" eventTrigger="" />
		<EquipmentConstant id="620101034" valueType="U4" logicalName="PMA.RecipeRunningMode" value="1" min="0" max="" units="" defaultValue="5" eventTrigger="" />
		<EquipmentConstant id="620101035" valueType="Boolean" logicalName="PMA.IsEnableRecipeExtension" value="false" min="0" max="" units="" defaultValue="1" eventTrigger="" />
		<EquipmentConstant id="620101036" valueType="U4" logicalName="PMA.ControlPressureSetPoint" value="80" min="0" max="" units="" defaultValue="False" eventTrigger="" />
		<EquipmentConstant id="620101037" valueType="U4" logicalName="PMA.ControlPressureN2FlowSetPoint" value="300" min="0" max="" units="" defaultValue="80" eventTrigger="" />
		<EquipmentConstant id="620101038" valueType="U4" logicalName="PMA.Dry.Pump.MFG" value="" min="0" max="10" units="" defaultValue="1" eventTrigger="" />
		<EquipmentConstant id="620101039" valueType="U4" logicalName="PMA.Dry.Pump.CommunicationType" value="" min="0" max="10" units="" defaultValue="1" eventTrigger="" />
		<EquipmentConstant id="620101040" valueType="List" logicalName="PMA.Dry.Pump.Port" value="" min="" max="" units="" defaultValue="COM22" eventTrigger="" />
		<EquipmentConstant id="620101041" valueType="F8" logicalName="PMA.Dry.Pump.ChamberForelinePressureThreshold" value="" min="0" max="1300" units="" defaultValue="1000" eventTrigger="" />
		<EquipmentConstant id="620101042" valueType="U4" logicalName="PMA.Dry.Pump.ChamberForelinePressureTimeout" value="" min="0" max="3000" units="" defaultValue="20" eventTrigger="" />
		<EquipmentConstant id="620101043" valueType="Boolean" logicalName="PMA.Dry.Pump.EnableSwitch" value="" min="0" max="10" units="" defaultValue="False" eventTrigger="" />
		<EquipmentConstant id="620101044" valueType="U4" logicalName="PMA.RF.MFG" value="" min="0" max="10" units="" defaultValue="1" eventTrigger="" />
		<EquipmentConstant id="620101045" valueType="U4" logicalName="PMA.RF.CommunicationType" value="" min="0" max="10" units="" defaultValue="1" eventTrigger="" />
		<EquipmentConstant id="620101046" valueType="List" logicalName="PMA.RF.Port" value="" min="" max="" units="" defaultValue="COM38" eventTrigger="" />
		<EquipmentConstant id="620101047" valueType="List" logicalName="PMA.RF.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101048" valueType="F8" logicalName="PMA.RF.PowerAlarmRange" value="" min="0" max="1000" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101049" valueType="F8" logicalName="PMA.RF.PowerAlammTime" value="" min="0" max="10" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101050" valueType="F8" logicalName="PMA.RF.PowerwarningRange" value="" min="0" max="1000" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101051" valueType="F8" logicalName="PMA.RF.PowerWarningTime" value="" min="0" max="10" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101052" valueType="F8" logicalName="PMA.RF.ReflectPowerAlarmRange" value="" min="0" max="1000" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101053" valueType="F8" logicalName="PMA.RF.ReflectPowerAlarmTime" value="" min="0" max="10" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101054" valueType="F8" logicalName="PMA.RF.PowerRange" value="" min="0" max="30000" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101055" valueType="F8" logicalName="PMA.RF.Coefficient" value="" min="0" max="10" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101056" valueType="Boolean" logicalName="PMA.RF.EnablePulsingFunction" value="" min="0" max="10" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101057" valueType="Boolean" logicalName="PMA.RF.EnableReflectPower" value="" min="0" max="10" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101058" valueType="Boolean" logicalName="PMA.RF.EnableVoltageCurrent" value="" min="0" max="10" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101059" valueType="U4" logicalName="PMA.RF.PowerRegulationFactor" value="" min="0" max="10" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101060" valueType="U4" logicalName="PMA.RF.RfPowerAlarmRange" value="" min="0" max="10000" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101061" valueType="U4" logicalName="PMA.RF.RiPowerAlarmTime" value="" min="0" max="10000" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101062" valueType="U4" logicalName="PMA.RF.RFTurnonTimeout" value="" min="0" max="10" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101063" valueType="Boolean" logicalName="PMA.RF.EnableCalibration" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101064" valueType="List" logicalName="PMA.RF.GeneratorSerialNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101065" valueType="List" logicalName="PMA.RF.SensorSerialNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101066" valueType="F8" logicalName="PMA.RF.CurentRFMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101067" valueType="F8" logicalName="PMA.RF.RFCalibratedMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101068" valueType="Boolean" logicalName="PMA.Match.EnableMatch" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101069" valueType="U4" logicalName="PMA.Match.MFG" value="" min="0" max="10" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101070" valueType="U4" logicalName="PMA.Match.CommunicationType" value="" min="0" max="10" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101071" valueType="List" logicalName="PMA.Match.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101072" valueType="List" logicalName="PMA.Match.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101073" valueType="Boolean" logicalName="PMA.Match.MatchModeEnableC1C2Position" value="" min="0" max="10" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101074" valueType="Boolean" logicalName="PMA.Match.EnableC1C2StepOffset" value="" min="0" max="10" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101075" valueType="U4" logicalName="PMA.Match.C1C2StepOffsetValue" value="" min="0" max="10" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101076" valueType="Boolean" logicalName="PMA.RFBox.EnableMatch" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101077" valueType="U4" logicalName="PMA.RFBox.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101078" valueType="U4" logicalName="PMA.RFBox.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101079" valueType="List" logicalName="PMA.RFBox.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101080" valueType="List" logicalName="PMA.RFBox.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101081" valueType="Boolean" logicalName="PMA.MfcGas1.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101082" valueType="List" logicalName="PMA.MfcGas1.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101083" valueType="U4" logicalName="PMA.MfcGas1.MfcN2Scale" value="" min="0" max="10000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101084" valueType="F8" logicalName="PMA.MfcGas1.MfcScaleFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101085" valueType="U4" logicalName="PMA.MfcGas1.DefaultSetPoint" value="" min="0" max="1000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101086" valueType="U4" logicalName="PMA.MfcGas1.FlowRegulationFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101087" valueType="Boolean" logicalName="PMA.MfcGas1.MfcEnableAlarm" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101088" valueType="U4" logicalName="PMA.MfcGas1.MfcAlarmRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101089" valueType="U4" logicalName="PMA.MfcGas1.MfcAlarmTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101090" valueType="U4" logicalName="PMA.MfcGas1.MfcwarningRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101091" valueType="U4" logicalName="PMA.MfcGas1.MfcWarningTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101092" valueType="U4" logicalName="PMA.MfcGas1.MFCWriteMode" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101093" valueType="Boolean" logicalName="PMA.MfcGas2.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101094" valueType="List" logicalName="PMA.MfcGas2.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101095" valueType="U4" logicalName="PMA.MfcGas2.MfcN2Scale" value="" min="0" max="10000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101096" valueType="F8" logicalName="PMA.MfcGas2.MfcScaleFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101097" valueType="U4" logicalName="PMA.MfcGas2.DefaultSetPoint" value="" min="0" max="1000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101098" valueType="U4" logicalName="PMA.MfcGas2.FlowRegulationFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101099" valueType="Boolean" logicalName="PMA.MfcGas2.MfcEnableAlarm" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101100" valueType="U4" logicalName="PMA.MfcGas2.MfcAlarmRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101101" valueType="U4" logicalName="PMA.MfcGas2.MfcAlarmTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101102" valueType="U4" logicalName="PMA.MfcGas2.MfcwarningRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101103" valueType="U4" logicalName="PMA.MfcGas2.MfcWarningTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101104" valueType="U4" logicalName="PMA.MfcGas2.MFCWriteMode" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101105" valueType="Boolean" logicalName="PMA.MfcGas3.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101106" valueType="List" logicalName="PMA.MfcGas3.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101107" valueType="U4" logicalName="PMA.MfcGas3.MfcN2Scale" value="" min="0" max="10000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101108" valueType="F8" logicalName="PMA.MfcGas3.MfcScaleFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101109" valueType="U4" logicalName="PMA.MfcGas3.DefaultSetPoint" value="" min="0" max="1000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101110" valueType="U4" logicalName="PMA.MfcGas3.FlowRegulationFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101111" valueType="Boolean" logicalName="PMA.MfcGas3.MfcEnableAlarm" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101112" valueType="U4" logicalName="PMA.MfcGas3.MfcAlarmRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101113" valueType="U4" logicalName="PMA.MfcGas3.MfcAlarmTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101114" valueType="U4" logicalName="PMA.MfcGas3.MfcwarningRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101115" valueType="U4" logicalName="PMA.MfcGas3.MfcWarningTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101116" valueType="U4" logicalName="PMA.MfcGas3.MFCWriteMode" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101117" valueType="Boolean" logicalName="PMA.MfcGas4.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101118" valueType="List" logicalName="PMA.MfcGas4.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101119" valueType="U4" logicalName="PMA.MfcGas4.MfcN2Scale" value="" min="0" max="10000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101120" valueType="F8" logicalName="PMA.MfcGas4.MfcScaleFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101121" valueType="U4" logicalName="PMA.MfcGas4.DefaultSetPoint" value="" min="0" max="1000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101122" valueType="U4" logicalName="PMA.MfcGas4.FlowRegulationFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101123" valueType="Boolean" logicalName="PMA.MfcGas4.MfcEnableAlarm" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101124" valueType="U4" logicalName="PMA.MfcGas4.MfcAlarmRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101125" valueType="U4" logicalName="PMA.MfcGas4.MfcAlarmTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101126" valueType="U4" logicalName="PMA.MfcGas4.MfcwarningRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101127" valueType="U4" logicalName="PMA.MfcGas4.MfcWarningTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101128" valueType="U4" logicalName="PMA.MfcGas4.MFCWriteMode" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101129" valueType="Boolean" logicalName="PMA.MfcGas5.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101130" valueType="List" logicalName="PMA.MfcGas5.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101131" valueType="U4" logicalName="PMA.MfcGas5.MfcN2Scale" value="" min="0" max="10000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101132" valueType="F8" logicalName="PMA.MfcGas5.MfcScaleFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101133" valueType="U4" logicalName="PMA.MfcGas5.DefaultSetPoint" value="" min="0" max="1000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101134" valueType="U4" logicalName="PMA.MfcGas5.FlowRegulationFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101135" valueType="Boolean" logicalName="PMA.MfcGas5.MfcEnableAlarm" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101136" valueType="U4" logicalName="PMA.MfcGas5.MfcAlarmRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101137" valueType="U4" logicalName="PMA.MfcGas5.MfcAlarmTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101138" valueType="U4" logicalName="PMA.MfcGas5.MfcwarningRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101139" valueType="U4" logicalName="PMA.MfcGas5.MfcWarningTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101140" valueType="U4" logicalName="PMA.MfcGas5.MFCWriteMode" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101141" valueType="Boolean" logicalName="PMA.MfcGas6.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101142" valueType="List" logicalName="PMA.MfcGas6.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101143" valueType="U4" logicalName="PMA.MfcGas6.MfcN2Scale" value="" min="0" max="10000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101144" valueType="F8" logicalName="PMA.MfcGas6.MfcScaleFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101145" valueType="U4" logicalName="PMA.MfcGas6.DefaultSetPoint" value="" min="0" max="1000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101146" valueType="U4" logicalName="PMA.MfcGas6.FlowRegulationFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101147" valueType="Boolean" logicalName="PMA.MfcGas6.MfcEnableAlarm" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101148" valueType="U4" logicalName="PMA.MfcGas6.MfcAlarmRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101149" valueType="U4" logicalName="PMA.MfcGas6.MfcAlarmTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101150" valueType="U4" logicalName="PMA.MfcGas6.MfcwarningRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101151" valueType="U4" logicalName="PMA.MfcGas6.MfcWarningTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101152" valueType="U4" logicalName="PMA.MfcGas6.MFCWriteMode" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101153" valueType="Boolean" logicalName="PMA.MfcGas7.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101154" valueType="List" logicalName="PMA.MfcGas7.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101155" valueType="U4" logicalName="PMA.MfcGas7.MfcN2Scale" value="" min="0" max="10000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101156" valueType="F8" logicalName="PMA.MfcGas7.MfcScaleFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101157" valueType="U4" logicalName="PMA.MfcGas7.DefaultSetPoint" value="" min="0" max="1000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101158" valueType="U4" logicalName="PMA.MfcGas7.FlowRegulationFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101159" valueType="Boolean" logicalName="PMA.MfcGas7.MfcEnableAlarm" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101160" valueType="U4" logicalName="PMA.MfcGas7.MfcAlarmRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101161" valueType="U4" logicalName="PMA.MfcGas7.MfcAlarmTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101162" valueType="U4" logicalName="PMA.MfcGas7.MfcwarningRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101163" valueType="U4" logicalName="PMA.MfcGas7.MfcWarningTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101164" valueType="U4" logicalName="PMA.MfcGas7.MFCWriteMode" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101165" valueType="Boolean" logicalName="PMA.MfcGas8.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101166" valueType="List" logicalName="PMA.MfcGas8.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101167" valueType="U4" logicalName="PMA.MfcGas8.MfcN2Scale" value="" min="0" max="10000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101168" valueType="F8" logicalName="PMA.MfcGas8.MfcScaleFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101169" valueType="U4" logicalName="PMA.MfcGas8.DefaultSetPoint" value="" min="0" max="1000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101170" valueType="U4" logicalName="PMA.MfcGas8.FlowRegulationFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101171" valueType="Boolean" logicalName="PMA.MfcGas8.MfcEnableAlarm" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101172" valueType="U4" logicalName="PMA.MfcGas8.MfcAlarmRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101173" valueType="U4" logicalName="PMA.MfcGas8.MfcAlarmTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101174" valueType="U4" logicalName="PMA.MfcGas8.MfcwarningRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101175" valueType="U4" logicalName="PMA.MfcGas8.MfcWarningTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101176" valueType="U4" logicalName="PMA.MfcGas8.MFCWriteMode" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101177" valueType="Boolean" logicalName="PMA.MfcN2.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101178" valueType="List" logicalName="PMA.MfcN2.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101179" valueType="U4" logicalName="PMA.MfcN2.MfcN2Scale" value="" min="0" max="10000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101180" valueType="F8" logicalName="PMA.MfcN2.MfcScaleFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101181" valueType="U4" logicalName="PMA.MfcN2.DefaultSetPoint" value="" min="0" max="1000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101182" valueType="U4" logicalName="PMA.MfcN2.FlowRegulationFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101183" valueType="Boolean" logicalName="PMA.MfcN2.MfcEnableAlarm" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101184" valueType="U4" logicalName="PMA.MfcN2.MfcAlarmRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101185" valueType="U4" logicalName="PMA.MfcN2.MfcAlarmTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101186" valueType="U4" logicalName="PMA.MfcN2.MfcwarningRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101187" valueType="U4" logicalName="PMA.MfcN2.MfcWarningTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101188" valueType="U4" logicalName="PMA.MfcN2.MFCWriteMode" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101189" valueType="F8" logicalName="PMA.Pump.LeakRate" value="" min="0" max="10000" units="PaPerMin" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101190" valueType="U4" logicalName="PMA.Pump.LeakCheckPumpingTime" value="" min="0" max="3000" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101191" valueType="U4" logicalName="PMA.Pump.LeakCheckHoldTime" value="" min="0" max="3000" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101192" valueType="U4" logicalName="PMA.Pump.PumpBasePressure" value="" min="0" max="5" units="Pa" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101193" valueType="F8" logicalName="PMA.Pump.LeakCheckBasePressure" value="" min="0" max="100" units="Pa" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101194" valueType="List" logicalName="PMA.Pump.LeakCheckGasLineNums" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101195" valueType="F8" logicalName="PMA.Pump.PumpTimeLimit" value="" min="0" max="3000" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101196" valueType="U4" logicalName="PMA.Pump.PumpValveDelay" value="" min="0" max="3000" units="s" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101197" valueType="U4" logicalName="PMA.Pump.PumpCrossingPressure" value="" min="120" max="200000" units="Pa" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101198" valueType="U4" logicalName="PMA.Pump.PumpopenlSOPressure" value="" min="6" max="120" units="Pa" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101199" valueType="U4" logicalName="PMA.Pump.ForelinePressure" value="" min="0" max="2000" units="Pa" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101200" valueType="U4" logicalName="PMA.Purge.PurgecycleCount" value="" min="0" max="200" units="times" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101201" valueType="U4" logicalName="PMA.Purge.PurgeVentPressure" value="" min="0" max="1300" units="Pa" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101202" valueType="U4" logicalName="PMA.Purge.PurgePumpPressure" value="" min="0" max="30" units="Pa" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101203" valueType="U4" logicalName="PMA.Purge.PurgeventTimeLimit" value="" min="0" max="3600" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101204" valueType="U4" logicalName="PMA.Purge.PurgePumpTimeLimit" value="" min="0" max="3600" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101205" valueType="U4" logicalName="PMA.Purge.PurgeVentStableTime" value="" min="0" max="600" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101206" valueType="U4" logicalName="PMA.Purge.PurgePumpTime" value="" min="0" max="7200" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101207" valueType="U4" logicalName="PMA.Purge.GasPurgeCycleCount" value="" min="0" max="200" units="times" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101208" valueType="U4" logicalName="PMA.Purge.GasPurgeFlowTime" value="" min="0" max="300" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101209" valueType="U4" logicalName="PMA.Purge.GasPurgePumpTime" value="" min="0" max="300" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101210" valueType="Boolean" logicalName="PMA.PendulumHeater.lsOn" value="" min="0" max="0" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101211" valueType="F8" logicalName="PMA.PendulumHeater.TemperatureSetPoint" value="" min="0" max="1000" units="℃" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101212" valueType="Boolean" logicalName="PMA.PendulumHeater.HeaterEnableTolerance" value="" min="0" max="0" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101213" valueType="U4" logicalName="PMA.PendulumHeater.HeaterAlarmRange" value="" min="0" max="200" units="℃" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101214" valueType="U4" logicalName="PMA.PendulumHeater.HeaterAlarmTime" value="" min="0" max="3600" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101215" valueType="U4" logicalName="PMA.PendulumHeater.HeaterWarningRange" value="" min="0" max="200" units="℃" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101216" valueType="U4" logicalName="PMA.PendulumHeater.HeaterWarningTime" value="" min="0" max="3600" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101217" valueType="List" logicalName="PMA.TurboPump.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101218" valueType="F8" logicalName="PMA.TurboPump.ChamberForelinePressureThreshold" value="" min="0" max="1300" units="Pa" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101219" valueType="U4" logicalName="PMA.TurboPump.ChamberForelinePressureTimeout" value="" min="0" max="3000" units="s" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101220" valueType="List" logicalName="PMA.PendulumValve.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101221" valueType="U4" logicalName="PMA.PendulumValve.PressureFullRange" value="" min="0" max="13000" units="Pa" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101222" valueType="U4" logicalName="PMA.PendulumValve.ForelinePressureLimit" value="" min="0" max="250" units="Pa" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101223" valueType="U4" logicalName="PMA.PendulumValve.ChamberPressureLimit" value="" min="0" max="250" units="Pa" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101224" valueType="U4" logicalName="PMA.PendulumValve.TurboPumpSpeedLimit" value="" min="0" max="3000" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101225" valueType="Boolean" logicalName="PMA.PendulumValve.NoCheck" value="" min="0" max="0" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101226" valueType="F8" logicalName="PMA.HighTemperatureHeater.LiftServoPosition1" value="" min="-600" max="600" units="mm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101227" valueType="F8" logicalName="PMA.HighTemperatureHeater.LiftServoPosition2" value="" min="-600" max="600" units="mm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101228" valueType="F8" logicalName="PMA.HighTemperatureHeater.LiftServoPosition3" value="" min="-600" max="600" units="mm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101229" valueType="F8" logicalName="PMA.HighTemperatureHeater.LiftServoPosition4" value="" min="-600" max="600" units="mm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101230" valueType="F8" logicalName="PMA.HighTemperatureHeater.LiftServoPosition5" value="" min="-600" max="600" units="mm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101231" valueType="F8" logicalName="PMA.HighTemperatureHeater.LiftServoPositionOffset" value="" min="-5" max="5" units="mm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101232" valueType="F8" logicalName="PMA.HighTemperatureHeater.OriginSearchHighSpeed" value="" min="-600" max="600" units="mm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101233" valueType="F8" logicalName="PMA.HighTemperatureHeater.OriginSearchLowspeed" value="" min="-600" max="600" units="mm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101234" valueType="F8" logicalName="PMA.HighTemperatureHeater.AbsMovespeed" value="" min="-600" max="600" units="mm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101235" valueType="F8" logicalName="PMA.HighTemperatureHeater.MaximusMoveSpeed" value="" min="-600" max="600" units="mm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101236" valueType="F8" logicalName="PMA.HighTemperatureHeater.SoftDownLimit" value="" min="-600" max="600" units="mm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101237" valueType="F8" logicalName="PMA.HighTemperatureHeater.SoftUpLimit" value="" min="-600" max="600" units="mm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101238" valueType="F8" logicalName="PMA.HighTemperatureHeater.Temperature" value="" min="20" max="1000" units="℃" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101239" valueType="F8" logicalName="PMA.HighTemperatureHeater.Ratio" value="" min="50" max="200" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101240" valueType="Boolean" logicalName="PMA.HighTemperatureHeater.lsOn" value="" min="0" max="0" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="620101241" valueType="F8" logicalName="PMA.HighTemperatureHeater.N2WarningTemperatureLimit" value="" min="20" max="1000" units="℃" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101001" valueType="U4" logicalName="PMB.ChamberType" value="2" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101002" valueType="F8" logicalName="PMB.TurboN2FlowSetPoint" value="100" min="0" max="200" units="sccm" defaultValue="2" eventTrigger="" />
		<EquipmentConstant id="630101003" valueType="U4" logicalName="PMB.PrepareTransferTimeout" value="120" min="1" max="99999" units="s" defaultValue="100" eventTrigger="" />
		<EquipmentConstant id="630101004" valueType="U4" logicalName="PMB.TransferwaferTimeout" value="120" min="1" max="99999" units="s" defaultValue="120" eventTrigger="" />
		<EquipmentConstant id="630101005" valueType="U4" logicalName="PMB.OpenGasValveTimeout" value="1" min="0" max="60" units="second" defaultValue="120" eventTrigger="" />
		<EquipmentConstant id="630101006" valueType="U4" logicalName="PMB.TimeLimitOfCloseGasValve" value="1" min="0" max="10" units="" defaultValue="1" eventTrigger="" />
		<EquipmentConstant id="630101007" valueType="U4" logicalName="PMB.OpenCloseSlitValveTimeout" value="1" min="0" max="10" units="" defaultValue="1" eventTrigger="" />
		<EquipmentConstant id="630101008" valueType="F8" logicalName="PMB.GasFlowPressureAlarmRange" value="100" min="0" max="10138" units="Pa" defaultValue="1" eventTrigger="" />
		<EquipmentConstant id="630101009" valueType="F8" logicalName="PMB.GasFlowPressureAlarmTime" value="60" min="0" max="3600" units="second" defaultValue="100" eventTrigger="" />
		<EquipmentConstant id="630101010" valueType="F8" logicalName="PMB.GasFlowPressureWarningRange" value="100" min="0" max="10138" units="Pa" defaultValue="60" eventTrigger="" />
		<EquipmentConstant id="630101011" valueType="F8" logicalName="PMB.GasFlowPressureWarningTime" value="60" min="0" max="3600" units="second" defaultValue="100" eventTrigger="" />
		<EquipmentConstant id="630101012" valueType="Boolean" logicalName="PMB.EnableThrottleValve" value="true" min="0" max="10" units="" defaultValue="60" eventTrigger="" />
		<EquipmentConstant id="630101013" valueType="U4" logicalName="PMB.ValveHeaterSetPointLimit" value="150" min="0" max="500" units="" defaultValue="true" eventTrigger="" />
		<EquipmentConstant id="630101014" valueType="U4" logicalName="PMB.ForeLineHeaterSetPointLimit" value="140" min="0" max="500" units="" defaultValue="150" eventTrigger="" />
		<EquipmentConstant id="630101015" valueType="U4" logicalName="PMB.CheckSubstrateTempTimeout" value="120" min="0" max="3600" units="" defaultValue="140" eventTrigger="" />
		<EquipmentConstant id="630101016" valueType="U4" logicalName="PMB.CheckATMTimeout" value="90" min="0" max="3000" units="s" defaultValue="120" eventTrigger="" />
		<EquipmentConstant id="630101017" valueType="U4" logicalName="PMB.OverventTime" value="2000" min="0" max="60000" units="ms" defaultValue="90" eventTrigger="" />
		<EquipmentConstant id="630101018" valueType="F8" logicalName="PMB.ChamberBasePressureThreshold" value="104000" min="0" max="140000" units="Pa" defaultValue="2000" eventTrigger="" />
		<EquipmentConstant id="630101019" valueType="F8" logicalName="PMB.ChamberBaseTemperatureThreshold" value="120" min="0" max="1000" units="℃" defaultValue="104000" eventTrigger="" />
		<EquipmentConstant id="630101020" valueType="F8" logicalName="PMB.ProcessPressureOffset" value="10" min="0" max="14" units="Pa" defaultValue="120" eventTrigger="" />
		<EquipmentConstant id="630101021" valueType="F8" logicalName="PMB.ChamberVolume" value="7500" min="0" max="10000" units="ms" defaultValue="10" eventTrigger="" />
		<EquipmentConstant id="630101022" valueType="F8" logicalName="PMB.GasTemperature" value="25" min="0" max="10000" units="ms" defaultValue="7500" eventTrigger="" />
		<EquipmentConstant id="630101023" valueType="F8" logicalName="PMB.TargetPressureInMFCVerification" value="9" min="0" max="" units="" defaultValue="25" eventTrigger="" />
		<EquipmentConstant id="630101024" valueType="F8" logicalName="PMB.GasFlowTimeInMFCVerification" value="180" min="0" max="" units="" defaultValue="9" eventTrigger="" />
		<EquipmentConstant id="630101025" valueType="U4" logicalName="PMB.PickDelayTime" value="0" min="0" max="10000" units="" defaultValue="180" eventTrigger="" />
		<EquipmentConstant id="630101026" valueType="U4" logicalName="PMB.PlaceDelayTime" value="0" min="0" max="10000" units="" defaultValue="0" eventTrigger="" />
		<EquipmentConstant id="630101027" valueType="List" logicalName="PMB.ChamberLabel" value="Strip" min="" max="" units="" defaultValue="0" eventTrigger="" />
		<EquipmentConstant id="630101028" valueType="F8" logicalName="PMB.MaxDeviationInMFCVerification" value="30" min="0" max="" units="" defaultValue="Strip" eventTrigger="" />
		<EquipmentConstant id="630101029" valueType="U4" logicalName="PMB.WallHeaterSetPointLimit" value="150" min="0" max="" units="" defaultValue="30" eventTrigger="" />
		<EquipmentConstant id="630101030" valueType="U4" logicalName="PMB.PendulumHeaterSetPointLimit" value="150" min="0" max="" units="" defaultValue="150" eventTrigger="" />
		<EquipmentConstant id="630101031" valueType="Boolean" logicalName="PMB.EnableWallHeater" value="false" min="0" max="" units="" defaultValue="150" eventTrigger="" />
		<EquipmentConstant id="630101032" valueType="Boolean" logicalName="PMB.EnableGridHeater" value="false" min="0" max="" units="" defaultValue="false" eventTrigger="" />
		<EquipmentConstant id="630101033" valueType="U4" logicalName="PMB.RecipeTolerancelgnoreTime" value="5" min="0" max="" units="" defaultValue="false" eventTrigger="" />
		<EquipmentConstant id="630101034" valueType="U4" logicalName="PMB.RecipeRunningMode" value="1" min="0" max="" units="" defaultValue="5" eventTrigger="" />
		<EquipmentConstant id="630101035" valueType="Boolean" logicalName="PMB.IsEnableRecipeExtension" value="false" min="0" max="" units="" defaultValue="1" eventTrigger="" />
		<EquipmentConstant id="630101036" valueType="U4" logicalName="PMB.ControlPressureSetPoint" value="80" min="0" max="" units="" defaultValue="false" eventTrigger="" />
		<EquipmentConstant id="630101037" valueType="U4" logicalName="PMB.ControlPressureN2FlowSetPoint" value="300" min="0" max="" units="" defaultValue="80" eventTrigger="" />
		<EquipmentConstant id="630101038" valueType="U4" logicalName="PMB.MFG" value="" min="" max="" units="" defaultValue="300" eventTrigger="" />
		<EquipmentConstant id="630101039" valueType="U4" logicalName="PMB.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101040" valueType="List" logicalName="PMB.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101041" valueType="F8" logicalName="PMB.ChamberForelinePressureThreshold" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101042" valueType="U4" logicalName="PMB.ChamberForelinePressureTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101043" valueType="Boolean" logicalName="PMB.EnableSwitch" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101044" valueType="U4" logicalName="PMB.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101045" valueType="U4" logicalName="PMB.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101046" valueType="List" logicalName="PMB.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101047" valueType="List" logicalName="PMB.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101048" valueType="F8" logicalName="PMB.PowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101049" valueType="F8" logicalName="PMB.PowerAlammTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101050" valueType="F8" logicalName="PMB.PowerwarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101051" valueType="F8" logicalName="PMB.PowerWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101052" valueType="F8" logicalName="PMB.ReflectPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101053" valueType="F8" logicalName="PMB.ReflectPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101054" valueType="F8" logicalName="PMB.PowerRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101055" valueType="F8" logicalName="PMB.Coefficient" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101056" valueType="Boolean" logicalName="PMB.EnablePulsingFunction" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101057" valueType="Boolean" logicalName="PMB.EnableReflectPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101058" valueType="Boolean" logicalName="PMB.EnableVoltageCurrent" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101059" valueType="U4" logicalName="PMB.PowerRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101060" valueType="U4" logicalName="PMB.RfPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101061" valueType="U4" logicalName="PMB.RiPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101062" valueType="U4" logicalName="PMB.RFTurnonTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101063" valueType="Boolean" logicalName="PMB.EnableCalibration" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101064" valueType="List" logicalName="PMB.GeneratorSerialNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101065" valueType="List" logicalName="PMB.SensorSerialNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101066" valueType="F8" logicalName="PMB.CurentRFMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101067" valueType="F8" logicalName="PMB.RFCalibratedMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101068" valueType="Boolean" logicalName="PMB.EnableMatch" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101069" valueType="U4" logicalName="PMB.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101070" valueType="U4" logicalName="PMB.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101071" valueType="List" logicalName="PMB.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101072" valueType="List" logicalName="PMB.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101073" valueType="Boolean" logicalName="PMB.MatchModeEnableC1C2Position" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101074" valueType="Boolean" logicalName="PMB.EnableC1C2StepOffset" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101075" valueType="U4" logicalName="PMB.C1C2StepOffsetValue" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101076" valueType="Boolean" logicalName="PMB.EnableMatch" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101077" valueType="U4" logicalName="PMB.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101078" valueType="U4" logicalName="PMB.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101079" valueType="List" logicalName="PMB.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101080" valueType="List" logicalName="PMB.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101081" valueType="Boolean" logicalName="PMB.MfcGas1.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101082" valueType="List" logicalName="PMB.MfcGas1.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101083" valueType="U4" logicalName="PMB.MfcGas1.MfcN2Scale" value="" min="0" max="10000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101084" valueType="F8" logicalName="PMB.MfcGas1.MfcScaleFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101085" valueType="U4" logicalName="PMB.MfcGas1.DefaultSetPoint" value="" min="0" max="1000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101086" valueType="U4" logicalName="PMB.MfcGas1.FlowRegulationFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101087" valueType="Boolean" logicalName="PMB.MfcGas1.MfcEnableAlarm" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101088" valueType="U4" logicalName="PMB.MfcGas1.MfcAlarmRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101089" valueType="U4" logicalName="PMB.MfcGas1.MfcAlarmTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101090" valueType="U4" logicalName="PMB.MfcGas1.MfcwarningRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101091" valueType="U4" logicalName="PMB.MfcGas1.MfcWarningTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101092" valueType="U4" logicalName="PMB.MfcGas1.MFCWriteMode" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101093" valueType="Boolean" logicalName="PMB.MfcGas2.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101094" valueType="List" logicalName="PMB.MfcGas2.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101095" valueType="U4" logicalName="PMB.MfcGas2.MfcN2Scale" value="" min="0" max="10000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101096" valueType="F8" logicalName="PMB.MfcGas2.MfcScaleFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101097" valueType="U4" logicalName="PMB.MfcGas2.DefaultSetPoint" value="" min="0" max="1000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101098" valueType="U4" logicalName="PMB.MfcGas2.FlowRegulationFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101099" valueType="Boolean" logicalName="PMB.MfcGas2.MfcEnableAlarm" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101100" valueType="U4" logicalName="PMB.MfcGas2.MfcAlarmRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101101" valueType="U4" logicalName="PMB.MfcGas2.MfcAlarmTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101102" valueType="U4" logicalName="PMB.MfcGas2.MfcwarningRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101103" valueType="U4" logicalName="PMB.MfcGas2.MfcWarningTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101104" valueType="U4" logicalName="PMB.MfcGas2.MFCWriteMode" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101105" valueType="Boolean" logicalName="PMB.MfcGas3.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101106" valueType="List" logicalName="PMB.MfcGas3.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101107" valueType="U4" logicalName="PMB.MfcGas3.MfcN2Scale" value="" min="0" max="10000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101108" valueType="F8" logicalName="PMB.MfcGas3.MfcScaleFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101109" valueType="U4" logicalName="PMB.MfcGas3.DefaultSetPoint" value="" min="0" max="1000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101110" valueType="U4" logicalName="PMB.MfcGas3.FlowRegulationFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101111" valueType="Boolean" logicalName="PMB.MfcGas3.MfcEnableAlarm" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101112" valueType="U4" logicalName="PMB.MfcGas3.MfcAlarmRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101113" valueType="U4" logicalName="PMB.MfcGas3.MfcAlarmTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101114" valueType="U4" logicalName="PMB.MfcGas3.MfcwarningRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101115" valueType="U4" logicalName="PMB.MfcGas3.MfcWarningTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101116" valueType="U4" logicalName="PMB.MfcGas3.MFCWriteMode" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101117" valueType="Boolean" logicalName="PMB.MfcGas4.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101118" valueType="List" logicalName="PMB.MfcGas4.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101119" valueType="U4" logicalName="PMB.MfcGas4.MfcN2Scale" value="" min="0" max="10000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101120" valueType="F8" logicalName="PMB.MfcGas4.MfcScaleFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101121" valueType="U4" logicalName="PMB.MfcGas4.DefaultSetPoint" value="" min="0" max="1000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101122" valueType="U4" logicalName="PMB.MfcGas4.FlowRegulationFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101123" valueType="Boolean" logicalName="PMB.MfcGas4.MfcEnableAlarm" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101124" valueType="U4" logicalName="PMB.MfcGas4.MfcAlarmRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101125" valueType="U4" logicalName="PMB.MfcGas4.MfcAlarmTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101126" valueType="U4" logicalName="PMB.MfcGas4.MfcwarningRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101127" valueType="U4" logicalName="PMB.MfcGas4.MfcWarningTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101128" valueType="U4" logicalName="PMB.MfcGas4.MFCWriteMode" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101129" valueType="Boolean" logicalName="PMB.MfcGas5.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101130" valueType="List" logicalName="PMB.MfcGas5.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101131" valueType="U4" logicalName="PMB.MfcGas5.MfcN2Scale" value="" min="0" max="10000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101132" valueType="F8" logicalName="PMB.MfcGas5.MfcScaleFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101133" valueType="U4" logicalName="PMB.MfcGas5.DefaultSetPoint" value="" min="0" max="1000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101134" valueType="U4" logicalName="PMB.MfcGas5.FlowRegulationFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101135" valueType="Boolean" logicalName="PMB.MfcGas5.MfcEnableAlarm" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101136" valueType="U4" logicalName="PMB.MfcGas5.MfcAlarmRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101137" valueType="U4" logicalName="PMB.MfcGas5.MfcAlarmTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101138" valueType="U4" logicalName="PMB.MfcGas5.MfcwarningRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101139" valueType="U4" logicalName="PMB.MfcGas5.MfcWarningTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101140" valueType="U4" logicalName="PMB.MfcGas5.MFCWriteMode" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101141" valueType="Boolean" logicalName="PMB.MfcGas6.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101142" valueType="List" logicalName="PMB.MfcGas6.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101143" valueType="U4" logicalName="PMB.MfcGas6.MfcN2Scale" value="" min="0" max="10000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101144" valueType="F8" logicalName="PMB.MfcGas6.MfcScaleFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101145" valueType="U4" logicalName="PMB.MfcGas6.DefaultSetPoint" value="" min="0" max="1000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101146" valueType="U4" logicalName="PMB.MfcGas6.FlowRegulationFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101147" valueType="Boolean" logicalName="PMB.MfcGas6.MfcEnableAlarm" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101148" valueType="U4" logicalName="PMB.MfcGas6.MfcAlarmRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101149" valueType="U4" logicalName="PMB.MfcGas6.MfcAlarmTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101150" valueType="U4" logicalName="PMB.MfcGas6.MfcwarningRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101151" valueType="U4" logicalName="PMB.MfcGas6.MfcWarningTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101152" valueType="U4" logicalName="PMB.MfcGas6.MFCWriteMode" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101153" valueType="Boolean" logicalName="PMB.MfcGas7.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101154" valueType="List" logicalName="PMB.MfcGas7.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101155" valueType="U4" logicalName="PMB.MfcGas7.MfcN2Scale" value="" min="0" max="10000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101156" valueType="F8" logicalName="PMB.MfcGas7.MfcScaleFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101157" valueType="U4" logicalName="PMB.MfcGas7.DefaultSetPoint" value="" min="0" max="1000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101158" valueType="U4" logicalName="PMB.MfcGas7.FlowRegulationFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101159" valueType="Boolean" logicalName="PMB.MfcGas7.MfcEnableAlarm" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101160" valueType="U4" logicalName="PMB.MfcGas7.MfcAlarmRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101161" valueType="U4" logicalName="PMB.MfcGas7.MfcAlarmTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101162" valueType="U4" logicalName="PMB.MfcGas7.MfcwarningRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101163" valueType="U4" logicalName="PMB.MfcGas7.MfcWarningTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101164" valueType="U4" logicalName="PMB.MfcGas7.MFCWriteMode" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101165" valueType="Boolean" logicalName="PMB.MfcGas8.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101166" valueType="List" logicalName="PMB.MfcGas8.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101167" valueType="U4" logicalName="PMB.MfcGas8.MfcN2Scale" value="" min="0" max="10000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101168" valueType="F8" logicalName="PMB.MfcGas8.MfcScaleFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101169" valueType="U4" logicalName="PMB.MfcGas8.DefaultSetPoint" value="" min="0" max="1000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101170" valueType="U4" logicalName="PMB.MfcGas8.FlowRegulationFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101171" valueType="Boolean" logicalName="PMB.MfcGas8.MfcEnableAlarm" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101172" valueType="U4" logicalName="PMB.MfcGas8.MfcAlarmRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101173" valueType="U4" logicalName="PMB.MfcGas8.MfcAlarmTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101174" valueType="U4" logicalName="PMB.MfcGas8.MfcwarningRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101175" valueType="U4" logicalName="PMB.MfcGas8.MfcWarningTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101176" valueType="U4" logicalName="PMB.MfcGas8.MFCWriteMode" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101177" valueType="Boolean" logicalName="PMB.MfcN2.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101178" valueType="List" logicalName="PMB.MfcN2.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101179" valueType="U4" logicalName="PMB.MfcN2.MfcN2Scale" value="" min="0" max="10000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101180" valueType="F8" logicalName="PMB.MfcN2.MfcScaleFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101181" valueType="U4" logicalName="PMB.MfcN2.DefaultSetPoint" value="" min="0" max="1000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101182" valueType="U4" logicalName="PMB.MfcN2.FlowRegulationFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101183" valueType="Boolean" logicalName="PMB.MfcN2.MfcEnableAlarm" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101184" valueType="U4" logicalName="PMB.MfcN2.MfcAlarmRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101185" valueType="U4" logicalName="PMB.MfcN2.MfcAlarmTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101186" valueType="U4" logicalName="PMB.MfcN2.MfcwarningRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101187" valueType="U4" logicalName="PMB.MfcN2.MfcWarningTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101188" valueType="U4" logicalName="PMB.MfcN2.MFCWriteMode" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101189" valueType="F8" logicalName="PMB.Pump.LeakRate" value="" min="0" max="10000" units="PaPerMin" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101190" valueType="U4" logicalName="PMB.Pump.LeakCheckPumpingTime" value="" min="0" max="3000" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101191" valueType="U4" logicalName="PMB.Pump.LeakCheckHoldTime" value="" min="0" max="3000" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101192" valueType="U4" logicalName="PMB.Pump.PumpBasePressure" value="" min="0" max="5" units="Pa" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101193" valueType="F8" logicalName="PMB.Pump.LeakCheckBasePressure" value="" min="0" max="100" units="Pa" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101194" valueType="List" logicalName="PMB.Pump.LeakCheckGasLineNums" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101195" valueType="F8" logicalName="PMB.Pump.PumpTimeLimit" value="" min="0" max="3000" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101196" valueType="U4" logicalName="PMB.Pump.PumpValveDelay" value="" min="0" max="3000" units="s" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101197" valueType="U4" logicalName="PMB.Pump.PumpCrossingPressure" value="" min="120" max="200000" units="Pa" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101198" valueType="U4" logicalName="PMB.Pump.PumpopenlSOPressure" value="" min="6" max="120" units="Pa" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101199" valueType="U4" logicalName="PMB.Pump.ForelinePressure" value="" min="0" max="2000" units="Pa" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101200" valueType="U4" logicalName="PMB.Purge.PurgecycleCount" value="" min="0" max="200" units="times" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101201" valueType="U4" logicalName="PMB.Purge.PurgeVentPressure" value="" min="0" max="1300" units="Pa" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101202" valueType="U4" logicalName="PMB.Purge.PurgePumpPressure" value="" min="0" max="30" units="Pa" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101203" valueType="U4" logicalName="PMB.Purge.PurgeventTimeLimit" value="" min="0" max="3600" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101204" valueType="U4" logicalName="PMB.Purge.PurgePumpTimeLimit" value="" min="0" max="3600" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101205" valueType="U4" logicalName="PMB.Purge.PurgeVentStableTime" value="" min="0" max="600" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101206" valueType="U4" logicalName="PMB.Purge.PurgePumpTime" value="" min="0" max="7200" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101207" valueType="U4" logicalName="PMB.Purge.GasPurgeCycleCount" value="" min="0" max="200" units="times" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101208" valueType="U4" logicalName="PMB.Purge.GasPurgeFlowTime" value="" min="0" max="300" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101209" valueType="U4" logicalName="PMB.Purge.GasPurgePumpTime" value="" min="0" max="300" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101210" valueType="Boolean" logicalName="PMB.PendulumHeater.lsOn" value="" min="0" max="0" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101211" valueType="F8" logicalName="PMB.PendulumHeater.TemperatureSetPoint" value="" min="0" max="1000" units="℃" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101212" valueType="Boolean" logicalName="PMB.PendulumHeater.HeaterEnableTolerance" value="" min="0" max="0" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101213" valueType="U4" logicalName="PMB.PendulumHeater.HeaterAlarmRange" value="" min="0" max="200" units="℃" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101214" valueType="U4" logicalName="PMB.PendulumHeater.HeaterAlarmTime" value="" min="0" max="3600" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101215" valueType="U4" logicalName="PMB.PendulumHeater.HeaterWarningRange" value="" min="0" max="200" units="℃" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101216" valueType="U4" logicalName="PMB.PendulumHeater.HeaterWarningTime" value="" min="0" max="3600" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101217" valueType="List" logicalName="PMB.TurboPump.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101218" valueType="F8" logicalName="PMB.TurboPump.ChamberForelinePressureThreshold" value="" min="0" max="1300" units="Pa" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101219" valueType="U4" logicalName="PMB.TurboPump.ChamberForelinePressureTimeout" value="" min="0" max="3000" units="s" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101220" valueType="List" logicalName="PMB.PendulumValve.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101221" valueType="U4" logicalName="PMB.PendulumValve.PressureFullRange" value="" min="0" max="13000" units="Pa" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101222" valueType="U4" logicalName="PMB.PendulumValve.ForelinePressureLimit" value="" min="0" max="250" units="Pa" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101223" valueType="U4" logicalName="PMB.PendulumValve.ChamberPressureLimit" value="" min="0" max="250" units="Pa" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101224" valueType="U4" logicalName="PMB.PendulumValve.TurboPumpSpeedLimit" value="" min="0" max="3000" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101225" valueType="Boolean" logicalName="PMB.PendulumValve.NoCheck" value="" min="0" max="0" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101226" valueType="F8" logicalName="PMB.HighTemperatureHeater.LiftServoPosition1" value="" min="-600" max="600" units="mm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101227" valueType="F8" logicalName="PMB.HighTemperatureHeater.LiftServoPosition2" value="" min="-600" max="600" units="mm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101228" valueType="F8" logicalName="PMB.HighTemperatureHeater.LiftServoPosition3" value="" min="-600" max="600" units="mm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101229" valueType="F8" logicalName="PMB.HighTemperatureHeater.LiftServoPosition4" value="" min="-600" max="600" units="mm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101230" valueType="F8" logicalName="PMB.HighTemperatureHeater.LiftServoPosition5" value="" min="-600" max="600" units="mm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101231" valueType="F8" logicalName="PMB.HighTemperatureHeater.LiftServoPositionOffset" value="" min="-5" max="5" units="mm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101232" valueType="F8" logicalName="PMB.HighTemperatureHeater.OriginSearchHighSpeed" value="" min="-600" max="600" units="mm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101233" valueType="F8" logicalName="PMB.HighTemperatureHeater.OriginSearchLowspeed" value="" min="-600" max="600" units="mm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101234" valueType="F8" logicalName="PMB.HighTemperatureHeater.AbsMovespeed" value="" min="-600" max="600" units="mm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101235" valueType="F8" logicalName="PMB.HighTemperatureHeater.MaximusMoveSpeed" value="" min="-600" max="600" units="mm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101236" valueType="F8" logicalName="PMB.HighTemperatureHeater.SoftDownLimit" value="" min="-600" max="600" units="mm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101237" valueType="F8" logicalName="PMB.HighTemperatureHeater.SoftUpLimit" value="" min="-600" max="600" units="mm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101238" valueType="F8" logicalName="PMB.HighTemperatureHeater.Temperature" value="" min="20" max="1000" units="℃" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101239" valueType="F8" logicalName="PMB.HighTemperatureHeater.Ratio" value="" min="50" max="200" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101240" valueType="Boolean" logicalName="PMB.HighTemperatureHeater.lsOn" value="" min="0" max="0" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="630101241" valueType="F8" logicalName="PMB.HighTemperatureHeater.N2WarningTemperatureLimit" value="" min="20" max="1000" units="℃" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101001" valueType="U4" logicalName="PMC.ChamberType" value="2" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101002" valueType="F8" logicalName="PMC.TurboN2FlowSetPoint" value="100" min="0" max="200" units="sccm" defaultValue="2" eventTrigger="" />
		<EquipmentConstant id="640101003" valueType="U4" logicalName="PMC.PrepareTransferTimeout" value="120" min="1" max="99999" units="s" defaultValue="100" eventTrigger="" />
		<EquipmentConstant id="640101004" valueType="U4" logicalName="PMC.TransferwaferTimeout" value="120" min="1" max="99999" units="s" defaultValue="120" eventTrigger="" />
		<EquipmentConstant id="640101005" valueType="U4" logicalName="PMC.OpenGasValveTimeout" value="1" min="0" max="60" units="second" defaultValue="120" eventTrigger="" />
		<EquipmentConstant id="640101006" valueType="U4" logicalName="PMC.TimeLimitOfCloseGasValve" value="1" min="0" max="10" units="" defaultValue="1" eventTrigger="" />
		<EquipmentConstant id="640101007" valueType="U4" logicalName="PMC.OpenCloseSlitValveTimeout" value="1" min="0" max="10" units="" defaultValue="1" eventTrigger="" />
		<EquipmentConstant id="640101008" valueType="F8" logicalName="PMC.GasFlowPressureAlarmRange" value="100" min="0" max="10138" units="Pa" defaultValue="1" eventTrigger="" />
		<EquipmentConstant id="640101009" valueType="F8" logicalName="PMC.GasFlowPressureAlarmTime" value="60" min="0" max="3600" units="second" defaultValue="100" eventTrigger="" />
		<EquipmentConstant id="640101010" valueType="F8" logicalName="PMC.GasFlowPressureWarningRange" value="100" min="0" max="10138" units="Pa" defaultValue="60" eventTrigger="" />
		<EquipmentConstant id="640101011" valueType="F8" logicalName="PMC.GasFlowPressureWarningTime" value="60" min="0" max="3600" units="second" defaultValue="100" eventTrigger="" />
		<EquipmentConstant id="640101012" valueType="Boolean" logicalName="PMC.EnableThrottleValve" value="true" min="0" max="10" units="" defaultValue="60" eventTrigger="" />
		<EquipmentConstant id="640101013" valueType="U4" logicalName="PMC.ValveHeaterSetPointLimit" value="150" min="0" max="500" units="" defaultValue="true" eventTrigger="" />
		<EquipmentConstant id="640101014" valueType="U4" logicalName="PMC.ForeLineHeaterSetPointLimit" value="140" min="0" max="500" units="" defaultValue="150" eventTrigger="" />
		<EquipmentConstant id="640101015" valueType="U4" logicalName="PMC.CheckSubstrateTempTimeout" value="120" min="0" max="3600" units="" defaultValue="140" eventTrigger="" />
		<EquipmentConstant id="640101016" valueType="U4" logicalName="PMC.CheckATMTimeout" value="90" min="0" max="3000" units="s" defaultValue="120" eventTrigger="" />
		<EquipmentConstant id="640101017" valueType="U4" logicalName="PMC.OverventTime" value="2000" min="0" max="60000" units="ms" defaultValue="90" eventTrigger="" />
		<EquipmentConstant id="640101018" valueType="F8" logicalName="PMC.ChamberBasePressureThreshold" value="104000" min="0" max="140000" units="Pa" defaultValue="2000" eventTrigger="" />
		<EquipmentConstant id="640101019" valueType="F8" logicalName="PMC.ChamberBaseTemperatureThreshold" value="120" min="0" max="1000" units="℃" defaultValue="104000" eventTrigger="" />
		<EquipmentConstant id="640101020" valueType="F8" logicalName="PMC.ProcessPressureOffset" value="10" min="0" max="14" units="Pa" defaultValue="120" eventTrigger="" />
		<EquipmentConstant id="640101021" valueType="F8" logicalName="PMC.ChamberVolume" value="7500" min="0" max="10000" units="ms" defaultValue="10" eventTrigger="" />
		<EquipmentConstant id="640101022" valueType="F8" logicalName="PMC.GasTemperature" value="25" min="0" max="10000" units="ms" defaultValue="7500" eventTrigger="" />
		<EquipmentConstant id="640101023" valueType="F8" logicalName="PMC.TargetPressureInMFCVerification" value="9" min="0" max="" units="" defaultValue="25" eventTrigger="" />
		<EquipmentConstant id="640101024" valueType="F8" logicalName="PMC.GasFlowTimeInMFCVerification" value="180" min="0" max="" units="" defaultValue="9" eventTrigger="" />
		<EquipmentConstant id="640101025" valueType="U4" logicalName="PMC.PickDelayTime" value="0" min="0" max="10000" units="" defaultValue="180" eventTrigger="" />
		<EquipmentConstant id="640101026" valueType="U4" logicalName="PMC.PlaceDelayTime" value="0" min="0" max="10000" units="" defaultValue="0" eventTrigger="" />
		<EquipmentConstant id="640101027" valueType="List" logicalName="PMC.ChamberLabel" value="Strip" min="" max="" units="" defaultValue="0" eventTrigger="" />
		<EquipmentConstant id="640101028" valueType="F8" logicalName="PMC.MaxDeviationInMFCVerification" value="30" min="0" max="" units="" defaultValue="Strip" eventTrigger="" />
		<EquipmentConstant id="640101029" valueType="U4" logicalName="PMC.WallHeaterSetPointLimit" value="150" min="0" max="" units="" defaultValue="30" eventTrigger="" />
		<EquipmentConstant id="640101030" valueType="U4" logicalName="PMC.PendulumHeaterSetPointLimit" value="150" min="0" max="" units="" defaultValue="150" eventTrigger="" />
		<EquipmentConstant id="640101031" valueType="Boolean" logicalName="PMC.EnableWallHeater" value="false" min="0" max="" units="" defaultValue="150" eventTrigger="" />
		<EquipmentConstant id="640101032" valueType="Boolean" logicalName="PMC.EnableGridHeater" value="false" min="0" max="" units="" defaultValue="false" eventTrigger="" />
		<EquipmentConstant id="640101033" valueType="U4" logicalName="PMC.RecipeTolerancelgnoreTime" value="5" min="0" max="" units="" defaultValue="false" eventTrigger="" />
		<EquipmentConstant id="640101034" valueType="U4" logicalName="PMC.RecipeRunningMode" value="1" min="0" max="" units="" defaultValue="5" eventTrigger="" />
		<EquipmentConstant id="640101035" valueType="Boolean" logicalName="PMC.IsEnableRecipeExtension" value="false" min="0" max="" units="" defaultValue="1" eventTrigger="" />
		<EquipmentConstant id="640101036" valueType="U4" logicalName="PMC.ControlPressureSetPoint" value="80" min="0" max="" units="" defaultValue="false" eventTrigger="" />
		<EquipmentConstant id="640101037" valueType="U4" logicalName="PMC.ControlPressureN2FlowSetPoint" value="300" min="0" max="" units="" defaultValue="80" eventTrigger="" />
		<EquipmentConstant id="640101038" valueType="U4" logicalName="PMC.MFG" value="" min="" max="" units="" defaultValue="300" eventTrigger="" />
		<EquipmentConstant id="640101039" valueType="U4" logicalName="PMC.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101040" valueType="List" logicalName="PMC.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101041" valueType="F8" logicalName="PMC.ChamberForelinePressureThreshold" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101042" valueType="U4" logicalName="PMC.ChamberForelinePressureTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101043" valueType="Boolean" logicalName="PMC.EnableSwitch" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101044" valueType="U4" logicalName="PMC.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101045" valueType="U4" logicalName="PMC.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101046" valueType="List" logicalName="PMC.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101047" valueType="List" logicalName="PMC.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101048" valueType="F8" logicalName="PMC.PowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101049" valueType="F8" logicalName="PMC.PowerAlammTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101050" valueType="F8" logicalName="PMC.PowerwarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101051" valueType="F8" logicalName="PMC.PowerWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101052" valueType="F8" logicalName="PMC.ReflectPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101053" valueType="F8" logicalName="PMC.ReflectPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101054" valueType="F8" logicalName="PMC.PowerRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101055" valueType="F8" logicalName="PMC.Coefficient" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101056" valueType="Boolean" logicalName="PMC.EnablePulsingFunction" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101057" valueType="Boolean" logicalName="PMC.EnableReflectPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101058" valueType="Boolean" logicalName="PMC.EnableVoltageCurrent" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101059" valueType="U4" logicalName="PMC.PowerRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101060" valueType="U4" logicalName="PMC.RfPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101061" valueType="U4" logicalName="PMC.RiPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101062" valueType="U4" logicalName="PMC.RFTurnonTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101063" valueType="Boolean" logicalName="PMC.EnableCalibration" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101064" valueType="List" logicalName="PMC.GeneratorSerialNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101065" valueType="List" logicalName="PMC.SensorSerialNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101066" valueType="F8" logicalName="PMC.CurentRFMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101067" valueType="F8" logicalName="PMC.RFCalibratedMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101068" valueType="Boolean" logicalName="PMC.EnableMatch" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101069" valueType="U4" logicalName="PMC.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101070" valueType="U4" logicalName="PMC.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101071" valueType="List" logicalName="PMC.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101072" valueType="List" logicalName="PMC.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101073" valueType="Boolean" logicalName="PMC.MatchModeEnableC1C2Position" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101074" valueType="Boolean" logicalName="PMC.EnableC1C2StepOffset" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101075" valueType="U4" logicalName="PMC.C1C2StepOffsetValue" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101076" valueType="Boolean" logicalName="PMC.EnableMatch" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101077" valueType="U4" logicalName="PMC.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101078" valueType="U4" logicalName="PMC.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101079" valueType="List" logicalName="PMC.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101080" valueType="List" logicalName="PMC.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101081" valueType="Boolean" logicalName="PMC.MfcGas1.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101082" valueType="List" logicalName="PMC.MfcGas1.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101083" valueType="U4" logicalName="PMC.MfcGas1.MfcN2Scale" value="" min="0" max="10000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101084" valueType="F8" logicalName="PMC.MfcGas1.MfcScaleFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101085" valueType="U4" logicalName="PMC.MfcGas1.DefaultSetPoint" value="" min="0" max="1000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101086" valueType="U4" logicalName="PMC.MfcGas1.FlowRegulationFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101087" valueType="Boolean" logicalName="PMC.MfcGas1.MfcEnableAlarm" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101088" valueType="U4" logicalName="PMC.MfcGas1.MfcAlarmRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101089" valueType="U4" logicalName="PMC.MfcGas1.MfcAlarmTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101090" valueType="U4" logicalName="PMC.MfcGas1.MfcwarningRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101091" valueType="U4" logicalName="PMC.MfcGas1.MfcWarningTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101092" valueType="U4" logicalName="PMC.MfcGas1.MFCWriteMode" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101093" valueType="Boolean" logicalName="PMC.MfcGas2.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101094" valueType="List" logicalName="PMC.MfcGas2.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101095" valueType="U4" logicalName="PMC.MfcGas2.MfcN2Scale" value="" min="0" max="10000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101096" valueType="F8" logicalName="PMC.MfcGas2.MfcScaleFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101097" valueType="U4" logicalName="PMC.MfcGas2.DefaultSetPoint" value="" min="0" max="1000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101098" valueType="U4" logicalName="PMC.MfcGas2.FlowRegulationFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101099" valueType="Boolean" logicalName="PMC.MfcGas2.MfcEnableAlarm" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101100" valueType="U4" logicalName="PMC.MfcGas2.MfcAlarmRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101101" valueType="U4" logicalName="PMC.MfcGas2.MfcAlarmTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101102" valueType="U4" logicalName="PMC.MfcGas2.MfcwarningRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101103" valueType="U4" logicalName="PMC.MfcGas2.MfcWarningTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101104" valueType="U4" logicalName="PMC.MfcGas2.MFCWriteMode" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101105" valueType="Boolean" logicalName="PMC.MfcGas3.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101106" valueType="List" logicalName="PMC.MfcGas3.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101107" valueType="U4" logicalName="PMC.MfcGas3.MfcN2Scale" value="" min="0" max="10000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101108" valueType="F8" logicalName="PMC.MfcGas3.MfcScaleFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101109" valueType="U4" logicalName="PMC.MfcGas3.DefaultSetPoint" value="" min="0" max="1000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101110" valueType="U4" logicalName="PMC.MfcGas3.FlowRegulationFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101111" valueType="Boolean" logicalName="PMC.MfcGas3.MfcEnableAlarm" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101112" valueType="U4" logicalName="PMC.MfcGas3.MfcAlarmRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101113" valueType="U4" logicalName="PMC.MfcGas3.MfcAlarmTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101114" valueType="U4" logicalName="PMC.MfcGas3.MfcwarningRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101115" valueType="U4" logicalName="PMC.MfcGas3.MfcWarningTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101116" valueType="U4" logicalName="PMC.MfcGas3.MFCWriteMode" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101117" valueType="Boolean" logicalName="PMC.MfcGas4..Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101118" valueType="List" logicalName="PMC.MfcGas4.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101119" valueType="U4" logicalName="PMC.MfcGas4.MfcN2Scale" value="" min="0" max="10000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101120" valueType="F8" logicalName="PMC.MfcGas4.MfcScaleFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101121" valueType="U4" logicalName="PMC.MfcGas4.DefaultSetPoint" value="" min="0" max="1000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101122" valueType="U4" logicalName="PMC.MfcGas4.FlowRegulationFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101123" valueType="Boolean" logicalName="PMC.MfcGas4.MfcEnableAlarm" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101124" valueType="U4" logicalName="PMC.MfcGas4.MfcAlarmRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101125" valueType="U4" logicalName="PMC.MfcGas4.MfcAlarmTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101126" valueType="U4" logicalName="PMC.MfcGas4.MfcwarningRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101127" valueType="U4" logicalName="PMC.MfcGas4.MfcWarningTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101128" valueType="U4" logicalName="PMC.MfcGas4.MFCWriteMode" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101129" valueType="Boolean" logicalName="PMC.MfcGas5.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101130" valueType="List" logicalName="PMC.MfcGas5.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101131" valueType="U4" logicalName="PMC.MfcGas5.MfcN2Scale" value="" min="0" max="10000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101132" valueType="F8" logicalName="PMC.MfcGas5.MfcScaleFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101133" valueType="U4" logicalName="PMC.MfcGas5.DefaultSetPoint" value="" min="0" max="1000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101134" valueType="U4" logicalName="PMC.MfcGas5.FlowRegulationFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101135" valueType="Boolean" logicalName="PMC.MfcGas5.MfcEnableAlarm" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101136" valueType="U4" logicalName="PMC.MfcGas5.MfcAlarmRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101137" valueType="U4" logicalName="PMC.MfcGas5.MfcAlarmTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101138" valueType="U4" logicalName="PMC.MfcGas5.MfcwarningRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101139" valueType="U4" logicalName="PMC.MfcGas5.MfcWarningTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101140" valueType="U4" logicalName="PMC.MfcGas5.MFCWriteMode" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101141" valueType="Boolean" logicalName="PMC.MfcGas6.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101142" valueType="List" logicalName="PMC.MfcGas6.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101143" valueType="U4" logicalName="PMC.MfcGas6.MfcN2Scale" value="" min="0" max="10000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101144" valueType="F8" logicalName="PMC.MfcGas6.MfcScaleFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101145" valueType="U4" logicalName="PMC.MfcGas6.DefaultSetPoint" value="" min="0" max="1000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101146" valueType="U4" logicalName="PMC.MfcGas6.FlowRegulationFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101147" valueType="Boolean" logicalName="PMC.MfcGas6.MfcEnableAlarm" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101148" valueType="U4" logicalName="PMC.MfcGas6.MfcAlarmRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101149" valueType="U4" logicalName="PMC.MfcGas6.MfcAlarmTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101150" valueType="U4" logicalName="PMC.MfcGas6.MfcwarningRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101151" valueType="U4" logicalName="PMC.MfcGas6.MfcWarningTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101152" valueType="U4" logicalName="PMC.MfcGas6.MFCWriteMode" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101153" valueType="Boolean" logicalName="PMC.MfcGas7.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101154" valueType="List" logicalName="PMC.MfcGas7.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101155" valueType="U4" logicalName="PMC.MfcGas7.MfcN2Scale" value="" min="0" max="10000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101156" valueType="F8" logicalName="PMC.MfcGas7.MfcScaleFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101157" valueType="U4" logicalName="PMC.MfcGas7.DefaultSetPoint" value="" min="0" max="1000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101158" valueType="U4" logicalName="PMC.MfcGas7.FlowRegulationFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101159" valueType="Boolean" logicalName="PMC.MfcGas7.MfcEnableAlarm" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101160" valueType="U4" logicalName="PMC.MfcGas7.MfcAlarmRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101161" valueType="U4" logicalName="PMC.MfcGas7.MfcAlarmTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101162" valueType="U4" logicalName="PMC.MfcGas7.MfcwarningRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101163" valueType="U4" logicalName="PMC.MfcGas7.MfcWarningTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101164" valueType="U4" logicalName="PMC.MfcGas7.MFCWriteMode" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101165" valueType="Boolean" logicalName="PMC.MfcGas8.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101166" valueType="List" logicalName="PMC.MfcGas8.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101167" valueType="U4" logicalName="PMC.MfcGas8.MfcN2Scale" value="" min="0" max="10000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101168" valueType="F8" logicalName="PMC.MfcGas8.MfcScaleFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101169" valueType="U4" logicalName="PMC.MfcGas8.DefaultSetPoint" value="" min="0" max="1000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101170" valueType="U4" logicalName="PMC.MfcGas8.FlowRegulationFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101171" valueType="Boolean" logicalName="PMC.MfcGas8.MfcEnableAlarm" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101172" valueType="U4" logicalName="PMC.MfcGas8.MfcAlarmRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101173" valueType="U4" logicalName="PMC.MfcGas8.MfcAlarmTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101174" valueType="U4" logicalName="PMC.MfcGas8.MfcwarningRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101175" valueType="U4" logicalName="PMC.MfcGas8.MfcWarningTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101176" valueType="U4" logicalName="PMC.MfcGas8.MFCWriteMode" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101177" valueType="Boolean" logicalName="PMC.MfcN2.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101178" valueType="List" logicalName="PMC.MfcN2.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101179" valueType="U4" logicalName="PMC.MfcN2.MfcN2Scale" value="" min="0" max="10000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101180" valueType="F8" logicalName="PMC.MfcN2.MfcScaleFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101181" valueType="U4" logicalName="PMC.MfcN2.DefaultSetPoint" value="" min="0" max="1000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101182" valueType="U4" logicalName="PMC.MfcN2.FlowRegulationFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101183" valueType="Boolean" logicalName="PMC.MfcN2.MfcEnableAlarm" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101184" valueType="U4" logicalName="PMC.MfcN2.MfcAlarmRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101185" valueType="U4" logicalName="PMC.MfcN2.MfcAlarmTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101186" valueType="U4" logicalName="PMC.MfcN2.MfcwarningRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101187" valueType="U4" logicalName="PMC.MfcN2.MfcWarningTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101188" valueType="U4" logicalName="PMC.MfcN2.MFCWriteMode" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101189" valueType="F8" logicalName="PMC.Pump.LeakRate" value="" min="0" max="10000" units="PaPerMin" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101190" valueType="U4" logicalName="PMC.Pump.LeakCheckPumpingTime" value="" min="0" max="3000" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101191" valueType="U4" logicalName="PMC.Pump.LeakCheckHoldTime" value="" min="0" max="3000" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101192" valueType="U4" logicalName="PMC.Pump.PumpBasePressure" value="" min="0" max="5" units="Pa" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101193" valueType="F8" logicalName="PMC.Pump.LeakCheckBasePressure" value="" min="0" max="100" units="Pa" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101194" valueType="List" logicalName="PMC.Pump.LeakCheckGasLineNums" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101195" valueType="F8" logicalName="PMC.Pump.PumpTimeLimit" value="" min="0" max="3000" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101196" valueType="U4" logicalName="PMC.Pump.PumpValveDelay" value="" min="0" max="3000" units="s" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101197" valueType="U4" logicalName="PMC.Pump.PumpCrossingPressure" value="" min="120" max="200000" units="Pa" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101198" valueType="U4" logicalName="PMC.Pump.PumpopenlSOPressure" value="" min="6" max="120" units="Pa" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101199" valueType="U4" logicalName="PMC.Pump.ForelinePressure" value="" min="0" max="2000" units="Pa" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101200" valueType="U4" logicalName="PMC.Purge.PurgecycleCount" value="" min="0" max="200" units="times" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101201" valueType="U4" logicalName="PMC.Purge.PurgeVentPressure" value="" min="0" max="1300" units="Pa" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101202" valueType="U4" logicalName="PMC.Purge.PurgePumpPressure" value="" min="0" max="30" units="Pa" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101203" valueType="U4" logicalName="PMC.Purge.PurgeventTimeLimit" value="" min="0" max="3600" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101204" valueType="U4" logicalName="PMC.Purge.PurgePumpTimeLimit" value="" min="0" max="3600" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101205" valueType="U4" logicalName="PMC.Purge.PurgeVentStableTime" value="" min="0" max="600" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101206" valueType="U4" logicalName="PMC.Purge.PurgePumpTime" value="" min="0" max="7200" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101207" valueType="U4" logicalName="PMC.Purge.GasPurgeCycleCount" value="" min="0" max="200" units="times" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101208" valueType="U4" logicalName="PMC.Purge.GasPurgeFlowTime" value="" min="0" max="300" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101209" valueType="U4" logicalName="PMC.Purge.GasPurgePumpTime" value="" min="0" max="300" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101210" valueType="Boolean" logicalName="PMC.PendulumHeater.lsOn" value="" min="0" max="0" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101211" valueType="F8" logicalName="PMC.PendulumHeater.TemperatureSetPoint" value="" min="0" max="1000" units="℃" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101212" valueType="Boolean" logicalName="PMC.PendulumHeater.HeaterEnableTolerance" value="" min="0" max="0" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101213" valueType="U4" logicalName="PMC.PendulumHeater.HeaterAlarmRange" value="" min="0" max="200" units="℃" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101214" valueType="U4" logicalName="PMC.PendulumHeater.HeaterAlarmTime" value="" min="0" max="3600" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101215" valueType="U4" logicalName="PMC.PendulumHeater.HeaterWarningRange" value="" min="0" max="200" units="℃" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101216" valueType="U4" logicalName="PMC.PendulumHeater.HeaterWarningTime" value="" min="0" max="3600" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101217" valueType="List" logicalName="PMC.TurboPump.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101218" valueType="F8" logicalName="PMC.TurboPump.ChamberForelinePressureThreshold" value="" min="0" max="1300" units="Pa" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101219" valueType="U4" logicalName="PMC.TurboPump.ChamberForelinePressureTimeout" value="" min="0" max="3000" units="s" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101220" valueType="List" logicalName="PMC.PendulumValve.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101221" valueType="U4" logicalName="PMC.PendulumValve.PressureFullRange" value="" min="0" max="13000" units="Pa" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101222" valueType="U4" logicalName="PMC.PendulumValve.ForelinePressureLimit" value="" min="0" max="250" units="Pa" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101223" valueType="U4" logicalName="PMC.PendulumValve.ChamberPressureLimit" value="" min="0" max="250" units="Pa" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101224" valueType="U4" logicalName="PMC.PendulumValve.TurboPumpSpeedLimit" value="" min="0" max="3000" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101225" valueType="Boolean" logicalName="PMC.PendulumValve.NoCheck" value="" min="0" max="0" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101226" valueType="F8" logicalName="PMC.HighTemperatureHeater.LiftServoPosition1" value="" min="-600" max="600" units="mm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101227" valueType="F8" logicalName="PMC.HighTemperatureHeater.LiftServoPosition2" value="" min="-600" max="600" units="mm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101228" valueType="F8" logicalName="PMC.HighTemperatureHeater.LiftServoPosition3" value="" min="-600" max="600" units="mm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101229" valueType="F8" logicalName="PMC.HighTemperatureHeater.LiftServoPosition4" value="" min="-600" max="600" units="mm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101230" valueType="F8" logicalName="PMC.HighTemperatureHeater.LiftServoPosition5" value="" min="-600" max="600" units="mm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101231" valueType="F8" logicalName="PMC.HighTemperatureHeater.LiftServoPositionOffset" value="" min="-5" max="5" units="mm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101232" valueType="F8" logicalName="PMC.HighTemperatureHeater.OriginSearchHighSpeed" value="" min="-600" max="600" units="mm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101233" valueType="F8" logicalName="PMC.HighTemperatureHeater.OriginSearchLowspeed" value="" min="-600" max="600" units="mm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101234" valueType="F8" logicalName="PMC.HighTemperatureHeater.AbsMovespeed" value="" min="-600" max="600" units="mm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101235" valueType="F8" logicalName="PMC.HighTemperatureHeater.MaximusMoveSpeed" value="" min="-600" max="600" units="mm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101236" valueType="F8" logicalName="PMC.HighTemperatureHeater.SoftDownLimit" value="" min="-600" max="600" units="mm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101237" valueType="F8" logicalName="PMC.HighTemperatureHeater.SoftUpLimit" value="" min="-600" max="600" units="mm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101238" valueType="F8" logicalName="PMC.HighTemperatureHeater.Temperature" value="" min="20" max="1000" units="℃" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101239" valueType="F8" logicalName="PMC.HighTemperatureHeater.Ratio" value="" min="50" max="200" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101240" valueType="Boolean" logicalName="PMC.HighTemperatureHeater.lsOn" value="" min="0" max="0" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="640101241" valueType="F8" logicalName="PMC.HighTemperatureHeater.N2WarningTemperatureLimit" value="" min="20" max="1000" units="℃" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101001" valueType="U4" logicalName="PMD.ChamberType" value="2" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101002" valueType="F8" logicalName="PMD.TurboN2FlowSetPoint" value="100" min="0" max="200" units="sccm" defaultValue="2" eventTrigger="" />
		<EquipmentConstant id="650101003" valueType="U4" logicalName="PMD.PrepareTransferTimeout" value="120" min="1" max="99999" units="s" defaultValue="100" eventTrigger="" />
		<EquipmentConstant id="650101004" valueType="U4" logicalName="PMD.TransferwaferTimeout" value="120" min="1" max="99999" units="s" defaultValue="120" eventTrigger="" />
		<EquipmentConstant id="650101005" valueType="U4" logicalName="PMD.OpenGasValveTimeout" value="1" min="0" max="60" units="second" defaultValue="120" eventTrigger="" />
		<EquipmentConstant id="650101006" valueType="U4" logicalName="PMD.TimeLimitOfCloseGasValve" value="1" min="0" max="10" units="" defaultValue="1" eventTrigger="" />
		<EquipmentConstant id="650101007" valueType="U4" logicalName="PMD.OpenCloseSlitValveTimeout" value="1" min="0" max="10" units="" defaultValue="1" eventTrigger="" />
		<EquipmentConstant id="650101008" valueType="F8" logicalName="PMD.GasFlowPressureAlarmRange" value="100" min="0" max="10138" units="Pa" defaultValue="1" eventTrigger="" />
		<EquipmentConstant id="650101009" valueType="F8" logicalName="PMD.GasFlowPressureAlarmTime" value="60" min="0" max="3600" units="second" defaultValue="100" eventTrigger="" />
		<EquipmentConstant id="650101010" valueType="F8" logicalName="PMD.GasFlowPressureWarningRange" value="100" min="0" max="10138" units="Pa" defaultValue="60" eventTrigger="" />
		<EquipmentConstant id="650101011" valueType="F8" logicalName="PMD.GasFlowPressureWarningTime" value="60" min="0" max="3600" units="second" defaultValue="100" eventTrigger="" />
		<EquipmentConstant id="650101012" valueType="Boolean" logicalName="PMD.EnableThrottleValve" value="true" min="0" max="10" units="" defaultValue="60" eventTrigger="" />
		<EquipmentConstant id="650101013" valueType="U4" logicalName="PMD.ValveHeaterSetPointLimit" value="150" min="0" max="500" units="" defaultValue="true" eventTrigger="" />
		<EquipmentConstant id="650101014" valueType="U4" logicalName="PMD.ForeLineHeaterSetPointLimit" value="140" min="0" max="500" units="" defaultValue="150" eventTrigger="" />
		<EquipmentConstant id="650101015" valueType="U4" logicalName="PMD.CheckSubstrateTempTimeout" value="120" min="0" max="3600" units="" defaultValue="140" eventTrigger="" />
		<EquipmentConstant id="650101016" valueType="U4" logicalName="PMD.CheckATMTimeout" value="90" min="0" max="3000" units="s" defaultValue="120" eventTrigger="" />
		<EquipmentConstant id="650101017" valueType="U4" logicalName="PMD.OverventTime" value="2000" min="0" max="60000" units="ms" defaultValue="90" eventTrigger="" />
		<EquipmentConstant id="650101018" valueType="F8" logicalName="PMD.ChamberBasePressureThreshold" value="104000" min="0" max="140000" units="Pa" defaultValue="2000" eventTrigger="" />
		<EquipmentConstant id="650101019" valueType="F8" logicalName="PMD.ChamberBaseTemperatureThreshold" value="120" min="0" max="1000" units="℃" defaultValue="104000" eventTrigger="" />
		<EquipmentConstant id="650101020" valueType="F8" logicalName="PMD.ProcessPressureOffset" value="10" min="0" max="14" units="Pa" defaultValue="120" eventTrigger="" />
		<EquipmentConstant id="650101021" valueType="F8" logicalName="PMD.ChamberVolume" value="7500" min="0" max="10000" units="ms" defaultValue="10" eventTrigger="" />
		<EquipmentConstant id="650101022" valueType="F8" logicalName="PMD.GasTemperature" value="25" min="0" max="10000" units="ms" defaultValue="7500" eventTrigger="" />
		<EquipmentConstant id="650101023" valueType="F8" logicalName="PMD.TargetPressureInMFCVerification" value="9" min="0" max="" units="" defaultValue="25" eventTrigger="" />
		<EquipmentConstant id="650101024" valueType="F8" logicalName="PMD.GasFlowTimeInMFCVerification" value="180" min="0" max="" units="" defaultValue="9" eventTrigger="" />
		<EquipmentConstant id="650101025" valueType="U4" logicalName="PMD.PickDelayTime" value="0" min="0" max="10000" units="" defaultValue="180" eventTrigger="" />
		<EquipmentConstant id="650101026" valueType="U4" logicalName="PMD.PlaceDelayTime" value="0" min="0" max="10000" units="" defaultValue="0" eventTrigger="" />
		<EquipmentConstant id="650101027" valueType="List" logicalName="PMD.ChamberLabel" value="Strip" min="" max="" units="" defaultValue="0" eventTrigger="" />
		<EquipmentConstant id="650101028" valueType="F8" logicalName="PMD.MaxDeviationInMFCVerification" value="30" min="0" max="" units="" defaultValue="Strip" eventTrigger="" />
		<EquipmentConstant id="650101029" valueType="U4" logicalName="PMD.WallHeaterSetPointLimit" value="150" min="0" max="" units="" defaultValue="30" eventTrigger="" />
		<EquipmentConstant id="650101030" valueType="U4" logicalName="PMD.PendulumHeaterSetPointLimit" value="150" min="0" max="" units="" defaultValue="150" eventTrigger="" />
		<EquipmentConstant id="650101031" valueType="Boolean" logicalName="PMD.EnableWallHeater" value="false" min="0" max="" units="" defaultValue="150" eventTrigger="" />
		<EquipmentConstant id="650101032" valueType="Boolean" logicalName="PMD.EnableGridHeater" value="false" min="0" max="" units="" defaultValue="false" eventTrigger="" />
		<EquipmentConstant id="650101033" valueType="U4" logicalName="PMD.RecipeTolerancelgnoreTime" value="5" min="0" max="" units="" defaultValue="false" eventTrigger="" />
		<EquipmentConstant id="650101034" valueType="U4" logicalName="PMD.RecipeRunningMode" value="1" min="0" max="" units="" defaultValue="5" eventTrigger="" />
		<EquipmentConstant id="650101035" valueType="Boolean" logicalName="PMD.IsEnableRecipeExtension" value="false" min="0" max="" units="" defaultValue="1" eventTrigger="" />
		<EquipmentConstant id="650101036" valueType="U4" logicalName="PMD.ControlPressureSetPoint" value="80" min="0" max="" units="" defaultValue="false" eventTrigger="" />
		<EquipmentConstant id="650101037" valueType="U4" logicalName="PMD.ControlPressureN2FlowSetPoint" value="300" min="0" max="" units="" defaultValue="80" eventTrigger="" />
		<EquipmentConstant id="650101038" valueType="U4" logicalName="PMD.MFG" value="" min="" max="" units="" defaultValue="300" eventTrigger="" />
		<EquipmentConstant id="650101039" valueType="U4" logicalName="PMD.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101040" valueType="List" logicalName="PMD.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101041" valueType="F8" logicalName="PMD.ChamberForelinePressureThreshold" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101042" valueType="U4" logicalName="PMD.ChamberForelinePressureTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101043" valueType="Boolean" logicalName="PMD.EnableSwitch" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101044" valueType="U4" logicalName="PMD.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101045" valueType="U4" logicalName="PMD.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101046" valueType="List" logicalName="PMD.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101047" valueType="List" logicalName="PMD.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101048" valueType="F8" logicalName="PMD.PowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101049" valueType="F8" logicalName="PMD.PowerAlammTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101050" valueType="F8" logicalName="PMD.PowerwarningRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101051" valueType="F8" logicalName="PMD.PowerWarningTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101052" valueType="F8" logicalName="PMD.ReflectPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101053" valueType="F8" logicalName="PMD.ReflectPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101054" valueType="F8" logicalName="PMD.PowerRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101055" valueType="F8" logicalName="PMD.Coefficient" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101056" valueType="Boolean" logicalName="PMD.EnablePulsingFunction" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101057" valueType="Boolean" logicalName="PMD.EnableReflectPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101058" valueType="Boolean" logicalName="PMD.EnableVoltageCurrent" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101059" valueType="U4" logicalName="PMD.PowerRegulationFactor" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101060" valueType="U4" logicalName="PMD.RfPowerAlarmRange" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101061" valueType="U4" logicalName="PMD.RiPowerAlarmTime" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101062" valueType="U4" logicalName="PMD.RFTurnonTimeout" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101063" valueType="Boolean" logicalName="PMD.EnableCalibration" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101064" valueType="List" logicalName="PMD.GeneratorSerialNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101065" valueType="List" logicalName="PMD.SensorSerialNumber" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101066" valueType="F8" logicalName="PMD.CurentRFMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101067" valueType="F8" logicalName="PMD.RFCalibratedMaxPower" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101068" valueType="Boolean" logicalName="PMD.EnableMatch" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101069" valueType="U4" logicalName="PMD.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101070" valueType="U4" logicalName="PMD.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101071" valueType="List" logicalName="PMD.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101072" valueType="List" logicalName="PMD.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101073" valueType="Boolean" logicalName="PMD.MatchModeEnableC1C2Position" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101074" valueType="Boolean" logicalName="PMD.EnableC1C2StepOffset" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101075" valueType="U4" logicalName="PMD.C1C2StepOffsetValue" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101076" valueType="Boolean" logicalName="PMD.EnableMatch" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101077" valueType="U4" logicalName="PMD.MFG" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101078" valueType="U4" logicalName="PMD.CommunicationType" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101079" valueType="List" logicalName="PMD.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101080" valueType="List" logicalName="PMD.IPAddress" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101081" valueType="Boolean" logicalName="PMD.MfcGas1.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101082" valueType="List" logicalName="PMD.MfcGas1.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101083" valueType="U4" logicalName="PMD.MfcGas1.MfcN2Scale" value="" min="0" max="10000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101084" valueType="F8" logicalName="PMD.MfcGas1.MfcScaleFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101085" valueType="U4" logicalName="PMD.MfcGas1.DefaultSetPoint" value="" min="0" max="1000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101086" valueType="U4" logicalName="PMD.MfcGas1.FlowRegulationFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101087" valueType="Boolean" logicalName="PMD.MfcGas1.MfcEnableAlarm" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101088" valueType="U4" logicalName="PMD.MfcGas1.MfcAlarmRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101089" valueType="U4" logicalName="PMD.MfcGas1.MfcAlarmTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101090" valueType="U4" logicalName="PMD.MfcGas1.MfcwarningRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101091" valueType="U4" logicalName="PMD.MfcGas1.MfcWarningTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101092" valueType="U4" logicalName="PMD.MfcGas1.MFCWriteMode" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101093" valueType="Boolean" logicalName="PMD.MfcGas2.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101094" valueType="List" logicalName="PMD.MfcGas2.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101095" valueType="U4" logicalName="PMD.MfcGas2.MfcN2Scale" value="" min="0" max="10000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101096" valueType="F8" logicalName="PMD.MfcGas2.MfcScaleFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101097" valueType="U4" logicalName="PMD.MfcGas2.DefaultSetPoint" value="" min="0" max="1000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101098" valueType="U4" logicalName="PMD.MfcGas2.FlowRegulationFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101099" valueType="Boolean" logicalName="PMD.MfcGas2.MfcEnableAlarm" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101100" valueType="U4" logicalName="PMD.MfcGas2.MfcAlarmRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101101" valueType="U4" logicalName="PMD.MfcGas2.MfcAlarmTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101102" valueType="U4" logicalName="PMD.MfcGas2.MfcwarningRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101103" valueType="U4" logicalName="PMD.MfcGas2.MfcWarningTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101104" valueType="U4" logicalName="PMD.MfcGas2.MFCWriteMode" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101105" valueType="Boolean" logicalName="PMD.MfcGas3.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101106" valueType="List" logicalName="PMD.MfcGas3.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101107" valueType="U4" logicalName="PMD.MfcGas3.MfcN2Scale" value="" min="0" max="10000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101108" valueType="F8" logicalName="PMD.MfcGas3.MfcScaleFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101109" valueType="U4" logicalName="PMD.MfcGas3.DefaultSetPoint" value="" min="0" max="1000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101110" valueType="U4" logicalName="PMD.MfcGas3.FlowRegulationFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101111" valueType="Boolean" logicalName="PMD.MfcGas3.MfcEnableAlarm" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101112" valueType="U4" logicalName="PMD.MfcGas3.MfcAlarmRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101113" valueType="U4" logicalName="PMD.MfcGas3.MfcAlarmTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101114" valueType="U4" logicalName="PMD.MfcGas3.MfcwarningRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101115" valueType="U4" logicalName="PMD.MfcGas3.MfcWarningTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101116" valueType="U4" logicalName="PMD.MfcGas3.MFCWriteMode" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101117" valueType="Boolean" logicalName="PMD.MfcGas4.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101118" valueType="List" logicalName="PMD.MfcGas4.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101119" valueType="U4" logicalName="PMD.MfcGas4." value="" min="0" max="10000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101120" valueType="F8" logicalName="PMD.MfcGas4.MfcScaleFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101121" valueType="U4" logicalName="PMD.MfcGas4.DefaultSetPoint" value="" min="0" max="1000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101122" valueType="U4" logicalName="PMD.MfcGas4.FlowRegulationFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101123" valueType="Boolean" logicalName="PMD.MfcGas4.MfcEnableAlarm" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101124" valueType="U4" logicalName="PMD.MfcGas4.MfcAlarmRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101125" valueType="U4" logicalName="PMD.MfcGas4.MfcAlarmTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101126" valueType="U4" logicalName="PMD.MfcGas4.MfcwarningRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101127" valueType="U4" logicalName="PMD.MfcGas4.MfcWarningTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101128" valueType="U4" logicalName="PMD.MfcGas4.MFCWriteMode" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101129" valueType="Boolean" logicalName="PMD.MfcGas5.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101130" valueType="List" logicalName="PMD.MfcGas5.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101131" valueType="U4" logicalName="PMD.MfcGas5.MfcN2Scale" value="" min="0" max="10000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101132" valueType="F8" logicalName="PMD.MfcGas5." value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101133" valueType="U4" logicalName="PMD.MfcGas5.DefaultSetPoint" value="" min="0" max="1000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101134" valueType="U4" logicalName="PMD.MfcGas5.FlowRegulationFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101135" valueType="Boolean" logicalName="PMD.MfcGas5.MfcEnableAlarm" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101136" valueType="U4" logicalName="PMD.MfcGas5.MfcAlarmRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101137" valueType="U4" logicalName="PMD.MfcGas5.MfcAlarmTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101138" valueType="U4" logicalName="PMD.MfcGas5.MfcwarningRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101139" valueType="U4" logicalName="PMD.MfcGas5.MfcWarningTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101140" valueType="U4" logicalName="PMD.MfcGas5.MFCWriteMode" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101141" valueType="Boolean" logicalName="PMD.MfcGas6.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101142" valueType="List" logicalName="PMD.MfcGas6.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101143" valueType="U4" logicalName="PMD.MfcGas6.MfcN2Scale" value="" min="0" max="10000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101144" valueType="F8" logicalName="PMD.MfcGas6.MfcScaleFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101145" valueType="U4" logicalName="PMD.MfcGas6.DefaultSetPoint" value="" min="0" max="1000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101146" valueType="U4" logicalName="PMD.MfcGas6.FlowRegulationFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101147" valueType="Boolean" logicalName="PMD.MfcGas6.MfcEnableAlarm" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101148" valueType="U4" logicalName="PMD.MfcGas6.MfcAlarmRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101149" valueType="U4" logicalName="PMD.MfcGas6.MfcAlarmTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101150" valueType="U4" logicalName="PMD.MfcGas6.MfcwarningRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101151" valueType="U4" logicalName="PMD.MfcGas6.MfcWarningTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101152" valueType="U4" logicalName="PMD.MfcGas6.MFCWriteMode" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101153" valueType="Boolean" logicalName="PMD.MfcGas7.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101154" valueType="List" logicalName="PMD.MfcGas7.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101155" valueType="U4" logicalName="PMD.MfcGas7.MfcN2Scale" value="" min="0" max="10000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101156" valueType="F8" logicalName="PMD.MfcGas7.MfcScaleFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101157" valueType="U4" logicalName="PMD.MfcGas7.DefaultSetPoint" value="" min="0" max="1000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101158" valueType="U4" logicalName="PMD.MfcGas7.FlowRegulationFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101159" valueType="Boolean" logicalName="PMD.MfcGas7.MfcEnableAlarm" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101160" valueType="U4" logicalName="PMD.MfcGas7.MfcAlarmRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101161" valueType="U4" logicalName="PMD.MfcGas7.MfcAlarmTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101162" valueType="U4" logicalName="PMD.MfcGas7.MfcwarningRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101163" valueType="U4" logicalName="PMD.MfcGas7.MfcWarningTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101164" valueType="U4" logicalName="PMD.MfcGas7.MFCWriteMode" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101165" valueType="Boolean" logicalName="PMD.MfcGas8.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101166" valueType="List" logicalName="PMD.MfcGas8.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101167" valueType="U4" logicalName="PMD.MfcGas8.MfcN2Scale" value="" min="0" max="10000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101168" valueType="F8" logicalName="PMD.MfcGas8.MfcScaleFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101169" valueType="U4" logicalName="PMD.MfcGas8.DefaultSetPoint" value="" min="0" max="1000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101170" valueType="U4" logicalName="PMD.MfcGas8.FlowRegulationFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101171" valueType="Boolean" logicalName="PMD.MfcGas8.MfcEnableAlarm" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101172" valueType="U4" logicalName="PMD.MfcGas8.MfcAlarmRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101173" valueType="U4" logicalName="PMD.MfcGas8.MfcAlarmTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101174" valueType="U4" logicalName="PMD.MfcGas8.MfcwarningRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101175" valueType="U4" logicalName="PMD.MfcGas8.MfcWarningTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101176" valueType="U4" logicalName="PMD.MfcGas8.MFCWriteMode" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101177" valueType="Boolean" logicalName="PMD.MfcN2.Enable" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101178" valueType="List" logicalName="PMD.MfcN2.GasName" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101179" valueType="U4" logicalName="PMD.MfcN2.MfcN2Scale" value="" min="0" max="10000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101180" valueType="F8" logicalName="PMD.MfcN2.MfcScaleFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101181" valueType="U4" logicalName="PMD.MfcN2.DefaultSetPoint" value="" min="0" max="1000" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101182" valueType="U4" logicalName="PMD.MfcN2.FlowRegulationFactor" value="" min="0" max="10" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101183" valueType="Boolean" logicalName="PMD.MfcN2.MfcEnableAlarm" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101184" valueType="U4" logicalName="PMD.MfcN2.MfcAlarmRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101185" valueType="U4" logicalName="PMD.MfcN2.MfcAlarmTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101186" valueType="U4" logicalName="PMD.MfcN2.MfcwarningRange" value="" min="0" max="200" units="sccm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101187" valueType="U4" logicalName="PMD.MfcN2.MfcWarningTime" value="" min="0" max="60" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101188" valueType="U4" logicalName="PMD.MfcN2.MFCWriteMode" value="" min="0" max="1" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101189" valueType="F8" logicalName="PMD.Pump.LeakRate" value="" min="0" max="10000" units="PaPerMin" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101190" valueType="U4" logicalName="PMD.Pump.LeakCheckPumpingTime" value="" min="0" max="3000" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101191" valueType="U4" logicalName="PMD.Pump.LeakCheckHoldTime" value="" min="0" max="3000" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101192" valueType="U4" logicalName="PMD.Pump.PumpBasePressure" value="" min="0" max="5" units="Pa" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101193" valueType="F8" logicalName="PMD.Pump.LeakCheckBasePressure" value="" min="0" max="100" units="Pa" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101194" valueType="List" logicalName="PMD.Pump.LeakCheckGasLineNums" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101195" valueType="F8" logicalName="PMD.Pump.PumpTimeLimit" value="" min="0" max="3000" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101196" valueType="U4" logicalName="PMD.Pump.PumpValveDelay" value="" min="0" max="3000" units="s" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101197" valueType="U4" logicalName="PMD.Pump.PumpCrossingPressure" value="" min="120" max="200000" units="Pa" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101198" valueType="U4" logicalName="PMD.Pump.PumpopenlSOPressure" value="" min="6" max="120" units="Pa" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101199" valueType="U4" logicalName="PMD.Pump.ForelinePressure" value="" min="0" max="2000" units="Pa" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101200" valueType="U4" logicalName="PMD.Purge.PurgecycleCount" value="" min="0" max="200" units="times" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101201" valueType="U4" logicalName="PMD.Purge.PurgeVentPressure" value="" min="0" max="1300" units="Pa" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101202" valueType="U4" logicalName="PMD.Purge.PurgePumpPressure" value="" min="0" max="30" units="Pa" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101203" valueType="U4" logicalName="PMD.Purge.PurgeventTimeLimit" value="" min="0" max="3600" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101204" valueType="U4" logicalName="PMD.Purge.PurgePumpTimeLimit" value="" min="0" max="3600" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101205" valueType="U4" logicalName="PMD.Purge.PurgeVentStableTime" value="" min="0" max="600" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101206" valueType="U4" logicalName="PMD.Purge.PurgePumpTime" value="" min="0" max="7200" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101207" valueType="U4" logicalName="PMD.Purge.GasPurgeCycleCount" value="" min="0" max="200" units="times" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101208" valueType="U4" logicalName="PMD.Purge.GasPurgeFlowTime" value="" min="0" max="300" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101209" valueType="U4" logicalName="PMD.Purge.GasPurgePumpTime" value="" min="0" max="300" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101210" valueType="Boolean" logicalName="PMD.PendulumHeater.lsOn" value="" min="0" max="0" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101211" valueType="F8" logicalName="PMD.PendulumHeater.TemperatureSetPoint" value="" min="0" max="1000" units="℃" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101212" valueType="Boolean" logicalName="PMD.PendulumHeater.HeaterEnableTolerance" value="" min="0" max="0" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101213" valueType="U4" logicalName="PMD.PendulumHeater.HeaterAlarmRange" value="" min="0" max="200" units="℃" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101214" valueType="U4" logicalName="PMD.PendulumHeater.HeaterAlarmTime" value="" min="0" max="3600" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101215" valueType="U4" logicalName="PMD.PendulumHeater.HeaterWarningRange" value="" min="0" max="200" units="℃" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101216" valueType="U4" logicalName="PMD.PendulumHeater.HeaterWarningTime" value="" min="0" max="3600" units="second" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101217" valueType="List" logicalName="PMD.TurboPump.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101218" valueType="F8" logicalName="PMD.TurboPump.ChamberForelinePressureThreshold" value="" min="0" max="1300" units="Pa" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101219" valueType="U4" logicalName="PMD.TurboPump.ChamberForelinePressureTimeout" value="" min="0" max="3000" units="s" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101220" valueType="List" logicalName="PMD.PendulumValve.Port" value="" min="" max="" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101221" valueType="U4" logicalName="PMD.PendulumValve.PressureFullRange" value="" min="0" max="13000" units="Pa" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101222" valueType="U4" logicalName="PMD.PendulumValve.ForelinePressureLimit" value="" min="0" max="250" units="Pa" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101223" valueType="U4" logicalName="PMD.PendulumValve.ChamberPressureLimit" value="" min="0" max="250" units="Pa" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101224" valueType="U4" logicalName="PMD.PendulumValve.TurboPumpSpeedLimit" value="" min="0" max="3000" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101225" valueType="Boolean" logicalName="PMD.PendulumValve.NoCheck" value="" min="0" max="0" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101226" valueType="F8" logicalName="PMD.HighTemperatureHeater.LiftServoPosition1" value="" min="-600" max="600" units="mm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101227" valueType="F8" logicalName="PMD.HighTemperatureHeater.LiftServoPosition2" value="" min="-600" max="600" units="mm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101228" valueType="F8" logicalName="PMD.HighTemperatureHeater.LiftServoPosition3" value="" min="-600" max="600" units="mm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101229" valueType="F8" logicalName="PMD.HighTemperatureHeater.LiftServoPosition4" value="" min="-600" max="600" units="mm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101230" valueType="F8" logicalName="PMD.HighTemperatureHeater.LiftServoPosition5" value="" min="-600" max="600" units="mm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101231" valueType="F8" logicalName="PMD.HighTemperatureHeater.LiftServoPositionOffset" value="" min="-5" max="5" units="mm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101232" valueType="F8" logicalName="PMD.HighTemperatureHeater.OriginSearchHighSpeed" value="" min="-600" max="600" units="mm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101233" valueType="F8" logicalName="PMD.HighTemperatureHeater.OriginSearchLowspeed" value="" min="-600" max="600" units="mm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101234" valueType="F8" logicalName="PMD.HighTemperatureHeater.AbsMovespeed" value="" min="-600" max="600" units="mm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101235" valueType="F8" logicalName="PMD.HighTemperatureHeater.MaximusMoveSpeed" value="" min="-600" max="600" units="mm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101236" valueType="F8" logicalName="PMD.HighTemperatureHeater.SoftDownLimit" value="" min="-600" max="600" units="mm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101237" valueType="F8" logicalName="PMD.HighTemperatureHeater.SoftUpLimit" value="" min="-600" max="600" units="mm" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101238" valueType="F8" logicalName="PMD.HighTemperatureHeater.Temperature" value="" min="20" max="1000" units="℃" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101239" valueType="F8" logicalName="PMD.HighTemperatureHeater.Ratio" value="" min="50" max="200" units="" defaultValue="" eventTrigger="" />
		<EquipmentConstant id="650101240" valueType="Boolean" logicalName="PMD.HighTemperatureHeater.lsOn" value="" min="0" max="0" units="" defaultValue="" eventTrigger="" />
	</EquipmentConstants>
	<DataVariables>
		<DataVariable id="3007" valueType="I4" logicalName="ECChangedID" eventTrigger="" />
		<DataVariable id="3102" valueType="Ascii" logicalName="LotID" eventTrigger="" />
		<DataVariable id="3103" valueType="Ascii" logicalName="RecipeID" eventTrigger="" />
		<DataVariable id="3104" valueType="Ascii" logicalName="JobID" eventTrigger="" />
		<DataVariable id="3105" valueType="Ascii" logicalName="CarrierID" eventTrigger="" />
		<DataVariable id="3106" valueType="Ascii" logicalName="SlotMap" eventTrigger="" />
		<DataVariable id="3107" valueType="Ascii" logicalName="SequenceID" eventTrigger="" />
		<DataVariable id="3108" valueType="Ascii" logicalName="StationName" eventTrigger="" />
		<DataVariable id="3109" valueType="Ascii" logicalName="RecipeStepNumber" eventTrigger="" />
		<DataVariable id="3110" valueType="Ascii" logicalName="SlotID" eventTrigger="" />
		<DataVariable id="3113" valueType="I4" logicalName="PortID" eventTrigger="" />
		<DataVariable id="3124" valueType="I4" logicalName="ProcessedWaferCount" eventTrigger="" />
		<DataVariable id="3125" valueType="I4" logicalName="WaferProcessResult" eventTrigger="" />
		<DataVariable id="3404" valueType="Ascii" logicalName="SubstID" eventTrigger="" />
		<DataVariable id="3405" valueType="Ascii" logicalName="SubstLocID" eventTrigger="" />
		<DataVariable id="3406" valueType="I4" logicalName="SubstLocState" eventTrigger="" />
		<DataVariable id="3503" valueType="Ascii" logicalName="SmartTag" eventTrigger="" />
		<DataVariable id="10000" valueType="Ascii" logicalName="ControlJobID" eventTrigger="" />
		<DataVariable id="10001" valueType="I4" logicalName="ControlJobState" eventTrigger="" />
		<DataVariable id="10002" valueType="I4" logicalName="PortTransferState" eventTrigger="" />
	</DataVariables>
	<AlarmVariables>
		<AlarmVariable id="10101001" logicalName="ERR_LOGOFF_ERROR"             description="LOGOFF ERROR"                 alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101002" logicalName="ERR_UPDATE_PW_ERROR"          description="UPDATE PASSWORD ERROR"        alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101003" logicalName="ERR_DELETE_USER_ERROR"        description="DELETE USER ERROR"            alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101004" logicalName="ERR_UPDATE_USER_ERROR"        description="UPDATE USER ERROR"            alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101005" logicalName="ERR_WCF_OPEN_ERROR"           description="WCF OPEN ERROR"               alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101006" logicalName="ERR_ROUTINE_FAILED"           description="ROUTINE FAILED"               alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101007" logicalName="ERR_SIGNAL_TOWER_UNDEFINE"    description="SIGNAL TOWER UNDEFINE"        alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101008" logicalName="ERR_SIGNAL_TOWER_INVALID_CFG" description="SIGNAL TOWER INVALID CFG"     alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101009" logicalName="ERR_PLC_HEARTBEAT_FAIL"       description="SYSTEM HEARTBEAT FAIL"        alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101010" logicalName="ERR_DEVICE_INFO"              description="DEVICE ERROR"                 alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<!--<AlarmVariable id="10101011" logicalName="ERR_EXCEPTION"                description="EXCEPTION ERROR"              alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />-->
		<AlarmVariable id="10101012" logicalName="ERR_WAFER_MANAGER_FAILED"     description="WAFER MANAGER FAILED"         alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101013" logicalName="ERR_FSM_FAILED"               description="FSM FAILED"                   alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101014" logicalName="ERR_ROUTER"                   description="ROUTER ERROR"                 alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101015" logicalName="ERR_SEQUENCE"                 description="SEQUENCE ERROR"               alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101016" logicalName="ERR_INTERLOCK_FAIL"           description="INTERLOCK ERROR"              alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101017" logicalName="ERR_DEVICE_ENTITY"            description="DEVICE ENTITY ERROR"          alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101018" logicalName="ERR_PM_SCRUBBER_NOOK_STOPTRANSFER"   description="Scrubber Alarm,transfer stop"          alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />

		<AlarmVariable id="10101028" logicalName="ERR_EFEM_COMMON_FAILED"              description="EFEM ERROR"                   alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101029" logicalName="ERR_EFEM_ROBOT"                      description="EFEM ROBOT ALARM"             alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101030" logicalName="ERR_EFEM_VAC_SOURCE_PRESSURE_LOW"    description="EFEM VAC SOURCE PRESSURE LOW" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101031" logicalName="ERR_EFEM_IONIZER_COMPRESSED_AIR"     description="EFEM IONIZER COMPRESSED AIR"  alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101032" logicalName="ERR_EFEM_COMPRESSED_AIR_PRESSURE_LOW" description="EFEM COMPRESSED AIR PRESSURE LOW" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101033" logicalName="ERR_EFEM_FLOW_GUAGE_SENSOR"          description="EFEM FLOW GUAGE SENSOR"       alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101034" logicalName="ERR_EFEM_LEAKAGE"                    description="EFEM LEAKAGE"                 alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101035" logicalName="ERR_EFEM_IONIZER"                    description="EFEM IONIZER"                 alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101036" logicalName="ERR_EFEM_FFU"                        description="EFEM FFU"                     alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101037" logicalName="ERR_EFEM_SWITCH_TO_MAINTAIN_MODE"    description="EFEM SWITCH TO MAINTAIN MODE" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101056" logicalName="ERR_TM_ROBOT"                        description="TM ROBOT ALARM"               alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101057" logicalName="ERR_TM"                              description="TM ALARM"                     alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101058" logicalName="ERR_TM_PLC_HEARTBEAT_FAIL"                    description="TM PLC HEARTBEAT ALARM"       alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101059" logicalName="ERR_TM_ROBOT_PICKSLOTOVERRANGE"      description="TM ROBOT PICK  SLOT OVER RANGE"   alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101060" logicalName="ERR_TM_ROBOT_PLACESLOTOVERRANGE"     description="TM ROBOT PLACE SLOT OVER RANGE" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101061" logicalName="ERR_TM_ROBOT_SETINTLOCKWAF_SEN"      description="TM SET INTLOCK WAF SEN" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101062" logicalName="ERR_TM_ROBOT_SETINTLOCKRZ"           description="TM SET INTLOCK RZ" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101063" logicalName="ERR_TM_ROBOT_SETINTLOCK"             description="TM SET INTLOCK"    alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101064" logicalName="ERR_TM_ROBOT_SETIOECHO"              description="TM SET IO ECHO"    alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101065" logicalName="ERR_TM_ROBOT_SETIOSTATE"             description="TM SET IO STATE"   alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101066" logicalName="ERR_TM_PUPMCONNECT"                  description="TM PUMP CONNECT FAIL" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101067" logicalName="ERR_TM_LeakCheck"                    description="TM LEAK CHECK FAIL" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101068" logicalName="ERR_TM_LL_PressureDifference"        description="TM OPEN DOOR FAIL DUE TO TM/LL PRESSURE DIFFERENCE" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101069" logicalName="ERR_TM_PM_PressureDifference"        description="TM OPEN DOOR FAIL DUE TO TM/PM PRESSURE DIFFERENCE" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101084" logicalName="ERR_LLA_PUPMCONNECT"                 description="LLA PUMP CONNECT FAIL" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101085" logicalName="ERR_LLB_PUPMCONNECT"                 description="LLB PUMP CONNECT FAIL" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101086" logicalName="ERR_LLA_MFC1FLOWOVERRANGE"           description="LLA FLOW OVERRANGE" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101087" logicalName="ERR_LLB_MFC1FLOWOVERRANGE"           description="LLB FLOW OVERRANGE" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101088" logicalName="ERR_LLA_MFCPRESSURE"                 description="LLA MFC1 PRESSURE ALARM" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101089" logicalName="ERR_LLB_MFCPRESSURE"                 description="LLB MFC1 PRESSURE ALARM" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101090" logicalName="ERR_LLA_LeakCheck"                   description="LLA LEAK CHECK FAIL" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101091" logicalName="ERR_LLB_LeakCheck"                   description="LLB LEAK CHECK FAIL" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101092" logicalName="ERR_LLA_Vent"                        description="LLA VENT FAIL"       alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101093" logicalName="ERR_LLA_PumpDown"                    description="LLA PUMP DOWN FAIL"  alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101094" logicalName="ERR_LLB_Vent"                        description="LLB VENT FAIL"       alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101095" logicalName="ERR_LLB_PumpDown"                    description="LLB PUMP DOWN FAIL"  alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101100" logicalName="PMA_ERR_DEVICE_IO_HEATER"            description="PMA IO HEATER ALARM" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101101" logicalName="PMA_ERR_DRY_PUMP"                    description="PMA DRY PUMP ALARM" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101102" logicalName="PMA_ERR_PENDULUM_VALVE"              description="PMA PENDULUM VALVE ALARM" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101103" logicalName="PMA_ERR_ESC_HV"                      description="PMA ESC HV ALARM" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101104" logicalName="PMA_ERR_TURBO_PUMP"                  description="PMA TURBO PUMP ALARM" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101105" logicalName="PMA_ERR_RF"                          description="PMA RF ALARM" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101106" logicalName="PMA_ERR_DEVICE_CHILLER"              description="PMA CHILLER ALARM" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101107" logicalName="PMA_ERR_ENDPOINT"                    description="PMA EPD ALARM" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101108" logicalName="PMA_ERR_BACKSIDE_HE"                 description="PMA BACKSIDE HE ALARM" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101109" logicalName="PMA_ERR_PROCESS"                     description="PMA PROCESS ERROR" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101110" logicalName="PMA_ERR_IoGasValve"                  description="PMA IO GAS VALVE ALARM" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101111" logicalName="PMA_ERR_PM"                          description="PMA PM ALARM" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101112" logicalName="PMA_ERR_Sensor"                      description="PMA SENSOR ALARM" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101113" logicalName="PMA_ERR_IO_VALVE"                    description="PMA IO VALVE ALARM" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101114" logicalName="PMA_ERR_MATCH"                       description="PMA MATCH ALARM" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101115" logicalName="PMA_ERR_RFBox"                       description="PMA RFBOX ALARM" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101116" logicalName="PMA_ERR_HighTemperatureHeater"       description="PMA HIGH TEMPERATURE HEATER ALARM" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101117" logicalName="PMA_ERR_PM_TOLERANCE"                description="PMA PROCESS TOLERANCE ALARM" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101118" logicalName="PMA_ERR_PM_PLC_HEARTBEAT_FAIL"       description="PMA PLC HEARTBEAT ALARM" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101119" logicalName="PMA_ERR_RF_Connect"                  description="PMA RF CONNECT FAIL" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101120" logicalName="PMA_ERR_RF_WaterFlow"                description="PMA RF POWER FAIL DUE TO WATER FLOW"   alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101121" logicalName="PMA_ERR_RF_RFGInterlock"             description="PMA RF POWER FAIL DUE TO RF INTERLOCK" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101122" logicalName="PMA_ERR_RF_GASOFF"                   description="PMA RF AUTO CLOSE DUE TO GAS OFF"      alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101123" logicalName="PMA_ERR_PV_INTERLOCK_FORELINRPRESSURE"    description="PMA OPEN PENDULUM VALVE FAIL DUE TO FORELINE PRESSURE" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101124" logicalName="PMA_ERR_PV_INTERLOCK_TURBOPUMPNOTATSPEED" description="PMA OPEN PENDULUM VALVE FAIL DUE TO TURBO PUMP NOT AT SPEED" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101125" logicalName="PMA_ERR_PV_PARITY"             description="PMA PENDULUM VALVE ALARM PARITY" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101126" logicalName="PMA_ERR_MFC_MFC1FLOWOVERRANGE" description="PMA MFC1 FLOW OVER RANGE" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101127" logicalName="PMA_ERR_MFC_MFC2FLOWOVERRANGE" description="PMA MFC2 FLOW OVER RANGE" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101128" logicalName="PMA_ERR_MFC_MFC3FLOWOVERRANGE" description="PMA MFC3 FLOW OVER RANGE" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101129" logicalName="PMA_ERR_MFC_MFC4FLOWOVERRANGE" description="PMA MFC4 FLOW OVER RANGE" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101130" logicalName="PMA_ERR_MFC_MFC5FLOWOVERRANGE" description="PMA MFC5 FLOW OVER RANGE" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101131" logicalName="PMA_ERR_MFC_MFC6FLOWOVERRANGE" description="PMA MFC6 FLOW OVER RANGE" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101132" logicalName="PMA_ERR_MFC_MFC7FLOWOVERRANGE" description="PMA MFC7 FLOW OVER RANGE" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101133" logicalName="PMA_ERR_MFC_MFC8FLOWOVERRANGE" description="PMA MFC8 FLOW OVER RANGE" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101134" logicalName="PMA_ERR_MFC_N2FLOWOVERRANGE" description="PMA N2 FLOW OVER RANGE" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101135" logicalName="PMA_ERR_MFC1_PRESSURE" description="PMA MFC1 Pressure Alarm" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101136" logicalName="PMA_ERR_MFC2_PRESSURE" description="PMA MFC2 Pressure Alarm" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101137" logicalName="PMA_ERR_MFC3_PRESSURE" description="PMA MFC3 Pressure Alarm" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101138" logicalName="PMA_ERR_MFC4_PRESSURE" description="PMA MFC4 Pressure Alarm" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101139" logicalName="PMA_ERR_MFC5_PRESSURE" description="PMA MFC5 Pressure Alarm" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101140" logicalName="PMA_ERR_MFC6_PRESSURE" description="PMA MFC6 Pressure Alarm" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101141" logicalName="PMA_ERR_MFC7_PRESSURE" description="PMA MFC7 Pressure Alarm" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101142" logicalName="PMA_ERR_MFC8_PRESSURE" description="PMA MFC8 Pressure Alarm" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101143" logicalName="PMA_ERR_N2_PRESSURE"   description="PMA N2 Pressure Alarm" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101144" logicalName="PMA_ERR_HighTemperatureHeater_SetRatio_OverRange"           description="PMA Heater set ratio over range" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101145" logicalName="PMA_ERR_HighTemperatureHeater_SetTemperature_OverRange" description="PMA Heater set temperature over range" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101146" logicalName="PMA_ERR_HighTemperatureHeater_GoPosition1TimeOut"       description="PMA Heater Go to Position1 Timeout" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101147" logicalName="PMA_ERR_HighTemperatureHeater_GoPosition2TimeOut"       description="PMA Heater Go to Position2 Timeout" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101148" logicalName="PMA_ERR_HighTemperatureHeater_GoPosition3TimeOut"       description="PMA Heater Go to Position3 Timeout" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101149" logicalName="PMA_ERR_HighTemperatureHeater_GoPosition4TimeOut"       description="PMA Heater Go to Position4 Timeout" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101150" logicalName="PMA_ERR_HighTemperatureHeater_GoPosition5TimeOut"       description="PMA Heater Go to Position5 Timeout" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101151" logicalName="PMA_ERR_HighTemperatureHeater_TransferPosition"         description="PMA pick/place heater not transfer position" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101152" logicalName="PMA_ERR_HighTemperatureHeater_LiftDriverAlarm"          description="PMA plc heater driver ALARM" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101153" logicalName="PMA_ERR_HighTemperatureHeater_LiftPosiModuleAlarm"      description="PMA heater lift POSITION ALARM" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101154" logicalName="PMA_ERR_HighTemperatureHeater_LiftORGAlarm"             description="PMA heater lift ORIGIN ALARM" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101155" logicalName="PMA_ERR_HighTemperatureHeater_GoOriginTimeOut"          description="PMA Heater Go to Origin Timeout" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101156" logicalName="PMA_ERR_LeakCheck"           description="PMA LEAK CHECK FAIL"       alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101157" logicalName="PMA_ERR_Vent"                description="PMA VENT FAIL" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101158" logicalName="PMA_ERR_PumpDown"            description="PMA PUMP DOWN FAIL" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101159" logicalName="PMA_ERR_SCRUBBER_ALARM"      description="PMA SCRUBBER ALARM" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />		
		<AlarmVariable id="10101160" logicalName="PMA_ERR_ROUTINE_FAILED"      description="PMA ROUTINE FAIL" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101161" logicalName="PMA_ERR_PM_PROCESSNOWAFER"   description="PMA PROCESS NO WAFER" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101162" logicalName="PMA_ERR_PM_CLEANWITHWAFER"   description="PMA CLEAN WITH WAFER" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101163" logicalName="PMA_ERR_DEVICE_INFO"         description="PMA DEVICE ALARM"                 alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101164" logicalName="PMA_WARNING_SENSOR_CDAPRESSURE"  description="PMA Sensor CDA Pressure Abnormal"                 alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101165" logicalName="PMA_WARNING_SENSOR_WATERFLOW"    description="PMA Sensor Water Flow Abnormal"                 alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101166" logicalName="PMA_WARNING_SENSOR_WATERLEAK"    description="PMA Sensor Water Leak"                 alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101167" logicalName="PMA_WARNING_SENSOR_N2PRESSURE"    description="PMA N2 Pressure Abnormal"                 alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101168" logicalName="PMA_WARNING_SENSOR_GASBOXDOOR"    description="PMA Gas Box Door SW Abnormal"                 alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101169" logicalName="PMA_WARNING_SENSOR_GASBOXPRESSURE"    description="PMA Gas Box Pressure Abnormal"                 alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101170" logicalName="PMA_WARNING_SENSOR_N2PURGEPRESSURE"    description="PMA N2 Purge Pressure Abnormal"                 alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101171" logicalName="PMA_ERR_SENSOR_WATERFLOW_STOP_CURRENTPROCESS"    description="PMA Water Flow Abnormal,Stop Current Process"                 alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101172" logicalName="PMA_ERR_SENSOR_WATERFLOW_STOP_NEXTPROCESS"       description="PMA Water Flow Abnormal,Stop Next Process"                 alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />





		<AlarmVariable id="10101176" logicalName="PMB_ERR_DEVICE_IO_HEATER"    description="PMB IO HEATER ALARM" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101177" logicalName="PMB_ERR_DRY_PUMP"            description="PMB DRY PUMP ALARM" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101178" logicalName="PMB_ERR_PENDULUM_VALVE"      description="PMB PENDULUM VALVE ALARM" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101179" logicalName="PMB_ERR_ESC_HV"              description="PMB ESC HV ALARM" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101180" logicalName="PMB_ERR_TURBO_PUMP"          description="PMB TURBO PUMP ALARM" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101181" logicalName="PMB_ERR_RF"                  description="PMB RF ALARM" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101182" logicalName="PMB_ERR_DEVICE_CHILLER"      description="PMB CHILLER ALARM" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101183" logicalName="PMB_ERR_ENDPOINT"            description="PMB EPD ALARM" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101184" logicalName="PMB_ERR_BACKSIDE_HE"         description="PMB BACKSIDE HE ALARM" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101185" logicalName="PMB_ERR_PROCESS"             description="PMB PROCESS ERROR" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101186" logicalName="PMB_ERR_IoGasValve"          description="PMB IO GAS VALVE ALARM" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101187" logicalName="PMB_ERR_PM"                  description="PMB PM ALARM" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101188" logicalName="PMB_ERR_Sensor"              description="PMB SENSOR ALARM" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101189" logicalName="PMB_ERR_IO_VALVE"            description="PMB IO VALVE ALARM" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101190" logicalName="PMB_ERR_MATCH"               description="PMB MATCH ALARM" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101191" logicalName="PMB_ERR_RFBox"               description="PMB RFBOX ALARM" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101192" logicalName="PMB_ERR_HighTemperatureHeater" description="PMB HIGH TEMPERATURE HEATER ALARM" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101193" logicalName="PMB_ERR_PM_TOLERANCE"        description="PMB PROCESS TOLERANCE ALARM" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101194" logicalName="PMB_ERR_PM_PLC_HEARTBEAT_FAIL"  description="PMB PLC HEARTBEAT ALARM" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101195" logicalName="PMB_ERR_RF_Connect"          description="PMB RF CONNECT FAIL" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101196" logicalName="PMB_ERR_RF_WaterFlow"        description="PMB RF POWER FAIL DUE TO WATER FLOW" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101197" logicalName="PMB_ERR_RF_RFGInterlock"     description="PMB RF POWER FAIL DUE TO RF INTERLOCK" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101198" logicalName="PMB_ERR_RF_GASOFF"           description="PMB RF AUTO CLOSE DUE TO GAS OFF" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101199" logicalName="PMB_ERR_PV_INTERLOCK_FORELINRPRESSURE"    description="PMB OPEN PENDULUM VALVE FAIL DUE TO FORELINE PRESSURE" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101200" logicalName="PMB_ERR_PV_INTERLOCK_TURBOPUMPNOTATSPEED" description="PMB OPEN PENDULUM VALVE FAIL DUE TO TURBO PUMP NOT AT SPEED" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101201" logicalName="PMB_ERR_PV_PARITY"                        description="PMB PENDULUM VALVE ALARM PARITY" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101202" logicalName="PMB_ERR_MFC_MFC1FLOWOVERRANGE" description="PMB MFC1 FLOW OVER RANGE" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101203" logicalName="PMB_ERR_MFC_MFC2FLOWOVERRANGE" description="PMB MFC1 FLOW OVER RANGE" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101204" logicalName="PMB_ERR_MFC_MFC3FLOWOVERRANGE" description="PMB MFC1 FLOW OVER RANGE" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101205" logicalName="PMB_ERR_MFC_MFC4FLOWOVERRANGE" description="PMB MFC4 FLOW OVER RANGE" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101206" logicalName="PMB_ERR_MFC_MFC5FLOWOVERRANGE" description="PMB MFC5 FLOW OVER RANGE" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101207" logicalName="PMB_ERR_MFC_MFC6FLOWOVERRANGE" description="PMB MFC6 FLOW OVER RANGE" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101208" logicalName="PMB_ERR_MFC_MFC7FLOWOVERRANGE" description="PMB MFC7 FLOW OVER RANGE" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101209" logicalName="PMB_ERR_MFC_MFC8FLOWOVERRANGE" description="PMB MFC8 FLOW OVER RANGE" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101210" logicalName="PMB_ERR_MFC_N2FLOWOVERRANGE"   description="PMB N2 FLOW OVER RANGE" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101211" logicalName="PMB_ERR_MFC1_PRESSURE" description="PMB MFC1 Pressure Alarm" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101212" logicalName="PMB_ERR_MFC2_PRESSURE" description="PMB MFC2 Pressure Alarm" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101213" logicalName="PMB_ERR_MFC3_PRESSURE" description="PMB MFC3 Pressure Alarm" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101214" logicalName="PMB_ERR_MFC4_PRESSURE" description="PMB MFC4 Pressure Alarm" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101215" logicalName="PMB_ERR_MFC5_PRESSURE" description="PMB MFC5 Pressure Alarm" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101216" logicalName="PMB_ERR_MFC6_PRESSURE" description="PMB MFC6 Pressure Alarm" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101217" logicalName="PMB_ERR_MFC7_PRESSURE" description="PMB MFC7 Pressure Alarm" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101218" logicalName="PMB_ERR_MFC8_PRESSURE" description="PMB MFC8 Pressure Alarm" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101219" logicalName="PMB_ERR_N2_PRESSURE"   description="PMB N2 Pressure Alarm"   alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101220" logicalName="PMB_ERR_HighTemperatureHeater_SetRatio_OverRange"       description="PMB Heater set ratio over range"       alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101221" logicalName="PMB_ERR_HighTemperatureHeater_SetTemperature_OverRange" description="PMB Heater set temperature over range" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101222" logicalName="PMB_ERR_HighTemperatureHeater_GoPosition1TimeOut"  description="PMB Heater Go to Position1 Timeout" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101223" logicalName="PMB_ERR_HighTemperatureHeater_GoPosition2TimeOut"  description="PMB Heater Go to Position2 Timeout" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101224" logicalName="PMB_ERR_HighTemperatureHeater_GoPosition3TimeOut"  description="PMB Heater Go to Position3 Timeout" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101225" logicalName="PMB_ERR_HighTemperatureHeater_GoPosition4TimeOut"  description="PMB Heater Go to Position4 Timeout" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101226" logicalName="PMB_ERR_HighTemperatureHeater_GoPosition5TimeOut"  description="PMB Heater Go to Position5 Timeout" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101227" logicalName="PMB_ERR_HighTemperatureHeater_TransferPosition"    description="PMB pick/place heater not transfer position" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101228" logicalName="PMB_ERR_HighTemperatureHeater_LiftDriverAlarm"     description="PMB plc heater driver ALARM" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101229" logicalName="PMB_ERR_HighTemperatureHeater_LiftPosiModuleAlarm" description="PMB heater lift POSITION ALARM" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101230" logicalName="PMB_ERR_HighTemperatureHeater_LiftORGAlarm"        description="PMB heater lift ORIGIN ALARM" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101231" logicalName="PMB_ERR_HighTemperatureHeater_GoOriginTimeOut"     description="PMB Heater Go to Origin Timeout" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101232" logicalName="PMB_ERR_LeakCheck"   description="PMB LEAK CHECK FAIL" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101233" logicalName="PMB_ERR_Vent"        description="PMB VENT FAIL" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101234" logicalName="PMB_ERR_PumpDown"    description="PMB PUMP DOWN FAIL" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101235" logicalName="PMB_ERR_SCRUBBER_ALARM"      description="PMB SCRUBBER ALARM" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101236" logicalName="PMB_ERR_ROUTINE_FAILED"      description="PMB ROUTINE FAIL" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101237" logicalName="PMB_ERR_PM_PROCESSNOWAFER"   description="PMB PROCESS NO WAFER" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101238" logicalName="PMB_ERR_PM_CLEANWITHWAFER"   description="PMB CLEAN WITH WAFER" alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101239" logicalName="PMB_ERR_DEVICE_INFO"         description="PMB DEVICE ALAEM"                 alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101240" logicalName="PMB_WARNING_SENSOR_CDAPRESSURE"  description="PMB Sensor CDA Pressure Abnormal"                 alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101241" logicalName="PMB_WARNING_SENSOR_WATERFLOW"    description="PMB Sensor Water Flow Abnormal"                 alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101242" logicalName="PMB_WARNING_SENSOR_WATERLEAK"    description="PMB Sensor Water Leak"                 alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101243" logicalName="PMB_WARNING_SENSOR_N2PRESSURE"    description="PMB N2 Pressure Abnormal"                 alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101244" logicalName="PMB_WARNING_SENSOR_GASBOXDOOR"    description="PMB Gas Box Door SW Abnormal"                 alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101245" logicalName="PMB_WARNING_SENSOR_GASBOXPRESSURE"    description="PMB Gas Box Pressure Abnormal"                 alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
		<AlarmVariable id="10101246" logicalName="PMB_WARNING_SENSOR_N2PURGEPRESSURE"    description="PMB N2 Purge Pressure Abnormal"                 alarmLevel="EquipmentStatusWarning" enabled="true" eventSet="0" eventClear="0" />
	</AlarmVariables>
	<Reports>
		<Report id="1" logicalName="HostDefinedReport_1">
			<Variables>
				<ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
				<ReportVariable id="4" variableType="StatusVariable" logicalName="ControlState" />
			</Variables>
		</Report>
		<Report id="10" logicalName="HostDefinedReport_10">
			<Variables>
				<ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
				<ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
			</Variables>
		</Report>
		<Report id="11" logicalName="HostDefinedReport_11">
			<Variables>
				<ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
				<ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
				<ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
			</Variables>
		</Report>
		<Report id="12" logicalName="HostDefinedReport_12">
			<Variables>
				<ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
				<ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
				<ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
			</Variables>
		</Report>
		<Report id="13" logicalName="HostDefinedReport_13">
			<Variables>
				<ReportVariable id="3106" variableType="DataVariable" logicalName="SlotMap" />
				<ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
				<ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
			</Variables>
		</Report>
		<Report id="14" logicalName="HostDefinedReport_14">
			<Variables>
				<ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
				<ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
			</Variables>
		</Report>
		<Report id="15" logicalName="HostDefinedReport_15">
			<Variables>
				<ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
				<ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
			</Variables>
		</Report>
		<Report id="16" logicalName="HostDefinedReport_16">
			<Variables>
				<ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
				<ReportVariable id="3104" variableType="DataVariable" logicalName="JobID" />
				<ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
				<ReportVariable id="3107" variableType="DataVariable" logicalName="SequenceID" />
			</Variables>
		</Report>
		<Report id="17" logicalName="HostDefinedReport_17">
			<Variables>
				<ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
				<ReportVariable id="3104" variableType="DataVariable" logicalName="JobID" />
				<ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
				<ReportVariable id="3107" variableType="DataVariable" logicalName="SequenceID" />
			</Variables>
		</Report>
		<Report id="18" logicalName="HostDefinedReport_18">
			<Variables>
				<ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
				<ReportVariable id="3104" variableType="DataVariable" logicalName="JobID" />
				<ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
				<ReportVariable id="3107" variableType="DataVariable" logicalName="SequenceID" />
			</Variables>
		</Report>
		<Report id="19" logicalName="HostDefinedReport_19">
			<Variables>
				<ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
				<ReportVariable id="3104" variableType="DataVariable" logicalName="JobID" />
				<ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
				<ReportVariable id="3107" variableType="DataVariable" logicalName="SequenceID" />
			</Variables>
		</Report>
		<Report id="2" logicalName="HostDefinedReport_2">
			<Variables>
				<ReportVariable id="3007" variableType="DataVariable" logicalName="ECChangedID" />
			</Variables>
		</Report>
		<Report id="20" logicalName="HostDefinedReport_20">
			<Variables>
				<ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
				<ReportVariable id="3104" variableType="DataVariable" logicalName="JobID" />
				<ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
				<ReportVariable id="3107" variableType="DataVariable" logicalName="SequenceID" />
			</Variables>
		</Report>
		<Report id="21" logicalName="HostDefinedReport_21">
			<Variables>
				<ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
				<ReportVariable id="3104" variableType="DataVariable" logicalName="JobID" />
				<ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
				<ReportVariable id="3107" variableType="DataVariable" logicalName="SequenceID" />
				<ReportVariable id="3124" variableType="DataVariable" logicalName="ProcessedWaferCount" />
			</Variables>
		</Report>
		<Report id="22" logicalName="HostDefinedReport_22">
			<Variables>
				<ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
				<ReportVariable id="3104" variableType="DataVariable" logicalName="JobID" />
				<ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
				<ReportVariable id="3107" variableType="DataVariable" logicalName="SequenceID" />
			</Variables>
		</Report>
		<Report id="23" logicalName="HostDefinedReport_23">
			<Variables>
				<ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
				<ReportVariable id="3104" variableType="DataVariable" logicalName="JobID" />
				<ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
				<ReportVariable id="3107" variableType="DataVariable" logicalName="SequenceID" />
			</Variables>
		</Report>
		<Report id="24" logicalName="HostDefinedReport_24">
			<Variables>
				<ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
				<ReportVariable id="3104" variableType="DataVariable" logicalName="JobID" />
				<ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
				<ReportVariable id="3107" variableType="DataVariable" logicalName="SequenceID" />
			</Variables>
		</Report>
		<Report id="25" logicalName="HostDefinedReport_25">
			<Variables>
				<ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
				<ReportVariable id="3104" variableType="DataVariable" logicalName="JobID" />
				<ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
				<ReportVariable id="3107" variableType="DataVariable" logicalName="SequenceID" />
				<ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
			</Variables>
		</Report>
		<Report id="26" logicalName="HostDefinedReport_26">
			<Variables>
				<ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
				<ReportVariable id="3104" variableType="DataVariable" logicalName="JobID" />
				<ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
				<ReportVariable id="3107" variableType="DataVariable" logicalName="SequenceID" />
				<ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
				<ReportVariable id="3125" variableType="DataVariable" logicalName="WaferProcessResult" />
			</Variables>
		</Report>
		<Report id="29" logicalName="HostDefinedReport_29">
			<Variables>
				<ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
				<ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
				<ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
				<ReportVariable id="3109" variableType="DataVariable" logicalName="RecipeStepNumber" />
				<ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
			</Variables>
		</Report>
		<Report id="3" logicalName="HostDefinedReport_3">
			<Variables>
				<ReportVariable id="3404" variableType="DataVariable" logicalName="SubstID" />
				<ReportVariable id="3405" variableType="DataVariable" logicalName="SubstLocID" />
				<ReportVariable id="3406" variableType="DataVariable" logicalName="SubstLocState" />
				<ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
				<ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
			</Variables>
		</Report>
		<Report id="30" logicalName="HostDefinedReport_30">
			<Variables>
				<ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
				<ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
				<ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
				<ReportVariable id="3109" variableType="DataVariable" logicalName="RecipeStepNumber" />
				<ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
			</Variables>
		</Report>
		<Report id="31" logicalName="HostDefinedReport_31">
			<Variables>
				<ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
				<ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
				<ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
				<ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
			</Variables>
		</Report>
		<Report id="32" logicalName="HostDefinedReport_32">
			<Variables>
				<ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
				<ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
				<ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
				<ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
				<ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
			</Variables>
		</Report>
		<Report id="33" logicalName="HostDefinedReport_33">
			<Variables>
				<ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
				<ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
				<ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
				<ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
				<ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
			</Variables>
		</Report>
		<Report id="34" logicalName="HostDefinedReport_34">
			<Variables>
				<ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
				<ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
				<ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
				<ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
				<ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
			</Variables>
		</Report>
		<Report id="35" logicalName="HostDefinedReport_35">
			<Variables>
				<ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
				<ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
				<ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
				<ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
				<ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
			</Variables>
		</Report>
		<Report id="36" logicalName="HostDefinedReport_36">
			<Variables>
				<ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
				<ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
				<ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
				<ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
				<ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
			</Variables>
		</Report>
		<Report id="37" logicalName="HostDefinedReport_37">
			<Variables>
				<ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
				<ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
				<ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
				<ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
				<ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
			</Variables>
		</Report>
		<Report id="38" logicalName="HostDefinedReport_38">
			<Variables>
				<ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
				<ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
				<ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
				<ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
				<ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
			</Variables>
		</Report>
		<Report id="39" logicalName="HostDefinedReport_39">
			<Variables>
				<ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
				<ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
				<ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
				<ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
				<ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
			</Variables>
		</Report>
		<Report id="4" logicalName="HostDefinedReport_4">
			<Variables>
				<ReportVariable id="3404" variableType="DataVariable" logicalName="SubstID" />
				<ReportVariable id="3405" variableType="DataVariable" logicalName="SubstLocID" />
				<ReportVariable id="3406" variableType="DataVariable" logicalName="SubstLocState" />
				<ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
				<ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
			</Variables>
		</Report>
		<Report id="40" logicalName="HostDefinedReport_40">
			<Variables>
				<ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
				<ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
				<ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
				<ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
				<ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
			</Variables>
		</Report>
		<Report id="41" logicalName="HostDefinedReport_41">
			<Variables>
				<ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
				<ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
				<ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
				<ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
				<ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
			</Variables>
		</Report>
		<Report id="42" logicalName="HostDefinedReport_42">
			<Variables>
				<ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
				<ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
				<ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
				<ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
				<ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
			</Variables>
		</Report>
		<Report id="43" logicalName="HostDefinedReport_43">
			<Variables>
				<ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
				<ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
				<ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
				<ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
				<ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
			</Variables>
		</Report>
		<Report id="44" logicalName="HostDefinedReport_44">
			<Variables>
				<ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
				<ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
				<ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
				<ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
				<ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
			</Variables>
		</Report>
		<Report id="45" logicalName="HostDefinedReport_45">
			<Variables>
				<ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
				<ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
				<ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
				<ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
				<ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
			</Variables>
		</Report>
		<Report id="46" logicalName="HostDefinedReport_46">
			<Variables>
				<ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
				<ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
				<ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
				<ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
				<ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
			</Variables>
		</Report>
		<Report id="47" logicalName="HostDefinedReport_47">
			<Variables>
				<ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
				<ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
				<ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
				<ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
				<ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
			</Variables>
		</Report>
		<Report id="48" logicalName="HostDefinedReport_48">
			<Variables>
				<ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
				<ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
				<ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
				<ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
				<ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
			</Variables>
		</Report>
		<Report id="49" logicalName="HostDefinedReport_49">
			<Variables>
				<ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
				<ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
				<ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
				<ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
				<ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
			</Variables>
		</Report>
		<Report id="5" logicalName="HostDefinedReport_5">
			<Variables>
				<ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
				<ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
			</Variables>
		</Report>
		<Report id="50" logicalName="HostDefinedReport_50">
			<Variables>
				<ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
				<ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
				<ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
				<ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
				<ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
			</Variables>
		</Report>
		<Report id="51" logicalName="HostDefinedReport_51">
			<Variables>
				<ReportVariable id="3103" variableType="DataVariable" logicalName="RecipeID" />
				<ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
				<ReportVariable id="3102" variableType="DataVariable" logicalName="LotID" />
				<ReportVariable id="3110" variableType="DataVariable" logicalName="SlotID" />
				<ReportVariable id="3108" variableType="DataVariable" logicalName="StationName" />
			</Variables>
		</Report>
		<Report id="6" logicalName="HostDefinedReport_6">
			<Variables>
				<ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
				<ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
				<ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
			</Variables>
		</Report>
		<Report id="7" logicalName="HostDefinedReport_7">
			<Variables>
				<ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
				<ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
				<ReportVariable id="3503" variableType="DataVariable" logicalName="SmartTag" />
				<ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
			</Variables>
		</Report>
		<Report id="8" logicalName="HostDefinedReport_8">
			<Variables>
				<ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
				<ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
			</Variables>
		</Report>
		<Report id="9" logicalName="HostDefinedReport_9">
			<Variables>
				<ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
				<ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
				<ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
			</Variables>
		</Report>
		<Report id="10000" logicalName="Define_10000">
			<Variables>
				<ReportVariable id="10000" variableType="DataVariable" logicalName="ControlJobID" />
				<ReportVariable id="10001" variableType="DataVariable" logicalName="ControlJobState" />
			</Variables>
		</Report>
		<Report id="10001" logicalName="Define_10001">
			<Variables>
				<ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
				<ReportVariable id="10002" variableType="DataVariable" logicalName="PortTransferState" />
			</Variables>
		</Report>
		<Report id="10002" logicalName="Define_10002">
			<Variables>
				<ReportVariable id="3113" variableType="DataVariable" logicalName="PortID" />
				<ReportVariable id="10002" variableType="DataVariable" logicalName="PortTransferState" />
				<ReportVariable id="3105" variableType="DataVariable" logicalName="CarrierID" />
			</Variables>
		</Report>
	</Reports>
	<CollectionEvents>
		<CollectionEvent id="1" logicalName="EquipmentOFFLINE" description="" enabled="true">
			<Reports>
				<int>1</int>
			</Reports>
		</CollectionEvent>
		<CollectionEvent id="2" logicalName="ControlStateLOCAL" description="" enabled="true">
			<Reports>
				<int>1</int>
			</Reports>
		</CollectionEvent>
		<CollectionEvent id="3" logicalName="ControlStateREMOTE" description="" enabled="true">
			<Reports>
				<int>1</int>
			</Reports>
		</CollectionEvent>
		<CollectionEvent id="8" logicalName="EquipmentConstantChanged" description="" enabled="true">
			<Reports>
				<int>2</int>
			</Reports>
		</CollectionEvent>
		<CollectionEvent id="160" logicalName="SpoolingActivated" description="" enabled="true">
			<Reports />
		</CollectionEvent>
		<CollectionEvent id="161" logicalName="SpoolingDeactivated" description="" enabled="true">
			<Reports />
		</CollectionEvent>
		<CollectionEvent id="162" logicalName="SpoolingFailed" description="" enabled="true">
			<Reports />
		</CollectionEvent>
		<CollectionEvent id="503" logicalName="WAFER_LEFT_POSITION" description="" enabled="true">
			<Reports>
				<int>3</int>
			</Reports>
		</CollectionEvent>
		<CollectionEvent id="504" logicalName="WAFER_ARRIVE_POSITION" description="" enabled="true">
			<Reports>
				<int>4</int>
			</Reports>
		</CollectionEvent>
		<CollectionEvent id="1000" logicalName="CARRIER_ARRIVED" description="" enabled="true">
			<Reports>
				<int>5</int>
			</Reports>
		</CollectionEvent>
		<CollectionEvent id="1001" logicalName="CARRIER_REMOVED" description="" enabled="true">
			<Reports>
				<int>6</int>
			</Reports>
		</CollectionEvent>
		<CollectionEvent id="1002" logicalName="CARRIER_ID_READ" description="" enabled="true">
			<Reports>
				<int>7</int>
			</Reports>
		</CollectionEvent>
		<CollectionEvent id="1003" logicalName="CARRIER_ID_READ_FAILED" description="" enabled="true">
			<Reports>
				<int>8</int>
			</Reports>
		</CollectionEvent>
		<CollectionEvent id="1004" logicalName="CARRIER_ID_WRITE" description="" enabled="true">
			<Reports>
				<int>9</int>
			</Reports>
		</CollectionEvent>
		<CollectionEvent id="1005" logicalName="CARRIER_ID_WRITE_FAILED" description="" enabled="true">
			<Reports>
				<int>10</int>
			</Reports>
		</CollectionEvent>
		<CollectionEvent id="1006" logicalName="CARRIER_LOADED" description="" enabled="true">
			<Reports>
				<int>11</int>
			</Reports>
		</CollectionEvent>
		<CollectionEvent id="1007" logicalName="CARRIER_UNLOADED" description="" enabled="true">
			<Reports>
				<int>12</int>
			</Reports>
		</CollectionEvent>
		<CollectionEvent id="1008" logicalName="SLOT_MAP_AVAILABLE" description="" enabled="true">
			<Reports>
				<int>13</int>
			</Reports>
		</CollectionEvent>
		<CollectionEvent id="1012" logicalName="PortClamped" description="" enabled="true">
			<Reports>
				<int>14</int>
			</Reports>
		</CollectionEvent>
		<CollectionEvent id="1013" logicalName="PortUnClamped" description="" enabled="true">
			<Reports>
				<int>15</int>
			</Reports>
		</CollectionEvent>
		<CollectionEvent id="1022" logicalName="PortJobStarted" description="" enabled="true">
			<Reports>
				<int>16</int>
			</Reports>
		</CollectionEvent>
		<CollectionEvent id="1023" logicalName="PortJobStopped" description="" enabled="true">
			<Reports>
				<int>17</int>
			</Reports>
		</CollectionEvent>
		<CollectionEvent id="1024" logicalName="PortJobPaused" description="" enabled="true">
			<Reports>
				<int>18</int>
			</Reports>
		</CollectionEvent>
		<CollectionEvent id="1025" logicalName="PortJobResumed" description="" enabled="true">
			<Reports>
				<int>19</int>
			</Reports>
		</CollectionEvent>
		<CollectionEvent id="1026" logicalName="PortJobAborted" description="" enabled="true">
			<Reports>
				<int>20</int>
			</Reports>
		</CollectionEvent>
		<CollectionEvent id="1027" logicalName="PortJobFinished" description="" enabled="true">
			<Reports>
				<int>21</int>
			</Reports>
		</CollectionEvent>
		<CollectionEvent id="1028" logicalName="PortJobFailed" description="" enabled="true">
			<Reports>
				<int>22</int>
			</Reports>
		</CollectionEvent>
		<CollectionEvent id="1030" logicalName="PortPPSelected" description="" enabled="true">
			<Reports>
				<int>23</int>
			</Reports>
		</CollectionEvent>
		<CollectionEvent id="1031" logicalName="PortPPSelectFailed" description="" enabled="true">
			<Reports>
				<int>24</int>
			</Reports>
		</CollectionEvent>
		<CollectionEvent id="1032" logicalName="PortJobWaferStart" description="" enabled="true">
			<Reports>
				<int>25</int>
			</Reports>
		</CollectionEvent>
		<CollectionEvent id="1033" logicalName="PortJobWaferEnd" description="" enabled="true">
			<Reports>
				<int>26</int>
			</Reports>
		</CollectionEvent>
		<CollectionEvent id="3001" logicalName="PMARecipeStart" description="" enabled="true">
			<Reports>
				<int>33</int>
			</Reports>
		</CollectionEvent>
		<CollectionEvent id="3002" logicalName="PMARecipeComplete" description="" enabled="true">
			<Reports>
				<int>34</int>
			</Reports>
		</CollectionEvent>
		<CollectionEvent id="3003" logicalName="PMARecipeStepStart" description="" enabled="true">
			<Reports>
				<int>35</int>
			</Reports>
		</CollectionEvent>
		<CollectionEvent id="3004" logicalName="PMARecipeStepEnd" description="" enabled="true">
			<Reports>
				<int>36</int>
			</Reports>
		</CollectionEvent>
		<CollectionEvent id="3005" logicalName="PMARecipeFailed" description="" enabled="true">
			<Reports>
				<int>37</int>
			</Reports>
		</CollectionEvent>
		<CollectionEvent id="3011" logicalName="PMBRecipeStart" description="" enabled="true">
			<Reports>
				<int>38</int>
			</Reports>
		</CollectionEvent>
		<CollectionEvent id="3012" logicalName="PMBRecipeComplete" description="" enabled="true">
			<Reports>
				<int>39</int>
			</Reports>
		</CollectionEvent>
		<CollectionEvent id="3013" logicalName="PMBRecipeStepStart" description="" enabled="true">
			<Reports>
				<int>40</int>
			</Reports>
		</CollectionEvent>
		<CollectionEvent id="3014" logicalName="PMBRecipeStepEnd" description="" enabled="true">
			<Reports>
				<int>41</int>
			</Reports>
		</CollectionEvent>
		<CollectionEvent id="3015" logicalName="PMBRecipeFailed" description="" enabled="true">
			<Reports>
				<int>42</int>
			</Reports>
		</CollectionEvent>
		<CollectionEvent id="3021" logicalName="PMCRecipeStart" description="" enabled="true">
			<Reports>
				<int>43</int>
			</Reports>
		</CollectionEvent>
		<CollectionEvent id="3022" logicalName="PMCRecipeComplete" description="" enabled="true">
			<Reports>
				<int>44</int>
			</Reports>
		</CollectionEvent>
		<CollectionEvent id="3023" logicalName="PMCRecipeStepStart" description="" enabled="true">
			<Reports>
				<int>45</int>
			</Reports>
		</CollectionEvent>
		<CollectionEvent id="3024" logicalName="PMCRecipeStepEnd" description="" enabled="true">
			<Reports>
				<int>46</int>
			</Reports>
		</CollectionEvent>
		<CollectionEvent id="3025" logicalName="PMCRecipeFailed" description="" enabled="true">
			<Reports>
				<int>47</int>
			</Reports>
		</CollectionEvent>
		<CollectionEvent id="3031" logicalName="PMDRecipeStart" description="" enabled="true">
			<Reports>
				<int>48</int>
			</Reports>
		</CollectionEvent>
		<CollectionEvent id="3032" logicalName="PMDRecipeComplete" description="" enabled="true">
			<Reports>
				<int>49</int>
			</Reports>
		</CollectionEvent>
		<CollectionEvent id="3033" logicalName="PMDRecipeStepStart" description="" enabled="true">
			<Reports>
				<int>50</int>
			</Reports>
		</CollectionEvent>
		<CollectionEvent id="3034" logicalName="PMDRecipeStepEnd" description="" enabled="true">
			<Reports>
				<int>51</int>
			</Reports>
		</CollectionEvent>
		<CollectionEvent id="3035" logicalName="PMDRecipeFailed" description="" enabled="true">
			<Reports>
				<int>32</int>
			</Reports>
		</CollectionEvent>
	</CollectionEvents>
</EquipmentVariables>