 jiangjy
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7c24d80c1b
门开之后检查是否位移
|
1 month ago |
|
jiangjy
|
35e7818bf8
隐藏FIMS motiontimeout配置
|
1 month ago |
|
jiangjy
|
97998f5065
应用fims load overtime
|
1 month ago |
|
jiangjy
|
13525e2b67
update FIMS load后检查是否wafer移位
|
1 month ago |
|
jiangjy
|
b49f4700fa
update recipe btn
|
1 month ago |
|
jiangjy
|
a9dbc21add
Merge branch 'Master_ELK02_Release_Development' of http://git.jetplasma-oa.com/Jet/FurnaceELK into Master_ELK02_Release_Development
|
1 month ago |
|
jiangjy
|
6a73ebfc92
_diWaferOnRobot true代表无遮挡，false代表有遮挡
|
1 month ago |
 huangping
|
1f9c2d3b94
修改gaspanel CEXH和DPR使用iotrigger
|
1 month ago |
|
jiangjy
|
db05d90757
fims load
|
1 month ago |
|
jiangjy
|
8ea144ea25
update
|
1 month ago |
|
jiangjy
|
4b8b0a1ed2
update robot 光感
|
1 month ago |
|
huangping
|
f7295b2b94
增加空判断
|
1 month ago |
|
jiangjy
|
8bec5b3d64
update mfc 31/32点位名称
|
1 month ago |
|
jiangjy
|
4f41b9b291
update abortN2purge
|
1 month ago |
|
jiangjy
|
5d07d1f230
update
|
1 month ago |
|
jiangjy
|
4cbf6674c8
优化是否需要检测
|
1 month ago |
|
jiangjy
|
99195d694b
2阶段/4阶段 添加时间判定逻辑
|
1 month ago |
|
jiangjy
|
bca4ab0809
fix bug
|
1 month ago |
|
jiangjy
|
3beebed461
update
|
1 month ago |
|
jiangjy
|
ec641c8ed8
update
|
1 month ago |
|
jiangjy
|
43303dc8a9
update Gas Btn
|
1 month ago |
|
jiangjy
|
aaacf1fd9a
update
|
1 month ago |
|
jiangjy
|
685bfecd5f
update
|
1 month ago |
|
jiangjy
|
eb2f276ee4
update id
|
1 month ago |
|
jiangjy
|
24d2b4b8ca
暂时取消安全回零指令
|
1 month ago |
|
huangping
|
e954e4b61b
Merge branch 'Master_ELK02_Release_Development' of http://git.jetplasma-oa.com/Jet/FurnaceELK into Master_ELK02_Release_Development
|
1 month ago |
|
huangping
|
f3cab9a06c
1.调整wafer更新在wafermanager中使用独立线程
|
1 month ago |
|
Jiangjinyuan
|
d26048f7fc
RestAllN2PrugeRD 的时候 需要重新计时
|
1 month ago |
 JET-JJY
|
59a2ce6f37
update
|
1 month ago |
|
JET-JJY
|
7618563eb4
优化N2purge 时间触发
|
1 month ago |
