|
|
@@ -2303,6 +2303,8 @@
|
|
|
<SVID id="339860001" valueType="Boolean" logicalName="PM1.AlarmSignaFOUPRobotTPStatusWarning.Value" value="" eventTrigger="" units="" description="" isArray="false" />
|
|
|
<SVID id="339870001" valueType="Boolean" logicalName="PM1.AlarmSignaWaferRobotTPStatusWarning.Value" value="" eventTrigger="" units="" description="" isArray="false" />
|
|
|
<SVID id="339880001" valueType="Boolean" logicalName="PM1.SensorPLCHeartBeatPC.Value" value="" eventTrigger="" units="" description="" isArray="false" />
|
|
|
+ <SVID id="339890001" valueType="F8" logicalName="PM1.LoadingAreaExhaustMS321.Value" value="" eventTrigger="" units="" description="" isArray="false" />
|
|
|
+ <SVID id="339900001" valueType="F8" logicalName="PM1.VG32.Value" value="" eventTrigger="" units="" description="" isArray="false" />
|
|
|
<SVID id="630010001" valueType="Boolean" logicalName="Stocker1.CassetteHasWafer" value="" eventTrigger="" units="" description="" isArray="false" />
|
|
|
<SVID id="630010002" valueType="Boolean" logicalName="Stocker1.FoupPresent" value="" eventTrigger="" units="" description="" isArray="false" />
|
|
|
<SVID id="630010003" valueType="Boolean" logicalName="Stocker1.IsError" value="" eventTrigger="" units="" description="" isArray="false" />
|
|
|
@@ -14497,6 +14499,10 @@
|
|
|
<ALID id="330011013" logicalName="PM1.VG33ToleranceAlarm" description="VG33 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330011013" eventClear="2330011013" />
|
|
|
<ALID id="330011014" logicalName="PM1.VG33ToleranceWarning" description="VG33 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330011014" eventClear="2330011014" />
|
|
|
<ALID id="330011015" logicalName="PM1.SensorPLCConnectedAlarm" description="PM1 Sensor PLC Connected Alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330011015" eventClear="2330011015" />
|
|
|
+ <ALID id="330011016" logicalName="PM1.LoadingAreaExhaustMS321ToleranceAlarm" description="LoadingAreaExhaustMS321 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330011016" eventClear="2330011016" />
|
|
|
+ <ALID id="330011017" logicalName="PM1.LoadingAreaExhaustMS321ToleranceWarning" description="LoadingAreaExhaustMS321 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330011017" eventClear="2330011017" />
|
|
|
+ <ALID id="330011018" logicalName="PM1.VG32ToleranceAlarm" description="VG32 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330011018" eventClear="2330011018" />
|
|
|
+ <ALID id="330011019" logicalName="PM1.VG32ToleranceWarning" description="VG32 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330011019" eventClear="2330011019" />
|
|
|
<ALID id="330020001" logicalName="PM1.AlarmHighLimit.AI_APCExternalHeaterTempPV" description="APC external heater Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020001" eventClear="2330020001" />
|
|
|
<ALID id="330020002" logicalName="PM1.AlarmHighLimit.AI_APCRingHeaterTempPV" description="APC ring heater Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020002" eventClear="2330020002" />
|
|
|
<ALID id="330020003" logicalName="PM1.AlarmHighLimit.AI_CapHeaterTempPV" description="Cap heater Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020003" eventClear="2330020003" />
|
jiangjy