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@@ -1460,8 +1460,8 @@
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<AI_ITEM Index="472" Name="AI_MFM12AirFlowPV" BufferOffset="472" Addr="D5944" Description="MFM12 air flow PV" />
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<AI_ITEM Index="473" Name="AI_MFM13AirFlowPV" BufferOffset="473" Addr="D5946" Description="MFM13 air flow PV" />
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<AI_ITEM Index="474" Name="AI_MFM16AirFlowPV" BufferOffset="474" Addr="D5948" Description="MFM16 air flow PV" />
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- <AI_ITEM Index="475" Name="AI_LSC1AirFlowPV" BufferOffset="475" Addr="D5950" Description="LSC1 air flow PV" />
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- <AI_ITEM Index="476" Name="AI_LSC2AirFlowPV" BufferOffset="476" Addr="D5952" Description="LSC2 air flow PV" />
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+ <AI_ITEM Index="475" Name="AI_MFC31AirFlowPV" BufferOffset="475" Addr="D5950" Description="MFC31 air flow PV(LSC1)" />
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+ <AI_ITEM Index="476" Name="AI_MFC32AirFlowPV" BufferOffset="476" Addr="D5952" Description="MFC32 air flow PV(LSC2)" />
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<AI_ITEM Index="2000" Name="AI_APCValueSensorInput1" BufferOffset="2000" Addr="D9000" Description="APC Value sensor input1 (p1)" />
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<AI_ITEM Index="2001" Name="AI_APCValueSensorInput2" BufferOffset="2001" Addr="D9002" Description="APC Value sensor input1 (p2)" />
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<AI_ITEM Index="2002" Name="AI_APCSelectController" BufferOffset="2002" Addr="D9004" Description="Select controller" />
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@@ -1647,8 +1647,8 @@
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<AO_ITEM Index="229" Name="AO_MFC13AirFlowSV" BufferOffset="229" Addr="D10458" Description="MFC13 air flow SV" />
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<AO_ITEM Index="230" Name="AO_MFC16AirFlowSV" BufferOffset="230" Addr="D10460" Description="MFC16 air flow SV" />
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<AO_ITEM Index="231" Name="AO_MFC17AirFlowSV" BufferOffset="231" Addr="D10462" Description="MFC17 air flow SV" />
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- <AO_ITEM Index="240" Name="AO_LSC1AirFlowSV" BufferOffset="240" Addr="D10480" Description="LSC1 air flow SV" />
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- <AO_ITEM Index="241" Name="AO_LSC2AirFlowSV" BufferOffset="241" Addr="D10482" Description="LSC2 air flow SV" />
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+ <AO_ITEM Index="240" Name="AO_MFC31AirFlowSV" BufferOffset="240" Addr="D10480" Description="LSC1 air flow SV" />
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+ <AO_ITEM Index="241" Name="AO_MFC32AirFlowSV" BufferOffset="241" Addr="D10482" Description="LSC2 air flow SV" />
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<AO_ITEM Index="1501" Name="AO_APCZeroAdjustP1" BufferOffset="1501" Addr="D13002" Description="Zero adjust P1 (0:NO OPERATION,1:ADJUST)" />
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<AO_ITEM Index="1504" Name="AO_APCZeroAdjustP2" BufferOffset="1504" Addr="D13008" Description="Zero adjust P2 (0:NO OPERATION,1:ADJUST)" />
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<AO_ITEM Index="1506" Name="AO_APCSlowVacuumTargetPressure" BufferOffset="1506" Addr="D13012" Description="Slow vacuum control target vacuum pressure" />
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@@ -1759,8 +1759,8 @@
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<AO_ITEM Index="1634" Name="AO_MFC13RampTime" BufferOffset="1634" Addr="D13268" Description="MFC13 Ramp Time" />
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<AO_ITEM Index="1635" Name="AO_MFC16RampTime" BufferOffset="1635" Addr="D13270" Description="MFC16 Ramp Time" />
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<AO_ITEM Index="1636" Name="AO_MFC17RampTime" BufferOffset="1636" Addr="D13272" Description="MFC17 Ramp Time" />
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- <AO_ITEM Index="1645" Name="AO_LSC1RampTime" BufferOffset="1645" Addr="D13290" Description="LSC1 Ramp Time" />
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- <AO_ITEM Index="1646" Name="AO_LSC2RampTime" BufferOffset="1646" Addr="D13292" Description="LSC2 Ramp Time" />
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+ <AO_ITEM Index="1645" Name="AO_MFC31RampTime" BufferOffset="1645" Addr="D13290" Description="MFC31 Ramp Time(LSC1)" />
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+ <AO_ITEM Index="1646" Name="AO_MFC3C2RampTime" BufferOffset="1646" Addr="D13292" Description="MFC32 Ramp Time(LSC2)" />
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<AO_ITEM Index="1650" Name="AO_UZoneCascadeTemp" BufferOffset="1650" Addr="D13300" Description="U Zone Cascade Temp" />
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<AO_ITEM Index="1651" Name="AO_CUZoneCascadeTemp" BufferOffset="1651" Addr="D13302" Description="CU Zone Cascade Temp" />
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<AO_ITEM Index="1652" Name="AO_CZoneCascadeTemp" BufferOffset="1652" Addr="D13304" Description="C Zone Cascade Temp" />
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