SimulatorSystem.cs 129 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.IOCore;
  3. using Aitex.Core.RT.Log;
  4. using Aitex.Core.Util;
  5. using MECF.Framework.Common.Equipment;
  6. using MECF.Framework.Simulator.Core.Driver;
  7. using System;
  8. using System.Collections.Generic;
  9. using Venus_Simulator.Devices;
  10. using System.Threading;
  11. using Venus_Core;
  12. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
  13. using System.Diagnostics.Eventing.Reader;
  14. namespace Venus_Simulator.Instances
  15. {
  16. public class SimulatorSystem : Singleton<SimulatorSystem>
  17. {
  18. private PeriodicJob _thread;
  19. private Random _rd = new Random();
  20. private RD_TRIG _trigATM = new RD_TRIG();
  21. private RD_TRIG _trigVAC = new RD_TRIG();
  22. private R_TRIG _trigLLExtend = new R_TRIG();
  23. private R_TRIG _trigLLRetract = new R_TRIG();
  24. private static int count = 0;
  25. private readonly float ATM_THRESHOLD = 750000;
  26. private readonly float ATM_PRESSURE = 760000;
  27. private readonly float ATM_LoadLock_PRESSURE = 760000;
  28. private readonly uint VAC_SW_PRESSURE = 9500;
  29. private readonly uint PROCESS_GAUGE = 10000;
  30. private Dictionary<ModuleName, DeviceSimulator> _MockDevices = new Dictionary<ModuleName, DeviceSimulator>();
  31. private Dictionary<ModuleName, JetChamber> jetChambers = new Dictionary<ModuleName, JetChamber>();
  32. public SimulatorSystem()
  33. {
  34. //_MockDevices.Add(ModuleName.PMB, new SkyPumpMock());
  35. //_MockDevices.Add(ModuleName.PMB, new AdTecGeneratorMock());
  36. //_MockDevices.Add(ModuleName.PMB, new AdTecMatchMock());
  37. // TODO
  38. jetChambers.Add(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber);
  39. jetChambers.Add(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber);
  40. jetChambers.Add(ModuleName.PMC, SimulatorJetChamber.CurrentPMCChamber);
  41. jetChambers.Add(ModuleName.PMD, SimulatorJetChamber.CurrentPMDChamber);
  42. }
  43. ~SimulatorSystem()
  44. {
  45. _thread?.Stop();
  46. }
  47. public void Initialize()
  48. {
  49. SetDefaultValue(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber);
  50. SetDefaultValue(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber);
  51. SetDefaultValue(ModuleName.PMC, SimulatorJetChamber.CurrentPMCChamber);
  52. SetDefaultValue(ModuleName.PMD, SimulatorJetChamber.CurrentPMDChamber);
  53. SetTMDefaultValue();
  54. SetSETMDefaultValue();
  55. SetDETMDefaultValue();
  56. Singleton<DataManager>.Instance.Initialize(false);
  57. _thread = new PeriodicJob(500, OnMonitor, nameof(SimulatorSystem), true);
  58. }
  59. private void SetDefaultValue(ModuleName mod, JetChamber jetChamber)
  60. {
  61. switch (jetChamber)
  62. {
  63. case JetChamber.VenusSE:
  64. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  65. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  66. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = false;
  67. IO.DI[$"{mod}.DI_ESC_Coolant_Flow_SW"].Value = true;
  68. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  69. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  70. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  71. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  72. //IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
  73. //IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  74. IO.DI[$"{mod}.DI_RF_HV_Interlock_OK"].Value = true;
  75. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  76. IO.DI[$"{mod}.DI_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
  77. IO.DI[$"{mod}.DI_Coolant_Outlet_TC_Broken_Alarm"].Value = false;
  78. IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
  79. IO.DI[$"{mod}.DI_Process_Pressure_100mt_Gauge_Alarm"].Value = false;
  80. IO.DI[$"{mod}.DI_Foreline_Pressure_10t_Gauge_Alarm"].Value = false;
  81. IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
  82. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  83. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  84. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = true;
  85. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = true;
  86. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = true;
  87. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = true;
  88. IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = true;
  89. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  90. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  91. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  92. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  93. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  94. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  95. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  96. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  97. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  98. IO.DI[$"{mod}.DI_MFC9_Pressure_Switch"].Value = true;
  99. IO.DI[$"{mod}.DI_MFC10_Pressure_Switch"].Value = true;
  100. IO.DI[$"{mod}.DI_MFC11_Pressure_Switch"].Value = true;
  101. IO.DI[$"{mod}.DI_MFC12_Pressure_Switch"].Value = true;
  102. IO.DI[$"{mod}.DI_He_Pressure_Switch"].Value = true;
  103. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = true;
  104. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  105. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  106. IO.DI[$"{mod}.DI_Turbo_Pump_Water_Flow_Switch"].Value = true;
  107. IO.DI[$"{mod}.DI_SOURCE_RF_Water_Flow_Switch"].Value = true;
  108. IO.DI[$"{mod}.DI_TM_ROB_NOT_EXTEND_TO_PM"].Value = true;
  109. IO.DI[$"{mod}.DI_TM_Slit_Door_Closed"].Value = true;
  110. IO.DI[$"{mod}.DI_Source_Match_interlock_ok"].Value = true;
  111. IO.DI[$"{mod}.DI_Bias_Match_interlock_ok"].Value = true;
  112. IO.DI[$"{mod}.DI_GASLINE_TC_Deviation_out_of_range"].Value = true;
  113. IO.DI[$"{mod}.DI_GASLINE_Control_TC_Broken_Alarm"].Value = true;
  114. IO.DI[$"{mod}.DI_GASLINE_Monitor_TC_Broken_Alarm"].Value = true;
  115. IO.DI[$"{mod}.DI_GASLINE_Heater_On_FB"].Value = true;
  116. IO.DI[$"{mod}.DI_CTRL_BOX_1#FAN_OK"].Value = true;
  117. IO.DI[$"{mod}.DI_CTRL_BOX_2#FAN_OK"].Value = true;
  118. IO.DI[$"{mod}.DI_POWER_BOX_FAN_OK"].Value = true;
  119. //// pressure
  120. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  121. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  122. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  123. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  124. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  125. //// Temperature
  126. SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
  127. //SetAiValue($"{mod}.AI_Valve_Monitor_TC_Temp", 27);
  128. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
  129. //SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 27);
  130. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  131. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", 27);
  132. SetAiValue($"{mod}.AI_Coolant_Inlet_Temp", 28);
  133. // Datetime
  134. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  135. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  136. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  137. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  138. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  139. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  140. break;
  141. case JetChamber.VenusDE:
  142. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  143. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  144. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = false;
  145. IO.DI[$"{mod}.DI_ESC_Coolant_Flow_SW"].Value = true;
  146. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  147. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  148. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  149. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  150. //IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
  151. //IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  152. IO.DI[$"{mod}.DI_RF_HV_Interlock_OK"].Value = true;
  153. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  154. IO.DI[$"{mod}.DI_Liner_Door_Open_Position"].Value = true;
  155. IO.DI[$"{mod}.DI_Liner_Door_Close_Position"].Value = false;
  156. IO.DI[$"{mod}.DI_ESC_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
  157. IO.DI[$"{mod}.DI_Magnets_Coils_ON_FB"].Value = false;
  158. IO.DI[$"{mod}.DI_ESC_Coolant_Outlet_TC_Broken_Alarm"].Value = false;
  159. IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
  160. IO.DI[$"{mod}.DI_Process_Pressure_1t_Gauge_Alarm"].Value = false;
  161. IO.DI[$"{mod}.DI_Foreline_Pressure_10t_Gauge_Alarm"].Value = false;
  162. IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
  163. IO.DI[$"{mod}.DI_Valve_Heater_On_FB"].Value = false;
  164. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  165. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  166. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  167. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  168. //IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = true;
  169. //IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = true;
  170. //IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = true;
  171. //IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = true;
  172. //IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = true;
  173. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  174. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  175. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  176. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  177. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  178. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  179. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  180. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  181. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  182. IO.DI[$"{mod}.DI_MFC9_Pressure_Switch"].Value = true;
  183. IO.DI[$"{mod}.DI_MFC10_Pressure_Switch"].Value = true;
  184. IO.DI[$"{mod}.DI_MFC11_Pressure_Switch"].Value = true;
  185. IO.DI[$"{mod}.DI_MFC12_Pressure_Switch"].Value = true;
  186. IO.DI[$"{mod}.DI_He_Pressure_Switch"].Value = true;
  187. //IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = true;
  188. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  189. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  190. IO.DI[$"{mod}.DI_Turbo_Pump_Water_Flow_Switch"].Value = true;
  191. IO.DI[$"{mod}.DI_BIAS_RF_Water_Flow_Switch"].Value = true;
  192. IO.DI[$"{mod}.DI_CHB_Coolant_Flow_SW"].Value = true;
  193. //IO.DI[$"{mod}.DI_SOURCE_RF_Water_Flow_Switch"].Value = true;
  194. IO.DI[$"{mod}.DI_TM_ROB_NOT_EXTEND_TO_PM"].Value = true;
  195. IO.DI[$"{mod}.DI_TM_Slit_Door_Closed"].Value = true;
  196. //IO.DI[$"{mod}.DI_Source_Match_interlock_ok"].Value = true;
  197. IO.DI[$"{mod}.DI_Bias_Match_interlock_ok"].Value = true;
  198. //IO.DI[$"{mod}.DI_GASLINE_TC_Deviation_out_of_range"].Value = true;
  199. //IO.DI[$"{mod}.DI_GASLINE_Control_TC_Broken_Alarm"].Value = true;
  200. //IO.DI[$"{mod}.DI_GASLINE_Monitor_TC_Broken_Alarm"].Value = true;
  201. //IO.DI[$"{mod}.DI_GASLINE_Heater_On_FB"].Value = true;
  202. IO.DI[$"{mod}.DI_CTRL_BOX_1#FAN_OK"].Value = true;
  203. IO.DI[$"{mod}.DI_CTRL_BOX_2#FAN_OK"].Value = true;
  204. IO.DI[$"{mod}.DI_POWER_BOX_FAN_OK"].Value = true;
  205. IO.DI[$"{mod}.DI_MAGNET_BOX_FAN_OK"].Value = true;
  206. //// pressure
  207. SetAiValue($"{mod}.AI_Process_Pressure_1t", 100);
  208. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  209. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  210. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  211. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  212. //// Temperature
  213. SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
  214. //SetAiValue($"{mod}.AI_Gasline_Control_TC_Temp", 27);
  215. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
  216. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 28);
  217. //SetAiValue($"{mod}.AI_Gasline_Monitor_TC_Temp", 27);
  218. SetAiValue($"{mod}.AI_CHB_Coolant_Inlet_Temp", 28);
  219. SetAiValue($"{mod}.AI_CHB_Coolant_Outlet_Temp", 27);
  220. SetAiValue($"{mod}.AI_ESC_Coolant_Inlet_Temp", 28);
  221. SetAiValue($"{mod}.AI_ESC_Coolant_Outlet_Temp", 28);
  222. // Datetime
  223. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  224. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  225. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  226. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  227. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  228. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  229. break;
  230. case JetChamber.Kepler2300:
  231. // chamber
  232. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  233. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  234. IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
  235. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  236. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  237. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  238. IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
  239. IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  240. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  241. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  242. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  243. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  244. IO.DI[$"{mod}.DI_S_Valve_TC_Deviation_out_of_range"].Value = false;
  245. IO.DI[$"{mod}.DI_S_Valve_Control_TC_Broken_Alarm"].Value = false;
  246. IO.DI[$"{mod}.DI_S_Valve_Monitor_TC_Broken_Alarm"].Value = false;
  247. IO.DI[$"{mod}.DI_S_Valve_Heater_On_FB"].Value = false;
  248. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  249. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  250. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  251. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  252. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false;
  253. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = false;
  254. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false;
  255. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = false;
  256. IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = false;
  257. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  258. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  259. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  260. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  261. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  262. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  263. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  264. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  265. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  266. IO.DI[$"{mod}.DI_ESC_He_Pressure_Switch"].Value = true;
  267. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Guage_Alarm"].Value = false;
  268. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  269. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  270. IO.DI[$"{mod}.DI_Source_RF_Water_Flow_Switch"].Value = true;
  271. IO.DI[$"{mod}.DI_S_Valve_OT_Switch_Alarm"].Value = false;
  272. IO.DI[$"{mod}.DI_Foreline_OT_Switch_Alarm"].Value = false;
  273. IO.DI[$"{mod}.DI_Arm_Not_Extend_to_PM"].Value = true;
  274. IO.DI[$"{mod}.DI_EFEM_Door_Colse"].Value = true;
  275. IO.DI[$"{mod}.DI_ESC_Inner_Coolant_Flow_SW"].Value = true;
  276. IO.DI[$"{mod}.DI_ESC_Outer_Coolant_Flow_SW"].Value = true;
  277. //// pressure
  278. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  279. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  280. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  281. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", ATM_PRESSURE);
  282. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  283. //// Temperature
  284. SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
  285. SetAiValue($"{mod}.AI_Foreline_Control_TC_Temp", 28);
  286. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  287. SetAiValue($"{mod}.AI_ESC_inner_coolant_outlet_TC_Temp", 20);
  288. SetAiValue($"{mod}.AI_ESC_outer_coolant_outlet_TC_Temp", 30);
  289. SetAiValue($"{mod}.AI_Top_Plate_coolant_outlet_TC_Temp", 40);
  290. // Datetime
  291. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  292. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  293. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  294. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  295. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  296. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  297. break;
  298. case JetChamber.Kepler2200A:
  299. case JetChamber.Kepler2200B:
  300. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  301. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  302. IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
  303. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  304. IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
  305. IO.DI[$"{mod}.DI_Source_RF_Match_Interlock"].Value = true;
  306. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  307. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  308. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  309. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  310. IO.DI[$"{mod}.DI_CHB_M-HT_Control_TC_Broken_Alarm"].Value = false;
  311. IO.DI[$"{mod}.DI_CHB_M-HT_Heater_On_FB"].Value = false;
  312. IO.DI[$"{mod}.DI_CHB_M-HT_OT_Switch_Alarm"].Value = false;
  313. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  314. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  315. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  316. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  317. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  318. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  319. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  320. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  321. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  322. IO.DI[$"{mod}.DI_N2_Purge_Pressure_Switch"].Value = true;
  323. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  324. IO.DI[$"{mod}.DI_Lid_Up_Limit_Pos_SW"].Value = true;
  325. //IO.DI[$"{mod}.DI_S_Valve_OT_Switch_Alarm"].Value = false;
  326. IO.DI[$"{mod}.DI_Lid_Down_Limit_Pos_SW"].Value = true;
  327. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  328. IO.DI[$"{mod}.DI_TM_Safety_Door_Colse"].Value = true;
  329. IO.DI[$"{mod}.DI_Arm_Not_Extend_to_PM"].Value = true;
  330. IO.DI[$"{mod}.DI_Source_RF_Water_Flow_Switch"].Value = true;
  331. //// pressure
  332. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  333. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  334. SetAiValue($"{mod}.AI_Process_Pressure_2t", 100);
  335. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  336. //// Temperature
  337. // SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
  338. SetAiValue($"{mod}.AI_CHB_M-HT_Control_TC_Temp", 28);
  339. // Datetime
  340. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  341. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  342. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  343. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  344. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  345. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  346. break;
  347. }
  348. }
  349. private void SetTMDefaultValue()
  350. {
  351. ModuleName mod = ModuleName.TM;
  352. IO.DI[$"{mod}.DI_TM_Power_On"].Value = true;
  353. IO.DI[$"{mod}.DI_TM_In_Safety"].Value = true;
  354. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  355. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMA"].Value = true;
  356. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMB"].Value = true;
  357. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMC"].Value = true;
  358. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMD"].Value = true;
  359. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLA"].Value = true;
  360. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLB"].Value = true;
  361. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLA"].Value = true;
  362. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLB"].Value = true;
  363. IO.DI[$"{mod}.DI_EFEM_Side_Door_Closed"].Value = true;
  364. IO.DI[$"{mod}.DI_TM_CHB_PCW_Flow_Switch"].Value = true;
  365. IO.DI[$"{mod}.DI_LLA_PCW_Flow_Switch"].Value = true;
  366. IO.DI[$"{mod}.DI_LLB_PCW_Flow_Switch"].Value = true;
  367. IO.DI[$"{mod}.DI_TM_CHB_Door_Closed"].Value = true;
  368. IO.DI[$"{mod}.DI_LLA_Lid_Door_Closed"].Value = true;
  369. IO.DI[$"{mod}.DI_LLB_Lid_Door_Closed"].Value = true;
  370. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  371. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  372. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  373. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  374. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  375. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  376. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  377. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  378. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_Position"].Value = false;
  379. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_Position"].Value = true;
  380. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_Position"].Value = false;
  381. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_Position"].Value = true;
  382. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_Position"].Value = false;
  383. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_Position"].Value = true;
  384. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_Position"].Value = false;
  385. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_Position"].Value = true;
  386. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  387. IO.DI[$"{mod}.DI_Vaccum_Pressure_Switch"].Value = true;
  388. IO.DI[$"{mod}.DI_N2_Pressure_Switch"].Value = true;
  389. IO.DI[$"{mod}.DI_TM_Chamber_VAC_Gauge_Alarm"].Value = true;
  390. IO.DI[$"{mod}.DI_TM_Foreline_VAC_Gauge_Alarm"].Value = true;
  391. IO.DI[$"{mod}.DI_LLA_Chamber_VAC_Gauge_Alarm"].Value = true;
  392. IO.DI[$"{mod}.DI_LLA_Foreline_VAC_Gauge_Alarm"].Value = true;
  393. IO.DI[$"{mod}.DI_LLB_Chamber_VAC_Gauge_Alarm"].Value = true;
  394. IO.DI[$"{mod}.DI_LLB_Foreline_VAC_Gauge_Alarm"].Value = true;
  395. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = true;
  396. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = true;
  397. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = true;
  398. IO.DI[$"{mod}.DI_PMA_Lid_Closed"].Value = true;
  399. IO.DI[$"{mod}.DI_PMB_Lid_Closed"].Value = true;
  400. IO.DI[$"{mod}.DI_PMC_Lid_Closed"].Value = true;
  401. IO.DI[$"{mod}.DI_PMD_Lid_Closed"].Value = true;
  402. // Datetime
  403. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  404. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  405. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  406. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  407. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  408. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  409. SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 5001);
  410. SetAiValue($"{mod}.AI_LLA_Foreline_Pressure", 5003);
  411. SetAiValue($"{mod}.AI_LLB_Foreline_Pressure", 5004);
  412. if (SystemConfig.Instance.GetValue<bool>("System.IsATMMode"))
  413. {
  414. SetAiValue($"{mod}.AI_TM_CHB_Pressure", 760000);
  415. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 760000);
  416. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 760000);
  417. }
  418. else
  419. {
  420. SetAiValue($"{mod}.AI_TM_CHB_Pressure", 5000);
  421. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 5002);
  422. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 5004);
  423. }
  424. }
  425. private void SetSETMDefaultValue()
  426. {
  427. ModuleName mod = ModuleName.SETM;
  428. IO.DI[$"{mod}.DI_System_CDA_Pressure_OK"].Value = true;
  429. IO.DI[$"{mod}.DI_LID_DOOR_CLOSED"].Value = true;
  430. IO.DI[$"{mod}.DI_VCE_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  431. IO.DI[$"{mod}.DI_PMA_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  432. IO.DI[$"{mod}.DI_PMB_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  433. IO.DI[$"{mod}.DI_VCE_ATM_SW"].Value = true;
  434. IO.DI[$"{mod}.DI_TM_ATM_SW"].Value = true;
  435. IO.DI[$"{mod}.DI_VCE_Wafer_Senser"].Value = true;
  436. IO.DI[$"{mod}.DI_PMA_Wafer_Senser"].Value = true;
  437. IO.DI[$"{mod}.DI_PMB_Wafer_Senser"].Value = true;
  438. IO.DI[$"{mod}.DI_PMC_Wafer_Senser"].Value = true;
  439. IO.DI[$"{mod}.DI_AC_RACK_FAN_OK"].Value = true;
  440. IO.DI[$"{mod}.DI_AC_RACK_Smoke_SW1"].Value = false;
  441. IO.DI[$"{mod}.DI_AC_RACK_Smoke_SW2"].Value = false;
  442. IO.DI[$"{mod}.DI_FA_Smoke_SW"].Value = false;
  443. IO.DI[$"{mod}.DI_Gas_Treatment_Alarm"].Value = false;
  444. IO.DI[$"{mod}.DI_SYSTEM_N2_Pressure_SW"].Value = true;
  445. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Open_Pos"].Value = false;
  446. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Close_Pos"].Value = true;
  447. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Open_Pos"].Value = false;
  448. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Close_Pos"].Value = true;
  449. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Open_Pos"].Value = false;
  450. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Close_Pos"].Value = true;
  451. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Open_Pos"].Value = false;
  452. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Close_Pos"].Value = true;
  453. IO.DI[$"{mod}.DI_TM_HE_Pressure_SW"].Value = true;
  454. IO.DI[$"{mod}.DI_TM_N2_Pressure_SW"].Value = true;
  455. IO.DI[$"{mod}.DI_PMC_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  456. IO.DI[$"{mod}.DI_PCW_Leak_SW"].Value = true;
  457. IO.DI[$"{mod}.DI_TM_CDA_Pressure_SW"].Value = true;
  458. IO.DI[$"{mod}.DI_VCE_VAC_SW"].Value = false;
  459. IO.DI[$"{mod}.DI_TM_VAC_SW"].Value = false;
  460. IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_VCE"].Value = true;
  461. IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_PMA"].Value = true;
  462. IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_PMB"].Value = true;
  463. IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_PMC"].Value = true;
  464. SetAiValue($"{mod}.AI_MFC_Flow", 3000);
  465. SetAiValue($"{mod}.AI_VCE_Pressure", 3000);
  466. SetAiValue($"{mod}.AI_Foreline_Pressure", 3000);
  467. SetAiValue($"{mod}.AI_TM_Pressure", 20);
  468. }
  469. private void SetDETMDefaultValue()
  470. {
  471. ModuleName mod = ModuleName.DETM;
  472. IO.DI[$"{mod}.DI_Smif1_Ready_to_load"].Value = true;
  473. IO.DI[$"{mod}.DI_Smif1_Ready_to_unload"].Value = true;
  474. IO.DI[$"{mod}.DI_Smif2_Ready_to_load"].Value = true;
  475. IO.DI[$"{mod}.DI_Smif2_Ready_to_unload"].Value = true;
  476. IO.DI[$"{mod}.DI_PMA_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  477. IO.DI[$"{mod}.DI_PMB_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  478. IO.DI[$"{mod}.DI_PMC_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  479. IO.DI[$"{mod}.DI_ROBOT_TO_VCEA_RETRACT"].Value = true;
  480. IO.DI[$"{mod}.DI_ROBOT_TO_VCEB_RETRACT"].Value = true;
  481. IO.DI[$"{mod}.DI_ROBOT_TO_PMA_RETRACT"].Value = true;
  482. IO.DI[$"{mod}.DI_ROBOT_TO_PMB_RETRACT"].Value = true;
  483. IO.DI[$"{mod}.DI_ROBOT_TO_PMC_RETRACT"].Value = true;
  484. IO.DI[$"{mod}.DI_ROBOT_TO_PMD_RETRACT"].Value = true;
  485. IO.DI[$"{mod}.DI_VCEA_Wafer_Sensor"].Value = true;
  486. IO.DI[$"{mod}.DI_VCEB_Wafer_Sensor"].Value = true;
  487. IO.DI[$"{mod}.DI_PMA_Wafer_Sensor"].Value = true;
  488. IO.DI[$"{mod}.DI_PMB_Wafer_Sensor"].Value = true;
  489. IO.DI[$"{mod}.DI_PMC_Wafer_Sensor"].Value = true;
  490. IO.DI[$"{mod}.DI_PMD_Wafer_Sensor"].Value = true;
  491. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Open_POS"].Value = false;
  492. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Close_POS"].Value = true;
  493. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Open_POS"].Value = false;
  494. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Close_POS"].Value = true;
  495. IO.DI[$"{mod}.DI_TM_N2_1_SW"].Value = true;
  496. IO.DI[$"{mod}.DI_TM_N2_2_SW"].Value = true;
  497. IO.DI[$"{mod}.DI_TM_CDA_SW"].Value = true;
  498. IO.DI[$"{mod}.DI_TM_He_SW"].Value = true;
  499. IO.DI[$"{mod}.DI_LEAK"].Value = true;
  500. IO.DI[$"{mod}.DI_VCEA_ATM_SW"].Value = true;
  501. IO.DI[$"{mod}.DI_VCEB_ATM_SW"].Value = true;
  502. IO.DI[$"{mod}.DI_TM_ATM_SW"].Value = true;
  503. IO.DI[$"{mod}.DI_AC_RACK_FAN_OK"].Value = true;
  504. IO.DI[$"{mod}.DI_AC_RACK_SMOKE_Out1"].Value = false;
  505. IO.DI[$"{mod}.DI_AC_RACK_SMOKE_Out2"].Value = false;
  506. IO.DI[$"{mod}.DI_FACTORY_SMOKE_Out"].Value = false;
  507. IO.DI[$"{mod}.DI_Abnormal_Exhaust_Gas"].Value = true;
  508. IO.DI[$"{mod}.DI_VCEA_Cassette_Present"].Value = true;
  509. IO.DI[$"{mod}.DI_VCEB_Cassette_Present"].Value = true;
  510. IO.DI[$"{mod}.DI_VCEA_ADR_LOCKED"].Value = true;
  511. IO.DI[$"{mod}.DI_VCEB_ADR_LOCKED"].Value = true;
  512. IO.DI[$"{mod}.DI_TM_LID_Close"].Value = true;
  513. IO.DI[$"{mod}.DI_LEFT_SMIF_READY"].Value = true;
  514. IO.DI[$"{mod}.DI_LEFT_SMIF_POD_INPLACE"].Value = true;
  515. IO.DI[$"{mod}.DI_RIGHT_SMIF_POD_INPLACE"].Value = true;
  516. IO.DI[$"{mod}.DI_LEFT_SMIF_ERROR"].Value = true;
  517. IO.DI[$"{mod}.DI_RIGHT_SMIF_ERROR"].Value = true;
  518. IO.DI[$"{mod}.DI_VCEA_EXTEND_ENABLE"].Value = true;
  519. IO.DI[$"{mod}.DI_VCEB_EXTEND_ENABLE"].Value = true;
  520. IO.DI[$"{mod}.DI_PMA_EXTEND_ENABLE"].Value = true;
  521. IO.DI[$"{mod}.DI_PMB_EXTEND_ENABLE"].Value = true;
  522. IO.DI[$"{mod}.DI_PMC_EXTEND_ENABLE"].Value = true;
  523. IO.DI[$"{mod}.DI_Safty_Alarm"].Value = false;
  524. IO.DI[$"{mod}.DI_TM_Soft_Pump"].Value = true;
  525. IO.DI[$"{mod}.DI_TM_Soft_Vent"].Value = true;
  526. SetAiValue($"{mod}.AI_MFC_Flow", 3000);
  527. SetAiValue($"{mod}.AI_Left_VCE_Pressure", 3000);
  528. SetAiValue($"{mod}.AI_Right_VCE_Pressure", 3000);
  529. SetAiValue($"{mod}.AI_VCE_Foreline_Pressure", 20);
  530. SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 20);
  531. SetAiValue($"{mod}.AI_TM_Pressure", 20);
  532. }
  533. private bool OnMonitor()
  534. {
  535. try
  536. {
  537. foreach (var item in jetChambers)
  538. {
  539. switch (item.Value)
  540. {
  541. case JetChamber.Kepler2300:
  542. MonitorSlitDoorInTM(item.Key);
  543. MonitorPin(item.Key);
  544. MonitorPressure_Kepler(item.Key);
  545. //MonitorTemperature(item.Key);
  546. MonitorGas(item.Key);
  547. this.SimulateHe(item.Key);
  548. //MonitorRF(item.Key);
  549. ChangeTime(item.Key);
  550. //MonitorIOPumpCtrl(item.Key);
  551. MonitorLid(item.Key);
  552. break;
  553. case JetChamber.Kepler2200A:
  554. case JetChamber.Kepler2200B:
  555. MonitorSlitDoorInTM(item.Key);
  556. MonitorPressure_Kepler2200A(item.Key);
  557. //MonitorTemperature(item.Key);
  558. MonitorGas(item.Key);
  559. // MonitorRF(item.Key);
  560. ChangeTime(item.Key);
  561. //MonitorIOPumpCtrl(item.Key);
  562. MonitorLid(item.Key);
  563. MonitorIOHighTemperatureHeater(item.Key);
  564. MonitorKepler2200Heater(item.Key);
  565. break;
  566. case JetChamber.VenusSE:
  567. MonitorPin(item.Key);
  568. //MonitorVenuSESlitDoor(item.Key);
  569. MonitorSEPressure(item.Key);
  570. MonitorSEGas(item.Key);
  571. ChangeTime(item.Key);
  572. this.SimulateSEHe(item.Key);
  573. break;
  574. case JetChamber.VenusDE:
  575. MonitorPin(item.Key);
  576. MonitorDEGas(item.Key);
  577. //MonitorVenuDESlitDoor(item.Key);
  578. MonitorDEPressure(item.Key);
  579. ChangeTime(item.Key);
  580. MonitorLinerDoor(item.Key);
  581. this.SimulateDEHe(item.Key);
  582. break;
  583. }
  584. }
  585. ChangeTime(ModuleName.TM);
  586. MonitorMFSlitDoor();
  587. MonitorSEMFSlitDoor();
  588. MonitorDEMFSlitDoor();
  589. MonitorMFPressure();
  590. MonitorSEMFPressure();
  591. MonitorDEMFPressure();
  592. }
  593. catch (Exception e)
  594. {
  595. LOG.WriteExeption(e);
  596. }
  597. return true;
  598. }
  599. private void ChangeTime(ModuleName mod)
  600. {
  601. // Heartbeat with PLC
  602. SetAiValue($"{mod}.AI_Heartbeat_FB", GetAoValue($"{mod}.AO_Heartbeat"));
  603. SetAiValue($"{mod}.AI_Year", DateTime.Now.Year);
  604. SetAiValue($"{mod}.AI_Month", DateTime.Now.Month);
  605. SetAiValue($"{mod}.AI_Day", DateTime.Now.Day);
  606. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  607. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  608. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  609. }
  610. //void MonitorVenuSESlitDoor(ModuleName mod)
  611. //{
  612. //}
  613. void MonitorSlitDoorInPM(ModuleName mod)
  614. {
  615. // slit door open
  616. if (IO.DO[$"{mod}.DO_Slit_Door_Open"].Value)
  617. {
  618. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = true;
  619. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = false;
  620. }
  621. // slit door close
  622. if (IO.DO[$"{mod}.DO_Slit_Door_Close"].Value)
  623. {
  624. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  625. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  626. }
  627. }
  628. void MonitorLinerDoor(ModuleName mod)
  629. {
  630. // slit door open
  631. if (IO.DO[$"{mod}.DO_PM_Liner_Door_Open"].Value)
  632. {
  633. IO.DI[$"{mod}.DI_Liner_Door_Open_Position"].Value = true;
  634. IO.DI[$"{mod}.DI_Liner_Door_Close_Position"].Value = false;
  635. }
  636. // slit door close
  637. if (IO.DO[$"{mod}.DO_PM_Liner_Door_Close"].Value)
  638. {
  639. IO.DI[$"{mod}.DI_Liner_Door_Open_Position"].Value = false;
  640. IO.DI[$"{mod}.DI_Liner_Door_Close_Position"].Value = true;
  641. }
  642. }
  643. void MonitorSlitDoorInTM(ModuleName mod)
  644. {
  645. // slit door open
  646. if (IO.DO[$"TM.DO_{mod}_SlitDoor_Open"].Value)
  647. {
  648. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = true;
  649. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = false;
  650. }
  651. // slit door close
  652. if (IO.DO[$"TM.DO_{mod}_SlitDoor_Close"].Value)
  653. {
  654. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  655. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  656. }
  657. }
  658. void MonitorMFSlitDoor()
  659. {
  660. ModuleName mod = ModuleName.TM;
  661. // LLA T door open
  662. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Open"].Value)
  663. {
  664. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = true;
  665. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = false;
  666. }
  667. // LLB T door open
  668. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Open"].Value)
  669. {
  670. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = true;
  671. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = false;
  672. }
  673. // LLA E door open
  674. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Open"].Value)
  675. {
  676. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = true;
  677. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = false;
  678. }
  679. // LLB E door open
  680. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Open"].Value)
  681. {
  682. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = true;
  683. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = false;
  684. }
  685. // LLA T door close
  686. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Close"].Value)
  687. {
  688. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  689. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  690. }
  691. // LLB T door close
  692. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Close"].Value)
  693. {
  694. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  695. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  696. }
  697. // LLA E door close
  698. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Close"].Value)
  699. {
  700. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  701. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  702. }
  703. // LLB E door close
  704. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Close"].Value)
  705. {
  706. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  707. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  708. }
  709. // PMA slitdoor door close/open
  710. if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Close"].Value)
  711. {
  712. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_Position"].Value = false;
  713. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_Position"].Value = true;
  714. }
  715. if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Open"].Value)
  716. {
  717. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_Position"].Value = true;
  718. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_Position"].Value = false;
  719. }
  720. // PMB slitdoor door close/open
  721. if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Close"].Value)
  722. {
  723. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_Position"].Value = false;
  724. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_Position"].Value = true;
  725. }
  726. if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Open"].Value)
  727. {
  728. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_Position"].Value = true;
  729. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_Position"].Value = false;
  730. }
  731. // PMC slitdoor door close/open
  732. if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Close"].Value)
  733. {
  734. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_Position"].Value = false;
  735. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_Position"].Value = true;
  736. }
  737. if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Open"].Value)
  738. {
  739. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_Position"].Value = true;
  740. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_Position"].Value = false;
  741. }
  742. // PMD slitdoor door close/open
  743. if (IO.DO[$"{mod}.DO_PMD_SlitDoor_Close"].Value)
  744. {
  745. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_Position"].Value = false;
  746. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_Position"].Value = true;
  747. }
  748. if (IO.DO[$"{mod}.DO_PMD_SlitDoor_Open"].Value)
  749. {
  750. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_Position"].Value = true;
  751. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_Position"].Value = false;
  752. }
  753. }
  754. void MonitorSEMFSlitDoor()
  755. {
  756. ModuleName mod = ModuleName.SETM;
  757. // VCE T door open
  758. if (IO.DO[$"{mod}.DO_VCE_Slit_Door_Open"].Value)
  759. {
  760. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Open_Pos"].Value = true;
  761. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Close_Pos"].Value = false;
  762. }
  763. // VCE T door Close
  764. if (IO.DO[$"{mod}.DO_VCE_Slit_Door_Close"].Value)
  765. {
  766. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Open_Pos"].Value = false;
  767. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Close_Pos"].Value = true;
  768. }
  769. //pma
  770. if (IO.DO[$"{mod}.DO_PMA_Slit_Door_Open"].Value)
  771. {
  772. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Open_Pos"].Value = true;
  773. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Close_Pos"].Value = false;
  774. }
  775. if (IO.DO[$"{mod}.DO_PMA_Slit_Door_Close"].Value)
  776. {
  777. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Open_Pos"].Value = false;
  778. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Close_Pos"].Value = true;
  779. }
  780. //pmb
  781. if (IO.DO[$"{mod}.DO_PMB_Slit_Door_Open"].Value)
  782. {
  783. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Open_Pos"].Value = true;
  784. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Close_Pos"].Value = false;
  785. }
  786. if (IO.DO[$"{mod}.DO_PMB_Slit_Door_Close"].Value)
  787. {
  788. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Open_Pos"].Value = false;
  789. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Close_Pos"].Value = true;
  790. }
  791. //pmc
  792. if (IO.DO[$"{mod}.DO_PMC_Slit_Door_Open"].Value)
  793. {
  794. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Open_Pos"].Value = true;
  795. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Close_Pos"].Value = false;
  796. }
  797. if (IO.DO[$"{mod}.DO_PMC_Slit_Door_Close"].Value)
  798. {
  799. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Open_Pos"].Value = false;
  800. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Close_Pos"].Value = true;
  801. }
  802. }
  803. void MonitorDEMFSlitDoor()
  804. {
  805. ModuleName mod = ModuleName.DETM;
  806. // VCE L door open
  807. if (IO.DO[$"{mod}.DO_VCEA_SlitDoor_Open"].Value)
  808. {
  809. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Open_POS"].Value = true;
  810. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Close_POS"].Value = false;
  811. }
  812. // VCE R door open
  813. if (IO.DO[$"{mod}.DO_VCEB_SlitDoor_Open"].Value)
  814. {
  815. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Open_POS"].Value = true;
  816. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Close_POS"].Value = false;
  817. }
  818. // VCE L door Close
  819. if (IO.DO[$"{mod}.DO_VCEA_SlitDoor_Close"].Value)
  820. {
  821. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Open_POS"].Value = false;
  822. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Close_POS"].Value = true;
  823. }
  824. // VCE R door Close
  825. if (IO.DO[$"{mod}.DO_VCEB_SlitDoor_Close"].Value)
  826. {
  827. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Open_POS"].Value = false;
  828. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Close_POS"].Value = true;
  829. }
  830. //pma
  831. if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Open"].Value)
  832. {
  833. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_POS"].Value = true;
  834. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_POS"].Value = false;
  835. }
  836. if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Close"].Value)
  837. {
  838. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_POS"].Value = false;
  839. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_POS"].Value = true;
  840. }
  841. //pmb
  842. if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Open"].Value)
  843. {
  844. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_POS"].Value = true;
  845. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_POS"].Value = false;
  846. }
  847. if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Close"].Value)
  848. {
  849. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_POS"].Value = false;
  850. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_POS"].Value = true;
  851. }
  852. //pmc
  853. if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Open"].Value)
  854. {
  855. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_POS"].Value = true;
  856. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_POS"].Value = false;
  857. }
  858. if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Close"].Value)
  859. {
  860. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_POS"].Value = false;
  861. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_POS"].Value = true;
  862. }
  863. }
  864. void MonitorPin(ModuleName mod)
  865. {
  866. // lift pin up
  867. if (IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value != IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value)
  868. {
  869. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value;
  870. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value;
  871. }
  872. }
  873. void MonitorLid(ModuleName mod)
  874. {
  875. // lift pin up
  876. if (IO.DO[$"{mod}.DO_Lid_Up"].Value != IO.DO[$"{mod}.DO_Lid_Down"].Value)
  877. {
  878. IO.DI[$"{mod}.DI_Lid_Closed"].Value = IO.DO[$"{mod}.DO_Lid_Down"].Value;
  879. }
  880. }
  881. void MonitorExtendAndRetract(ModuleName mod)
  882. {
  883. // Extend
  884. _trigLLExtend.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Extend"].Value;
  885. if (_trigLLExtend.Q)
  886. {
  887. _trigLLRetract.RST = true;
  888. Thread.Sleep(500);
  889. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = true;
  890. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = false;
  891. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  892. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  893. }
  894. // Retract
  895. _trigLLRetract.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Retract"].Value;
  896. if (_trigLLRetract.Q)
  897. {
  898. count++;
  899. _trigLLExtend.RST = true;
  900. Thread.Sleep(500);
  901. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = false;
  902. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = true;
  903. if (count == 1)
  904. {
  905. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  906. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  907. }
  908. else if (count == 2)
  909. {
  910. count = 0;
  911. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = true;
  912. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  913. }
  914. }
  915. }
  916. void MonitorPressure(ModuleName mod)
  917. {
  918. string sAI_Foreline = "AI_Foreline_Pressure_760t";
  919. // Loadlock pressure
  920. string sAI_LoadLockPressure = "AI_LL_Pressure_760t";
  921. // Foreline
  922. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  923. {
  924. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  925. }
  926. else
  927. {
  928. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  929. }
  930. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  931. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  932. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  933. //float chamber_pressure = GetMockChamberPressure(mod);
  934. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  935. // soft pump & fast pump
  936. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  937. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  938. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  939. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  940. {
  941. //任意泵打开
  942. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  943. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  944. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  945. {//开双泵
  946. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  947. {
  948. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  949. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  950. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  951. }
  952. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  953. {
  954. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  955. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  956. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  957. }
  958. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  959. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  960. }
  961. else if (fast_pump_vlv.Value)//开
  962. {
  963. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  964. {
  965. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  966. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  967. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  968. }
  969. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  970. {
  971. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  972. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  973. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  974. }
  975. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  976. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  977. }
  978. else if (soft_pump_vlv.Value)
  979. {
  980. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  981. {
  982. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  983. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  984. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  985. }
  986. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  987. {
  988. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  989. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  990. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  991. }
  992. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  993. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  994. }
  995. else if (turbo_pump_vlv.Value)
  996. {
  997. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  998. if ((getAiValue_ChamberPressure - 500) >= 0)
  999. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1000. else
  1001. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1002. if ((getAiValue_ProcessPressure - 500) >= 0)
  1003. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1004. else
  1005. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1006. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1007. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1008. }
  1009. }
  1010. // fast vent & purge
  1011. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1012. //DOAccessor purge_vlv = IO.DO[$"{mod}.DO_Chamber_purge_valve"];
  1013. //if (vent_vlv.Value || purge_vlv.Value)
  1014. //{
  1015. // if (vent_vlv.Value && purge_vlv.Value)
  1016. // {
  1017. // float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1018. // float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1019. // if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1020. // {
  1021. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 30000);
  1022. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1023. // }
  1024. // else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1025. // {
  1026. // getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1027. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  1028. // SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  1029. // }
  1030. // //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(45000, 50000));
  1031. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(150, 160));
  1032. // }
  1033. // else
  1034. //
  1035. if (vent_vlv.Value)
  1036. {
  1037. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1038. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1039. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1040. {
  1041. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1042. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1043. }
  1044. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1045. {
  1046. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1047. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1048. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1049. }
  1050. else
  1051. {
  1052. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1053. }
  1054. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  1055. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  1056. }
  1057. // Loadlock Pumping Valve
  1058. DOAccessor Loadlock_pump_vlv = IO.DO[$"{mod}.DO_Loadlock_Pumping_Valve"];
  1059. if (Loadlock_pump_vlv.Value)
  1060. {
  1061. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") - 30000);
  1062. }
  1063. // Loadlock vent
  1064. DOAccessor Loadlock_vent_vlv = IO.DO[$"{mod}.DO_Loadlock_Vent_Valve"];
  1065. if (Loadlock_vent_vlv.Value)
  1066. {
  1067. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") + 30000);
  1068. }
  1069. // 压力值越界,复位
  1070. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1071. if (chamber_pressure1 > ATM_PRESSURE)
  1072. {
  1073. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1074. }
  1075. else if (chamber_pressure1 < 20)
  1076. {
  1077. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1078. }
  1079. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1080. if (process_pressure1 > PROCESS_GAUGE)
  1081. {
  1082. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1083. }
  1084. else if (process_pressure1 < 20)
  1085. {
  1086. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1087. }
  1088. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1089. if (foreline_pressure > 10000)
  1090. {
  1091. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 10000);
  1092. }
  1093. else if (foreline_pressure < 150)
  1094. {
  1095. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 150);
  1096. }
  1097. // 模拟压力计漂移
  1098. //int p1 = (int)GetMockChamberPressure(mod);
  1099. //int new_p1 = _rd.Next(p1 - 2, p1 + 2);
  1100. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", new_p1);
  1101. //int p2 = (int)GetAiValue($"{mod}.AI_Foreline_Pressure_10t");
  1102. //int new_p2 = _rd.Next(p2 - 1, p2 + 1);
  1103. //SetAiValue($"{mod}.AI_Foreline_Pressure_10t", new_p2);
  1104. //int p3 = (int)GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1105. //int new_p3 = _rd.Next(p3 - 1, p3 + 1);
  1106. //SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", new_p3);
  1107. // 根据当前压力值设定信号
  1108. //float chamber_pressure2 = GetMockChamberPressure(mod);
  1109. // ATM switch
  1110. IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1111. // VAC switch
  1112. IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1113. // Throttle valve
  1114. //var pos_sp = IO.AO[$"{mod}.AO_Throttle_Valve_Pressure_Setpoint"].Value;
  1115. //var mock_pos_fb = _rd.Next(pos_sp - 2, pos_sp + 2);
  1116. ////IO.AI[$"{mod}.AI_Throttle_Valve_Real_Pressure"].Value = (short)mock_pos_fb;
  1117. //SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", mock_pos_fb);
  1118. // 压力值
  1119. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  1120. //{
  1121. // short increase = (short)_rd.Next(20, 30);
  1122. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") + increase);
  1123. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") > GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  1124. // {
  1125. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  1126. // }
  1127. //}
  1128. //else
  1129. //{
  1130. // short increase = (short)_rd.Next(20, 30);
  1131. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") - increase);
  1132. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  1133. // {
  1134. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  1135. // }
  1136. //}
  1137. //// 位置值
  1138. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  1139. //{
  1140. // short increase = (short)_rd.Next(20, 30);
  1141. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") + increase);
  1142. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") > GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  1143. // {
  1144. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  1145. // }
  1146. //}
  1147. //else
  1148. //{
  1149. // short increase = (short)_rd.Next(20, 30);
  1150. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") - increase);
  1151. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  1152. // {
  1153. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  1154. // }
  1155. //}
  1156. }
  1157. void MonitorSEPressure(ModuleName mod)
  1158. {
  1159. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1160. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1161. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1162. // Foreline
  1163. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1164. {
  1165. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1166. }
  1167. else
  1168. {
  1169. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1170. }
  1171. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1172. // soft pump & fast pump
  1173. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1174. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1175. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1176. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1177. {
  1178. //任意泵打开
  1179. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1180. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1181. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1182. {//开双泵
  1183. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1184. {
  1185. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  1186. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1187. }
  1188. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1189. {
  1190. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  1191. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1192. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1193. }
  1194. }
  1195. else if (fast_pump_vlv.Value)//开
  1196. {
  1197. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1198. {
  1199. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  1200. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1201. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1202. }
  1203. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1204. {
  1205. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  1206. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1207. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1208. }
  1209. }
  1210. else if (soft_pump_vlv.Value)
  1211. {
  1212. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1213. {
  1214. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  1215. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1216. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1217. }
  1218. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1219. {
  1220. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  1221. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1222. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1223. }
  1224. }
  1225. else if (turbo_pump_vlv.Value)
  1226. {
  1227. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1228. if ((getAiValue_ChamberPressure - 500) >= 0)
  1229. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1230. else
  1231. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1232. if ((getAiValue_ProcessPressure - 500) >= 0)
  1233. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1234. else
  1235. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1236. }
  1237. }
  1238. // fast vent & purge
  1239. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1240. if (vent_vlv.Value)
  1241. {
  1242. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1243. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1244. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1245. {
  1246. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1247. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1248. }
  1249. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1250. {
  1251. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1252. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1253. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1254. }
  1255. else
  1256. {
  1257. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1258. }
  1259. }
  1260. // Loadlock Pumping Valve
  1261. // 压力值越界,复位
  1262. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1263. if (chamber_pressure1 > ATM_PRESSURE)
  1264. {
  1265. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1266. }
  1267. else if (chamber_pressure1 < 20)
  1268. {
  1269. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5);
  1270. }
  1271. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1272. if (process_pressure1 > PROCESS_GAUGE)
  1273. {
  1274. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1275. }
  1276. else if (process_pressure1 < 20)
  1277. {
  1278. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 5);
  1279. }
  1280. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1281. if (foreline_pressure > 1999)
  1282. {
  1283. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 1999);
  1284. }
  1285. else if (foreline_pressure < 150)
  1286. {
  1287. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1288. }
  1289. // ATM switch
  1290. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1291. // VAC switch
  1292. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1293. }
  1294. void MonitorDEPressure(ModuleName mod)
  1295. {
  1296. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1297. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1298. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1299. // Foreline
  1300. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1301. {
  1302. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1303. }
  1304. else
  1305. {
  1306. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1307. }
  1308. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1309. // soft pump & fast pump
  1310. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1311. //DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1312. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1313. if (fast_pump_vlv.Value || turbo_pump_vlv.Value)
  1314. {
  1315. //任意泵打开
  1316. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1317. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1318. if (fast_pump_vlv.Value)
  1319. {//开双泵
  1320. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1321. {
  1322. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  1323. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1324. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1325. }
  1326. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1327. {
  1328. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  1329. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1330. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1331. }
  1332. }
  1333. else if (turbo_pump_vlv.Value)
  1334. {
  1335. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1336. if ((getAiValue_ChamberPressure - 500) >= 0)
  1337. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1338. else
  1339. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1340. if ((getAiValue_ProcessPressure - 500) >= 0)
  1341. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1342. else
  1343. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1344. }
  1345. }
  1346. // fast vent & purge
  1347. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1348. if (vent_vlv.Value)
  1349. {
  1350. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1351. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1352. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1353. {
  1354. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1355. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1356. }
  1357. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1358. {
  1359. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1360. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1361. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1362. }
  1363. else
  1364. {
  1365. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1366. }
  1367. }
  1368. // Loadlock Pumping Valve
  1369. // 压力值越界,复位
  1370. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1371. if (chamber_pressure1 > ATM_PRESSURE)
  1372. {
  1373. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1374. }
  1375. else if (chamber_pressure1 < 20)
  1376. {
  1377. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5);
  1378. }
  1379. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1380. if (process_pressure1 > PROCESS_GAUGE)
  1381. {
  1382. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1383. }
  1384. else if (process_pressure1 < 20)
  1385. {
  1386. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 5);
  1387. }
  1388. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1389. if (foreline_pressure > 10000)
  1390. {
  1391. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  1392. }
  1393. else if (foreline_pressure < 150)
  1394. {
  1395. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1396. }
  1397. // ATM switch
  1398. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1399. // VAC switch
  1400. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1401. }
  1402. void MonitorPressure_Kepler(ModuleName mod)
  1403. {
  1404. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1405. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1406. {
  1407. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1408. }
  1409. else
  1410. {
  1411. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1412. }
  1413. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1414. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1415. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1416. //float chamber_pressure = GetMockChamberPressure(mod);
  1417. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1418. // soft pump & fast pump
  1419. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1420. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1421. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1422. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1423. {
  1424. //任意泵打开
  1425. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1426. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1427. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1428. {//开双泵
  1429. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1430. {
  1431. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  1432. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1433. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1434. }
  1435. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1436. {
  1437. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  1438. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1439. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1440. }
  1441. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  1442. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  1443. }
  1444. else if (fast_pump_vlv.Value)//开
  1445. {
  1446. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1447. {
  1448. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  1449. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1450. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1451. }
  1452. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1453. {
  1454. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  1455. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1456. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1457. }
  1458. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  1459. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  1460. }
  1461. else if (soft_pump_vlv.Value)
  1462. {
  1463. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1464. {
  1465. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  1466. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1467. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1468. }
  1469. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1470. {
  1471. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  1472. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1473. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1474. }
  1475. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  1476. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  1477. }
  1478. else if (turbo_pump_vlv.Value)
  1479. {
  1480. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1481. if ((getAiValue_ChamberPressure - 500) >= 0)
  1482. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1483. else
  1484. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1485. if ((getAiValue_ProcessPressure - 500) >= 0)
  1486. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1487. else
  1488. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1489. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1490. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1491. }
  1492. }
  1493. // fast vent & purge
  1494. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1495. if (vent_vlv.Value)
  1496. {
  1497. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1498. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1499. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1500. {
  1501. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1502. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1503. }
  1504. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1505. {
  1506. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1507. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1508. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1509. }
  1510. else
  1511. {
  1512. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1513. }
  1514. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  1515. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  1516. }
  1517. // Loadlock Pumping Valve
  1518. // 压力值越界,复位
  1519. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1520. if (chamber_pressure1 > ATM_PRESSURE)
  1521. {
  1522. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1523. }
  1524. else if (chamber_pressure1 < 20)
  1525. {
  1526. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1527. }
  1528. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1529. if (process_pressure1 > PROCESS_GAUGE)
  1530. {
  1531. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1532. }
  1533. else if (process_pressure1 < 20)
  1534. {
  1535. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1536. }
  1537. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1538. if (foreline_pressure > 10000)
  1539. {
  1540. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  1541. }
  1542. else if (foreline_pressure < 150)
  1543. {
  1544. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1545. }
  1546. // ATM switch
  1547. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1548. // VAC switch
  1549. IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1550. }
  1551. void MonitorPressure_Kepler2200A(ModuleName mod)
  1552. {
  1553. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1554. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1555. {
  1556. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1557. }
  1558. else
  1559. {
  1560. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1561. }
  1562. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1563. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1564. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1565. //float chamber_pressure = GetMockChamberPressure(mod);
  1566. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1567. // soft pump & fast pump
  1568. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1569. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1570. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1571. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1572. {
  1573. //任意泵打开
  1574. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1575. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1576. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1577. {//开双泵
  1578. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1579. {
  1580. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  1581. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1582. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1583. }
  1584. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1585. {
  1586. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  1587. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1588. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1589. }
  1590. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  1591. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  1592. }
  1593. else if (fast_pump_vlv.Value)//开
  1594. {
  1595. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1596. {
  1597. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  1598. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1599. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1600. }
  1601. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1602. {
  1603. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  1604. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1605. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1606. }
  1607. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  1608. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  1609. }
  1610. else if (soft_pump_vlv.Value)
  1611. {
  1612. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1613. {
  1614. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  1615. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1616. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1617. }
  1618. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1619. {
  1620. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  1621. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1622. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1623. }
  1624. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  1625. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  1626. }
  1627. else if (turbo_pump_vlv.Value)
  1628. {
  1629. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1630. if ((getAiValue_ChamberPressure - 500) >= 0)
  1631. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1632. else
  1633. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1634. if ((getAiValue_ProcessPressure - 500) >= 0)
  1635. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1636. else
  1637. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1638. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1639. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1640. }
  1641. }
  1642. // fast vent & purge
  1643. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1644. DOAccessor gas_final_vlv = IO.DO[$"{mod}.DO_Gas_Final_Valve"];
  1645. if (vent_vlv.Value && gas_final_vlv.Value)
  1646. {
  1647. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1648. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1649. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1650. {
  1651. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1652. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1653. }
  1654. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1655. {
  1656. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1657. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1658. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1659. }
  1660. else
  1661. {
  1662. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1663. }
  1664. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  1665. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  1666. }
  1667. // Loadlock Pumping Valve
  1668. // 压力值越界,复位
  1669. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1670. if (chamber_pressure1 > ATM_PRESSURE)
  1671. {
  1672. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1673. }
  1674. else if (chamber_pressure1 < 20)
  1675. {
  1676. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1677. }
  1678. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1679. if (process_pressure1 > PROCESS_GAUGE)
  1680. {
  1681. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1682. }
  1683. else if (process_pressure1 < 20)
  1684. {
  1685. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1686. }
  1687. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1688. if (foreline_pressure > 10000)
  1689. {
  1690. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  1691. }
  1692. else if (foreline_pressure < 150)
  1693. {
  1694. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1695. }
  1696. // ATM switch
  1697. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1698. // VAC switch
  1699. IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1700. }
  1701. void MonitorSEMFPressure()
  1702. {
  1703. ModuleName mod = ModuleName.SETM;
  1704. string VCE_ChamberPressure = "AI_VCE_Pressure";
  1705. string TM_AI_ChamberPressure = "AI_TM_Pressure";
  1706. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_TM_Fast_Pumping"];
  1707. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_TM_Soft_Pumping"];
  1708. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_TM_Fast_Vent"];
  1709. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_TM_Soft_Vent"];
  1710. DOAccessor VCE_fast_pump_vlv = IO.DO[$"{mod}.DO_VCE_Fast_Pumping"];
  1711. DOAccessor VCE_soft_pump_vlv = IO.DO[$"{mod}.DO_VCE_Soft_Pumping"];
  1712. DOAccessor VCE_fast_Vent_vlv = IO.DO[$"{mod}.DO_VCE_Fast_Vent"];
  1713. DOAccessor VCE_soft_Vent_vlv = IO.DO[$"{mod}.DO_VCE_Soft_Vent"];
  1714. float getAiValue_VCE_ChamberPressure = GetAiValue($"{mod}.{VCE_ChamberPressure}");
  1715. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1716. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  1717. {
  1718. if (getAiValue_TM_ChamberPressure > 10000)
  1719. {
  1720. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  1721. }
  1722. else if (getAiValue_TM_ChamberPressure <= 10000)
  1723. {
  1724. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  1725. }
  1726. }
  1727. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  1728. {
  1729. if (getAiValue_TM_ChamberPressure > 10000)
  1730. {
  1731. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  1732. }
  1733. else if (getAiValue_TM_ChamberPressure <= 10000)
  1734. {
  1735. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  1736. }
  1737. }
  1738. if (VCE_fast_pump_vlv.Value || VCE_soft_pump_vlv.Value)
  1739. {
  1740. if (getAiValue_VCE_ChamberPressure > 10000)
  1741. {
  1742. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") - 30000);
  1743. }
  1744. else if (getAiValue_VCE_ChamberPressure <= 10000)
  1745. {
  1746. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") - 1500);
  1747. }
  1748. }
  1749. if (VCE_fast_Vent_vlv.Value || VCE_soft_Vent_vlv.Value)
  1750. {
  1751. if (getAiValue_VCE_ChamberPressure > 10000)
  1752. {
  1753. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") + 30000);
  1754. }
  1755. else if (getAiValue_VCE_ChamberPressure <= 10000)
  1756. {
  1757. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") + 1500);
  1758. }
  1759. }
  1760. getAiValue_VCE_ChamberPressure = GetAiValue($"{mod}.{VCE_ChamberPressure}");
  1761. if (getAiValue_VCE_ChamberPressure > ATM_PRESSURE)
  1762. {
  1763. SetAiValue($"{mod}.{VCE_ChamberPressure}", ATM_PRESSURE);
  1764. }
  1765. else if (getAiValue_VCE_ChamberPressure < 20)
  1766. {
  1767. SetAiValue($"{mod}.{VCE_ChamberPressure}", 20);
  1768. }
  1769. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1770. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  1771. {
  1772. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  1773. }
  1774. else if (getAiValue_TM_ChamberPressure < 20)
  1775. {
  1776. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  1777. }
  1778. IO.DI[$"{mod}.DI_VCE_VAC_SW"].Value = GetAiValue($"{mod}.{VCE_ChamberPressure}") < VAC_SW_PRESSURE;
  1779. // VAC switch
  1780. IO.DI[$"{mod}.DI_TM_VAC_SW"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1781. }
  1782. void MonitorDEMFPressure()
  1783. {
  1784. ModuleName mod = ModuleName.DETM;
  1785. string AI_Left_VCE_Pressure = "AI_Left_VCE_Pressure";
  1786. string AI_Right_VCE_Pressure = "AI_Right_VCE_Pressure";
  1787. string TM_AI_ChamberPressure = "AI_TM_Pressure";
  1788. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_TM_Fast_Pump"];
  1789. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_TM_Soft_Pump"];
  1790. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_TM_Fast_Vent"];
  1791. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_TM_Soft_Vent"];
  1792. DOAccessor DO_VCEA_Fast_Pump = IO.DO[$"{mod}.DO_VCEA_Fast_Pump"];
  1793. DOAccessor DO_VCEA_Soft_Pump = IO.DO[$"{mod}.DO_VCEA_Soft_Pump"];
  1794. DOAccessor DO_VCEB_Fast_Pump = IO.DO[$"{mod}.DO_VCEB_Fast_Pump"];
  1795. DOAccessor DO_VCEB_Soft_Pump = IO.DO[$"{mod}.DO_VCEB_Soft_Pump"];
  1796. DOAccessor DO_VCEA_Fast_Vent = IO.DO[$"{mod}.DO_VCEA_Fast_Vent"];
  1797. DOAccessor DO_VCEA_Soft_Vent = IO.DO[$"{mod}.DO_VCEA_Soft_Vent"];
  1798. DOAccessor DO_VCEB_Fast_Vent = IO.DO[$"{mod}.DO_VCEB_Fast_Vent"];
  1799. DOAccessor DO_VCEB_Soft_Vent = IO.DO[$"{mod}.DO_VCEB_Soft_Vent"];
  1800. float getAiValue_AI_Left_VCE_Pressure = GetAiValue($"{mod}.{AI_Left_VCE_Pressure}");
  1801. float getAiValue_AI_Right_VCE_Pressure = GetAiValue($"{mod}.{AI_Right_VCE_Pressure}");
  1802. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1803. if (DO_VCEA_Fast_Pump.Value || DO_VCEA_Soft_Pump.Value)
  1804. {
  1805. if (getAiValue_AI_Left_VCE_Pressure > 10000)
  1806. {
  1807. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") - 30000);
  1808. }
  1809. else if (getAiValue_AI_Left_VCE_Pressure <= 10000)
  1810. {
  1811. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") - 1500);
  1812. }
  1813. }
  1814. if (DO_VCEB_Fast_Pump.Value || DO_VCEB_Soft_Pump.Value)
  1815. {
  1816. if (getAiValue_AI_Right_VCE_Pressure > 10000)
  1817. {
  1818. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") - 30000);
  1819. }
  1820. else if (getAiValue_AI_Right_VCE_Pressure <= 10000)
  1821. {
  1822. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") - 1500);
  1823. }
  1824. }
  1825. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  1826. {
  1827. if (getAiValue_TM_ChamberPressure > 10000)
  1828. {
  1829. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  1830. }
  1831. else if (getAiValue_TM_ChamberPressure <= 10000)
  1832. {
  1833. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  1834. }
  1835. }
  1836. if (DO_VCEA_Fast_Vent.Value || DO_VCEA_Soft_Vent.Value)
  1837. {
  1838. if (getAiValue_AI_Left_VCE_Pressure > 10000)
  1839. {
  1840. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") + 30000);
  1841. }
  1842. else if (getAiValue_AI_Left_VCE_Pressure <= 10000)
  1843. {
  1844. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") + 1500);
  1845. }
  1846. }
  1847. if (DO_VCEB_Fast_Vent.Value || DO_VCEB_Soft_Vent.Value)
  1848. {
  1849. if (getAiValue_AI_Right_VCE_Pressure > 10000)
  1850. {
  1851. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") + 30000);
  1852. }
  1853. else if (getAiValue_AI_Right_VCE_Pressure <= 10000)
  1854. {
  1855. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") + 1500);
  1856. }
  1857. }
  1858. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  1859. {
  1860. if (getAiValue_TM_ChamberPressure > 10000)
  1861. {
  1862. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  1863. }
  1864. else if (getAiValue_TM_ChamberPressure <= 10000)
  1865. {
  1866. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  1867. }
  1868. }
  1869. getAiValue_AI_Left_VCE_Pressure = GetAiValue($"{mod}.{AI_Left_VCE_Pressure}");
  1870. if (getAiValue_AI_Left_VCE_Pressure > ATM_PRESSURE)
  1871. {
  1872. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", ATM_PRESSURE);
  1873. }
  1874. else if (getAiValue_AI_Left_VCE_Pressure < 20)
  1875. {
  1876. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", 20);
  1877. }
  1878. getAiValue_AI_Right_VCE_Pressure = GetAiValue($"{mod}.{AI_Right_VCE_Pressure}");
  1879. if (getAiValue_AI_Right_VCE_Pressure > ATM_PRESSURE)
  1880. {
  1881. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", ATM_PRESSURE);
  1882. }
  1883. else if (getAiValue_AI_Right_VCE_Pressure < 20)
  1884. {
  1885. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", 20);
  1886. }
  1887. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1888. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  1889. {
  1890. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  1891. }
  1892. else if (getAiValue_TM_ChamberPressure < 20)
  1893. {
  1894. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  1895. }
  1896. // ATM switch
  1897. IO.DI[$"{mod}.DI_TM_ATM_SW"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") > ATM_THRESHOLD;
  1898. // VAC switch
  1899. IO.DI[$"{mod}.DI_TM_VAC_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1900. // ATM switch
  1901. IO.DI[$"{mod}.DI_VCEA_ATM_SW"].Value = GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") > ATM_THRESHOLD;
  1902. // ATM switch
  1903. IO.DI[$"{mod}.DI_VCEB_ATM_SW"].Value = GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") > ATM_THRESHOLD;
  1904. }
  1905. void MonitorMFPressure()
  1906. {
  1907. //if (SimulatorJetTM.CurrentTM == JetTMType.Venus)
  1908. //{
  1909. string LLA_AI_ChamberPressure = "AI_LLA_CHB_Pressure";
  1910. string LLB_AI_ChamberPressure = "AI_LLB_CHB_Pressure";
  1911. string TM_AI_ChamberPressure = "AI_TM_CHB_Pressure";
  1912. ModuleName mod = ModuleName.TM;
  1913. DOAccessor LLA_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLA"];
  1914. DOAccessor LLA_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLA"];
  1915. DOAccessor LLB_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLB"];
  1916. DOAccessor LLB_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLB"];
  1917. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_TM"];
  1918. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_TM"];
  1919. DOAccessor LLA_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLA"];
  1920. DOAccessor LLA_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLA"];
  1921. DOAccessor LLB_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLB"];
  1922. DOAccessor LLB_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLB"];
  1923. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_TM"];
  1924. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_TM"];
  1925. float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  1926. float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  1927. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1928. if (LLA_fast_pump_vlv.Value || LLA_soft_pump_vlv.Value)
  1929. {
  1930. if (getAiValue_LLA_ChamberPressure > 10000)
  1931. {
  1932. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 30000);
  1933. }
  1934. else if (getAiValue_LLA_ChamberPressure <= 10000)
  1935. {
  1936. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 1500);
  1937. }
  1938. }
  1939. if (LLB_fast_pump_vlv.Value || LLB_soft_pump_vlv.Value)
  1940. {
  1941. if (getAiValue_LLB_ChamberPressure > 10000)
  1942. {
  1943. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 30000);
  1944. }
  1945. else if (getAiValue_LLB_ChamberPressure <= 10000)
  1946. {
  1947. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 1500);
  1948. }
  1949. }
  1950. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  1951. {
  1952. if (getAiValue_TM_ChamberPressure > 10000)
  1953. {
  1954. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  1955. }
  1956. else if (getAiValue_TM_ChamberPressure <= 10000)
  1957. {
  1958. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  1959. }
  1960. }
  1961. if (LLA_fast_Vent_vlv.Value || LLA_soft_Vent_vlv.Value)
  1962. {
  1963. if (getAiValue_LLA_ChamberPressure > 10000)
  1964. {
  1965. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 30000);
  1966. }
  1967. else if (getAiValue_LLA_ChamberPressure <= 10000)
  1968. {
  1969. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 1500);
  1970. }
  1971. }
  1972. if (LLB_fast_Vent_vlv.Value || LLB_soft_Vent_vlv.Value)
  1973. {
  1974. if (getAiValue_LLB_ChamberPressure > 10000)
  1975. {
  1976. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 30000);
  1977. }
  1978. else if (getAiValue_LLB_ChamberPressure <= 10000)
  1979. {
  1980. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 1500);
  1981. }
  1982. }
  1983. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  1984. {
  1985. if (getAiValue_TM_ChamberPressure > 10000)
  1986. {
  1987. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  1988. }
  1989. else if (getAiValue_TM_ChamberPressure <= 10000)
  1990. {
  1991. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  1992. }
  1993. }
  1994. getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  1995. if (getAiValue_LLA_ChamberPressure > ATM_PRESSURE)
  1996. {
  1997. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", ATM_PRESSURE);
  1998. }
  1999. else if (getAiValue_LLA_ChamberPressure < 20)
  2000. {
  2001. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", 20);
  2002. }
  2003. getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  2004. if (getAiValue_LLB_ChamberPressure > ATM_PRESSURE)
  2005. {
  2006. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", ATM_PRESSURE);
  2007. }
  2008. else if (getAiValue_LLB_ChamberPressure < 20)
  2009. {
  2010. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", 20);
  2011. }
  2012. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2013. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  2014. {
  2015. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  2016. }
  2017. else if (getAiValue_TM_ChamberPressure < 20)
  2018. {
  2019. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  2020. }
  2021. // ATM switch
  2022. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") > ATM_THRESHOLD;
  2023. // VAC switch
  2024. IO.DI[$"{mod}.DI_TM_VAC_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  2025. // ATM switch
  2026. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") > ATM_THRESHOLD;
  2027. // VAC switch
  2028. IO.DI[$"{mod}.DI_LLA_VAC_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  2029. // ATM switch
  2030. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") > ATM_THRESHOLD;
  2031. // VAC switch
  2032. IO.DI[$"{mod}.DI_LLB_VAC_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  2033. // }
  2034. //else if (SimulatorJetTM.CurrentTM == JetTMType.VenusSE)
  2035. //{
  2036. // ModuleName mod = ModuleName.TM;
  2037. // //float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  2038. // //float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  2039. // //float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2040. //}
  2041. }
  2042. void SetAiValue(string name, float value)
  2043. {
  2044. byte[] flow = BitConverter.GetBytes(value);
  2045. short high1 = BitConverter.ToInt16(flow, 0);
  2046. short low1 = BitConverter.ToInt16(flow, 2);
  2047. IO.AI[name].Buffer[IO.AI[name].Index] = BitConverter.ToInt16(flow, 0);
  2048. IO.AI[name].Buffer[IO.AI[name].Index + 1] = BitConverter.ToInt16(flow, 2);
  2049. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  2050. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  2051. float readback = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  2052. }
  2053. float GetAiValue(string name)
  2054. {
  2055. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  2056. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  2057. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  2058. return flow;
  2059. }
  2060. float GetAoValue(string name)
  2061. {
  2062. byte[] high = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index]);
  2063. byte[] low = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index + 1]);
  2064. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  2065. return flow;
  2066. }
  2067. void MonitorTemperature(ModuleName mod)
  2068. {
  2069. //IO.DI[$"{mod}.DI_Substrate_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value;
  2070. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Forline_Heater_On"].Value;
  2071. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value;
  2072. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  2073. IO.DI[$"{mod}.DI_Substrate_TC_Deviation_out_of_range"].Value = false;
  2074. // 底座
  2075. //if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  2076. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") < GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  2077. //{
  2078. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") + _rd.Next(1, 2));
  2079. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") + _rd.Next(1, 2));
  2080. //}
  2081. //else if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  2082. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  2083. //{
  2084. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") - _rd.Next(1, 2));
  2085. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") - _rd.Next(1, 2));
  2086. //}
  2087. // Foreline
  2088. if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  2089. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") < GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  2090. {
  2091. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") + _rd.Next(1, 2));
  2092. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") + _rd.Next(1, 2));
  2093. }
  2094. else if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  2095. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") > GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  2096. {
  2097. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") - _rd.Next(1, 2));
  2098. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") - _rd.Next(1, 2));
  2099. }
  2100. // Wall
  2101. if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  2102. GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") < GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  2103. {
  2104. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") + _rd.Next(1, 2));
  2105. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") + _rd.Next(1, 2));
  2106. }
  2107. else if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  2108. GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  2109. {
  2110. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") - _rd.Next(1, 2));
  2111. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") - _rd.Next(1, 2));
  2112. }
  2113. }
  2114. void MonitorGas(ModuleName mod)
  2115. {
  2116. // gas
  2117. this.SimulateMFC(mod, 1);
  2118. this.SimulateMFC(mod, 2);
  2119. this.SimulateMFC(mod, 3);
  2120. this.SimulateMFC(mod, 4);
  2121. this.SimulateMFC(mod, 5);
  2122. this.SimulateMFC(mod, 6);
  2123. this.SimulateMFC(mod, 7);
  2124. this.SimulateMFC(mod, 8);
  2125. this.SimulateN2(mod);
  2126. }
  2127. void MonitorSEGas(ModuleName mod)
  2128. {
  2129. SimulateMFC(mod, 1);
  2130. SimulateMFC(mod, 2);
  2131. SimulateMFC(mod, 3);
  2132. SimulateMFC(mod, 4);
  2133. SimulateMFC(mod, 5);
  2134. SimulateMFC(mod, 6);
  2135. SimulateMFC(mod, 7);
  2136. SimulateMFC(mod, 8);
  2137. SimulateMFC(mod, 9);
  2138. SimulateMFC(mod, 10);
  2139. SimulateMFC(mod, 11);
  2140. SimulateMFC(mod, 12);
  2141. }
  2142. void MonitorDEGas(ModuleName mod)
  2143. {
  2144. SimulateMFC(mod, 1);
  2145. SimulateMFC(mod, 2);
  2146. SimulateMFC(mod, 3);
  2147. SimulateMFC(mod, 4);
  2148. SimulateMFC(mod, 5);
  2149. SimulateMFC(mod, 6);
  2150. SimulateMFC(mod, 7);
  2151. SimulateMFC(mod, 8);
  2152. SimulateMFC(mod, 9);
  2153. SimulateMFC(mod, 10);
  2154. SimulateMFC(mod, 11);
  2155. SimulateMFC(mod, 12);
  2156. }
  2157. private void SimulateMFC(ModuleName mod, byte gasNum)
  2158. {
  2159. var sp = GetAoValue($"{mod}.AO_MFC{gasNum}_Flow_Setpoint");
  2160. //var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2161. SetAiValue($"{mod}.AI_MFC{gasNum}_Flow", (float)sp);
  2162. }
  2163. private void SimulateN2(ModuleName mod)
  2164. {
  2165. var sp = GetAoValue($"{mod}.AO_Turbo_Pump_N2_Flow_Setpoint");
  2166. //var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2167. SetAiValue($"{mod}.AI_Turbo_Pump_N2_Flow", (float)sp);
  2168. }
  2169. private void SimulateSEHe(ModuleName mod)
  2170. {
  2171. var sp = GetAoValue($"{mod}.AO_ESC_He_Pressure_Setpoint");
  2172. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2173. SetAiValue($"{mod}.AI_He_Flow", (float)mock_fb);
  2174. }
  2175. private void SimulateDEHe(ModuleName mod)
  2176. {
  2177. var sp = GetAoValue($"{mod}.AO_ESC_He_Pressure_Setpoint1");
  2178. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2179. SetAiValue($"{mod}.AI_MFC_He1_Flow", (float)mock_fb);
  2180. }
  2181. private void SimulateHe(ModuleName mod)
  2182. {
  2183. var sp = GetAoValue($"{mod}.AO_He_Flow_Setpoint");
  2184. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2185. SetAiValue($"{mod}.AI_ESC_He_Flow", (float)mock_fb);
  2186. }
  2187. void MonitorRF(ModuleName mod)
  2188. {
  2189. // RF generator
  2190. var sp = GetAoValue($"{mod}.AO_Generator_Power_Setpoint");
  2191. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2192. //var mock_sp = _rd.Next(sp - 3, sp + 3);
  2193. SetAiValue($"{mod}.AI_Generator_Forward_Power", (float)mock_fb);
  2194. //IO.DI[$"{mod}.DI_Generator_Power_Status"].Value = IO.DO[$"{mod}.DO_Generator_Power_ON"].Value;
  2195. }
  2196. void MonitorIOPumpCtrl(ModuleName mod)
  2197. {
  2198. if (IO.DO[$"{mod}.DO_Pump_Run"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = true;
  2199. if (IO.DO[$"{mod}.DO_Pump_Stop"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = false;
  2200. }
  2201. void MonitorIOHighTemperatureHeater(ModuleName mod)
  2202. {
  2203. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position1"].Value)
  2204. {
  2205. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = true;
  2206. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2207. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2208. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2209. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2210. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2211. }
  2212. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position2"].Value)
  2213. {
  2214. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2215. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = true;
  2216. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2217. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2218. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2219. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2220. }
  2221. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position3"].Value)
  2222. {
  2223. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2224. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2225. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = true;
  2226. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2227. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2228. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2229. }
  2230. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position4"].Value)
  2231. {
  2232. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2233. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2234. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2235. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = true;
  2236. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2237. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2238. }
  2239. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position5"].Value)
  2240. {
  2241. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2242. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2243. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2244. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2245. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = true;
  2246. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2247. }
  2248. if (IO.DO[$"{mod}.DO_Lift_Servo_Origin"].Value)
  2249. {
  2250. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2251. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2252. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2253. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2254. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2255. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = true;
  2256. }
  2257. IO.DI[$"{mod}.DI_CHB_M-HT_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_M-HT_Heater_On"].Value;
  2258. var sp = GetAoValue($"{mod}.AO_CHB_M-HT_Temperature_Setpoint");
  2259. var mock_fb = _rd.Next((int)sp - 1, (int)sp + 1) + _rd.NextDouble();
  2260. //var mock_sp = _rd.Next(sp - 3, sp + 3);
  2261. SetAiValue($"{mod}.AI_CHB_M-HT_Control_TC_Temp", (float)mock_fb);
  2262. }
  2263. void MonitorKepler2200Heater(ModuleName mod)
  2264. {
  2265. var pendulumHeaterSetpoint = GetAoValue($"{mod}.AO_P_Valve_Temperature_Setpoint");
  2266. SetAiValue($"{mod}.AI_P_Valve_Control_TC_Temp", (float)pendulumHeaterSetpoint);
  2267. }
  2268. public void Terminate()
  2269. {
  2270. _thread.Stop();
  2271. }
  2272. public void SetCoolantOutletTemp(string module, int Temp)
  2273. {
  2274. //if (SimulatorJetChamber.CurrentChamber == JetChamber.Venus)
  2275. //{
  2276. //SetAiValue($"{module}.AI_Coolant_Outlet_Temp", Temp);
  2277. //}
  2278. }
  2279. }
  2280. }