ZZ-EFEM/Jet/Jet_001_2P_Jet/EfemRT/Config/2LPJet006/DeviceDefine.xml

<?xml version="1.0" encoding="utf-8"?>
<Configs>
	<!--硬件配置-->
	<IoCardQuantity>1</IoCardQuantity>
	<DmcCardInstalled>false</DmcCardInstalled>
	<PLCIoInstalled>false</PLCIoInstalled>
	<DisableSignalTower>false</DisableSignalTower>

	<!--LoadPort 设置项-->
	<LoadPortType>OpenStageWithWaferSize</LoadPortType>
	<LoadPortQuantity>1</LoadPortQuantity>
	<RFIDInstallment>00</RFIDInstallment>
	<FfuMemoBusControl>false</FfuMemoBusControl>

	<!--Robot 设置项-->
	<RobotType>NXC100</RobotType>
	<!--    NXC100 or SR100-->
	<MotionAxisInstalled>false</MotionAxisInstalled>
	<OcrInstalled>false</OcrInstalled>
	<AlignerInstalled>false</AlignerInstalled>
	<AlignerNeedMoveUpCommand>false</AlignerNeedMoveUpCommand>

	<!--Load Lock 设置项-->
	<LoadLockQuantity>1</LoadLockQuantity>
	<LoadLockSlot>1</LoadLockSlot>
	<LLDoorControlByStation>false</LLDoorControlByStation>

	<!--EFEM指令配置项-->
	<WAFSHEnable>true</WAFSHEnable>

	<!--Cooling buffer-->
	<CoolingBufferInstalled>true</CoolingBufferInstalled>

	<RobotIsSingleArm>false</RobotIsSingleArm>

	<!--Buffer 设置项-->
	<BufferQuantity>0</BufferQuantity>
	<BufferSlot>0</BufferSlot>
	<MultiWaferSize>false</MultiWaferSize>

	<!--Is Maintenance-->
	<MaintenanceSignal>false</MaintenanceSignal>
	<EfemDoorOpenSignal>true</EfemDoorOpenSignal>
</Configs>