Please enable JavaScript in your browser!
Home
Explore
Help
Register
Sign In
JetPlasma
/
ZZ-EFEM
Watch
2
Star
0
Fork
0
Files
Issues
0
Pull Requests
0
Wiki
Branch:
master
Branches
Tags
master
ZZ-EFEM
/
Jet
/
Jet_001_2P_Jet
niuyx
e65452b4e9
1. Revise LoadPort wafer protrusion alarm Bug;
1 week ago
..
EfemRT
e65452b4e9
1. Revise LoadPort wafer protrusion alarm Bug;
1 week ago
EfemSetup
bb9b5b57f2
Add MechanicalAligner Device; Revise Buffer1 to Buffer; Add Buffer config Items; Revise Check.cs;
1 month ago
EfemSimulator
9b7aa90185
1. Add WaferProtrusion Alarm;
3 weeks ago
EfemUI
c202ed82f3
1.Revise slitDoor UI display;
3 weeks ago