update mfc 31/32点位名称

Furnace/FurnaceRT/Config/FurnaceGemModel.xml

@@ -2305,6 +2305,12 @@
     <SVID id="339880001" valueType="Boolean" logicalName="PM1.SensorPLCHeartBeatPC.Value" value="" eventTrigger="" units="" description="" isArray="false" />
     <SVID id="339890001" valueType="F8" logicalName="PM1.LoadingAreaExhaustMS321.Value" value="" eventTrigger="" units="" description="" isArray="false" />
     <SVID id="339900001" valueType="F8" logicalName="PM1.VG32.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339910001" valueType="Boolean" logicalName="PM1.SensorSL02001gasboxdoorsw11.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339920001" valueType="Boolean" logicalName="PM1.SensorSL02001gasboxdoorsw12.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339930001" valueType="Boolean" logicalName="PM1.SensorSL02002gasboxdoorsw11.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339940001" valueType="Boolean" logicalName="PM1.SensorSL02002gasboxdoorsw12.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339950001" valueType="Boolean" logicalName="PM1.SensorSL05002LAdoorsw2.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339960001" valueType="Boolean" logicalName="PM1.SensorSL05004LAfurnacedoorsw.Value" value="" eventTrigger="" units="" description="" isArray="false" />
     <SVID id="630010001" valueType="Boolean" logicalName="Stocker1.CassetteHasWafer" value="" eventTrigger="" units="" description="" isArray="false" />
     <SVID id="630010002" valueType="Boolean" logicalName="Stocker1.FoupPresent" value="" eventTrigger="" units="" description="" isArray="false" />
     <SVID id="630010003" valueType="Boolean" logicalName="Stocker1.IsError" value="" eventTrigger="" units="" description="" isArray="false" />
@@ -3235,6 +3241,7 @@
     <ECID id="330480007" valueType="Ascii" logicalName="PM1.N2Purge.TransferRoomStableWaitTime" value="" min="" max="" eventTrigger="" units="" description=" Transfer Room O2_Density Stable Wait Time" isArray="false" />
     <ECID id="330480008" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeFOUPO2CheckSV" value="" min="" max="" eventTrigger="" units="" description="FOUP O2 CheckSV" isArray="false" />
     <ECID id="330480009" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeLAO2CheckSV" value="" min="" max="" eventTrigger="" units="" description=" LA O2 CheckSV" isArray="false" />
+    <ECID id="330480010" valueType="Ascii" logicalName="PM1.N2Purge.EnableAbortN2purge" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
     <ECID id="330490001" valueType="Ascii" logicalName="PM1.N2Purge.WaferCharge.FOUPN2PurgeEnable" value="" min="" max="" eventTrigger="" units="" description="FOUP N2 Purge Charge Enable" isArray="false" />
     <ECID id="330490002" valueType="Ascii" logicalName="PM1.N2Purge.WaferCharge.TransferRoomN2PurgeEnable" value="" min="" max="" eventTrigger="" units="" description="Transfer Room N2 Purge Charge Enable" isArray="false" />
     <ECID id="330490003" valueType="Ascii" logicalName="PM1.N2Purge.WaferCharge.TransferRoomO2DensityCheckEnable" value="" min="" max="" eventTrigger="" units="" description="Transfer Room O2 Density Check Charge Enable" isArray="false" />

Furnace/FurnaceRT/Config/IO/ELK/DeviceModelPM.xml

@@ -1297,8 +1297,8 @@
 		<IoMFC id="MFC13" display="MFC13" schematicId="MFC13" unit="sccm"				aiFlow="AI_MFC13AirFlowPV"				aoFlow="AO_MFC13AirFlowSV"			    aoRamp="AO_MFC13RampTime"				aioType="float"				scBasePath="PM1.MFC"/>
 		<IoMFC id="MFC16" display="MFC16" schematicId="MFC16" unit="sccm"				aiFlow="AI_MFC16AirFlowPV"				aoFlow="AO_MFC16AirFlowSV"			    aoRamp="AO_MFC16RampTime"				aioType="float"				scBasePath="PM1.MFC"/>
 		<IoMFC id="MFC17" display="MFC17" schematicId="MFC17" unit="sccm"				aiFlow="AI_MFC17AirFlowPV"				aoFlow="AO_MFC17AirFlowSV"			    aoRamp="AO_MFC17RampTime"				aioType="float"				scBasePath="PM1.MFC"/>
-		<IoMFC id="MFC31" display="MFC31" schematicId="MFC31" unit="sccm"				aiFlow="AI_LSC1AirFlowPV"				aoFlow="AO_LSC1AirFlowSV"			    aoRamp="AO_LSC1RampTime"				aioType="float"				scBasePath="PM1.MFC"/>
-		<IoMFC id="MFC32" display="MFC32" schematicId="MFC32" unit="sccm"				aiFlow="AI_LSC2AirFlowPV"				aoFlow="AO_LSC2AirFlowSV"			    aoRamp="AO_LSC2RampTime"				aioType="float"				scBasePath="PM1.MFC"/>
+		<IoMFC id="MFC31" display="MFC31" schematicId="MFC31" unit="sccm"				aiFlow="AI_MFC31AirFlowPV"				aoFlow="AO_MFC31AirFlowSV"			    aoRamp="AO_MFC31RampTime"				aioType="float"				scBasePath="PM1.MFC"/>
+		<IoMFC id="MFC32" display="MFC32" schematicId="MFC32" unit="sccm"				aiFlow="AI_MFC32AirFlowPV"				aoFlow="AO_MFC32AirFlowSV"			    aoRamp="AO_MFC32RampTime"				aioType="float"				scBasePath="PM1.MFC"/>
 		<IoMFC id="MFC51" display="MFC51" schematicId="MFC51" unit="sccm"				aiFlow="AI_MFC51AirFlowPV"				aoFlow="AO_MFC51AirFlowSV"			    aoRamp="AO_MFC51RampTime"				aioType="float"				scBasePath="PM1.MFC"/>
 	</IoMFCs>
 	<IoMFMs classType="FurnaceRT.Equipments.PMs.Devices.IoMFM" assembly="FurnaceRT">

Furnace/FurnaceRT/Config/IO/ELK/_ioDefinePM.xml

@@ -1460,8 +1460,8 @@
 		<AI_ITEM Index="472"    Name="AI_MFM12AirFlowPV"                                      BufferOffset="472"                                      Addr="D5944"                      Description="MFM12 air flow PV"                       />
 		<AI_ITEM Index="473"    Name="AI_MFM13AirFlowPV"                                      BufferOffset="473"                                      Addr="D5946"                      Description="MFM13 air flow PV"                       />
 		<AI_ITEM Index="474"    Name="AI_MFM16AirFlowPV"                                      BufferOffset="474"                                      Addr="D5948"                      Description="MFM16 air flow PV"                       />
-		<AI_ITEM Index="475"    Name="AI_LSC1AirFlowPV"                                      BufferOffset="475"                                      Addr="D5950"                      Description="LSC1 air flow PV"                       />
-		<AI_ITEM Index="476"    Name="AI_LSC2AirFlowPV"                                      BufferOffset="476"                                      Addr="D5952"                      Description="LSC2 air flow PV"                       />
+		<AI_ITEM Index="475"    Name="AI_MFC31AirFlowPV"                                      BufferOffset="475"                                      Addr="D5950"                      Description="MFC31 air flow PV(LSC1)"                       />
+		<AI_ITEM Index="476"    Name="AI_MFC32AirFlowPV"                                      BufferOffset="476"                                      Addr="D5952"                      Description="MFC32 air flow PV(LSC2)"                       />
 		<AI_ITEM Index="2000"   Name="AI_APCValueSensorInput1"                                      BufferOffset="2000"                                      Addr="D9000"                      Description="APC Value sensor input1 (p1)"                       />
 		<AI_ITEM Index="2001"   Name="AI_APCValueSensorInput2"                                      BufferOffset="2001"                                      Addr="D9002"                      Description="APC Value sensor input1 (p2)"                       />
 		<AI_ITEM Index="2002"   Name="AI_APCSelectController"                                      BufferOffset="2002"                                      Addr="D9004"                      Description="Select controller"                       />
@@ -1647,8 +1647,8 @@
 		<AO_ITEM Index="229"    Name="AO_MFC13AirFlowSV"                                      BufferOffset="229"                                      Addr="D10458"                      Description="MFC13 air flow SV"                       />
 		<AO_ITEM Index="230"    Name="AO_MFC16AirFlowSV"                                      BufferOffset="230"                                      Addr="D10460"                      Description="MFC16 air flow SV"                       />
 		<AO_ITEM Index="231"    Name="AO_MFC17AirFlowSV"                                      BufferOffset="231"                                      Addr="D10462"                      Description="MFC17 air flow SV"                       />
-		<AO_ITEM Index="240"    Name="AO_LSC1AirFlowSV"                                      BufferOffset="240"                                      Addr="D10480"                      Description="LSC1 air flow SV"                       />
-		<AO_ITEM Index="241"    Name="AO_LSC2AirFlowSV"                                      BufferOffset="241"                                      Addr="D10482"                      Description="LSC2 air flow SV"                       />
+		<AO_ITEM Index="240"    Name="AO_MFC31AirFlowSV"                                      BufferOffset="240"                                      Addr="D10480"                      Description="LSC1 air flow SV"                       />
+		<AO_ITEM Index="241"    Name="AO_MFC32AirFlowSV"                                      BufferOffset="241"                                      Addr="D10482"                      Description="LSC2 air flow SV"                       />
 		<AO_ITEM Index="1501"    Name="AO_APCZeroAdjustP1"                                      BufferOffset="1501"                                      Addr="D13002"                      Description="Zero adjust P1 (0:NO OPERATION,1:ADJUST)"                       />
 		<AO_ITEM Index="1504"    Name="AO_APCZeroAdjustP2"                                      BufferOffset="1504"                                      Addr="D13008"                      Description="Zero adjust P2 (0:NO OPERATION,1:ADJUST)"                       />
 		<AO_ITEM Index="1506"    Name="AO_APCSlowVacuumTargetPressure"                                      BufferOffset="1506"                                      Addr="D13012"                      Description="Slow vacuum control target vacuum pressure"                       />
@@ -1759,8 +1759,8 @@
 		<AO_ITEM Index="1634"    Name="AO_MFC13RampTime"                                      BufferOffset="1634"                                      Addr="D13268"                      Description="MFC13 Ramp Time"                       />
 		<AO_ITEM Index="1635"    Name="AO_MFC16RampTime"                                      BufferOffset="1635"                                      Addr="D13270"                      Description="MFC16 Ramp Time"                       />
 		<AO_ITEM Index="1636"    Name="AO_MFC17RampTime"                                      BufferOffset="1636"                                      Addr="D13272"                      Description="MFC17 Ramp Time"                       />
-		<AO_ITEM Index="1645"    Name="AO_LSC1RampTime"                                      BufferOffset="1645"                                      Addr="D13290"                      Description="LSC1 Ramp Time"                       />
-		<AO_ITEM Index="1646"    Name="AO_LSC2RampTime"                                      BufferOffset="1646"                                      Addr="D13292"                      Description="LSC2 Ramp Time"                       />
+		<AO_ITEM Index="1645"    Name="AO_MFC31RampTime"                                      BufferOffset="1645"                                      Addr="D13290"                      Description="MFC31 Ramp Time(LSC1)"                       />
+		<AO_ITEM Index="1646"    Name="AO_MFC3C2RampTime"                                      BufferOffset="1646"                                      Addr="D13292"                      Description="MFC32 Ramp Time(LSC2)"                       />
 		<AO_ITEM Index="1650"    Name="AO_UZoneCascadeTemp"                                      BufferOffset="1650"                                      Addr="D13300"                      Description="U Zone Cascade Temp"                       />
 		<AO_ITEM Index="1651"    Name="AO_CUZoneCascadeTemp"                                      BufferOffset="1651"                                      Addr="D13302"                      Description="CU Zone Cascade Temp"                       />
 		<AO_ITEM Index="1652"    Name="AO_CZoneCascadeTemp"                                      BufferOffset="1652"                                      Addr="D13304"                      Description="C Zone Cascade Temp"                       />